Your trusted supplier for semiconductor spare parts, consumables and upgrades
Thermawave heater and spare parts : fast and compatible sourcing for critical equipment
Thermawave heater solutions for fabs: fast delivery, certified compatibility, and expert support by Eumetrys Spare Parts. In the highly regulated and time-sensitive world of semiconductor manufacturing, equipment uptime is non-negotiable. That’s why Eumetrys Spare Parts has become a key sourcing partner for Thermawave system users. We help fabs secure reliable access to high-quality Thermawave heaters and other parts that are often difficult to source directly through traditional OEM channels.
More than just a supplier, we act as a technical partner that understands the constraints of cleanroom processes, production scheduling, and the strict validation protocols required in semiconductor fabs. We help engineers and buyers maintain stable and reliable Thermawave installations by offering proactive support and fully traceable components.
Supporting legacy systems with Thermawave semiconductor expertise
Thermawave semiconductor platforms play a pivotal role in process control for front-end semiconductor lines. Whether it’s for monitoring oxide thickness or critical film parameters, Thermawave tools are still widely used across global fabs. However, sourcing replacement parts, especially heaters and sensors, can be a challenge due to limited OEM support.
Eumetrys Spare Parts addresses this need by offering validated alternatives or certified equivalents for a wide range of Thermawave parts. Our engineering team ensures each part complies with cleanroom and process requirements, avoiding compatibility issues that can arise from generic replacements.
Over the years, our support for Thermawave semiconductor users has evolved to include technical consulting, predictive maintenance guidance, and supply chain audits. We help operations teams evaluate the condition of existing Thermawave systems and determine if proactive component replacements or upgrades can reduce downtime risks.
browse our thermawave catalog and find the perfect fit for your needs
Brand
Tool
Part Number
Description
Category
URL
SEO Title (EN)
Meta Description (EN)
THERMAWAVE
01-002847
Flow Control Valve
spare_part
High-quality nan for THERMAWAVE CMP tool. Flow Control Valve. Compatible with THERMAWAVE equipment. Part No. 01-002847.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. UTE Inner ring for 7zone 12inch PPS & SUS. Compatible with AMAT equipment. Part No. 0041-10531.
THERMAWAVE
01-003120
Tandberg Tape Drive
spare_part
High-quality nan for THERMAWAVE CMP tool. Tandberg Tape Drive. Compatible with THERMAWAVE equipment. Part No. 01-003120.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. UTE Outer ring for 7zone 12inch PETP / XL20. Compatible with AMAT equipment. Part No. 0021-47390/0021-95042.
THERMAWAVE
01-003770
Obs. PCB Assembly,Video DIGITIZER
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. PCB Assembly,Video DIGITIZER. Compatible with THERMAWAVE equipment. Part No. 01-003770.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. FNS Inner/outer ring for 7zone 12inch PPS / PPS & SUS. Compatible with AMAT equipment. Part No. 0022-18504/0041-8267.
THERMAWAVE
06-002012
Connector,JACK SOCKET,D CONN
spare_part
High-quality nan for THERMAWAVE CMP tool. Connector,JACK SOCKET,D CONN. Compatible with THERMAWAVE equipment. Part No. 06-002012.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. Retainer ring for 3zone 12inch PPS & SUS. Compatible with AMAT equipment. Part No. 0041-44673.
THERMAWAVE
06-002477
Connector,HSG,06P,M,.62SP
spare_part
High-quality nan for THERMAWAVE CMP tool. Connector,HSG,06P,M,.62SP. Compatible with THERMAWAVE equipment. Part No. 06-002477.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. Retainer ring for Cu 5zone 12inch PPS & SUS. Compatible with AMAT equipment. Part No. 0040-97734.
THERMAWAVE
06-003255
Connector,03P,M,ARROW HART
spare_part
High-quality nan for THERMAWAVE CMP tool. Connector,03P,M,ARROW HART. Compatible with THERMAWAVE equipment. Part No. 06-003255.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. Retainer ring for 3/5zone 12inch PPS & SUS. Compatible with AMAT equipment. Part No. 0040-62020/88120/88203.
THERMAWAVE
06-020275
CONN,PLUG,NEMA5-20P,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. CONN,PLUG,NEMA5-20P,125V. Compatible with THERMAWAVE equipment. Part No. 06-020275.
High-quality consumable for MIRRA / MIRRA MESA CMP tool. Retainer ring 12inch PEEK Carbon. Compatible with AMAT equipment. Part No. 0020-48427/0040-52612.
THERMAWAVE
06-021212
Connector, Din, Mimi, 6P, Bulkhead
spare_part
High-quality nan for THERMAWAVE CMP tool. Connector, Din, Mimi, 6P, Bulkhead. Compatible with THERMAWAVE equipment. Part No. 06-021212.
Boost CMP stability and lifetime with our silicone + Parylene-coated membrane. Proven on 45,000 wafers with zero defects. Fully compatible with AMAT MIRA systems.
THERMAWAVE
06-027945
CONN,NULL,D25F/D9F
spare_part
High-quality nan for THERMAWAVE CMP tool. CONN,NULL,D25F/D9F. Compatible with THERMAWAVE equipment. Part No. 06-027945.
Retrofit solution for 200mm CMP systems (AMAT Mirra) replacing diaphragm-type pad conditioners with a cylinder-based design. Offers better reliability, longer lifetime, integrated position sensing, and reduces maintenance time and wafer loss.
THERMAWAVE
06-035623
ADPT,SCSI, 68-50 PIN,W/TERM
spare_part
High-quality nan for THERMAWAVE CMP tool. ADPT,SCSI, 68-50 PIN,W/TERM. Compatible with THERMAWAVE equipment. Part No. 06-035623.
THERMAWAVE
06-035634
TERM,SCSI,CENTRONICS,50P
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,SCSI,CENTRONICS,50P. Compatible with THERMAWAVE equipment. Part No. 06-035634.
THERMAWAVE
06-035666
CONN,PLUG,NEMA,L6-30P,250V
spare_part
High-quality nan for THERMAWAVE CMP tool. CONN,PLUG,NEMA,L6-30P,250V. Compatible with THERMAWAVE equipment. Part No. 06-035666.
THERMAWAVE
06-035675
CONN,ADPTR,E84,ISOPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. CONN,ADPTR,E84,ISOPORT. Compatible with THERMAWAVE equipment. Part No. 06-035675.
THERMAWAVE
06-035684
CONN,ADPT,DVI TO VGA
spare_part
High-quality nan for THERMAWAVE CMP tool. CONN,ADPT,DVI TO VGA. Compatible with THERMAWAVE equipment. Part No. 06-035684.
THERMAWAVE
08-005261
LED,YELLOW,RT ANG
spare_part
High-quality nan for THERMAWAVE CMP tool. LED,YELLOW,RT ANG. Compatible with THERMAWAVE equipment. Part No. 08-005261.
THERMAWAVE
08-005957
LED,IR EMITTER,MTE-1080
spare_part
High-quality nan for THERMAWAVE CMP tool. LED,IR EMITTER,MTE-1080. Compatible with THERMAWAVE equipment. Part No. 08-005957.
THERMAWAVE
08-006142
LED,LIGHT BAR,RED,8PIN,SIP
spare_part
High-quality nan for THERMAWAVE CMP tool. LED,LIGHT BAR,RED,8PIN,SIP. Compatible with THERMAWAVE equipment. Part No. 08-006142.
THERMAWAVE
08-006149
LED,RED,RT ANG,PCMT
spare_part
High-quality nan for THERMAWAVE CMP tool. LED,RED,RT ANG,PCMT. Compatible with THERMAWAVE equipment. Part No. 08-006149.
THERMAWAVE
09-002362
Switch,PUSHBUTTON,SPDT
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,PUSHBUTTON,SPDT. Compatible with THERMAWAVE equipment. Part No. 09-002362.
THERMAWAVE
09-002363
Switch,ACTUACTOR W/Insulator
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,ACTUACTOR W/Insulator. Compatible with THERMAWAVE equipment. Part No. 09-002363.
THERMAWAVE
09-003009
Switch,AIR FLOW,SPDT,785 FT/MIN (REPLACED BY P/n 09-026786 from KLA on 14-05-2008)
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,AIR FLOW,SPDT,785 FT/MIN (REPLACED BY P/n 09-026786 from KLA on 14-05-2008). Compatible with THERMAWAVE equipment. Part No. 09-003009.
THERMAWAVE
09-003142
Switch,Opticical,OPB,P PACKAGE
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Opticical,OPB,P PACKAGE. Compatible with THERMAWAVE equipment. Part No. 09-003142.
THERMAWAVE
09-003355
Switch,TOGGLE,SPDT,10A,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,TOGGLE,SPDT,10A,250VAC. Compatible with THERMAWAVE equipment. Part No. 09-003355.
THERMAWAVE
09-003443
Switch,Vacuum Actuated,145IN WC
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Vacuum Actuated,145IN WC. Compatible with THERMAWAVE equipment. Part No. 09-003443.
THERMAWAVE
09-003684
Switch,MOMENTARY INTERLOCK
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,MOMENTARY INTERLOCK. Compatible with THERMAWAVE equipment. Part No. 09-003684.
THERMAWAVE
09-005054
Switch,Vacuum Actuated,200IN WC
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Vacuum Actuated,200IN WC. Compatible with THERMAWAVE equipment. Part No. 09-005054.
THERMAWAVE
09-005144
BLOCK,ControllerACT,EMO,NC
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,ControllerACT,EMO,NC. Compatible with THERMAWAVE equipment. Part No. 09-005144.
THERMAWAVE
09-005145
SHROUD,MUSHROOM,40MM,EMO
spare_part
High-quality nan for THERMAWAVE CMP tool. SHROUD,MUSHROOM,40MM,EMO. Compatible with THERMAWAVE equipment. Part No. 09-005145.
THERMAWAVE
09-005146
Switch,40MM,OPERATOR&Adaptor,EMO
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,40MM,OPERATOR&Adaptor,EMO. Compatible with THERMAWAVE equipment. Part No. 09-005146.
THERMAWAVE
09-005830
Switch,Opticical,OPB,T PKG,.01AP
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Opticical,OPB,T PKG,.01AP. Compatible with THERMAWAVE equipment. Part No. 09-005830.
THERMAWAVE
09-008214
Ina,Sensor,Humidity,2%,RH accuracy repl. by 09-041385
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Sensor,Humidity,2%,RH accuracy repl. by 09-041385. Compatible with THERMAWAVE equipment. Part No. 09-008214.
THERMAWAVE
09-008910
Detector,POSITION SENSOR,Auto Focus
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector,POSITION SENSOR,Auto Focus. Compatible with THERMAWAVE equipment. Part No. 09-008910.
THERMAWAVE
09-010748
Switch,PIN PLUNGER,150GRAM,.1AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,PIN PLUNGER,150GRAM,.1AMP. Compatible with THERMAWAVE equipment. Part No. 09-010748.
THERMAWAVE
09-010749
Switch,Opticical,PhotoMICROSENS,T
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Opticical,PhotoMICROSENS,T. Compatible with THERMAWAVE equipment. Part No. 09-010749.
THERMAWAVE
09-010920
Switch,Rotary,PCBMT,16POLE,2POS
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,Rotary,PCBMT,16POLE,2POS. Compatible with THERMAWAVE equipment. Part No. 09-010920.
THERMAWAVE
09-011030
BUTTON,Window,25MM,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. BUTTON,Window,25MM,BH. Compatible with THERMAWAVE equipment. Part No. 09-011030.
THERMAWAVE
09-011188
Controller,Ionizer,5024-CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller,Ionizer,5024-CE. Compatible with THERMAWAVE equipment. Part No. 09-011188.
THERMAWAVE
09-012018
Switch,40MM,OPERATOR&ADT,EMO,TWIStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,40MM,OPERATOR&ADT,EMO,TWIStandard. Compatible with THERMAWAVE equipment. Part No. 09-012018.
THERMAWAVE
09-012049
Switch,TOGGLE,DPDT,ON-OFF-MON ON
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,TOGGLE,DPDT,ON-OFF-MON ON. Compatible with THERMAWAVE equipment. Part No. 09-012049.
THERMAWAVE
09-013543
KENS,Switch,Optic LMT,T-W StandardG,TL
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,Switch,Optic LMT,T-W StandardG,TL. Compatible with THERMAWAVE equipment. Part No. 09-013543.
THERMAWAVE
09-013544
KENS,Switch,Optic LMT,T-W StandardG,DL
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,Switch,Optic LMT,T-W StandardG,DL. Compatible with THERMAWAVE equipment. Part No. 09-013544.
THERMAWAVE
09-013561
Switch,PNEUMATIC PRESSURE
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,PNEUMATIC PRESSURE. Compatible with THERMAWAVE equipment. Part No. 09-013561.
THERMAWAVE
09-015491
SW, 40MM,EMO W/Key
spare_part
High-quality nan for THERMAWAVE CMP tool. SW, 40MM,EMO W/Key. Compatible with THERMAWAVE equipment. Part No. 09-015491.
THERMAWAVE
09-016747
SENSOR,Photo,L-SHAPED,5-24V
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR,Photo,L-SHAPED,5-24V. Compatible with THERMAWAVE equipment. Part No. 09-016747.
THERMAWAVE
09-017977
Detector,POSITION SENSOR,Auto Focus,HA
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector,POSITION SENSOR,Auto Focus,HA. Compatible with THERMAWAVE equipment. Part No. 09-017977.
THERMAWAVE
09-018880
Sensor, Photo-Micro, NAIS
spare_part
High-quality nan for THERMAWAVE CMP tool. Sensor, Photo-Micro, NAIS. Compatible with THERMAWAVE equipment. Part No. 09-018880.
THERMAWAVE
09-019353
Shockwatch, Magnetic, 20G
spare_part
High-quality nan for THERMAWAVE CMP tool. Shockwatch, Magnetic, 20G. Compatible with THERMAWAVE equipment. Part No. 09-019353.
THERMAWAVE
09-019718
SW,VACUUM ACTUATED 14.70IN HG
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,VACUUM ACTUATED 14.70IN HG. Compatible with THERMAWAVE equipment. Part No. 09-019718.
THERMAWAVE
09-019720
SW, Vacuum Actuated 10.65 IN HG
spare_part
High-quality nan for THERMAWAVE CMP tool. SW, Vacuum Actuated 10.65 IN HG. Compatible with THERMAWAVE equipment. Part No. 09-019720.
THERMAWAVE
09-019734
Switch,MINI,SIMUL ROLLER,5A,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,MINI,SIMUL ROLLER,5A,250VAC. Compatible with THERMAWAVE equipment. Part No. 09-019734.
THERMAWAVE
09-019947
Switch,REED,Theta Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,REED,Theta Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 09-019947.
THERMAWAVE
09-021200
EMITTER,ULTRA CLEAN,SIL
spare_part
High-quality nan for THERMAWAVE CMP tool. EMITTER,ULTRA CLEAN,SIL. Compatible with THERMAWAVE equipment. Part No. 09-021200.
THERMAWAVE
09-021376
GUARD,EMO SW,YEL
spare_part
High-quality nan for THERMAWAVE CMP tool. GUARD,EMO SW,YEL. Compatible with THERMAWAVE equipment. Part No. 09-021376.
THERMAWAVE
09-021377
SW,EMO,TURN TO RELEASE
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,EMO,TURN TO RELEASE. Compatible with THERMAWAVE equipment. Part No. 09-021377.
THERMAWAVE
09-021774
Switch,MOMENTARY,ILLUM,24V,GRN LED
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch,MOMENTARY,ILLUM,24V,GRN LED. Compatible with THERMAWAVE equipment. Part No. 09-021774.
THERMAWAVE
09-022015
SENSOR,TEMP MDL,THMCPL,4INPUTS
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR,TEMP MDL,THMCPL,4INPUTS. Compatible with THERMAWAVE equipment. Part No. 09-022015.
THERMAWAVE
09-022017
TEMP CNTRL MDL,PLC,THMCP,XSTOR
spare_part
High-quality nan for THERMAWAVE CMP tool. TEMP CNTRL MDL,PLC,THMCP,XSTOR. Compatible with THERMAWAVE equipment. Part No. 09-022017.
THERMAWAVE
09-022153
SENSOR,FLD LVL/LEAK,24VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR,FLD LVL/LEAK,24VDC. Compatible with THERMAWAVE equipment. Part No. 09-022153.
THERMAWAVE
09-022154
SENSOR,FLOW,.53-7.9GPM,3/8NPT
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR,FLOW,.53-7.9GPM,3/8NPT. Compatible with THERMAWAVE equipment. Part No. 09-022154.
THERMAWAVE
09-022294
SW ASSY,LIMIT,X-AXIS,STG,8IN
spare_part
High-quality nan for THERMAWAVE CMP tool. SW ASSY,LIMIT,X-AXIS,STG,8IN. Compatible with THERMAWAVE equipment. Part No. 09-022294.
THERMAWAVE
09-022295
Limit Switch Assembly, Y-Axis, Stage, 8 inch
spare_part
High-quality nan for THERMAWAVE CMP tool. Limit Switch Assembly, Y-Axis, Stage, 8 inch. Compatible with THERMAWAVE equipment. Part No. 09-022295.
THERMAWAVE
09-022296
Switch Assembly,Limit,Y-AXIS,StandardG,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch Assembly,Limit,Y-AXIS,StandardG,UV. Compatible with THERMAWAVE equipment. Part No. 09-022296.
THERMAWAVE
09-022428
SW,PUSHBUTTON,SECURITY,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,PUSHBUTTON,SECURITY,P35. Compatible with THERMAWAVE equipment. Part No. 09-022428.
THERMAWAVE
09-022530
Limit Switch Assembly, X/Y Asix, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Limit Switch Assembly, X/Y Asix, TP500. Compatible with THERMAWAVE equipment. Part No. 09-022530.
THERMAWAVE
09-027283
SW,2PORT,KEY,VID,MOUSE
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,2PORT,KEY,VID,MOUSE. Compatible with THERMAWAVE equipment. Part No. 09-027283.
THERMAWAVE
09-029830
ECS/01-2512 (12 Port 10/100 Switch)
spare_part
High-quality nan for THERMAWAVE CMP tool. ECS/01-2512 (12 Port 10/100 Switch). Compatible with THERMAWAVE equipment. Part No. 09-029830.
THERMAWAVE
09-041360
SW,PRESSURE,HI-PREC DGTL
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,PRESSURE,HI-PREC DGTL. Compatible with THERMAWAVE equipment. Part No. 09-041360.
THERMAWAVE
09-041361
SW,INTRLK,H20 SENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,INTRLK,H20 SENSOR. Compatible with THERMAWAVE equipment. Part No. 09-041361.
THERMAWAVE
09-041366
SW,VIEW IP
spare_part
High-quality nan for THERMAWAVE CMP tool. SW,VIEW IP. Compatible with THERMAWAVE equipment. Part No. 09-041366.
THERMAWAVE
10-002232
Relay,TELEDYNE
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,TELEDYNE. Compatible with THERMAWAVE equipment. Part No. 10-002232.
THERMAWAVE
10-003385
Relay,TIME DELAY,TDB
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,TIME DELAY,TDB. Compatible with THERMAWAVE equipment. Part No. 10-003385.
THERMAWAVE
10-003560
Relay,3 POLE,110V
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,3 POLE,110V. Compatible with THERMAWAVE equipment. Part No. 10-003560.
THERMAWAVE
10-003654
SOC,Relay,11 PIN,BLADE
spare_part
High-quality nan for THERMAWAVE CMP tool. SOC,Relay,11 PIN,BLADE. Compatible with THERMAWAVE equipment. Part No. 10-003654.
THERMAWAVE
10-003655
SOC,Relay,8 PIN, OCTAL
spare_part
High-quality nan for THERMAWAVE CMP tool. SOC,Relay,8 PIN, OCTAL. Compatible with THERMAWAVE equipment. Part No. 10-003655.
THERMAWAVE
10-008537
Relay,TIME DELAY,10SEC,24VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,TIME DELAY,10SEC,24VAC. Compatible with THERMAWAVE equipment. Part No. 10-008537.
THERMAWAVE
10-010646
Relay,MOD,PLC
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,MOD,PLC. Compatible with THERMAWAVE equipment. Part No. 10-010646.
THERMAWAVE
10-013126
Relay,24VDC,3PDT
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,24VDC,3PDT. Compatible with THERMAWAVE equipment. Part No. 10-013126.
THERMAWAVE
10-021111
Relay,TIME DELAY,1-10SEC,24VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay,TIME DELAY,1-10SEC,24VDC. Compatible with THERMAWAVE equipment. Part No. 10-021111.
THERMAWAVE
10-022004
RELAY SOLID STATE,40A,PHOTO
spare_part
High-quality nan for THERMAWAVE CMP tool. RELAY SOLID STATE,40A,PHOTO. Compatible with THERMAWAVE equipment. Part No. 10-022004.
THERMAWAVE
10-022016
RELAY OUTPUT MDL,PLC,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. RELAY OUTPUT MDL,PLC,DES. Compatible with THERMAWAVE equipment. Part No. 10-022016.
THERMAWAVE
10-022094
RELAY,CONTACTOR,5.5KW
spare_part
High-quality nan for THERMAWAVE CMP tool. RELAY,CONTACTOR,5.5KW. Compatible with THERMAWAVE equipment. Part No. 10-022094.
THERMAWAVE
10-022461
RELAY,DPDT,5AMP,24VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. RELAY,DPDT,5AMP,24VDC. Compatible with THERMAWAVE equipment. Part No. 10-022461.
THERMAWAVE
11-002639
Cable,MOD-TAP,13IN,Standard MMJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,MOD-TAP,13IN,Standard MMJ. Compatible with THERMAWAVE equipment. Part No. 11-002639.
THERMAWAVE
11-002925
Cable Assembly,A905,FAStandard/SLOW Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,A905,FAStandard/SLOW Switch. Compatible with THERMAWAVE equipment. Part No. 11-002925.
THERMAWAVE
11-002965
Cable Assembly,CRADLE,W17
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,CRADLE,W17. Compatible with THERMAWAVE equipment. Part No. 11-002965.
THERMAWAVE
11-002979
Cable Assembly,W31
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W31. Compatible with THERMAWAVE equipment. Part No. 11-002979.
THERMAWAVE
11-002986
Cable Assembly,W54
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W54. Compatible with THERMAWAVE equipment. Part No. 11-002986.
THERMAWAVE
11-003027
Cable Assembly,W106
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W106. Compatible with THERMAWAVE equipment. Part No. 11-003027.
THERMAWAVE
11-003029
Cable Assembly,W108
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W108. Compatible with THERMAWAVE equipment. Part No. 11-003029.
THERMAWAVE
11-003373
Cable Assembly,DOM POWER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DOM POWER. Compatible with THERMAWAVE equipment. Part No. 11-003373.
THERMAWAVE
11-003712
Cable,Robot Controller,X-WAIStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,Robot Controller,X-WAIStandard. Compatible with THERMAWAVE equipment. Part No. 11-003712.
THERMAWAVE
11-003713
Cable Assembly,Robot Controller,Y-ARM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Robot Controller,Y-ARM. Compatible with THERMAWAVE equipment. Part No. 11-003713.
THERMAWAVE
11-003714
Cable,Robot Controller, Z
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,Robot Controller, Z. Compatible with THERMAWAVE equipment. Part No. 11-003714.
THERMAWAVE
11-003802-01
Cable Assembly,Power Switch Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power Switch Laser. Compatible with THERMAWAVE equipment. Part No. 11-003802-01.
THERMAWAVE
11-003914
Cable Assembly,W87,P2 MULITBUSS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W87,P2 MULITBUSS. Compatible with THERMAWAVE equipment. Part No. 11-003914.
THERMAWAVE
11-004040
Cable Assembly,W40,Robot/SYS Sense
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W40,Robot/SYS Sense. Compatible with THERMAWAVE equipment. Part No. 11-004040.
THERMAWAVE
11-004041
Cable Assembly,Solenoid,508J
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Solenoid,508J. Compatible with THERMAWAVE equipment. Part No. 11-004041.
THERMAWAVE
11-004075
Solenoid Assembly, 510J
spare_part
High-quality nan for THERMAWAVE CMP tool. Solenoid Assembly, 510J. Compatible with THERMAWAVE equipment. Part No. 11-004075.
THERMAWAVE
11-004149
Cable Assembly,KEYBD,22IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,KEYBD,22IN. Compatible with THERMAWAVE equipment. Part No. 11-004149.
THERMAWAVE
11-004196
Cable Assembly,2X512K Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,2X512K Upgrade. Compatible with THERMAWAVE equipment. Part No. 11-004196.
THERMAWAVE
11-004779
Harness Assembly, Lt Optical Cover
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assembly, Lt Optical Cover. Compatible with THERMAWAVE equipment. Part No. 11-004779.
THERMAWAVE
11-004901
Harness Assy,Optic BENCH,W6
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,Optic BENCH,W6. Compatible with THERMAWAVE equipment. Part No. 11-004901.
THERMAWAVE
11-005035
Cable,BUS/StandardRAP AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,BUS/StandardRAP AXIS. Compatible with THERMAWAVE equipment. Part No. 11-005035.
THERMAWAVE
11-005142
Cable Assembly,Robot VAC Sense
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Robot VAC Sense. Compatible with THERMAWAVE equipment. Part No. 11-005142.
THERMAWAVE
11-005173
Cable Assembly,SECS/AUX-1
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SECS/AUX-1. Compatible with THERMAWAVE equipment. Part No. 11-005173.
THERMAWAVE
11-005545
Cable,DB9F-DB25
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,DB9F-DB25. Compatible with THERMAWAVE equipment. Part No. 11-005545.
THERMAWAVE
11-005903
Harness Assy,Servo Stage Sense
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,Servo Stage Sense. Compatible with THERMAWAVE equipment. Part No. 11-005903.
THERMAWAVE
11-006114
Cable Assembly,W132,300HZ,Auto Focus,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W132,300HZ,Auto Focus,T9. Compatible with THERMAWAVE equipment. Part No. 11-006114.
THERMAWAVE
11-006165
Cable Assembly,Flat,Auto FocusD TO Optic PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,Auto FocusD TO Optic PL. Compatible with THERMAWAVE equipment. Part No. 11-006165.
THERMAWAVE
11-006166
Cable Assembly,Flat,Auto FocusA TO Auto FocusD INT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,Auto FocusA TO Auto FocusD INT. Compatible with THERMAWAVE equipment. Part No. 11-006166.
THERMAWAVE
11-006521
Cable Assembly,TEMP Sense/CNTRL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TEMP Sense/CNTRL. Compatible with THERMAWAVE equipment. Part No. 11-006521.
THERMAWAVE
11-006550
SENSOR Assembly,45DEG Chopper
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,45DEG Chopper. Compatible with THERMAWAVE equipment. Part No. 11-006550.
THERMAWAVE
11-006561
CABLE ASSY, OPT PL, HEATER ASSY
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, OPT PL, HEATER ASSY. Compatible with THERMAWAVE equipment. Part No. 11-006561.
THERMAWAVE
11-006899
Cable Assembly,CPU Power SupplyUpgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,CPU Power SupplyUpgrade. Compatible with THERMAWAVE equipment. Part No. 11-006899.
THERMAWAVE
11-007300
Cable Assembly,REAL TIME POS,5AXKL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,REAL TIME POS,5AXKL. Compatible with THERMAWAVE equipment. Part No. 11-007300.
THERMAWAVE
11-007399
CABLE ASSY,EMO&CONTROL
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EMO&CONTROL. Compatible with THERMAWAVE equipment. Part No. 11-007399.
THERMAWAVE
11-007483
Cable Assembly,Optic PL,Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Optic PL,Detector. Compatible with THERMAWAVE equipment. Part No. 11-007483.
THERMAWAVE
11-007524
CABLE ASSY,O-BUSS,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,O-BUSS,P20. Compatible with THERMAWAVE equipment. Part No. 11-007524.
THERMAWAVE
11-007665
Cable Assembly, Motherboard/Thermal PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Motherboard/Thermal PL. Compatible with THERMAWAVE equipment. Part No. 11-007665.
THERMAWAVE
11-007668
Harness Assy,INTERLOCK
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,INTERLOCK. Compatible with THERMAWAVE equipment. Part No. 11-007668.
THERMAWAVE
11-007707
Harness Assy,PERIPHERAL SENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,PERIPHERAL SENSOR. Compatible with THERMAWAVE equipment. Part No. 11-007707.
THERMAWAVE
11-007709
Cable Assembly,A110 TO Hene AOM Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,A110 TO Hene AOM Driver. Compatible with THERMAWAVE equipment. Part No. 11-007709.
THERMAWAVE
11-007713
Cable Assembly,AOM Driver TO Crystal
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AOM Driver TO Crystal. Compatible with THERMAWAVE equipment. Part No. 11-007713.
THERMAWAVE
11-007714
Cable Assembly, A102 To Ar AOM Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, A102 To Ar AOM Driver. Compatible with THERMAWAVE equipment. Part No. 11-007714.
THERMAWAVE
11-007725
Cable Assembly,OpticICS PL,CNTRL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,OpticICS PL,CNTRL. Compatible with THERMAWAVE equipment. Part No. 11-007725.
THERMAWAVE
11-007831
Cable Assembly,Flat,50COND,OP/DET
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,50COND,OP/DET. Compatible with THERMAWAVE equipment. Part No. 11-007831.
THERMAWAVE
11-007832
Cable Assembly,Flat,34COND,OP/SHTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,34COND,OP/SHTR. Compatible with THERMAWAVE equipment. Part No. 11-007832.
THERMAWAVE
11-007833
Cable Assembly,Flat,20COND,OP/CameraR
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,20COND,OP/CameraR. Compatible with THERMAWAVE equipment. Part No. 11-007833.
THERMAWAVE
11-007834
Cable Assembly,Flat,34COND,OP/Auto Focus
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,34COND,OP/Auto Focus. Compatible with THERMAWAVE equipment. Part No. 11-007834.
THERMAWAVE
11-007835
Cable Assembly,Flat,10COND,C&F FDriver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,10COND,C&F FDriver. Compatible with THERMAWAVE equipment. Part No. 11-007835.
THERMAWAVE
11-007836
Cable Assembly,Flat,50COND,A/D
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,50COND,A/D. Compatible with THERMAWAVE equipment. Part No. 11-007836.
THERMAWAVE
11-007837
Cable Assembly,Flat,50COND,DGT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,50COND,DGT. Compatible with THERMAWAVE equipment. Part No. 11-007837.
THERMAWAVE
11-007838
Cable Assembly,Flat,50COND,WFR HDL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,50COND,WFR HDL. Compatible with THERMAWAVE equipment. Part No. 11-007838.
THERMAWAVE
11-007842
Cable Assembly,Flat,34COND,FLOPPY
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,34COND,FLOPPY. Compatible with THERMAWAVE equipment. Part No. 11-007842.
THERMAWAVE
11-007848
Cable Assembly,Camera,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Camera,P20. Compatible with THERMAWAVE equipment. Part No. 11-007848.
THERMAWAVE
11-007849
Cable Assembly,AUTO FOCUS,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AUTO FOCUS,P20. Compatible with THERMAWAVE equipment. Part No. 11-007849.
THERMAWAVE
11-007850
Cable Assembly,Auto Focus DET
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus DET. Compatible with THERMAWAVE equipment. Part No. 11-007850.
THERMAWAVE
11-007987
Cable Assembly,EMO INTERLOCK Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,EMO INTERLOCK Switch. Compatible with THERMAWAVE equipment. Part No. 11-007987.
THERMAWAVE
11-008004
Cable Assembly,Platform
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Platform. Compatible with THERMAWAVE equipment. Part No. 11-008004.
THERMAWAVE
11-008022
Cable Assembly,Robot CNTRL/GNDBUSS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Robot CNTRL/GNDBUSS. Compatible with THERMAWAVE equipment. Part No. 11-008022.
THERMAWAVE
11-008075
Cable Assembly,LED,Cassette
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LED,Cassette. Compatible with THERMAWAVE equipment. Part No. 11-008075.
THERMAWAVE
11-008101
CABLE ASSY,O-BUSS INTERCONN
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,O-BUSS INTERCONN. Compatible with THERMAWAVE equipment. Part No. 11-008101.
THERMAWAVE
11-008103
Cable Assembly,Theta Stage M
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Theta Stage M. Compatible with THERMAWAVE equipment. Part No. 11-008103.
THERMAWAVE
11-008104
USE UP EXISTING STOCK - then order 61-015530 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 61-015530 instead.. Compatible with THERMAWAVE equipment. Part No. 11-008104.
THERMAWAVE
11-008111
Cable Assembly,AIR FLOW Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AIR FLOW Switch. Compatible with THERMAWAVE equipment. Part No. 11-008111.
THERMAWAVE
11-008112
HARNESS ASSY,X-Y,AR TRKR LM
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,X-Y,AR TRKR LM. Compatible with THERMAWAVE equipment. Part No. 11-008112.
THERMAWAVE
11-008219
Cable Assembly,CASS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,CASS. Compatible with THERMAWAVE equipment. Part No. 11-008219.
THERMAWAVE
11-008243
Cable Assembly,Adaptor,CYONIC TO OMNI
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor,CYONIC TO OMNI. Compatible with THERMAWAVE equipment. Part No. 11-008243.
THERMAWAVE
11-008255
Cable Assembly,Laser Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Laser Driver. Compatible with THERMAWAVE equipment. Part No. 11-008255.
THERMAWAVE
11-008265
Cable Assembly,Adaptor,Chopper PCB
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor,Chopper PCB. Compatible with THERMAWAVE equipment. Part No. 11-008265.
THERMAWAVE
11-008303
Cable Assembly,Auto Focus LED
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus LED. Compatible with THERMAWAVE equipment. Part No. 11-008303.
THERMAWAVE
11-008305
Cable Assembly,Auto Focus 5X/50X LMT Sense
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus 5X/50X LMT Sense. Compatible with THERMAWAVE equipment. Part No. 11-008305.
THERMAWAVE
11-008306
Cable Assembly,Auto Focus Limit Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus Limit Switch. Compatible with THERMAWAVE equipment. Part No. 11-008306.
THERMAWAVE
11-008474
Cable Assembly,Flat,34COND,Auto Focus/Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,34COND,Auto Focus/Driver. Compatible with THERMAWAVE equipment. Part No. 11-008474.
THERMAWAVE
11-008607
Cable Assembly,Cognex,SCSI HD
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex,SCSI HD. Compatible with THERMAWAVE equipment. Part No. 11-008607.
THERMAWAVE
11-008632
Cable Assembly,Cognex Adaptor
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex Adaptor. Compatible with THERMAWAVE equipment. Part No. 11-008632.
THERMAWAVE
11-008739
Cable Assembly,PC23/C DriverIVES
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,PC23/C DriverIVES. Compatible with THERMAWAVE equipment. Part No. 11-008739.
THERMAWAVE
11-008742
Cable Assembly,EXT,Bracket/QUAD CELL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,EXT,Bracket/QUAD CELL. Compatible with THERMAWAVE equipment. Part No. 11-008742.
THERMAWAVE
11-008743
Cable Assembly,EXT,Bracket/Auto Focus Lens H
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,EXT,Bracket/Auto Focus Lens H. Compatible with THERMAWAVE equipment. Part No. 11-008743.
THERMAWAVE
11-008877
Cable Assembly,GND,Laser Diode
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,GND,Laser Diode. Compatible with THERMAWAVE equipment. Part No. 11-008877.
THERMAWAVE
11-008884
Cable Assembly,SECSII,PCB I/O,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SECSII,PCB I/O,P20. Compatible with THERMAWAVE equipment. Part No. 11-008884.
THERMAWAVE
11-008942
Cable Assembly,Adaptor ALC TO OMNI
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor ALC TO OMNI. Compatible with THERMAWAVE equipment. Part No. 11-008942.
THERMAWAVE
11-009162
Cable Assembly,BNC,Monitor REF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,BNC,Monitor REF. Compatible with THERMAWAVE equipment. Part No. 11-009162.
THERMAWAVE
11-009163
Cable Assembly,BNC,Panel REF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,BNC,Panel REF. Compatible with THERMAWAVE equipment. Part No. 11-009163.
THERMAWAVE
11-009226
Cable Assembly,AIR FLOW Switch,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AIR FLOW Switch,P20. Compatible with THERMAWAVE equipment. Part No. 11-009226.
THERMAWAVE
11-009298
Cable Assembly,Adaptor,KEYBD/INTF PCB
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor,KEYBD/INTF PCB. Compatible with THERMAWAVE equipment. Part No. 11-009298.
THERMAWAVE
11-009320
Cable Assembly,BUFFER&SECS,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,BUFFER&SECS,P20. Compatible with THERMAWAVE equipment. Part No. 11-009320.
THERMAWAVE
11-009383
StandardRAP,KEYBOARD CVR,GND
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardRAP,KEYBOARD CVR,GND. Compatible with THERMAWAVE equipment. Part No. 11-009383.
THERMAWAVE
11-009492
Cable Assembly,Bracket/SPCTROIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Bracket/SPCTROIF. Compatible with THERMAWAVE equipment. Part No. 11-009492.
THERMAWAVE
11-009931
CABLE ASSY,T-BALL INTERCON,6P
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,T-BALL INTERCON,6P. Compatible with THERMAWAVE equipment. Part No. 11-009931.
THERMAWAVE
11-010053
Cable Assembly,Robot GND
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Robot GND. Compatible with THERMAWAVE equipment. Part No. 11-010053.
THERMAWAVE
11-010111
Cable Assembly,Printer/PRINTX,TP42
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Printer/PRINTX,TP42. Compatible with THERMAWAVE equipment. Part No. 11-010111.
THERMAWAVE
11-010112
Cable Assembly,W84,Robot/PC,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,W84,Robot/PC,TP420. Compatible with THERMAWAVE equipment. Part No. 11-010112.
THERMAWAVE
11-010155
Cable Assembly,VID,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,VID,TP420. Compatible with THERMAWAVE equipment. Part No. 11-010155.
THERMAWAVE
11-010161
Cable Assembly,Laser,UNIPHASE,OMNI
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Laser,UNIPHASE,OMNI. Compatible with THERMAWAVE equipment. Part No. 11-010161.
THERMAWAVE
11-010179
Cable Assembly,SCSI,SIG/Power,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SCSI,SIG/Power,TP420. Compatible with THERMAWAVE equipment. Part No. 11-010179.
THERMAWAVE
11-010256
Cable Assembly,Shutter CNTRL/Bracket
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Shutter CNTRL/Bracket. Compatible with THERMAWAVE equipment. Part No. 11-010256.
THERMAWAVE
11-010257
Cable Assembly,Adaptor,ShutterS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor,ShutterS. Compatible with THERMAWAVE equipment. Part No. 11-010257.
THERMAWAVE
11-010258
Cable Assembly,ARRAY DET/Bracket
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,ARRAY DET/Bracket. Compatible with THERMAWAVE equipment. Part No. 11-010258.
THERMAWAVE
11-010259
Cable Assembly,ARRAY,ANA PROC/Bracket
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,ARRAY,ANA PROC/Bracket. Compatible with THERMAWAVE equipment. Part No. 11-010259.
THERMAWAVE
11-010306
Cable Assembly,Bracket/ShutterS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Bracket/ShutterS. Compatible with THERMAWAVE equipment. Part No. 11-010306.
THERMAWAVE
11-010381
Cable Assembly,QUAD,ANA PROC/Bracket
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,QUAD,ANA PROC/Bracket. Compatible with THERMAWAVE equipment. Part No. 11-010381.
THERMAWAVE
11-010402
SENSOR Assembly,Chopper
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,Chopper. Compatible with THERMAWAVE equipment. Part No. 11-010402.
THERMAWAVE
11-010406
Cable Assembly,MBUSS INTERFACE
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,MBUSS INTERFACE. Compatible with THERMAWAVE equipment. Part No. 11-010406.
THERMAWAVE
11-010425
Cable Assembly,COMPUMotor Power,PC23
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,COMPUMotor Power,PC23. Compatible with THERMAWAVE equipment. Part No. 11-010425.
THERMAWAVE
11-010426
Cable Assembly,DC DIStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DC DIStandard. Compatible with THERMAWAVE equipment. Part No. 11-010426.
THERMAWAVE
11-010430
Cable Assembly,SERIAL INTERCONNECT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SERIAL INTERCONNECT. Compatible with THERMAWAVE equipment. Part No. 11-010430.
THERMAWAVE
11-010451
Cable Assembly,SECSII,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SECSII,TP420. Compatible with THERMAWAVE equipment. Part No. 11-010451.
THERMAWAVE
11-010471
Cable Assembly,Laser DriverVR Monitor
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Laser DriverVR Monitor. Compatible with THERMAWAVE equipment. Part No. 11-010471.
THERMAWAVE
11-010482
Cable Assembly,Monitor Power
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Monitor Power. Compatible with THERMAWAVE equipment. Part No. 11-010482.
THERMAWAVE
11-010594
Cable Assembly,Adaptor,CYONICS-UNIPHS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Adaptor,CYONICS-UNIPHS. Compatible with THERMAWAVE equipment. Part No. 11-010594.
THERMAWAVE
11-010638
Cable Assembly,Stepper Motor Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Stepper Motor Driver. Compatible with THERMAWAVE equipment. Part No. 11-010638.
THERMAWAVE
11-010639
Cable Assembly,Power UMBILICAL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power UMBILICAL. Compatible with THERMAWAVE equipment. Part No. 11-010639.
THERMAWAVE
11-010713
Cable Assembly,EMO&CNTRL,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,EMO&CNTRL,BH. Compatible with THERMAWAVE equipment. Part No. 11-010713.
THERMAWAVE
11-010714
Cable Assembly,VGA,BH COM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,VGA,BH COM. Compatible with THERMAWAVE equipment. Part No. 11-010714.
THERMAWAVE
11-010719
Cable Assembly,LT PEN,BH A
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LT PEN,BH A. Compatible with THERMAWAVE equipment. Part No. 11-010719.
THERMAWAVE
11-010721
Cable Assembly,TRACKBALL,BH A
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TRACKBALL,BH A. Compatible with THERMAWAVE equipment. Part No. 11-010721.
THERMAWAVE
11-010722
Cable Assembly,TRACKBALL,BH B
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TRACKBALL,BH B. Compatible with THERMAWAVE equipment. Part No. 11-010722.
THERMAWAVE
11-010724
Cable Assembly,BNC,RG59,15FT,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,BNC,RG59,15FT,BH. Compatible with THERMAWAVE equipment. Part No. 11-010724.
THERMAWAVE
11-010728
Cable Assembly,Window OP/CLSESense
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Window OP/CLSESense. Compatible with THERMAWAVE equipment. Part No. 11-010728.
THERMAWAVE
11-010734
Cable Assembly,Platform,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Platform,BH. Compatible with THERMAWAVE equipment. Part No. 11-010734.
THERMAWAVE
11-010736
Cable Assembly,BUFFER PLC COMM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,BUFFER PLC COMM. Compatible with THERMAWAVE equipment. Part No. 11-010736.
THERMAWAVE
11-010737
Cable Assembly,Ionizer
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Ionizer. Compatible with THERMAWAVE equipment. Part No. 11-010737.
THERMAWAVE
11-010746
Harness Assy,FLIPPER SENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,FLIPPER SENSOR. Compatible with THERMAWAVE equipment. Part No. 11-010746.
THERMAWAVE
11-010762
Cable Assembly,PLC,AC Power
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,PLC,AC Power. Compatible with THERMAWAVE equipment. Part No. 11-010762.
THERMAWAVE
11-010763
Cable Assembly,PLC,DC Power
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,PLC,DC Power. Compatible with THERMAWAVE equipment. Part No. 11-010763.
THERMAWAVE
11-010884
Cable Assembly,5X/80X,LIM SENS,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,5X/80X,LIM SENS,UV. Compatible with THERMAWAVE equipment. Part No. 11-010884.
THERMAWAVE
11-011028
Cable Assembly,Controller UMBILICAL,8FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Controller UMBILICAL,8FT. Compatible with THERMAWAVE equipment. Part No. 11-011028.
THERMAWAVE
11-011128
Cable Assembly,CASS TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,CASS TILT. Compatible with THERMAWAVE equipment. Part No. 11-011128.
THERMAWAVE
11-011320
Cable Assembly,INDEXER Power,SMIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INDEXER Power,SMIF. Compatible with THERMAWAVE equipment. Part No. 11-011320.
THERMAWAVE
11-011416
Cable Assembly,INDEXER/SECS,SMIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INDEXER/SECS,SMIF. Compatible with THERMAWAVE equipment. Part No. 11-011416.
THERMAWAVE
11-011458
Equipe Robot,Robot FLEX CBL ASS3.0
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Robot FLEX CBL ASS3.0. Compatible with THERMAWAVE equipment. Part No. 11-011458.
THERMAWAVE
11-011459
Equipe Robot,Robot FLEX CBL ASS4.0
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Robot FLEX CBL ASS4.0. Compatible with THERMAWAVE equipment. Part No. 11-011459.
THERMAWAVE
11-011468
Cable Assembly,INDEXER/SAM,SMIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INDEXER/SAM,SMIF. Compatible with THERMAWAVE equipment. Part No. 11-011468.
THERMAWAVE
11-011662
Cable Assembly,INDEXER TEStandard,SMIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INDEXER TEStandard,SMIF. Compatible with THERMAWAVE equipment. Part No. 11-011662.
THERMAWAVE
11-011714
Cable Assembly,AC Power,INDEXER,SMIF
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AC Power,INDEXER,SMIF. Compatible with THERMAWAVE equipment. Part No. 11-011714.
THERMAWAVE
11-011716
Cable Assembly,12AWG,StandardO,F,QD,12FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,12AWG,StandardO,F,QD,12FT. Compatible with THERMAWAVE equipment. Part No. 11-011716.
THERMAWAVE
11-011871
Cable Assembly, OPT PL, SDB BUSS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, OPT PL, SDB BUSS. Compatible with THERMAWAVE equipment. Part No. 11-011871.
THERMAWAVE
11-011916
CABLE ASSY,SDB,INTFC PL/TRKR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SDB,INTFC PL/TRKR. Compatible with THERMAWAVE equipment. Part No. 11-011916.
THERMAWAVE
11-011917
CABLE ASSY, SDB,DAB/INTFC PL
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, SDB,DAB/INTFC PL. Compatible with THERMAWAVE equipment. Part No. 11-011917.
THERMAWAVE
11-012012
Cable Assembly,Auto Focus Assembly/INTFC PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus Assembly/INTFC PL. Compatible with THERMAWAVE equipment. Part No. 11-012012.
THERMAWAVE
11-012022
Cable Assembly,Cognex,FLPY,SYQUEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex,FLPY,SYQUEStandard. Compatible with THERMAWAVE equipment. Part No. 11-012022.
THERMAWAVE
11-012074
Cable Assembly,Flat,DAB/INTFC PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Flat,DAB/INTFC PL. Compatible with THERMAWAVE equipment. Part No. 11-012074.
THERMAWAVE
11-012075
CABLE ASSY,FLAT,OPT PL SENSORS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,FLAT,OPT PL SENSORS. Compatible with THERMAWAVE equipment. Part No. 11-012075.
THERMAWAVE
11-012103
CABLE ASSY, COHU, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, COHU, UV. Compatible with THERMAWAVE equipment. Part No. 11-012103.
THERMAWAVE
11-012177
Cable Assembly,LT PEN,EXT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LT PEN,EXT. Compatible with THERMAWAVE equipment. Part No. 11-012177.
THERMAWAVE
11-012505
Cable Assembly,THERMIStandardORS,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,THERMIStandardORS,TP500. Compatible with THERMAWAVE equipment. Part No. 11-012505.
THERMAWAVE
11-012731
Cable Assembly,Auto Focus INTERConnector,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus INTERConnector,UV. Compatible with THERMAWAVE equipment. Part No. 11-012731.
THERMAWAVE
11-012732
CABLE ASSY,ANALOG PROC,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ANALOG PROC,UV. Compatible with THERMAWAVE equipment. Part No. 11-012732.
THERMAWAVE
11-012735
Cable Assembly,AGL4,PMT GAIN,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AGL4,PMT GAIN,UV. Compatible with THERMAWAVE equipment. Part No. 11-012735.
THERMAWAVE
11-012736
Cable Assembly,AGL4,Power DriverVR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AGL4,Power DriverVR,UV. Compatible with THERMAWAVE equipment. Part No. 11-012736.
THERMAWAVE
11-012737
Cable Assembly,MVG MIR,LT SRC,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,MVG MIR,LT SRC,UV. Compatible with THERMAWAVE equipment. Part No. 11-012737.
THERMAWAVE
11-012738
CABLE ASSY,PWR DRVR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PWR DRVR,UV. Compatible with THERMAWAVE equipment. Part No. 11-012738.
THERMAWAVE
11-012739
Cable Assembly,IUV DET,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,IUV DET,UV. Compatible with THERMAWAVE equipment. Part No. 11-012739.
THERMAWAVE
11-012741
Cable Assembly,MVG MIR,Shutter,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,MVG MIR,Shutter,UV. Compatible with THERMAWAVE equipment. Part No. 11-012741.
THERMAWAVE
11-012742
Cable Assembly,LIM Switch/MTR Driver,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LIM Switch/MTR Driver,UV. Compatible with THERMAWAVE equipment. Part No. 11-012742.
THERMAWAVE
11-012743
Cable Assembly,ENCODER INTFC,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,ENCODER INTFC,UV. Compatible with THERMAWAVE equipment. Part No. 11-012743.
THERMAWAVE
11-012744
Harness Assy,VEXTA CNTRL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,VEXTA CNTRL,UV. Compatible with THERMAWAVE equipment. Part No. 11-012744.
THERMAWAVE
11-012747
Cable Assembly,VEXTA,DC Power,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,VEXTA,DC Power,UV. Compatible with THERMAWAVE equipment. Part No. 11-012747.
THERMAWAVE
11-012748
Harness Assy,Stage CNTRL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,Stage CNTRL,UV. Compatible with THERMAWAVE equipment. Part No. 11-012748.
THERMAWAVE
11-012750
CABLE ASSY,MONOCHROME DATA,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MONOCHROME DATA,UV. Compatible with THERMAWAVE equipment. Part No. 11-012750.
THERMAWAVE
11-012759
Cable Assembly,LAMP Power,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LAMP Power,UV. Compatible with THERMAWAVE equipment. Part No. 11-012759.
THERMAWAVE
11-012761
Cable Assembly,Vacuum Valve,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Vacuum Valve,UV. Compatible with THERMAWAVE equipment. Part No. 11-012761.
THERMAWAVE
11-012860
Cable Assembly,MONOCHROME Power,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,MONOCHROME Power,UV. Compatible with THERMAWAVE equipment. Part No. 11-012860.
THERMAWAVE
11-013099
Cable Assembly,Power DIStandardR,OpticICS PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power DIStandardR,OpticICS PL. Compatible with THERMAWAVE equipment. Part No. 11-013099.
THERMAWAVE
11-013100
Cable Assembly,Power MDL/INTFC PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power MDL/INTFC PL. Compatible with THERMAWAVE equipment. Part No. 11-013100.
THERMAWAVE
11-013135
Cable Assembly,CTR-10 TIMER/Power BD
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,CTR-10 TIMER/Power BD. Compatible with THERMAWAVE equipment. Part No. 11-013135.
THERMAWAVE
11-013136
Cable Assembly,WFR DOOR,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,WFR DOOR,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013136.
THERMAWAVE
11-013142
Cable Assembly,HD,HTR&COOLER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,HD,HTR&COOLER. Compatible with THERMAWAVE equipment. Part No. 11-013142.
THERMAWAVE
11-013241
Cable Assembly,Auto Focus,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus,UV. Compatible with THERMAWAVE equipment. Part No. 11-013241.
THERMAWAVE
11-013263
CABLE ASSY,DGTL CNTRL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,DGTL CNTRL,UV. Compatible with THERMAWAVE equipment. Part No. 11-013263.
THERMAWAVE
11-013268
Cable Assembly,Auto Focus DET,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus DET,UV. Compatible with THERMAWAVE equipment. Part No. 11-013268.
THERMAWAVE
11-013305
Cable Assembly,R-MOD DET,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,R-MOD DET,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013305.
THERMAWAVE
11-013306
Cable Assembly,I-MOD DET,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,I-MOD DET,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013306.
THERMAWAVE
11-013326
Cable Assembly,LT P/S GND,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LT P/S GND,UV. Compatible with THERMAWAVE equipment. Part No. 11-013326.
THERMAWAVE
11-013329
Cable Assembly,DC DIStandard,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DC DIStandard,UV. Compatible with THERMAWAVE equipment. Part No. 11-013329.
THERMAWAVE
11-013466
Cable Assembly,Y-StandardG,ENCODER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y-StandardG,ENCODER. Compatible with THERMAWAVE equipment. Part No. 11-013466.
THERMAWAVE
11-013468
Cable Assembly,Y-StandardG,MTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y-StandardG,MTR. Compatible with THERMAWAVE equipment. Part No. 11-013468.
THERMAWAVE
11-013469
Cable Assembly,Y-StandardG,Limit Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y-StandardG,Limit Switch. Compatible with THERMAWAVE equipment. Part No. 11-013469.
THERMAWAVE
11-013470
Cable Assembly,THETA-StandardG,MTR/Limit
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,THETA-StandardG,MTR/Limit. Compatible with THERMAWAVE equipment. Part No. 11-013470.
THERMAWAVE
11-013471
Cable Assembly,X-StandardG,ENCODER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,X-StandardG,ENCODER. Compatible with THERMAWAVE equipment. Part No. 11-013471.
THERMAWAVE
11-013475
Cable Assembly,Optic PL ShutterS,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Optic PL ShutterS,UV. Compatible with THERMAWAVE equipment. Part No. 11-013475.
THERMAWAVE
11-013512
Ina, Cable Assy, Servo Pwr,TP500 repl. by 11-108425
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Cable Assy, Servo Pwr,TP500 repl. by 11-108425. Compatible with THERMAWAVE equipment. Part No. 11-013512.
THERMAWAVE
11-013665
Cable Assembly,Laser Power,GND
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Laser Power,GND. Compatible with THERMAWAVE equipment. Part No. 11-013665.
THERMAWAVE
11-013793
Cable Assembly,StandardG THMS,BOT,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,StandardG THMS,BOT,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013793.
THERMAWAVE
11-013822
CABLE ASSY, INDEXER PWR, DUVI
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, INDEXER PWR, DUVI. Compatible with THERMAWAVE equipment. Part No. 11-013822.
THERMAWAVE
11-013887
Cable Assembly,PC23/Sense W/OpticO
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,PC23/Sense W/OpticO. Compatible with THERMAWAVE equipment. Part No. 11-013887.
THERMAWAVE
11-013902
Cable Assembly,Y-StandardG LIM EXT,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y-StandardG LIM EXT,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013902.
THERMAWAVE
11-013903
Cable Assembly,Y/Z StandardG LIM,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y/Z StandardG LIM,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013903.
THERMAWAVE
11-013904
Cable Assembly,Y/Z StandardG MTR,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y/Z StandardG MTR,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013904.
THERMAWAVE
11-013968
Cable Assembly,LT TWR/PCB,DUVI
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LT TWR/PCB,DUVI. Compatible with THERMAWAVE equipment. Part No. 11-013968.
THERMAWAVE
11-013969
Cable Assembly,StandardG HTR/THMS,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,StandardG HTR/THMS,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013969.
THERMAWAVE
11-013970
Cable Assembly,Z-StandardG ENCODER,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Z-StandardG ENCODER,TP500. Compatible with THERMAWAVE equipment. Part No. 11-013970.
THERMAWAVE
11-014048
CABLE ASSY,MTR/TACH,X-STG,TP50
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MTR/TACH,X-STG,TP50. Compatible with THERMAWAVE equipment. Part No. 11-014048.
THERMAWAVE
11-014051
Cable Assembly,SERVO AMP/StandardG LIM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SERVO AMP/StandardG LIM. Compatible with THERMAWAVE equipment. Part No. 11-014051.
THERMAWAVE
11-014146
Cable Assembly,Cognex TO Optic PL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex TO Optic PL. Compatible with THERMAWAVE equipment. Part No. 11-014146.
THERMAWAVE
11-014147
Cable Assembly,Cognex Video IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex Video IN. Compatible with THERMAWAVE equipment. Part No. 11-014147.
THERMAWAVE
11-014148
Cable Assembly,Cognex Video OUT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex Video OUT. Compatible with THERMAWAVE equipment. Part No. 11-014148.
THERMAWAVE
11-014149
Cable Assembly,T-BALL,INTERCONN
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,T-BALL,INTERCONN. Compatible with THERMAWAVE equipment. Part No. 11-014149.
THERMAWAVE
11-014150
Cable Assembly,T-BALL SIGNAL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,T-BALL SIGNAL. Compatible with THERMAWAVE equipment. Part No. 11-014150.
THERMAWAVE
11-014151
Cable Assembly,Cognex Monitor
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex Monitor. Compatible with THERMAWAVE equipment. Part No. 11-014151.
THERMAWAVE
11-014152
Cable Assembly,Cognex,INTFC Power
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Cognex,INTFC Power. Compatible with THERMAWAVE equipment. Part No. 11-014152.
THERMAWAVE
11-014255
Cable Assembly,SCSI,HD/BACKUP
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SCSI,HD/BACKUP. Compatible with THERMAWAVE equipment. Part No. 11-014255.
THERMAWAVE
11-014258
Cable Assembly,DC DIStandard,OP3260
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DC DIStandard,OP3260. Compatible with THERMAWAVE equipment. Part No. 11-014258.
THERMAWAVE
11-014488
Cable Assembly,Power UMBILICAL,50 FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power UMBILICAL,50 FT. Compatible with THERMAWAVE equipment. Part No. 11-014488.
THERMAWAVE
11-014489
Cable Assembly,Controller UMBILICAL,50FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Controller UMBILICAL,50FT. Compatible with THERMAWAVE equipment. Part No. 11-014489.
THERMAWAVE
11-014616
CABLE ASSY, FLOPPY CNTRLR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, FLOPPY CNTRLR. Compatible with THERMAWAVE equipment. Part No. 11-014616.
THERMAWAVE
11-014968
CABLE ASSY,LT TWR I/O
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR I/O. Compatible with THERMAWAVE equipment. Part No. 11-014968.
THERMAWAVE
11-014977
Cable,RS232,DB25M TO DB9F
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,RS232,DB25M TO DB9F. Compatible with THERMAWAVE equipment. Part No. 11-014977.
THERMAWAVE
11-015051
Cable Assembly,TIMER/SERVO AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TIMER/SERVO AMP. Compatible with THERMAWAVE equipment. Part No. 11-015051.
THERMAWAVE
11-015117
Cable Assembly,Power,FAN Controller,DUVI
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power,FAN Controller,DUVI. Compatible with THERMAWAVE equipment. Part No. 11-015117.
THERMAWAVE
11-015182
Cable Assembly,AOM,EXTENDED
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AOM,EXTENDED. Compatible with THERMAWAVE equipment. Part No. 11-015182.
THERMAWAVE
11-015396
Cable Assembly,ON/OFF Power Switch
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,ON/OFF Power Switch. Compatible with THERMAWAVE equipment. Part No. 11-015396.
THERMAWAVE
11-015446
Cable Assembly,THETA MTR Driver,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,THETA MTR Driver,OP2600. Compatible with THERMAWAVE equipment. Part No. 11-015446.
THERMAWAVE
11-015447
Cable Assembly,X-MTR Driver,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,X-MTR Driver,OP2600. Compatible with THERMAWAVE equipment. Part No. 11-015447.
THERMAWAVE
11-015448
Cable Assembly,Y-MTR Driver,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Y-MTR Driver,OP2600. Compatible with THERMAWAVE equipment. Part No. 11-015448.
THERMAWAVE
11-015943
CABLE ASSY,SERVO,AMP/TACH TP
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SERVO,AMP/TACH TP. Compatible with THERMAWAVE equipment. Part No. 11-015943.
THERMAWAVE
11-016662
Cable Assembly,SERVO AMP/Z ENCODER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SERVO AMP/Z ENCODER. Compatible with THERMAWAVE equipment. Part No. 11-016662.
THERMAWAVE
11-016731
Assy, Cable, DGTZR/I-LSR, P3, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, DGTZR/I-LSR, P3, P34. Compatible with THERMAWAVE equipment. Part No. 11-016731.
THERMAWAVE
11-016732
Assy, Cable, DGTZR/QUD DET, P6, P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, DGTZR/QUD DET, P6, P3. Compatible with THERMAWAVE equipment. Part No. 11-016732.
THERMAWAVE
11-016733
Cable Assembly,DGTZ/ABCD DET,P2,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DGTZ/ABCD DET,P2,P3. Compatible with THERMAWAVE equipment. Part No. 11-016733.
THERMAWAVE
11-016931
Harness Assy,I/O,TECH80,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,I/O,TECH80,P34. Compatible with THERMAWAVE equipment. Part No. 11-016931.
THERMAWAVE
11-016934
Assy, Harness, DC Fan - 1, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Harness, DC Fan - 1, P34. Compatible with THERMAWAVE equipment. Part No. 11-016934.
THERMAWAVE
11-016940
HARNESS ASSY,PS,LWR,12P,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,PS,LWR,12P,P34. Compatible with THERMAWAVE equipment. Part No. 11-016940.
THERMAWAVE
11-016943
HARNESS ASSY,SPNR MTR PWR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,SPNR MTR PWR,P34. Compatible with THERMAWAVE equipment. Part No. 11-016943.
THERMAWAVE
11-016947
HARNESS ASSY, 24V, MTR DRVR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY, 24V, MTR DRVR, P34. Compatible with THERMAWAVE equipment. Part No. 11-016947.
THERMAWAVE
11-016949
HARNESS ASSY,PS,UPR DR,10P,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,PS,UPR DR,10P,P34. Compatible with THERMAWAVE equipment. Part No. 11-016949.
THERMAWAVE
11-016950
HARNESS ASSY,PS,UPR DR,12P,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,PS,UPR DR,12P,P34. Compatible with THERMAWAVE equipment. Part No. 11-016950.
THERMAWAVE
11-016951
HARNESS ASSY, PWR DIST/S, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY, PWR DIST/S, P34. Compatible with THERMAWAVE equipment. Part No. 11-016951.
THERMAWAVE
11-016953
HARNESS ASSY, AC IN, UPPR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY, AC IN, UPPR, P34. Compatible with THERMAWAVE equipment. Part No. 11-016953.
THERMAWAVE
11-016957
Harness Assy,MAIN EMO,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,MAIN EMO,P34. Compatible with THERMAWAVE equipment. Part No. 11-016957.
THERMAWAVE
11-016958
Harness Assembly, UV, Interlock, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assembly, UV, Interlock, P34. Compatible with THERMAWAVE equipment. Part No. 11-016958.
THERMAWAVE
11-016959
Harness Assy,INTRLCK Switch LOOP
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,INTRLCK Switch LOOP. Compatible with THERMAWAVE equipment. Part No. 11-016959.
THERMAWAVE
11-016985
Assy, Cable, AC IN, Lower, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, AC IN, Lower, P34. Compatible with THERMAWAVE equipment. Part No. 11-016985.
THERMAWAVE
11-016994
CABLE ASSY,PWR DR1,SHTR OUT,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PWR DR1,SHTR OUT,P3. Compatible with THERMAWAVE equipment. Part No. 11-016994.
THERMAWAVE
11-016996
CABLE ASSY, UV INTRLK, UPPR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, UV INTRLK, UPPR, P34. Compatible with THERMAWAVE equipment. Part No. 11-016996.
THERMAWAVE
11-016998
CABLE ASSY,5VDC,CNTRL INTF,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,5VDC,CNTRL INTF,P3. Compatible with THERMAWAVE equipment. Part No. 11-016998.
THERMAWAVE
11-017004
Cable Assembly, Spinner, RS232, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Spinner, RS232, P34. Compatible with THERMAWAVE equipment. Part No. 11-017004.
THERMAWAVE
11-017012
CABLE ASSY, 24VDC, SNS IN, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, 24VDC, SNS IN, P34. Compatible with THERMAWAVE equipment. Part No. 11-017012.
THERMAWAVE
11-017013
CABLE ASSY, 24V, HENE PS UPPR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, 24V, HENE PS UPPR, P34. Compatible with THERMAWAVE equipment. Part No. 11-017013.
THERMAWAVE
11-017014
Assy, Cable, DGTZR PS, Upr, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, DGTZR PS, Upr, P34. Compatible with THERMAWAVE equipment. Part No. 11-017014.
THERMAWAVE
11-017017
Cable Assembly, Stepper Motor, 15X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Stepper Motor, 15X, P34. Compatible with THERMAWAVE equipment. Part No. 11-017017.
THERMAWAVE
11-017018
Assy, Cable, Stepper Motor, 100X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Stepper Motor, 100X, P34. Compatible with THERMAWAVE equipment. Part No. 11-017018.
THERMAWAVE
11-017020
Cable Assembly, MM2, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, MM2, P34. Compatible with THERMAWAVE equipment. Part No. 11-017020.
THERMAWAVE
11-017021
Cable Assembly, White Light Shutter, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, White Light Shutter, P34. Compatible with THERMAWAVE equipment. Part No. 11-017021.
THERMAWAVE
11-017023
CABLE ASSY, LIM SW,IR/WL FLT,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, LIM SW,IR/WL FLT,P3. Compatible with THERMAWAVE equipment. Part No. 11-017023.
THERMAWAVE
11-017025
Assy, Cable, Limit Switch, UVSE, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Limit Switch, UVSE, P34. Compatible with THERMAWAVE equipment. Part No. 11-017025.
THERMAWAVE
11-017026
CABLE ASSY,DGTZR/WL,UV,P5,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,DGTZR/WL,UV,P5,P34. Compatible with THERMAWAVE equipment. Part No. 11-017026.
THERMAWAVE
11-017027
Assy, Cable, Digitizer/Tilt, P7, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Digitizer/Tilt, P7, P34. Compatible with THERMAWAVE equipment. Part No. 11-017027.
THERMAWAVE
11-017028
Assy, Cable, Autofocus Chopper
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Autofocus Chopper. Compatible with THERMAWAVE equipment. Part No. 11-017028.
THERMAWAVE
11-017035
Cable Assembly, Spinner Motor, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Spinner Motor, P34. Compatible with THERMAWAVE equipment. Part No. 11-017035.
THERMAWAVE
11-017037
CABLE ASSY, A/F DET, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, A/F DET, P34. Compatible with THERMAWAVE equipment. Part No. 11-017037.
THERMAWAVE
11-017039
CABLE ASSY,HENE P/S,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HENE P/S,P34. Compatible with THERMAWAVE equipment. Part No. 11-017039.
THERMAWAVE
11-017044
CABLE ASSY, COGNEX VIDEO IN,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, COGNEX VIDEO IN,P34. Compatible with THERMAWAVE equipment. Part No. 11-017044.
THERMAWAVE
11-017045
Assy, Cable, Cognex, MNTR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Cognex, MNTR, P34. Compatible with THERMAWAVE equipment. Part No. 11-017045.
THERMAWAVE
11-017046
Assy, Cable, NTSC Monitor, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, NTSC Monitor, P34. Compatible with THERMAWAVE equipment. Part No. 11-017046.
THERMAWAVE
11-017047
Cable Assembly,White Light SOURCE
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,White Light SOURCE. Compatible with THERMAWAVE equipment. Part No. 11-017047.
THERMAWAVE
11-017061
Assy, Cable, T/01, Tech-80, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, T/01, Tech-80, P34. Compatible with THERMAWAVE equipment. Part No. 11-017061.
THERMAWAVE
11-017062
Assy, Cable, I/02, Tech-80, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, I/02, Tech-80, P34. Compatible with THERMAWAVE equipment. Part No. 11-017062.
THERMAWAVE
11-017064
Cable Assembly, Power Supply, Upper/Lower, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Power Supply, Upper/Lower, P34. Compatible with THERMAWAVE equipment. Part No. 11-017064.
THERMAWAVE
11-017066
Cable Assembly,FLOPPY Driver,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,FLOPPY Driver,P34. Compatible with THERMAWAVE equipment. Part No. 11-017066.
THERMAWAVE
11-017067
Cable Assembly, LPT1, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, LPT1, P34. Compatible with THERMAWAVE equipment. Part No. 11-017067.
THERMAWAVE
11-017071
Cable Assembly,A/F DriverVR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,A/F DriverVR,P34. Compatible with THERMAWAVE equipment. Part No. 11-017071.
THERMAWAVE
11-017073
Cable Assembly,KEYBD,REAR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,KEYBD,REAR,P34. Compatible with THERMAWAVE equipment. Part No. 11-017073.
THERMAWAVE
11-017077
Cable Assembly, X-Encoder,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, X-Encoder,P34. Compatible with THERMAWAVE equipment. Part No. 11-017077.
THERMAWAVE
11-017091
Assy, Cable, AF Data Ext, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, AF Data Ext, P34. Compatible with THERMAWAVE equipment. Part No. 11-017091.
THERMAWAVE
11-017092
Assy, Cable, X-Enc Ext, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, X-Enc Ext, P34. Compatible with THERMAWAVE equipment. Part No. 11-017092.
THERMAWAVE
11-017093
Assy, Cable, Y-Enc Ext, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Y-Enc Ext, P34. Compatible with THERMAWAVE equipment. Part No. 11-017093.
THERMAWAVE
11-017094
Assy, Cable, Y-Mtr Lim Ex, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Y-Mtr Lim Ex, P34. Compatible with THERMAWAVE equipment. Part No. 11-017094.
THERMAWAVE
11-017095
Assy, Cable, Stage Brk Ext, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Stage Brk Ext, P34. Compatible with THERMAWAVE equipment. Part No. 11-017095.
THERMAWAVE
11-017096
Assy, Cable, Theta Motor, Limit Ext
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Theta Motor, Limit Ext. Compatible with THERMAWAVE equipment. Part No. 11-017096.
THERMAWAVE
11-017195
Cable Assembly, INTERCONN, DGTZR Power
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, INTERCONN, DGTZR Power. Compatible with THERMAWAVE equipment. Part No. 11-017195.
THERMAWAVE
11-017211
Assy, Harness, DC Fan - 2, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Harness, DC Fan - 2, P34. Compatible with THERMAWAVE equipment. Part No. 11-017211.
THERMAWAVE
11-017218
Assy, Harness, IPB/IPC, UV, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Harness, IPB/IPC, UV, P34. Compatible with THERMAWAVE equipment. Part No. 11-017218.
THERMAWAVE
11-017220
CABLE ASSY,CAMERA,PULNX,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CAMERA,PULNX,P34. Compatible with THERMAWAVE equipment. Part No. 11-017220.
THERMAWAVE
11-017280
Assy, Cable, Limit Switch, Dip Mir, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Limit Switch, Dip Mir, P34. Compatible with THERMAWAVE equipment. Part No. 11-017280.
THERMAWAVE
11-017626
Assy, Cable, Valve, Ctrl, Upr, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Valve, Ctrl, Upr, P34. Compatible with THERMAWAVE equipment. Part No. 11-017626.
THERMAWAVE
11-017682
Assy, Harness, OPT Sensor, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Harness, OPT Sensor, P34. Compatible with THERMAWAVE equipment. Part No. 11-017682.
THERMAWAVE
11-017982
CABLE ASSY,12AWG,ST,FQD,6FT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,12AWG,ST,FQD,6FT. Compatible with THERMAWAVE equipment. Part No. 11-017982.
THERMAWAVE
11-018017
Cable Assembly,Auto Focus LATERAL CELL,HA
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Auto Focus LATERAL CELL,HA. Compatible with THERMAWAVE equipment. Part No. 11-018017.
THERMAWAVE
11-018066
CABLE ASSY, CASS PL TO INTF, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, CASS PL TO INTF, P34. Compatible with THERMAWAVE equipment. Part No. 11-018066.
THERMAWAVE
11-018107
CABLE ASSY,SPINNER MTR,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SPINNER MTR,P35. Compatible with THERMAWAVE equipment. Part No. 11-018107.
THERMAWAVE
11-018108
CABLE ASSY,OPT SPIN ENC,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,OPT SPIN ENC,P35. Compatible with THERMAWAVE equipment. Part No. 11-018108.
THERMAWAVE
11-018114
CABLE ASSY,COGNEX VIDEO IN
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,COGNEX VIDEO IN. Compatible with THERMAWAVE equipment. Part No. 11-018114.
THERMAWAVE
11-018115
CABLE ASSY,COGNEX MONITOR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,COGNEX MONITOR. Compatible with THERMAWAVE equipment. Part No. 11-018115.
THERMAWAVE
11-018117
CABLE ASSY,WHT LT,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT,P35. Compatible with THERMAWAVE equipment. Part No. 11-018117.
THERMAWAVE
11-018129
Assy, Cable, I/01, Tech-80, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, I/01, Tech-80, T41. Compatible with THERMAWAVE equipment. Part No. 11-018129.
THERMAWAVE
11-018130
Assy, Cable, I/02, Tech-80, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, I/02, Tech-80, T41. Compatible with THERMAWAVE equipment. Part No. 11-018130.
THERMAWAVE
11-018151
HARNESS ASSY,OPT SENS,T41/P35
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,OPT SENS,T41/P35. Compatible with THERMAWAVE equipment. Part No. 11-018151.
THERMAWAVE
11-018182
CABLE ASSY,DATA AUTOFOCUS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,DATA AUTOFOCUS. Compatible with THERMAWAVE equipment. Part No. 11-018182.
THERMAWAVE
11-018186
CABLE ASSY,HTR/THMS,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HTR/THMS,T41. Compatible with THERMAWAVE equipment. Part No. 11-018186.
THERMAWAVE
11-018187
Cable Assembly,Power Z Stage,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Power Z Stage,P34. Compatible with THERMAWAVE equipment. Part No. 11-018187.
THERMAWAVE
11-018188
Cable Assembly,Z-MTR/PZT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Z-MTR/PZT. Compatible with THERMAWAVE equipment. Part No. 11-018188.
THERMAWAVE
11-018189
Cable Assembly, Driver Board, Sensor/LED
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Driver Board, Sensor/LED. Compatible with THERMAWAVE equipment. Part No. 11-018189.
THERMAWAVE
11-018328
CABLE ASSY,R-MOD DET,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,R-MOD DET,T41. Compatible with THERMAWAVE equipment. Part No. 11-018328.
THERMAWAVE
11-018333
Cable Assembly,Optic PL SDB,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Optic PL SDB,T41. Compatible with THERMAWAVE equipment. Part No. 11-018333.
THERMAWAVE
11-018385
CABLE ASSY,Y-MOTOR LIMITS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-MOTOR LIMITS. Compatible with THERMAWAVE equipment. Part No. 11-018385.
THERMAWAVE
11-018387
CABLE ASSY,REF ENCL/24V PWR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,REF ENCL/24V PWR. Compatible with THERMAWAVE equipment. Part No. 11-018387.
THERMAWAVE
11-018393
HARNESS ASSY,SENSOR,PNEU PNL
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,SENSOR,PNEU PNL. Compatible with THERMAWAVE equipment. Part No. 11-018393.
THERMAWAVE
11-018409
Cable Assembly,Robot COM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Robot COM,P34. Compatible with THERMAWAVE equipment. Part No. 11-018409.
THERMAWAVE
11-018417
CABLE ASSY, BLOWER PWR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, BLOWER PWR, P34. Compatible with THERMAWAVE equipment. Part No. 11-018417.
THERMAWAVE
11-018422
CABLE ASSY,OPT INTFC 3,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,OPT INTFC 3,P34. Compatible with THERMAWAVE equipment. Part No. 11-018422.
THERMAWAVE
11-018423
Cable Assembly, Tech-80 IPA, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Tech-80 IPA, P34. Compatible with THERMAWAVE equipment. Part No. 11-018423.
THERMAWAVE
11-018441
Cable Assembly, Ground, Optics Plate, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Ground, Optics Plate, P34. Compatible with THERMAWAVE equipment. Part No. 11-018441.
THERMAWAVE
11-018445
CABLE ASSY,100X HTR/THRM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,100X HTR/THRM,P34. Compatible with THERMAWAVE equipment. Part No. 11-018445.
THERMAWAVE
11-018446
Cable Assembly, PL, Heater/Thermal, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, PL, Heater/Thermal, P34. Compatible with THERMAWAVE equipment. Part No. 11-018446.
THERMAWAVE
11-018447
Cable Assy, Optics Plate, Spin Encoder, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Optics Plate, Spin Encoder, P34. Compatible with THERMAWAVE equipment. Part No. 11-018447.
THERMAWAVE
11-018448
Cable Assembly, COM 2
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, COM 2. Compatible with THERMAWAVE equipment. Part No. 11-018448.
THERMAWAVE
11-018449
Cable Assembly, DAB Spin Enconder
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, DAB Spin Enconder. Compatible with THERMAWAVE equipment. Part No. 11-018449.
THERMAWAVE
11-018450
CABLE ASSY,MTF/UPR BREAKOUT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MTF/UPR BREAKOUT. Compatible with THERMAWAVE equipment. Part No. 11-018450.
THERMAWAVE
11-018502
CABLE ASSY, PWR/MON, UPPR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, PWR/MON, UPPR, P34. Compatible with THERMAWAVE equipment. Part No. 11-018502.
THERMAWAVE
11-018503
Assy, Cable, Interlock, Power, Upper, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Interlock, Power, Upper, P34. Compatible with THERMAWAVE equipment. Part No. 11-018503.
THERMAWAVE
11-018504
Assy, Cable, Vextra, Drawer, Upper, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Vextra, Drawer, Upper, P34. Compatible with THERMAWAVE equipment. Part No. 11-018504.
THERMAWAVE
11-018506
CABLE ASSY,SHUTTER CTL,UPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SHUTTER CTL,UPR,P34. Compatible with THERMAWAVE equipment. Part No. 11-018506.
THERMAWAVE
11-018507
CABLE ASSY, LT TOWER CTL, UPPR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, LT TOWER CTL, UPPR. Compatible with THERMAWAVE equipment. Part No. 11-018507.
THERMAWAVE
11-018509
CABLE ASSY,SPIN ENC,UPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SPIN ENC,UPR,P34. Compatible with THERMAWAVE equipment. Part No. 11-018509.
THERMAWAVE
11-018510
CABLE ASSY,X-MTR/LIM,UPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X-MTR/LIM,UPR,P34. Compatible with THERMAWAVE equipment. Part No. 11-018510.
THERMAWAVE
11-018511
Assy, Cable, Y-Motor/Limit, Upper, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Y-Motor/Limit, Upper, P34. Compatible with THERMAWAVE equipment. Part No. 11-018511.
THERMAWAVE
11-018515
Assy, Cable, Fan, Power, Upper, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Fan, Power, Upper, P34. Compatible with THERMAWAVE equipment. Part No. 11-018515.
THERMAWAVE
11-018557
CABLE ASSY,Y DRVR,LIM,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y DRVR,LIM,T41. Compatible with THERMAWAVE equipment. Part No. 11-018557.
THERMAWAVE
11-018581
Assy, Cable, Therm, Lower Drawer, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Therm, Lower Drawer, P34. Compatible with THERMAWAVE equipment. Part No. 11-018581.
THERMAWAVE
11-018582
Assy, Harness, +/-15X, MFB, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Harness, +/-15X, MFB, P34. Compatible with THERMAWAVE equipment. Part No. 11-018582.
THERMAWAVE
11-018586
Assy, Cable, Video Power, Lower Drawer, P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Video Power, Lower Drawer, P3. Compatible with THERMAWAVE equipment. Part No. 11-018586.
THERMAWAVE
11-018730
CABLE ASSY,X-ENC,UPR DRW,T4
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X-ENC,UPR DRW,T4. Compatible with THERMAWAVE equipment. Part No. 11-018730.
THERMAWAVE
11-018732
CABLE ASSY,X/Y MTR/LIM,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X/Y MTR/LIM,T41. Compatible with THERMAWAVE equipment. Part No. 11-018732.
THERMAWAVE
11-018733
CABLE ASSY,Y-ENC,UPR DWR,T4
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-ENC,UPR DWR,T4. Compatible with THERMAWAVE equipment. Part No. 11-018733.
THERMAWAVE
11-018800
Assy, Cable, Stepper Motor, 5X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Stepper Motor, 5X, P34. Compatible with THERMAWAVE equipment. Part No. 11-018800.
THERMAWAVE
11-018826
Cable ASSY, LIM SW, 100X, LXC
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable ASSY, LIM SW, 100X, LXC. Compatible with THERMAWAVE equipment. Part No. 11-018826.
THERMAWAVE
11-018830
CABLE ASSY,WHT LT AC PWR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT AC PWR,P34. Compatible with THERMAWAVE equipment. Part No. 11-018830.
THERMAWAVE
11-018906
Cable Assembly,DAB DGTZR DATA,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,DAB DGTZR DATA,P34. Compatible with THERMAWAVE equipment. Part No. 11-018906.
THERMAWAVE
11-018924
CABLE ASSY, VIDEO, PWR, LCD, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, VIDEO, PWR, LCD, P34. Compatible with THERMAWAVE equipment. Part No. 11-018924.
THERMAWAVE
11-018925
CABLE ASSY, VIDEO, SIG, LCD, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, VIDEO, SIG, LCD, P34. Compatible with THERMAWAVE equipment. Part No. 11-018925.
THERMAWAVE
11-019129
Assy, Cable, Opt Interface, 3, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Opt Interface, 3, P34. Compatible with THERMAWAVE equipment. Part No. 11-019129.
THERMAWAVE
11-019173
HARNESS ASSY,VALUE CTRL,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,VALUE CTRL,T41. Compatible with THERMAWAVE equipment. Part No. 11-019173.
THERMAWAVE
11-019319
CABLE ASSY,MTR PWR,UPR,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MTR PWR,UPR,T41. Compatible with THERMAWAVE equipment. Part No. 11-019319.
High-quality nan for THERMAWAVE CMP tool. Ina, CABLE ASSY,TWR,CNTRL,UP,T41 repl.by 11-108414. Compatible with THERMAWAVE equipment. Part No. 11-019329.
THERMAWAVE
11-019469
CABLE ASSY,IPA,TECH80,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,IPA,TECH80,T41. Compatible with THERMAWAVE equipment. Part No. 11-019469.
THERMAWAVE
11-019631
Cable Assembly, Indexer Power, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Indexer Power, P34. Compatible with THERMAWAVE equipment. Part No. 11-019631.
THERMAWAVE
11-019633
Assy, Cable, Indexer, Power, Lower
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Indexer, Power, Lower. Compatible with THERMAWAVE equipment. Part No. 11-019633.
THERMAWAVE
11-019635
Cable Assembly,Indexer1 SECS, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Indexer1 SECS, P34. Compatible with THERMAWAVE equipment. Part No. 11-019635.
THERMAWAVE
11-019636
CABLE ASSY,INDEXER2 SECS,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,INDEXER2 SECS,P34. Compatible with THERMAWAVE equipment. Part No. 11-019636.
THERMAWAVE
11-019641
CABLE ASSY,LT TWR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR,P34. Compatible with THERMAWAVE equipment. Part No. 11-019641.
THERMAWAVE
11-019677
CABLE ASSY, ;PT1 LWR DWR, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, ;PT1 LWR DWR, T41. Compatible with THERMAWAVE equipment. Part No. 11-019677.
THERMAWAVE
11-019684
CABLE ASSY,IPC,TECH80,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,IPC,TECH80,T41. Compatible with THERMAWAVE equipment. Part No. 11-019684.
THERMAWAVE
11-019685
CABLE ASSY,IPD,TECH80,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,IPD,TECH80,T41. Compatible with THERMAWAVE equipment. Part No. 11-019685.
THERMAWAVE
11-019800
CABLE ASSY,X-ENCODER,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X-ENCODER,P35. Compatible with THERMAWAVE equipment. Part No. 11-019800.
THERMAWAVE
11-019803
CABLE ASSY, Y-MTR LIM, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, Y-MTR LIM, P35. Compatible with THERMAWAVE equipment. Part No. 11-019803.
THERMAWAVE
11-019804
CABLE ASSY, THETA MTR, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, THETA MTR, P35. Compatible with THERMAWAVE equipment. Part No. 11-019804.
THERMAWAVE
11-019805
CABLE ASSY, X-MTR LIM, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, X-MTR LIM, P35. Compatible with THERMAWAVE equipment. Part No. 11-019805.
THERMAWAVE
11-019806
CABLE ASSY,Y-ENCODER,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-ENCODER,P35. Compatible with THERMAWAVE equipment. Part No. 11-019806.
THERMAWAVE
11-019867
CABLE ASSY, ROBOT COM, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, ROBOT COM, P35. Compatible with THERMAWAVE equipment. Part No. 11-019867.
THERMAWAVE
11-019869
Cable Assy, Dab Spin Encoder
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Dab Spin Encoder. Compatible with THERMAWAVE equipment. Part No. 11-019869.
THERMAWAVE
11-019870
CABLE ASSY,NTSC MONITOR,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,NTSC MONITOR,P35. Compatible with THERMAWAVE equipment. Part No. 11-019870.
THERMAWAVE
11-019877
CABLE ASSY,MTF/UPR BRKOUT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MTF/UPR BRKOUT. Compatible with THERMAWAVE equipment. Part No. 11-019877.
THERMAWAVE
11-019912
CABLE ASSY,CAMERA,PULNX,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CAMERA,PULNX,P35. Compatible with THERMAWAVE equipment. Part No. 11-019912.
THERMAWAVE
11-019986
Assy, Cable, X LMT/MTR, OP5200
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, X LMT/MTR, OP5200. Compatible with THERMAWAVE equipment. Part No. 11-019986.
THERMAWAVE
11-019987
Assy, Cable, Y LMT/MTR, OP5200
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Y LMT/MTR, OP5200. Compatible with THERMAWAVE equipment. Part No. 11-019987.
THERMAWAVE
11-020141
Cable Assy, LIM SW, Lens Exch, 5X
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, LIM SW, Lens Exch, 5X. Compatible with THERMAWAVE equipment. Part No. 11-020141.
THERMAWAVE
11-020455
Cable Assembly,Optic,Switch,THETA,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Optic,Switch,THETA,OP2600. Compatible with THERMAWAVE equipment. Part No. 11-020455.
THERMAWAVE
11-020558
Cable Assembly, Limit Switch, Lens Exchange P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Limit Switch, Lens Exchange P34. Compatible with THERMAWAVE equipment. Part No. 11-020558.
THERMAWAVE
11-020565
CABLE ASSY, THEAT MTR / LIM EX
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, THEAT MTR / LIM EX. Compatible with THERMAWAVE equipment. Part No. 11-020565.
THERMAWAVE
11-020739
CABLE ASSY, Y-STG LIMITS,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, Y-STG LIMITS,T41. Compatible with THERMAWAVE equipment. Part No. 11-020739.
THERMAWAVE
11-020740
CABLE ASSY,X-STG MTR/TAC/LM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X-STG MTR/TAC/LM. Compatible with THERMAWAVE equipment. Part No. 11-020740.
THERMAWAVE
11-020742
CABLE ASSY,X STAGE ENCD
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X STAGE ENCD. Compatible with THERMAWAVE equipment. Part No. 11-020742.
THERMAWAVE
11-020743
CABLE ASSY, Y-STG ENCODER, T4
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, Y-STG ENCODER, T4. Compatible with THERMAWAVE equipment. Part No. 11-020743.
THERMAWAVE
11-020783
CABLE ASSY,Y-STG LP AF DATA
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-STG LP AF DATA. Compatible with THERMAWAVE equipment. Part No. 11-020783.
THERMAWAVE
11-020784
CABLE ASSY,Y-STG LP 24V PS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-STG LP 24V PS. Compatible with THERMAWAVE equipment. Part No. 11-020784.
THERMAWAVE
11-020785
CABLE ASSY,Y-STG LP THTAMTR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y-STG LP THTAMTR. Compatible with THERMAWAVE equipment. Part No. 11-020785.
THERMAWAVE
11-020786
CABLE ASSY, Y-STG LP HTR / THM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, Y-STG LP HTR / THM. Compatible with THERMAWAVE equipment. Part No. 11-020786.
THERMAWAVE
11-020787
Cable Assy, Y - Stage LP Y ENC
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Y - Stage LP Y ENC. Compatible with THERMAWAVE equipment. Part No. 11-020787.
THERMAWAVE
11-020789
Cable Assembly, X - Stage LP Y MTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, X - Stage LP Y MTR. Compatible with THERMAWAVE equipment. Part No. 11-020789.
THERMAWAVE
11-020790
CABLE ASSY .X-STG LP X ENC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY .X-STG LP X ENC. Compatible with THERMAWAVE equipment. Part No. 11-020790.
THERMAWAVE
11-020791
CABLE ASSY,X-STG LP Y LIM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X-STG LP Y LIM. Compatible with THERMAWAVE equipment. Part No. 11-020791.
THERMAWAVE
11-020846
CABLE ASSY,STPRGIG ENCODER,EXT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,STPRGIG ENCODER,EXT. Compatible with THERMAWAVE equipment. Part No. 11-020846.
THERMAWAVE
11-020913
Cable Assembly,LIM Switch,Lens EXCH,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,LIM Switch,Lens EXCH,P3. Compatible with THERMAWAVE equipment. Part No. 11-020913.
THERMAWAVE
11-020941
CABLE ASSY,LT TWR,PWR DR,UP
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR,PWR DR,UP. Compatible with THERMAWAVE equipment. Part No. 11-020941.
THERMAWAVE
11-021004
CABLE ASSY, DATA AUTOFOCUS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, DATA AUTOFOCUS. Compatible with THERMAWAVE equipment. Part No. 11-021004.
THERMAWAVE
11-021005
CABLE ASSY, PWR Z-STAGE, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, PWR Z-STAGE, T41. Compatible with THERMAWAVE equipment. Part No. 11-021005.
THERMAWAVE
11-021006
CABLE ASSY, DR BD, SENSOR/LED
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, DR BD, SENSOR/LED. Compatible with THERMAWAVE equipment. Part No. 11-021006.
THERMAWAVE
11-021042
Cable Assembly,SCSI HDDriver,JAZ,CD
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SCSI HDDriver,JAZ,CD. Compatible with THERMAWAVE equipment. Part No. 11-021042.
THERMAWAVE
11-021068
Cable Assembly,Sense,+5V,NT,P46
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Sense,+5V,NT,P46. Compatible with THERMAWAVE equipment. Part No. 11-021068.
THERMAWAVE
11-021070
CABLE ASSY,PWR,USER INTF,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PWR,USER INTF,NT. Compatible with THERMAWAVE equipment. Part No. 11-021070.
THERMAWAVE
11-021116
HARNESS ASSY, DC PWR, BKPL, NT
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY, DC PWR, BKPL, NT. Compatible with THERMAWAVE equipment. Part No. 11-021116.
THERMAWAVE
11-021137
Cable Assembly,0-BUSS,NT,P46
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,0-BUSS,NT,P46. Compatible with THERMAWAVE equipment. Part No. 11-021137.
THERMAWAVE
11-021164
Cable Assembly,INT,ETHERNET,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INT,ETHERNET,NT. Compatible with THERMAWAVE equipment. Part No. 11-021164.
THERMAWAVE
11-021184
CABLE ASSY, ADPT, THETA MTR / LIM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, ADPT, THETA MTR / LIM. Compatible with THERMAWAVE equipment. Part No. 11-021184.
THERMAWAVE
11-021185
CABLE ASSY,ADPT,XSTG MTR/LM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ADPT,XSTG MTR/LM. Compatible with THERMAWAVE equipment. Part No. 11-021185.
THERMAWAVE
11-021186
CABLE ASSY, ADPT,YSTG MTR/LM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, ADPT,YSTG MTR/LM. Compatible with THERMAWAVE equipment. Part No. 11-021186.
THERMAWAVE
11-021187
CABLE ASSY,ADPT,REF 24V,ZST
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ADPT,REF 24V,ZST. Compatible with THERMAWAVE equipment. Part No. 11-021187.
THERMAWAVE
11-021194
Cable Assembly,THETA MTR/SENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,THETA MTR/SENSOR. Compatible with THERMAWAVE equipment. Part No. 11-021194.
THERMAWAVE
11-021207
Cable Assembly,KYBD,NT,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,KYBD,NT,OP52XX. Compatible with THERMAWAVE equipment. Part No. 11-021207.
THERMAWAVE
11-021208
Cable Assembly,SCSI,NT,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SCSI,NT,OP52XX. Compatible with THERMAWAVE equipment. Part No. 11-021208.
THERMAWAVE
11-021209
Cable Assembly, SCSI, CD/Jaz, NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, SCSI, CD/Jaz, NT. Compatible with THERMAWAVE equipment. Part No. 11-021209.
THERMAWAVE
11-021210
Cable Assembly,SCSI,DWR1,NT,OP5
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,SCSI,DWR1,NT,OP5. Compatible with THERMAWAVE equipment. Part No. 11-021210.
THERMAWAVE
11-021211
Cable Assembly,MOUSE,NT,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,MOUSE,NT,OP52XX. Compatible with THERMAWAVE equipment. Part No. 11-021211.
THERMAWAVE
11-021256
Assy, Cable, Coarse 2, Near/Far, LM
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Cable, Coarse 2, Near/Far, LM. Compatible with THERMAWAVE equipment. Part No. 11-021256.
THERMAWAVE
11-021340
HARNESS ASSY,UV CAN INTLK,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,UV CAN INTLK,P34. Compatible with THERMAWAVE equipment. Part No. 11-021340.
THERMAWAVE
11-021341
Cable Assembly, Floppy/Drive Power, Drawer 1
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Floppy/Drive Power, Drawer 1. Compatible with THERMAWAVE equipment. Part No. 11-021341.
THERMAWAVE
11-021342
CABLE ASSY,FLPY/DR PWR,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,FLPY/DR PWR,NT. Compatible with THERMAWAVE equipment. Part No. 11-021342.
THERMAWAVE
11-021371
Cable Assembly,RESET,FRNT Panel,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,RESET,FRNT Panel,NT. Compatible with THERMAWAVE equipment. Part No. 11-021371.
THERMAWAVE
11-021372
Cable Assembly,HD Power,DWR1,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,HD Power,DWR1,NT. Compatible with THERMAWAVE equipment. Part No. 11-021372.
THERMAWAVE
11-021389
Cable Assembly,COM1,Driver,CMPTR,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,COM1,Driver,CMPTR,NT. Compatible with THERMAWAVE equipment. Part No. 11-021389.
THERMAWAVE
11-021435
Cable Assembly,INT,ETHERNET,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,INT,ETHERNET,NT. Compatible with THERMAWAVE equipment. Part No. 11-021435.
THERMAWAVE
11-021474
CABLE ASSY, BUFFER,LPT1,P32
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, BUFFER,LPT1,P32. Compatible with THERMAWAVE equipment. Part No. 11-021474.
THERMAWAVE
11-021554
Cable Assembly,Sense,+5V,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Sense,+5V,NT. Compatible with THERMAWAVE equipment. Part No. 11-021554.
THERMAWAVE
11-021555
Cable Assembly,EXT,MOUSE,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,EXT,MOUSE,NT. Compatible with THERMAWAVE equipment. Part No. 11-021555.
THERMAWAVE
11-021610
CABLE ASSY,X STG LP,X-ENC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X STG LP,X-ENC. Compatible with THERMAWAVE equipment. Part No. 11-021610.
THERMAWAVE
11-021611
CABLE ASSY,Y STG LP,Y-ENC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,Y STG LP,Y-ENC. Compatible with THERMAWAVE equipment. Part No. 11-021611.
THERMAWAVE
11-021664
Obs, Cable Assembly,VGA SIGNAL,LCD repl. by 11-108367
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs, Cable Assembly,VGA SIGNAL,LCD repl. by 11-108367. Compatible with THERMAWAVE equipment. Part No. 11-021664.
THERMAWAVE
11-021736
Cable Assembly,Video EXT,NT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Video EXT,NT,P34. Compatible with THERMAWAVE equipment. Part No. 11-021736.
THERMAWAVE
11-021757
Harness Assy,MAIN EMO,NT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Harness Assy,MAIN EMO,NT,P34. Compatible with THERMAWAVE equipment. Part No. 11-021757.
THERMAWAVE
11-021758
CABLE ASSY,EMO SW,NT,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EMO SW,NT,OP52XX. Compatible with THERMAWAVE equipment. Part No. 11-021758.
THERMAWAVE
11-021777
CABLE ASSY,IONIZER,QUADBAR 12F
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,IONIZER,QUADBAR 12F. Compatible with THERMAWAVE equipment. Part No. 11-021777.
THERMAWAVE
11-021780
CABLE ASSY,T-BALL SIGNAL,3290
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,T-BALL SIGNAL,3290. Compatible with THERMAWAVE equipment. Part No. 11-021780.
THERMAWAVE
11-021781
CABLE ASSY,EMO SW,OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EMO SW,OP3290. Compatible with THERMAWAVE equipment. Part No. 11-021781.
THERMAWAVE
11-021795
Cable Assembly,VID Power,LWR Driver,P
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,VID Power,LWR Driver,P. Compatible with THERMAWAVE equipment. Part No. 11-021795.
THERMAWAVE
11-021816
Cable Assembly, Trackball, 45 Degree, D9
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Trackball, 45 Degree, D9. Compatible with THERMAWAVE equipment. Part No. 11-021816.
THERMAWAVE
11-021855
CABLE ASSY,DAB DGTZR DATA
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,DAB DGTZR DATA. Compatible with THERMAWAVE equipment. Part No. 11-021855.
THERMAWAVE
11-021901
Cable Assembly,Laser Driver,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Laser Driver,P34. Compatible with THERMAWAVE equipment. Part No. 11-021901.
THERMAWAVE
11-022026
CABLE ASSY,SCSI,INTCON,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SCSI,INTCON,P35. Compatible with THERMAWAVE equipment. Part No. 11-022026.
THERMAWAVE
11-022027
CABLE ASSY,LT TWR2,U/I,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR2,U/I,P35. Compatible with THERMAWAVE equipment. Part No. 11-022027.
THERMAWAVE
11-022029
CABLE ASSY,MOUSE,INTCON,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MOUSE,INTCON,P35. Compatible with THERMAWAVE equipment. Part No. 11-022029.
THERMAWAVE
11-022031
CABLE ASSY,LT TWR,INTCON,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR,INTCON,P35. Compatible with THERMAWAVE equipment. Part No. 11-022031.
THERMAWAVE
11-022034
CABLE ASSY,VGA,INTCON,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VGA,INTCON,P35. Compatible with THERMAWAVE equipment. Part No. 11-022034.
THERMAWAVE
11-022035
Cable Assy, Video OUT1, U/I, P
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Video OUT1, U/I, P. Compatible with THERMAWAVE equipment. Part No. 11-022035.
THERMAWAVE
11-022039
CABLE ASSY,SCSI,USER INTF,P
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SCSI,USER INTF,P. Compatible with THERMAWAVE equipment. Part No. 11-022039.
THERMAWAVE
11-022040
CABLE ASSY,FLOPPY,U/I,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,FLOPPY,U/I,P35. Compatible with THERMAWAVE equipment. Part No. 11-022040.
THERMAWAVE
11-022042
CABLE ASSY,NTSC,USER INTFC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,NTSC,USER INTFC. Compatible with THERMAWAVE equipment. Part No. 11-022042.
THERMAWAVE
11-022044
CABLE ASSY,LT TWR1,U/I,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LT TWR1,U/I,P35. Compatible with THERMAWAVE equipment. Part No. 11-022044.
THERMAWAVE
11-022162
CABLE ASSY,A-B SW,REAR PNL
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,A-B SW,REAR PNL. Compatible with THERMAWAVE equipment. Part No. 11-022162.
THERMAWAVE
11-022175
CABLE ASSY,LPT1,LWR DR,NT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LPT1,LWR DR,NT,P34. Compatible with THERMAWAVE equipment. Part No. 11-022175.
THERMAWAVE
11-022360
CABLE ASSY,EMO INTFC,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EMO INTFC,DES. Compatible with THERMAWAVE equipment. Part No. 11-022360.
THERMAWAVE
11-022431
CABLE ASSY,PWR,+12V,LCD/JAM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PWR,+12V,LCD/JAM. Compatible with THERMAWAVE equipment. Part No. 11-022431.
THERMAWAVE
11-022447
Cable Assembly, Room Temperature Sensor, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, Room Temperature Sensor, P34. Compatible with THERMAWAVE equipment. Part No. 11-022447.
THERMAWAVE
11-022589
Cable Assembly, E84 COMM, LDR1
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, E84 COMM, LDR1. Compatible with THERMAWAVE equipment. Part No. 11-022589.
THERMAWAVE
11-022593
Cable Assembly, DC Power, LDR1, ME
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, DC Power, LDR1, ME. Compatible with THERMAWAVE equipment. Part No. 11-022593.
THERMAWAVE
11-022594
Cable Assembly, DC Power, LDR2, ME
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly, DC Power, LDR2, ME. Compatible with THERMAWAVE equipment. Part No. 11-022594.
THERMAWAVE
11-022618
CABLE ASSY,CTRLS2,U/I,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CTRLS2,U/I,P35. Compatible with THERMAWAVE equipment. Part No. 11-022618.
THERMAWAVE
11-022620
CABLE ASSY,VIDEO OUT2,U/I,P
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VIDEO OUT2,U/I,P. Compatible with THERMAWAVE equipment. Part No. 11-022620.
THERMAWAVE
11-022778
CABLE ASSY,E84 DATA2,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,E84 DATA2,P35. Compatible with THERMAWAVE equipment. Part No. 11-022778.
THERMAWAVE
11-022854
CABLE ASSY,WHT LT PS,OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT PS,OP5XXX. Compatible with THERMAWAVE equipment. Part No. 11-022854.
THERMAWAVE
11-023198
CABLE ASSY,GND,LSR DR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,GND,LSR DR,P34. Compatible with THERMAWAVE equipment. Part No. 11-023198.
THERMAWAVE
11-023283
CABLE ASSY, LCD,UPR,+12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, LCD,UPR,+12VDC. Compatible with THERMAWAVE equipment. Part No. 11-023283.
THERMAWAVE
11-023284
CABLE ASSY, LCD,LWR,+12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, LCD,LWR,+12VDC. Compatible with THERMAWAVE equipment. Part No. 11-023284.
THERMAWAVE
11-023420
CABLE ASSY,WHT LT,CNTRL,AST
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT,CNTRL,AST. Compatible with THERMAWAVE equipment. Part No. 11-023420.
THERMAWAVE
11-023616
CABLE ASSY,HTR OUT TMP TC8
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HTR OUT TMP TC8. Compatible with THERMAWAVE equipment. Part No. 11-023616.
THERMAWAVE
11-023860
Cable Assy, Crd, Pwr, 12Awg, UL
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Crd, Pwr, 12Awg, UL. Compatible with THERMAWAVE equipment. Part No. 11-023860.
THERMAWAVE
11-024376
CABLE ASSY,VIDEO,COG 8000
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VIDEO,COG 8000. Compatible with THERMAWAVE equipment. Part No. 11-024376.
THERMAWAVE
11-024379
Obs. Cable Assy,NTSC,Camera repl. by 11-108366
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Cable Assy,NTSC,Camera repl. by 11-108366. Compatible with THERMAWAVE equipment. Part No. 11-024379.
THERMAWAVE
11-024380
CABLE ASSY,VGA,CAMERA
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VGA,CAMERA. Compatible with THERMAWAVE equipment. Part No. 11-024380.
THERMAWAVE
11-024383
CABLE ASSY,VIDEO OUT 2,U/I
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VIDEO OUT 2,U/I. Compatible with THERMAWAVE equipment. Part No. 11-024383.
THERMAWAVE
11-024384
CABLE ASSY,VGA,INTCON
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VGA,INTCON. Compatible with THERMAWAVE equipment. Part No. 11-024384.
THERMAWAVE
11-025152
CABLE ASSY, SGL FLP/PWR,DWR1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, SGL FLP/PWR,DWR1. Compatible with THERMAWAVE equipment. Part No. 11-025152.
THERMAWAVE
11-025417
CABLE ASSY,CID,LOAD PORT 1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CID,LOAD PORT 1. Compatible with THERMAWAVE equipment. Part No. 11-025417.
THERMAWAVE
11-025418
CABLE ASSY,LCD/CID PWR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LCD/CID PWR. Compatible with THERMAWAVE equipment. Part No. 11-025418.
THERMAWAVE
11-025528
CABLE ASSY,CID,INTCON,LP1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CID,INTCON,LP1. Compatible with THERMAWAVE equipment. Part No. 11-025528.
THERMAWAVE
11-025529
CABLE ASSY,CID,INTCON,LP2
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,CID,INTCON,LP2. Compatible with THERMAWAVE equipment. Part No. 11-025529.
THERMAWAVE
11-025619
HARNESS ASSY,SNSR/IO,PNEU PNL
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,SNSR/IO,PNEU PNL. Compatible with THERMAWAVE equipment. Part No. 11-025619.
THERMAWAVE
11-025622
CABLE ASSY,RS232,RFID1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,RS232,RFID1. Compatible with THERMAWAVE equipment. Part No. 11-025622.
THERMAWAVE
11-025623
CABLE ASSY,RS232,RFID2
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,RS232,RFID2. Compatible with THERMAWAVE equipment. Part No. 11-025623.
THERMAWAVE
11-025861
CABLE ASSY,LIM SW,DIPR 1,L3
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LIM SW,DIPR 1,L3. Compatible with THERMAWAVE equipment. Part No. 11-025861.
THERMAWAVE
11-026957
CABLE ASSY,EXTENDER,FLOPPY
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EXTENDER,FLOPPY. Compatible with THERMAWAVE equipment. Part No. 11-026957.
THERMAWAVE
11-027012
CABLE ASSY,HTR,PWR IN,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HTR,PWR IN,DES. Compatible with THERMAWAVE equipment. Part No. 11-027012.
THERMAWAVE
11-027213
CABLE ASSY, AC, PWR,LCD
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY, AC, PWR,LCD. Compatible with THERMAWAVE equipment. Part No. 11-027213.
THERMAWAVE
11-027604
SF,CABLE ASSY,IRID2
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,CABLE ASSY,IRID2. Compatible with THERMAWAVE equipment. Part No. 11-027604.
THERMAWAVE
11-027606
SF,CABLE ASSY,IRID1
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,CABLE ASSY,IRID1. Compatible with THERMAWAVE equipment. Part No. 11-027606.
THERMAWAVE
11-028261
CABLE ASSY,TEMP CNTRL,TC1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,TEMP CNTRL,TC1. Compatible with THERMAWAVE equipment. Part No. 11-028261.
THERMAWAVE
11-028715
CABLE ASSY,KYBD2,U/I
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,KYBD2,U/I. Compatible with THERMAWAVE equipment. Part No. 11-028715.
THERMAWAVE
11-028720
CABLE ASSY,MOUSE,INTCON
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MOUSE,INTCON. Compatible with THERMAWAVE equipment. Part No. 11-028720.
THERMAWAVE
11-028735
CABLE ASSY,PUSH BUTTON,S2
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PUSH BUTTON,S2. Compatible with THERMAWAVE equipment. Part No. 11-028735.
THERMAWAVE
11-028739
CABLE ASSY,LOADER1,BUT,TPNT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LOADER1,BUT,TPNT. Compatible with THERMAWAVE equipment. Part No. 11-028739.
THERMAWAVE
11-028741
CABLE ASSY,LOADER2,BUT,TPNT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,LOADER2,BUT,TPNT. Compatible with THERMAWAVE equipment. Part No. 11-028741.
THERMAWAVE
11-028936
INA,CABLE ASSY,UTIL MOD,AC/DC
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,CABLE ASSY,UTIL MOD,AC/DC. Compatible with THERMAWAVE equipment. Part No. 11-028936.
THERMAWAVE
11-029039
CABLE ASSY,AC PWR,SRVR ASSY
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,AC PWR,SRVR ASSY. Compatible with THERMAWAVE equipment. Part No. 11-029039.
THERMAWAVE
11-029148
Cable Assy, VGA, KVM to PAS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, VGA, KVM to PAS. Compatible with THERMAWAVE equipment. Part No. 11-029148.
THERMAWAVE
11-029149
Cable Assy, KB, KVM to PAS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, KB, KVM to PAS. Compatible with THERMAWAVE equipment. Part No. 11-029149.
THERMAWAVE
11-029150
Cable Assy, Mouse, KVM to PAS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Mouse, KVM to PAS. Compatible with THERMAWAVE equipment. Part No. 11-029150.
THERMAWAVE
11-029151
Cable Assy, Mouse, I/F to KVM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Mouse, I/F to KVM. Compatible with THERMAWAVE equipment. Part No. 11-029151.
THERMAWAVE
11-029152
Cable Assy, KB, I/F to KVM
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, KB, I/F to KVM. Compatible with THERMAWAVE equipment. Part No. 11-029152.
THERMAWAVE
11-029205
CABLE ASSY,X/Y STG,CNTRLR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,X/Y STG,CNTRLR. Compatible with THERMAWAVE equipment. Part No. 11-029205.
THERMAWAVE
11-029268
Cable Assy, Ethernet, 2 FT, PAS to Facility Box
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, Ethernet, 2 FT, PAS to Facility Box. Compatible with THERMAWAVE equipment. Part No. 11-029268.
THERMAWAVE
11-029269
Cable Assy, CRSVR, 15 FT, OP/PS, OP to PAS box
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assy, CRSVR, 15 FT, OP/PS, OP to PAS box. Compatible with THERMAWAVE equipment. Part No. 11-029269.
THERMAWAVE
11-029400
Cable, Ethernet Patch, 25 FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable, Ethernet Patch, 25 FT. Compatible with THERMAWAVE equipment. Part No. 11-029400.
THERMAWAVE
11-029936
CABLE ASSY,SHUTTER SHLD,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SHUTTER SHLD,TP. Compatible with THERMAWAVE equipment. Part No. 11-029936.
THERMAWAVE
11-030993
CABLE ASSY,MSTR,NCT,MAT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MSTR,NCT,MAT. Compatible with THERMAWAVE equipment. Part No. 11-030993.
THERMAWAVE
11-108269
SF,CABLE ASSY,IRID1
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,CABLE ASSY,IRID1. Compatible with THERMAWAVE equipment. Part No. 11-108269.
THERMAWAVE
11-108274
CABLE ASSY,SCSI,PC TO DGTINTF
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,SCSI,PC TO DGTINTF. Compatible with THERMAWAVE equipment. Part No. 11-108274.
THERMAWAVE
11-108315
CABLE ASSY,WHT LT PS,SHLD,OP5
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT PS,SHLD,OP5. Compatible with THERMAWAVE equipment. Part No. 11-108315.
THERMAWAVE
11-108318
CABLE ASSY,WHT LT,PS,SHLD,OP5
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,WHT LT,PS,SHLD,OP5. Compatible with THERMAWAVE equipment. Part No. 11-108318.
THERMAWAVE
11-108320
CABLE ASSY,FAN,FRONT OI,COOLNG
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,FAN,FRONT OI,COOLNG. Compatible with THERMAWAVE equipment. Part No. 11-108320.
THERMAWAVE
11-108323
CABLE ASSY,MOTOR,X/Y AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,MOTOR,X/Y AXIS. Compatible with THERMAWAVE equipment. Part No. 11-108323.
THERMAWAVE
11-108324
CABLE ASSY,HALL,X-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HALL,X-AXIS. Compatible with THERMAWAVE equipment. Part No. 11-108324.
THERMAWAVE
11-108325
CABLE ASSY,ENC/LIM,X-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ENC/LIM,X-AXIS. Compatible with THERMAWAVE equipment. Part No. 11-108325.
THERMAWAVE
11-108326
CABLE ASSY,ENC/LIM,Y-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ENC/LIM,Y-AXIS. Compatible with THERMAWAVE equipment. Part No. 11-108326.
THERMAWAVE
11-108327
CABLE ASSY,HALL,Y-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HALL,Y-AXIS. Compatible with THERMAWAVE equipment. Part No. 11-108327.
THERMAWAVE
11-108330
CABLE ASSY,HTR/THM,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,HTR/THM,TP630XP. Compatible with THERMAWAVE equipment. Part No. 11-108330.
THERMAWAVE
11-108335
CABLE ASSY,STG ESD RELIEF
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,STG ESD RELIEF. Compatible with THERMAWAVE equipment. Part No. 11-108335.
THERMAWAVE
11-108336
CABLE ASSY,STG ESD DRN LMT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,STG ESD DRN LMT. Compatible with THERMAWAVE equipment. Part No. 11-108336.
THERMAWAVE
11-108349
CABLE ASSY,ADPT,RCA/S-VIDEO
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,ADPT,RCA/S-VIDEO. Compatible with THERMAWAVE equipment. Part No. 11-108349.
THERMAWAVE
11-108366
CABLE ASSY,NTSC,CAMERA
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,NTSC,CAMERA. Compatible with THERMAWAVE equipment. Part No. 11-108366.
THERMAWAVE
11-108367
CABLE ASSY,VGA SIGNAL,LCD
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,VGA SIGNAL,LCD. Compatible with THERMAWAVE equipment. Part No. 11-108367.
THERMAWAVE
11-108382
CABLE ASSY,KVM-SW W-XP COMP
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,KVM-SW W-XP COMP. Compatible with THERMAWAVE equipment. Part No. 11-108382.
THERMAWAVE
11-108386
CABLE ASSY,PNEU,LASER SHTR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,PNEU,LASER SHTR. Compatible with THERMAWAVE equipment. Part No. 11-108386.
THERMAWAVE
11-108424
CABLE ASSY,+12V,COGNEX 8100M+
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,+12V,COGNEX 8100M+. Compatible with THERMAWAVE equipment. Part No. 11-108424.
THERMAWAVE
11-108442
HARNESS ASSY,MTR,CNTRLR,KAW
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,MTR,CNTRLR,KAW. Compatible with THERMAWAVE equipment. Part No. 11-108442.
THERMAWAVE
11-108443
HARNESS ASSY,CNTRLR,SGNL,KA
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,CNTRLR,SGNL,KA. Compatible with THERMAWAVE equipment. Part No. 11-108443.
THERMAWAVE
11-108445
CABLE ASSY,RFID/IRID,ISOPORT 1
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,RFID/IRID,ISOPORT 1. Compatible with THERMAWAVE equipment. Part No. 11-108445.
THERMAWAVE
11-108446
CABLE ASSY,RFID/IRID,ISOPORT 2
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,RFID/IRID,ISOPORT 2. Compatible with THERMAWAVE equipment. Part No. 11-108446.
THERMAWAVE
11-108487
HARNESS ASSY,P-ALIG,IO1,KWI
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,P-ALIG,IO1,KWI. Compatible with THERMAWAVE equipment. Part No. 11-108487.
THERMAWAVE
11-108488
HARNESS ASSY,P-ALIG,MOTOR
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,P-ALIG,MOTOR. Compatible with THERMAWAVE equipment. Part No. 11-108488.
THERMAWAVE
11-108489
HARNESS ASSY,P-ALIG,SIGNAL
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,P-ALIG,SIGNAL. Compatible with THERMAWAVE equipment. Part No. 11-108489.
THERMAWAVE
11-108490
HARNESS ASSY,P-ALIG,IO2,KWI
spare_part
High-quality nan for THERMAWAVE CMP tool. HARNESS ASSY,P-ALIG,IO2,KWI. Compatible with THERMAWAVE equipment. Part No. 11-108490.
THERMAWAVE
11-108577
CABLE ASSY,OP PL SPIN ENC,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,OP PL SPIN ENC,P34. Compatible with THERMAWAVE equipment. Part No. 11-108577.
THERMAWAVE
11-108584
CABLE ASSY,STG X-ENC/LIM
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,STG X-ENC/LIM. Compatible with THERMAWAVE equipment. Part No. 11-108584.
THERMAWAVE
11-108585
CABLE ASSY,STG Y-ENC/LIMIT
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,STG Y-ENC/LIMIT. Compatible with THERMAWAVE equipment. Part No. 11-108585.
THERMAWAVE
11-112849
CABLE ASSY,EXTEND,HTR
spare_part
High-quality nan for THERMAWAVE CMP tool. CABLE ASSY,EXTEND,HTR. Compatible with THERMAWAVE equipment. Part No. 11-112849.
THERMAWAVE
12-005071
Cable, BNC-M to SMC Plug
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable, BNC-M to SMC Plug. Compatible with THERMAWAVE equipment. Part No. 12-005071.
THERMAWAVE
12-005982
Cable, Printer, Shielded, 10Ft
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable, Printer, Shielded, 10Ft. Compatible with THERMAWAVE equipment. Part No. 12-005982.
THERMAWAVE
12-006314
CORD,Power,03COND,MOLD INStandard S
spare_part
High-quality nan for THERMAWAVE CMP tool. CORD,Power,03COND,MOLD INStandard S. Compatible with THERMAWAVE equipment. Part No. 12-006314.
THERMAWAVE
12-008082
Cable,DATA LINE,W/9PIN,D-SUBS
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,DATA LINE,W/9PIN,D-SUBS. Compatible with THERMAWAVE equipment. Part No. 12-008082.
THERMAWAVE
12-008170
Cable,PC Printer,12FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,PC Printer,12FT. Compatible with THERMAWAVE equipment. Part No. 12-008170.
THERMAWAVE
12-008395
CORD,Power,03COND,14AWG,15FT
spare_part
High-quality nan for THERMAWAVE CMP tool. CORD,Power,03COND,14AWG,15FT. Compatible with THERMAWAVE equipment. Part No. 12-008395.
THERMAWAVE
12-009997
CORD,Power,03COND,18AWG,IEC320
spare_part
High-quality nan for THERMAWAVE CMP tool. CORD,Power,03COND,18AWG,IEC320. Compatible with THERMAWAVE equipment. Part No. 12-009997.
THERMAWAVE
12-011019
Cable,Video,M/M,HD15 CON,7.5FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,Video,M/M,HD15 CON,7.5FT. Compatible with THERMAWAVE equipment. Part No. 12-011019.
THERMAWAVE
12-018062
Cable,MECHAN,DOCKING,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,MECHAN,DOCKING,P34. Compatible with THERMAWAVE equipment. Part No. 12-018062.
THERMAWAVE
12-019198
Cable,ANTENNA EXT,INDEXER,6FT
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable,ANTENNA EXT,INDEXER,6FT. Compatible with THERMAWAVE equipment. Part No. 12-019198.
THERMAWAVE
14-001091
PCB Assembly,4-DECADE StandardEP ATT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,4-DECADE StandardEP ATT. Compatible with THERMAWAVE equipment. Part No. 14-001091.
THERMAWAVE
14-001882
PCB Assembly,MICRO StandardPR SEQ
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,MICRO StandardPR SEQ. Compatible with THERMAWAVE equipment. Part No. 14-001882.
THERMAWAVE
14-002003
PCB Assembly,Stage INDEXER
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Stage INDEXER. Compatible with THERMAWAVE equipment. Part No. 14-002003.
THERMAWAVE
14-002863
PCB Assembly,TRACKBALL INTERFACE
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TRACKBALL INTERFACE. Compatible with THERMAWAVE equipment. Part No. 14-002863.
THERMAWAVE
14-003591
PCB,CPU,SNGL BD,2MEG,GPC68020
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CPU,SNGL BD,2MEG,GPC68020. Compatible with THERMAWAVE equipment. Part No. 14-003591.
THERMAWAVE
14-003708
PCB,Robot Controller,WH3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot Controller,WH3. Compatible with THERMAWAVE equipment. Part No. 14-003708.
THERMAWAVE
14-003709
PCB,Robot Controller,WH3-Z
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot Controller,WH3-Z. Compatible with THERMAWAVE equipment. Part No. 14-003709.
THERMAWAVE
14-003710
PCB,Robot Controller,WH3-A
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot Controller,WH3-A. Compatible with THERMAWAVE equipment. Part No. 14-003710.
THERMAWAVE
14-003711
PCB,Robot Controller,WH3-W
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot Controller,WH3-W. Compatible with THERMAWAVE equipment. Part No. 14-003711.
THERMAWAVE
14-003745
PCB Assembly,RS232 I/O
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,RS232 I/O. Compatible with THERMAWAVE equipment. Part No. 14-003745.
THERMAWAVE
14-003979
PCB Assembly,CPU I/O,MK II
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU I/O,MK II. Compatible with THERMAWAVE equipment. Part No. 14-003979.
THERMAWAVE
14-004053
PCB Assembly,DATA ACQUISITION,MKII
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DATA ACQUISITION,MKII. Compatible with THERMAWAVE equipment. Part No. 14-004053.
THERMAWAVE
14-004053
PCB Assembly,DATA ACQUISITION,MKII
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DATA ACQUISITION,MKII. Compatible with THERMAWAVE equipment. Part No. 14-004053.
THERMAWAVE
14-004357
PCB Assembly,1-MHZ COHERENT DEMOD
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,1-MHZ COHERENT DEMOD. Compatible with THERMAWAVE equipment. Part No. 14-004357.
THERMAWAVE
14-004416
PCB Assembly,SIG COMMUTATOR,MKII
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SIG COMMUTATOR,MKII. Compatible with THERMAWAVE equipment. Part No. 14-004416.
THERMAWAVE
14-004420
PCB Assembly,TRACKER INTERFACE
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TRACKER INTERFACE. Compatible with THERMAWAVE equipment. Part No. 14-004420.
THERMAWAVE
14-004688
PCB Assembly,RMOD DET,MKII
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,RMOD DET,MKII. Compatible with THERMAWAVE equipment. Part No. 14-004688.
THERMAWAVE
14-004693
PCB Assembly,WFR&Vacuum ELEC
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,WFR&Vacuum ELEC. Compatible with THERMAWAVE equipment. Part No. 14-004693.
THERMAWAVE
14-004842
PCB Assembly,CPU "A",SECS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU "A",SECS. Compatible with THERMAWAVE equipment. Part No. 14-004842.
THERMAWAVE
14-004843
PCB Assembly,CPU "B", SECS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU "B", SECS. Compatible with THERMAWAVE equipment. Part No. 14-004843.
THERMAWAVE
14-005036
PCB,Cable AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Cable AXIS. Compatible with THERMAWAVE equipment. Part No. 14-005036.
THERMAWAVE
14-005244
PCB,CPU,SNGL BD,4MEG,GPC68020
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CPU,SNGL BD,4MEG,GPC68020. Compatible with THERMAWAVE equipment. Part No. 14-005244.
THERMAWAVE
14-005511
PCB Assembly,Auto Focus INTERCONN
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Auto Focus INTERCONN. Compatible with THERMAWAVE equipment. Part No. 14-005511.
THERMAWAVE
14-005743
PCB Assembly,OpticO-RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,OpticO-RS232. Compatible with THERMAWAVE equipment. Part No. 14-005743.
THERMAWAVE
14-006019
PCB Assembly, Digital, AF, MOD2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Digital, AF, MOD2. Compatible with THERMAWAVE equipment. Part No. 14-006019.
THERMAWAVE
14-006060
PCB,AT,A/D
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,AT,A/D. Compatible with THERMAWAVE equipment. Part No. 14-006060.
THERMAWAVE
14-006552
PCB Assembly,DC Chopper MON,MK2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DC Chopper MON,MK2. Compatible with THERMAWAVE equipment. Part No. 14-006552.
THERMAWAVE
14-006631
PCB, 2 Meg Memory
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB, 2 Meg Memory. Compatible with THERMAWAVE equipment. Part No. 14-006631.
THERMAWAVE
14-006676
PCB,ETHERNET
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,ETHERNET. Compatible with THERMAWAVE equipment. Part No. 14-006676.
THERMAWAVE
14-006725
PCB Assembly,HEATER CNTRL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,HEATER CNTRL. Compatible with THERMAWAVE equipment. Part No. 14-006725.
THERMAWAVE
14-006877
PCB Assembly, Analog, AF, MOD3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Analog, AF, MOD3. Compatible with THERMAWAVE equipment. Part No. 14-006877.
THERMAWAVE
14-007003
PCB Assembly,AUTO FOCUS AT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,AUTO FOCUS AT. Compatible with THERMAWAVE equipment. Part No. 14-007003.
THERMAWAVE
14-007009
PCB Assembly,AUTO FOCUS,AT DriverIVER
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,AUTO FOCUS,AT DriverIVER. Compatible with THERMAWAVE equipment. Part No. 14-007009.
THERMAWAVE
14-007077
PCB Assembly,TRACKBALL INTFC,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TRACKBALL INTFC,P16. Compatible with THERMAWAVE equipment. Part No. 14-007077.
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Auto Focus INTERConnector,AT repl.by 14-017976. Compatible with THERMAWAVE equipment. Part No. 14-007135.
THERMAWAVE
14-007189
PCB,SCSI Controller,AT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,SCSI Controller,AT. Compatible with THERMAWAVE equipment. Part No. 14-007189.
THERMAWAVE
14-007190
PCB,BACKPLANE,14 SLOT,AT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,BACKPLANE,14 SLOT,AT. Compatible with THERMAWAVE equipment. Part No. 14-007190.
THERMAWAVE
14-007252
PCB Assembly,Auto Focus Detector,AT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Auto Focus Detector,AT. Compatible with THERMAWAVE equipment. Part No. 14-007252.
THERMAWAVE
14-007273
PCB Assembly,SCSI Controller,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SCSI Controller,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 14-007273.
THERMAWAVE
14-007274
PCB Assembly,CPU,4MEG,SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU,4MEG,SCSI. Compatible with THERMAWAVE equipment. Part No. 14-007274.
THERMAWAVE
14-007294
PCB,Robot,X-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,X-AXIS. Compatible with THERMAWAVE equipment. Part No. 14-007294.
THERMAWAVE
14-007295
PCB,Robot,Y-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,Y-AXIS. Compatible with THERMAWAVE equipment. Part No. 14-007295.
THERMAWAVE
14-007296
PCB,Robot,REAL TIME POS,X-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,REAL TIME POS,X-AXIS. Compatible with THERMAWAVE equipment. Part No. 14-007296.
THERMAWAVE
14-007297
PCB,Robot,REAL TIME POS,Y-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,REAL TIME POS,Y-AXIS. Compatible with THERMAWAVE equipment. Part No. 14-007297.
THERMAWAVE
14-007298
PCB,Robot,SBC 5-AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,SBC 5-AXIS. Compatible with THERMAWAVE equipment. Part No. 14-007298.
THERMAWAVE
14-007299
PCB,Robot,SBC PIGGY BACK,5-AXS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,Robot,SBC PIGGY BACK,5-AXS. Compatible with THERMAWAVE equipment. Part No. 14-007299.
THERMAWAVE
14-007310
PCB Assembly,Cognex,INTERFACE
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,INTERFACE. Compatible with THERMAWAVE equipment. Part No. 14-007310.
THERMAWAVE
14-007582
PCB Assembly,TW ANALOG PROC
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TW ANALOG PROC. Compatible with THERMAWAVE equipment. Part No. 14-007582.
THERMAWAVE
14-007716
PCB Assembly,Detector,I-Hene,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Detector,I-Hene,T12. Compatible with THERMAWAVE equipment. Part No. 14-007716.
THERMAWAVE
14-007731
PCB Assembly,ANALOG,MOTHER BD
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,ANALOG,MOTHER BD. Compatible with THERMAWAVE equipment. Part No. 14-007731.
THERMAWAVE
14-007787
PCB Assembly,Stepper DriverVR,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Stepper DriverVR,T12. Compatible with THERMAWAVE equipment. Part No. 14-007787.
THERMAWAVE
14-007811
PCB Assembly,AUTO FOCUS,DET,AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,AUTO FOCUS,DET,AMP. Compatible with THERMAWAVE equipment. Part No. 14-007811.
THERMAWAVE
14-007822
PCB Assembly,R-Hene/TW DET
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,R-Hene/TW DET. Compatible with THERMAWAVE equipment. Part No. 14-007822.
THERMAWAVE
14-007915
PCB,SIMM,1MX9,70NSEC
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,SIMM,1MX9,70NSEC. Compatible with THERMAWAVE equipment. Part No. 14-007915.
THERMAWAVE
14-007988
PCB,CPU,SNGL BD,8MEG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CPU,SNGL BD,8MEG. Compatible with THERMAWAVE equipment. Part No. 14-007988.
THERMAWAVE
14-008217
PCB Assembly,NEW WAVE
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,NEW WAVE. Compatible with THERMAWAVE equipment. Part No. 14-008217.
THERMAWAVE
14-008247
PCB Assembly,DGTL,Auto Focus,MOD2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DGTL,Auto Focus,MOD2. Compatible with THERMAWAVE equipment. Part No. 14-008247.
THERMAWAVE
14-008249
PCB Assembly,ANALOG,Auto Focus,MOD3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,ANALOG,Auto Focus,MOD3. Compatible with THERMAWAVE equipment. Part No. 14-008249.
THERMAWAVE
14-008473
PCB Assembly,AUTO FOCUS CNTRL,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,AUTO FOCUS CNTRL,P20. Compatible with THERMAWAVE equipment. Part No. 14-008473.
THERMAWAVE
14-008481
PCB Assembly,BLUE TOPO Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,BLUE TOPO Detector. Compatible with THERMAWAVE equipment. Part No. 14-008481.
THERMAWAVE
14-008526
O*PCB Assembly,Controller,StandardPR MTR,P23
spare_part
High-quality nan for THERMAWAVE CMP tool. O*PCB Assembly,Controller,StandardPR MTR,P23. Compatible with THERMAWAVE equipment. Part No. 14-008526.
THERMAWAVE
14-008626
PCB Assembly,CPU B,SECSII,TP400
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU B,SECSII,TP400. Compatible with THERMAWAVE equipment. Part No. 14-008626.
THERMAWAVE
14-008645
PCB Assembly,Cognex,FINACTIVEL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,FINACTIVEL. Compatible with THERMAWAVE equipment. Part No. 14-008645.
THERMAWAVE
14-008733
PCB Assembly,CPU,8MEG/SECS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU,8MEG/SECS. Compatible with THERMAWAVE equipment. Part No. 14-008733.
THERMAWAVE
14-008766
PCB Assembly, XY-Centering/Tilt
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, XY-Centering/Tilt. Compatible with THERMAWAVE equipment. Part No. 14-008766.
THERMAWAVE
14-008952
PCB Assembly,LIGHT SHIELD,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,LIGHT SHIELD,T12. Compatible with THERMAWAVE equipment. Part No. 14-008952.
THERMAWAVE
14-009181
PCB,PATTERN RECOGNITION
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,PATTERN RECOGNITION. Compatible with THERMAWAVE equipment. Part No. 14-009181.
THERMAWAVE
14-009379
PCB Assembly,ARRAY Detector,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,ARRAY Detector,P20. Compatible with THERMAWAVE equipment. Part No. 14-009379.
THERMAWAVE
14-009612
OBS,PCB ASSY,ANALOG PROC,P23
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,PCB ASSY,ANALOG PROC,P23. Compatible with THERMAWAVE equipment. Part No. 14-009612.
THERMAWAVE
14-009631
PCB Assembly,DGTL CNTRL INTF,P23
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DGTL CNTRL INTF,P23. Compatible with THERMAWAVE equipment. Part No. 14-009631.
THERMAWAVE
14-009631
PCB Assembly,DGTL CNTRL INTF,P23
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DGTL CNTRL INTF,P23. Compatible with THERMAWAVE equipment. Part No. 14-009631.
THERMAWAVE
14-009784
PCB Assembly,I-Laser DET,Switch GAIN
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,I-Laser DET,Switch GAIN. Compatible with THERMAWAVE equipment. Part No. 14-009784.
THERMAWAVE
14-009886
PCB,SBC,CPU,486DX2,16MEG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,SBC,CPU,486DX2,16MEG. Compatible with THERMAWAVE equipment. Part No. 14-009886.
THERMAWAVE
14-009901
PCB Assembly,I-DET,AR,LOW Power,T11
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,I-DET,AR,LOW Power,T11. Compatible with THERMAWAVE equipment. Part No. 14-009901.
THERMAWAVE
14-009962
PCB Assembly,Cassette SENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cassette SENSOR. Compatible with THERMAWAVE equipment. Part No. 14-009962.
THERMAWAVE
14-009999
PCB Assembly,PC-MBUS INTF
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,PC-MBUS INTF. Compatible with THERMAWAVE equipment. Part No. 14-009999.
THERMAWAVE
14-010064
PCB Assembly,ANALOG PRCR,ASP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,ANALOG PRCR,ASP. Compatible with THERMAWAVE equipment. Part No. 14-010064.
THERMAWAVE
14-010064
PCB Assembly,ANALOG PRCR,ASP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,ANALOG PRCR,ASP. Compatible with THERMAWAVE equipment. Part No. 14-010064.
THERMAWAVE
14-010068
OK, Except repl.by 14-025749 on TP500s.
spare_part
High-quality nan for THERMAWAVE CMP tool. OK, Except repl.by 14-025749 on TP500s.. Compatible with THERMAWAVE equipment. Part No. 14-010068.
THERMAWAVE
14-010068
OK, Except repl.by 14-025749 on TP500s.
spare_part
High-quality nan for THERMAWAVE CMP tool. OK, Except repl.by 14-025749 on TP500s.. Compatible with THERMAWAVE equipment. Part No. 14-010068.
THERMAWAVE
14-010187
PCB Assembly,A-SPECTRO Shutter
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,A-SPECTRO Shutter. Compatible with THERMAWAVE equipment. Part No. 14-010187.
THERMAWAVE
14-010467
PCB Assembly,HEATER CNTRL,MK2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,HEATER CNTRL,MK2. Compatible with THERMAWAVE equipment. Part No. 14-010467.
THERMAWAVE
14-010502
PCB Assembly,SECS,CONFIGURED,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SECS,CONFIGURED,OP. Compatible with THERMAWAVE equipment. Part No. 14-010502.
THERMAWAVE
14-010521
PCB Assembly,CPU 486,TP420,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU 486,TP420,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 14-010521.
THERMAWAVE
14-010522
PCB,VGA,CNLR,1MB,ISA BUS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,VGA,CNLR,1MB,ISA BUS. Compatible with THERMAWAVE equipment. Part No. 14-010522.
THERMAWAVE
14-010523
PCB Assembly,VGA Controller,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,VGA Controller,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 14-010523.
THERMAWAVE
14-010586
Assy, PCB, Chopper Motor
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, PCB, Chopper Motor. Compatible with THERMAWAVE equipment. Part No. 14-010586.
THERMAWAVE
14-010820
INA,PCB ASSY,SCSI CNTRLR,TSTD, repl. by 14-023121
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,PCB ASSY,SCSI CNTRLR,TSTD, repl. by 14-023121. Compatible with THERMAWAVE equipment. Part No. 14-010820.
THERMAWAVE
14-010847
PCB, Config. GEM/SECS, TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB, Config. GEM/SECS, TP420. Compatible with THERMAWAVE equipment. Part No. 14-010847.
THERMAWAVE
14-011433
INA,PCB,SCSI CONTROLLER,ADAPT- repl.by 14-023102
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,PCB,SCSI CONTROLLER,ADAPT- repl.by 14-023102. Compatible with THERMAWAVE equipment. Part No. 14-011433.
THERMAWAVE
14-011444
Equipe Robot,I/O CNTRL BD
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,I/O CNTRL BD. Compatible with THERMAWAVE equipment. Part No. 14-011444.
THERMAWAVE
14-011445
Equipe Robot,GALIL MOTION CTL BD
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,GALIL MOTION CTL BD. Compatible with THERMAWAVE equipment. Part No. 14-011445.
THERMAWAVE
14-011446
Equipe Robot,AMP BD W/O AMP MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,AMP BD W/O AMP MOD. Compatible with THERMAWAVE equipment. Part No. 14-011446.
THERMAWAVE
14-011449
Equipe Robot,ATM Robot INT INTF BD
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,ATM Robot INT INTF BD. Compatible with THERMAWAVE equipment. Part No. 14-011449.
THERMAWAVE
14-011574
USE UP EXISTING STOCK - then order 14-026706 (TPs) or 14-023119 (OPs)
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 14-026706 (TPs) or 14-023119 (OPs). Compatible with THERMAWAVE equipment. Part No. 14-011574.
THERMAWAVE
14-011793
PCB ASSY,CDM,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CDM,TP500. Compatible with THERMAWAVE equipment. Part No. 14-011793.
THERMAWAVE
14-011804
PCB Assembly,DATA ACQUISITION
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DATA ACQUISITION. Compatible with THERMAWAVE equipment. Part No. 14-011804.
THERMAWAVE
14-011859
Ina, PCB Assembly,Tracker,TP500 repl. by 14-119403
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB Assembly,Tracker,TP500 repl. by 14-119403. Compatible with THERMAWAVE equipment. Part No. 14-011859.
THERMAWAVE
14-011888
PCB Assembly,Power BUSS CARDCG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Power BUSS CARDCG. Compatible with THERMAWAVE equipment. Part No. 14-011888.
THERMAWAVE
14-012128
KENS Robot,SBC BD 4000B 5121RS23
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,SBC BD 4000B 5121RS23. Compatible with THERMAWAVE equipment. Part No. 14-012128.
THERMAWAVE
14-012129
KENS Robot,SBC PIGGY BACK BOARD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,SBC PIGGY BACK BOARD. Compatible with THERMAWAVE equipment. Part No. 14-012129.
THERMAWAVE
14-012130
KENS Robot,Z-AXIS PIGGY BACK BD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,Z-AXIS PIGGY BACK BD. Compatible with THERMAWAVE equipment. Part No. 14-012130.
THERMAWAVE
14-012131
KENS Robot,Z-AXIS BOARD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,Z-AXIS BOARD. Compatible with THERMAWAVE equipment. Part No. 14-012131.
THERMAWAVE
14-012132
KENS Robot,ARM AXIS BOARD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,ARM AXIS BOARD. Compatible with THERMAWAVE equipment. Part No. 14-012132.
THERMAWAVE
14-012133
KENS Robot,ARM AXIS PIGGY BACKBD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,ARM AXIS PIGGY BACKBD. Compatible with THERMAWAVE equipment. Part No. 14-012133.
THERMAWAVE
14-012134
KENS Robot,WAIStandard AXIS BOARD
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,WAIStandard AXIS BOARD. Compatible with THERMAWAVE equipment. Part No. 14-012134.
THERMAWAVE
14-012135
KENS Robot,WAIStandard AXIS PIGGY BACK
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,WAIStandard AXIS PIGGY BACK. Compatible with THERMAWAVE equipment. Part No. 14-012135.
THERMAWAVE
14-012136
KENS Robot,FF AMP&FF I/R PCB
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS Robot,FF AMP&FF I/R PCB. Compatible with THERMAWAVE equipment. Part No. 14-012136.
THERMAWAVE
14-012176
Ina, PCB,LIGHT PEN,DT360,P26,CONFIG repl. by 14-119394
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB,LIGHT PEN,DT360,P26,CONFIG repl. by 14-119394. Compatible with THERMAWAVE equipment. Part No. 14-012176.
THERMAWAVE
14-012199
Ina, PCB,LIGHT PEN,DT360 repl. by 14-119393
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB,LIGHT PEN,DT360 repl. by 14-119393. Compatible with THERMAWAVE equipment. Part No. 14-012199.
THERMAWAVE
14-012421
PCB Assy,AF,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assy,AF,UV. Compatible with THERMAWAVE equipment. Part No. 14-012421.
THERMAWAVE
14-012422
PCB Assembly,Auto Focus,I/C,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Auto Focus,I/C,UV. Compatible with THERMAWAVE equipment. Part No. 14-012422.
THERMAWAVE
14-012423
ORDER 14-013618 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. ORDER 14-013618 instead.. Compatible with THERMAWAVE equipment. Part No. 14-012423.
THERMAWAVE
14-012425
PCB Assembly,Detector SupportPORT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Detector SupportPORT,UV. Compatible with THERMAWAVE equipment. Part No. 14-012425.
THERMAWAVE
14-012479
PCB ASSY,R-PROBE AC DET,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,R-PROBE AC DET,TP500. Compatible with THERMAWAVE equipment. Part No. 14-012479.
THERMAWAVE
14-012823
PCB Assy,PWR DR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assy,PWR DR,UV. Compatible with THERMAWAVE equipment. Part No. 14-012823.
THERMAWAVE
14-012961
PCB Assembly,TIMER/I/O,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TIMER/I/O,TP500. Compatible with THERMAWAVE equipment. Part No. 14-012961.
THERMAWAVE
14-013462
PCB Assembly,SERVO AMP MDL,T replaced by 14-014873
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SERVO AMP MDL,T replaced by 14-014873. Compatible with THERMAWAVE equipment. Part No. 14-013462.
THERMAWAVE
14-013540
KENS,5-X AXIS PCB
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,5-X AXIS PCB. Compatible with THERMAWAVE equipment. Part No. 14-013540.
THERMAWAVE
14-013541
KENS,5-Y AXIS PCB
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,5-Y AXIS PCB. Compatible with THERMAWAVE equipment. Part No. 14-013541.
THERMAWAVE
14-013542
KENS,SBC PCB FOR 5 AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,SBC PCB FOR 5 AXIS. Compatible with THERMAWAVE equipment. Part No. 14-013542.
THERMAWAVE
14-013581
PCB Assembly,CPU,PENTIUM-120
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CPU,PENTIUM-120. Compatible with THERMAWAVE equipment. Part No. 14-013581.
High-quality nan for THERMAWAVE CMP tool. Ina. PCB Assembly,TEStandardED,CPU,586-120 kit 61-013589. Compatible with THERMAWAVE equipment. Part No. 14-013582.
High-quality nan for THERMAWAVE CMP tool. Ina. PCB Assembly,TEStandardED,CPU,586-120 kit 61-013589. Compatible with THERMAWAVE equipment. Part No. 14-013582.
THERMAWAVE
14-013608
PCB Assembly,LVDT VOLT MOD,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,LVDT VOLT MOD,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 14-013608.
THERMAWAVE
14-013618
PCB Assembly,I/O&StandardEP CNTRL,CONFIG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,I/O&StandardEP CNTRL,CONFIG. Compatible with THERMAWAVE equipment. Part No. 14-013618.
THERMAWAVE
14-013668
PCB Assembly,VBSE100,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,VBSE100,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 14-013668.
THERMAWAVE
14-013699
PCB Assembly,Power DIStandardRIBUTION,TP50
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Power DIStandardRIBUTION,TP50. Compatible with THERMAWAVE equipment. Part No. 14-013699.
THERMAWAVE
14-013762
OBS,PCB Assembly,GALIL MOT Controller
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,PCB Assembly,GALIL MOT Controller. Compatible with THERMAWAVE equipment. Part No. 14-013762.
THERMAWAVE
14-013952
USE UP EXISTING STOCK - then order 14-012421
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 14-012421. Compatible with THERMAWAVE equipment. Part No. 14-013952.
THERMAWAVE
14-013955
Inactive - repl. by 14-012823 i
spare_part
High-quality nan for THERMAWAVE CMP tool. Inactive - repl. by 14-012823 i. Compatible with THERMAWAVE equipment. Part No. 14-013955.
THERMAWAVE
14-013994
PCB Assembly,Cognex,5600/T-B INTFC
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,5600/T-B INTFC. Compatible with THERMAWAVE equipment. Part No. 14-013994.
THERMAWAVE
14-013994
PCB Assembly,Cognex,5600/T-B INTFC
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,5600/T-B INTFC. Compatible with THERMAWAVE equipment. Part No. 14-013994.
THERMAWAVE
14-014055
PCB Assembly,GALIL MOT CNTRL,18BT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,GALIL MOT CNTRL,18BT. Compatible with THERMAWAVE equipment. Part No. 14-014055.
THERMAWAVE
14-014055
PCB Assembly,GALIL MOT CNTRL,18BT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,GALIL MOT CNTRL,18BT. Compatible with THERMAWAVE equipment. Part No. 14-014055.
THERMAWAVE
14-014192
PCB Assembly,Cognex,5600S,FINACTIVEL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,5600S,FINACTIVEL. Compatible with THERMAWAVE equipment. Part No. 14-014192.
THERMAWAVE
14-014232
Ina PCB Assembly,TEStandardED,CPU,P5/S use 14-018690
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina PCB Assembly,TEStandardED,CPU,P5/S use 14-018690. Compatible with THERMAWAVE equipment. Part No. 14-014232.
THERMAWAVE
14-014873
PCB Assembly,SERVO AMP,3AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SERVO AMP,3AXIS. Compatible with THERMAWAVE equipment. Part No. 14-014873.
THERMAWAVE
14-014995
PCB ASSY,SECS,SMIF,OP,CONF
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SECS,SMIF,OP,CONF. Compatible with THERMAWAVE equipment. Part No. 14-014995.
THERMAWAVE
14-015040
PCB ASSY,ADPT,SVO ENCDR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ADPT,SVO ENCDR. Compatible with THERMAWAVE equipment. Part No. 14-015040.
THERMAWAVE
14-015264
PCB Assembly,POS SENSOR,Auto Focus,Z-Standard
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,POS SENSOR,Auto Focus,Z-Standard. Compatible with THERMAWAVE equipment. Part No. 14-015264.
THERMAWAVE
14-015468
PCB Assembly,Z-StandardG,Auto Focus DriverVR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Z-StandardG,Auto Focus DriverVR,P34. Compatible with THERMAWAVE equipment. Part No. 14-015468.
THERMAWAVE
14-015493
PCB Assembly, Z-Stage, A/F
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Z-Stage, A/F. Compatible with THERMAWAVE equipment. Part No. 14-015493.
THERMAWAVE
14-015493
PCB Assembly, Z-Stage, A/F
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Z-Stage, A/F. Compatible with THERMAWAVE equipment. Part No. 14-015493.
THERMAWAVE
14-015571
PCB Assembly,DATA ACQ
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DATA ACQ. Compatible with THERMAWAVE equipment. Part No. 14-015571.
THERMAWAVE
14-015571
PCB Assembly,DATA ACQ
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DATA ACQ. Compatible with THERMAWAVE equipment. Part No. 14-015571.
THERMAWAVE
14-015615
PCB Assembly,DIGITIZER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DIGITIZER,P34. Compatible with THERMAWAVE equipment. Part No. 14-015615.
THERMAWAVE
14-015615
PCB Assembly,DIGITIZER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,DIGITIZER,P34. Compatible with THERMAWAVE equipment. Part No. 14-015615.
THERMAWAVE
14-015680
Ina. PCB,Carrier,DIGITAL I/O repl.by 14-023180
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. PCB,Carrier,DIGITAL I/O repl.by 14-023180. Compatible with THERMAWAVE equipment. Part No. 14-015680.
THERMAWAVE
14-015684
PCB Assembly,TIMER/IO,CONFIG TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,TIMER/IO,CONFIG TP500. Compatible with THERMAWAVE equipment. Part No. 14-015684.
THERMAWAVE
14-015704
Assy, PCB, Filter, SW, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, PCB, Filter, SW, P34. Compatible with THERMAWAVE equipment. Part No. 14-015704.
THERMAWAVE
14-015810
PCB Assembly,INTFC,Optic PL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,INTFC,Optic PL,P34. Compatible with THERMAWAVE equipment. Part No. 14-015810.
THERMAWAVE
14-015812
PCB Assembly,Power DriverVR,PNEU,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Power DriverVR,PNEU,P34. Compatible with THERMAWAVE equipment. Part No. 14-015812.
THERMAWAVE
14-015827
PCB ASSY,MOTOR DR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,MOTOR DR,P34. Compatible with THERMAWAVE equipment. Part No. 14-015827.
THERMAWAVE
14-016101
PCB Assembly,Cognex,5000,CONFIG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cognex,5000,CONFIG. Compatible with THERMAWAVE equipment. Part No. 14-016101.
THERMAWAVE
14-016112
Ina, PCB,Backplane,ISA/PCI 16+1+2 repl. by 14-119387
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB,Backplane,ISA/PCI 16+1+2 repl. by 14-119387. Compatible with THERMAWAVE equipment. Part No. 14-016112.
THERMAWAVE
14-016327
PCB ASSY,PROBE,LSR DR,ANLG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PROBE,LSR DR,ANLG. Compatible with THERMAWAVE equipment. Part No. 14-016327.
THERMAWAVE
14-016853
PCB Assembly,WEStandard CNTR,PMC-S1
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,WEStandard CNTR,PMC-S1. Compatible with THERMAWAVE equipment. Part No. 14-016853.
THERMAWAVE
14-016854
PCB Assembly,WStandard AMP,BLH-S4/15
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,WStandard AMP,BLH-S4/15. Compatible with THERMAWAVE equipment. Part No. 14-016854.
THERMAWAVE
14-017262
USE UP EXISTING STOCK - then order 14-026958 instead (PCB Assembly,TEStandardED,CPU,P5)
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 14-026958 instead (PCB Assembly,TEStandardED,CPU,P5). Compatible with THERMAWAVE equipment. Part No. 14-017262.
THERMAWAVE
14-017482
PCB Assembly,CASS/PRT OpticO ISO
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CASS/PRT OpticO ISO. Compatible with THERMAWAVE equipment. Part No. 14-017482.
THERMAWAVE
14-017532
PCB Assembly,MULTI FUNCTION,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,MULTI FUNCTION,P34. Compatible with THERMAWAVE equipment. Part No. 14-017532.
THERMAWAVE
14-017532
PCB Assembly,MULTI FUNCTION,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,MULTI FUNCTION,P34. Compatible with THERMAWAVE equipment. Part No. 14-017532.
THERMAWAVE
14-017641
PCB Assembly,Cassette INTF,B,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cassette INTF,B,P34. Compatible with THERMAWAVE equipment. Part No. 14-017641.
THERMAWAVE
14-017643
PCB Assembly,Cassette INTF,A,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Cassette INTF,A,P3. Compatible with THERMAWAVE equipment. Part No. 14-017643.
THERMAWAVE
14-017697
PCB Assembly,BREAKOUT,UPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,BREAKOUT,UPR,P34. Compatible with THERMAWAVE equipment. Part No. 14-017697.
THERMAWAVE
14-017835
PCB Assembly,HEATER Power DriverVR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,HEATER Power DriverVR,P34. Compatible with THERMAWAVE equipment. Part No. 14-017835.
THERMAWAVE
14-017976
PCB Assembly,Auto Focus INTERConnector,AT,HA
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Auto Focus INTERConnector,AT,HA. Compatible with THERMAWAVE equipment. Part No. 14-017976.
THERMAWAVE
14-018236
PCB Assembly,BREAKOUT,FRAME,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,BREAKOUT,FRAME,P34. Compatible with THERMAWAVE equipment. Part No. 14-018236.
THERMAWAVE
14-018274
PCB Assembly,INTFC,Optic PL,TALL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,INTFC,Optic PL,TALL. Compatible with THERMAWAVE equipment. Part No. 14-018274.
THERMAWAVE
14-018392
PCB Assembly,BULKHEAD,BRK,StandardG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,BULKHEAD,BRK,StandardG. Compatible with THERMAWAVE equipment. Part No. 14-018392.
THERMAWAVE
14-018402
PCB Assembly,INTFC CNTRL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,INTFC CNTRL,P34. Compatible with THERMAWAVE equipment. Part No. 14-018402.
THERMAWAVE
14-018436
PCB Assembly,FLT Panel LCD,DISPLY,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,FLT Panel LCD,DISPLY,P3. Compatible with THERMAWAVE equipment. Part No. 14-018436.
THERMAWAVE
14-018535
PCB Assembly,StandardG BREAKOUT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,StandardG BREAKOUT,P34. Compatible with THERMAWAVE equipment. Part No. 14-018535.
THERMAWAVE
14-018690
PCB,TEStandardED,133MHZ,16MB,S,V,L2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,TEStandardED,133MHZ,16MB,S,V,L2. Compatible with THERMAWAVE equipment. Part No. 14-018690.
THERMAWAVE
14-018948
PCB ASSY,ROTATING APER SENS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ROTATING APER SENS. Compatible with THERMAWAVE equipment. Part No. 14-018948.
THERMAWAVE
14-019153
PCB ASSY,PWR SUPPLY,48V,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PWR SUPPLY,48V,T41. Compatible with THERMAWAVE equipment. Part No. 14-019153.
THERMAWAVE
14-019159
PCB ASSY, INTLK DELAY, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, INTLK DELAY, T41. Compatible with THERMAWAVE equipment. Part No. 14-019159.
THERMAWAVE
14-019291
PCB Assembly,SENSOR,Opticical,THETA
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SENSOR,Opticical,THETA. Compatible with THERMAWAVE equipment. Part No. 14-019291.
THERMAWAVE
14-019468
PCB Assembly, Data Acquisition, TP500/630
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Data Acquisition, TP500/630. Compatible with THERMAWAVE equipment. Part No. 14-019468.
THERMAWAVE
14-019666
Use as is, then order 14-023180
spare_part
High-quality nan for THERMAWAVE CMP tool. Use as is, then order 14-023180. Compatible with THERMAWAVE equipment. Part No. 14-019666.
THERMAWAVE
14-019771
PCB ASSY,PWR DRVR,LT TWR,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PWR DRVR,LT TWR,P3. Compatible with THERMAWAVE equipment. Part No. 14-019771.
THERMAWAVE
14-019956
PCB ASSY, SERVO AMPLIFIER
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, SERVO AMPLIFIER. Compatible with THERMAWAVE equipment. Part No. 14-019956.
THERMAWAVE
14-019993
PCB Assembly,CASS SENS,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CASS SENS,T41. Compatible with THERMAWAVE equipment. Part No. 14-019993.
THERMAWAVE
14-020539
PCB Assembly, Z-Stage, A/F, P35 repl. by 14-119414 on OP73XX only
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Z-Stage, A/F, P35 repl. by 14-119414 on OP73XX only. Compatible with THERMAWAVE equipment. Part No. 14-020539.
THERMAWAVE
14-020659
PCB Assembly, Z-Stage, A/F, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Z-Stage, A/F, T41. Compatible with THERMAWAVE equipment. Part No. 14-020659.
THERMAWAVE
14-020750
PCB ASSY,HEATER PWR DRVR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,HEATER PWR DRVR. Compatible with THERMAWAVE equipment. Part No. 14-020750.
THERMAWAVE
14-020924
PCB,BCKPLANE,ISA/PCI,10+1+3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,BCKPLANE,ISA/PCI,10+1+3. Compatible with THERMAWAVE equipment. Part No. 14-020924.
THERMAWAVE
14-020990
PCB Assembly,Power DriverVR,Shutter
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,Power DriverVR,Shutter. Compatible with THERMAWAVE equipment. Part No. 14-020990.
THERMAWAVE
14-021163
PCB,TEStandardED,450MHZ,128MB,P2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,TEStandardED,450MHZ,128MB,P2. Compatible with THERMAWAVE equipment. Part No. 14-021163.
THERMAWAVE
14-021193
PCB Assembly,SENSOR,OpticO Switch,Z-StandardG
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,SENSOR,OpticO Switch,Z-StandardG. Compatible with THERMAWAVE equipment. Part No. 14-021193.
THERMAWAVE
14-021417
PCB,DIGITAL I/O,PCI,LT,OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,DIGITAL I/O,PCI,LT,OP3290. Compatible with THERMAWAVE equipment. Part No. 14-021417.
THERMAWAVE
14-021874
Ina,PCB ASSY,CNTRL INTFC 2,T41 repl. by 14-119401
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,PCB ASSY,CNTRL INTFC 2,T41 repl. by 14-119401. Compatible with THERMAWAVE equipment. Part No. 14-021874.
THERMAWAVE
14-022068
PCB Assy, A-B Sw, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assy, A-B Sw, P35. Compatible with THERMAWAVE equipment. Part No. 14-022068.
THERMAWAVE
14-022348
PCB ASSY,SPLITTER,LT TWR,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SPLITTER,LT TWR,P35. Compatible with THERMAWAVE equipment. Part No. 14-022348.
THERMAWAVE
14-022417
PCB ASSY,MVG MIR SNSR2,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,MVG MIR SNSR2,P34. Compatible with THERMAWAVE equipment. Part No. 14-022417.
THERMAWAVE
14-022435
INA,PCB,TESTED,450MHZ,128MB repl. by 61-029649
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,PCB,TESTED,450MHZ,128MB repl. by 61-029649. Compatible with THERMAWAVE equipment. Part No. 14-022435.
THERMAWAVE
14-022614
PCB Assembly, Servo Amp, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Servo Amp, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 14-022614.
THERMAWAVE
14-022711
PCB Assembly,StandardEP MOT CTRL,CONF
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,StandardEP MOT CTRL,CONF. Compatible with THERMAWAVE equipment. Part No. 14-022711.
THERMAWAVE
14-022746
PCB Assembly,CNFG,ISA DL RS232,1&2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly,CNFG,ISA DL RS232,1&2. Compatible with THERMAWAVE equipment. Part No. 14-022746.
THERMAWAVE
14-022870
PCB Assembly, Digital CNTRL Interface, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, Digital CNTRL Interface, T41. Compatible with THERMAWAVE equipment. Part No. 14-022870.
THERMAWAVE
14-023040
PCB ASSY,TESTED DGTL I/O,PCI
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,TESTED DGTL I/O,PCI. Compatible with THERMAWAVE equipment. Part No. 14-023040.
THERMAWAVE
14-023119
PCB Assembly, CNFG, SCSI CNTRL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, CNFG, SCSI CNTRL. Compatible with THERMAWAVE equipment. Part No. 14-023119.
THERMAWAVE
14-023180
PCB Assy, Step Cntr, TECH 80
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assy, Step Cntr, TECH 80. Compatible with THERMAWAVE equipment. Part No. 14-023180.
THERMAWAVE
14-023998
Ina. Pcb Assy,DUAL MON,PCI repl. by 14-119389
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Pcb Assy,DUAL MON,PCI repl. by 14-119389. Compatible with THERMAWAVE equipment. Part No. 14-023998.
THERMAWAVE
14-024342
PCB Assembly, ISA QUAD, RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assembly, ISA QUAD, RS232. Compatible with THERMAWAVE equipment. Part No. 14-024342.
THERMAWAVE
14-024356
PCB ASSY, CFG, ISA, QUAD, RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, CFG, ISA, QUAD, RS232. Compatible with THERMAWAVE equipment. Part No. 14-024356.
THERMAWAVE
14-024356
PCB ASSY, CFG, ISA, QUAD, RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, CFG, ISA, QUAD, RS232. Compatible with THERMAWAVE equipment. Part No. 14-024356.
THERMAWAVE
14-024696
PCB ASSY,ARRAY DETECTOR2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ARRAY DETECTOR2. Compatible with THERMAWAVE equipment. Part No. 14-024696.
THERMAWAVE
14-025026
PCB ASSY,VGA SW
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,VGA SW. Compatible with THERMAWAVE equipment. Part No. 14-025026.
THERMAWAVE
14-025065
PCB ASSY, CPU, 120MHZ
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, CPU, 120MHZ. Compatible with THERMAWAVE equipment. Part No. 14-025065.
THERMAWAVE
14-025391
PCB ASSY,NDATA ACQ,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,NDATA ACQ,P62. Compatible with THERMAWAVE equipment. Part No. 14-025391.
THERMAWAVE
14-025749
InaPCB Aseembly, Tested, 486DX2,3MB repl. by 14-119404
spare_part
High-quality nan for THERMAWAVE CMP tool. InaPCB Aseembly, Tested, 486DX2,3MB repl. by 14-119404. Compatible with THERMAWAVE equipment. Part No. 14-025749.
THERMAWAVE
14-026016
Ina, PCB Assy,Ethernet PCI ADPTR repl. by 14-119399
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB Assy,Ethernet PCI ADPTR repl. by 14-119399. Compatible with THERMAWAVE equipment. Part No. 14-026016.
THERMAWAVE
14-026025
Ina. PCB Assy,PCI,4 Port,10Base repl.by 14-030593
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. PCB Assy,PCI,4 Port,10Base repl.by 14-030593. Compatible with THERMAWAVE equipment. Part No. 14-026025.
THERMAWAVE
14-026188
PCB ASSY,CFG,ISA,8P,RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CFG,ISA,8P,RS232. Compatible with THERMAWAVE equipment. Part No. 14-026188.
THERMAWAVE
14-026257
PCB ASSY,DIGITIZER,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,DIGITIZER,P62. Compatible with THERMAWAVE equipment. Part No. 14-026257.
THERMAWAVE
14-026687
PCB ASSY,SBC,P3600MHZ,SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SBC,P3600MHZ,SCSI. Compatible with THERMAWAVE equipment. Part No. 14-026687.
THERMAWAVE
14-026706
PCB ASSY, CONFIG, SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY, CONFIG, SCSI. Compatible with THERMAWAVE equipment. Part No. 14-026706.
High-quality nan for THERMAWAVE CMP tool. Ina, PCB ASSY,CFG,600MHZ,P3,OP5X -relp.by14-029648. Compatible with THERMAWAVE equipment. Part No. 14-026967.
THERMAWAVE
14-027069
PCB ASSY,VP,COGNEX MVS-8120
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,VP,COGNEX MVS-8120. Compatible with THERMAWAVE equipment. Part No. 14-027069.
THERMAWAVE
14-027172
PCB ASSY,PCI,OCTAL,RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PCI,OCTAL,RS232. Compatible with THERMAWAVE equipment. Part No. 14-027172.
THERMAWAVE
14-028412
SF,PCB ASSY,DGTL INTFC,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,PCB ASSY,DGTL INTFC,ME. Compatible with THERMAWAVE equipment. Part No. 14-028412.
THERMAWAVE
14-028866
INA,PCB ASSY,ETHRNT,PCI ADPT repl. by 14-119399
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,PCB ASSY,ETHRNT,PCI ADPT repl. by 14-119399. Compatible with THERMAWAVE equipment. Part No. 14-028866.
THERMAWAVE
14-028881
PCB ASSY,PCI,8 AXIS W/SIM4
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PCI,8 AXIS W/SIM4. Compatible with THERMAWAVE equipment. Part No. 14-028881.
THERMAWAVE
14-029428
PCB ASSY,CFG,450MHZ,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CFG,450MHZ,TP630. Compatible with THERMAWAVE equipment. Part No. 14-029428.
THERMAWAVE
14-029440
PCB ASSY,SBC,P3,600MHZ,512M
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SBC,P3,600MHZ,512M. Compatible with THERMAWAVE equipment. Part No. 14-029440.
THERMAWAVE
14-029648
Ina,PCB, ASSY,CFG,700MHZ,P3,512 replaced by 14-119373
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,PCB, ASSY,CFG,700MHZ,P3,512 replaced by 14-119373. Compatible with THERMAWAVE equipment. Part No. 14-029648.
THERMAWAVE
14-030312
PCB ASSY,ENCDR BIAS,T-BALL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ENCDR BIAS,T-BALL. Compatible with THERMAWAVE equipment. Part No. 14-030312.
THERMAWAVE
14-030312
PCB ASSY,ENCDR BIAS,T-BALL
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ENCDR BIAS,T-BALL. Compatible with THERMAWAVE equipment. Part No. 14-030312.
THERMAWAVE
14-030593
Ina, PCB ASSY,Fast Ethernet PCI repl. by 14-119399
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, PCB ASSY,Fast Ethernet PCI repl. by 14-119399. Compatible with THERMAWAVE equipment. Part No. 14-030593.
THERMAWAVE
14-113255
EG,PCB ASSY,Z-BRAKE,AF,TPR
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PCB ASSY,Z-BRAKE,AF,TPR. Compatible with THERMAWAVE equipment. Part No. 14-113255.
THERMAWAVE
14-119360
PCB ASSY,INTCON P-62 BD
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,INTCON P-62 BD. Compatible with THERMAWAVE equipment. Part No. 14-119360.
THERMAWAVE
14-119369
PCB,CFG,700MHZ,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CFG,700MHZ,TP630XP. Compatible with THERMAWAVE equipment. Part No. 14-119369.
THERMAWAVE
14-119371
Ina, Pcb Assy,Ethernet,4-PORT repl. 14-119400
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Pcb Assy,Ethernet,4-PORT repl. 14-119400. Compatible with THERMAWAVE equipment. Part No. 14-119371.
THERMAWAVE
14-119373
PCB,CFG,700MHZ,512MB,OP53X/73X
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CFG,700MHZ,512MB,OP53X/73X. Compatible with THERMAWAVE equipment. Part No. 14-119373.
THERMAWAVE
14-119378
Ina. EG,PCB ASSY,Z-BRAKE,AF,TP630XP repl. by 14-113255
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. EG,PCB ASSY,Z-BRAKE,AF,TP630XP repl. by 14-113255. Compatible with THERMAWAVE equipment. Part No. 14-119378.
THERMAWAVE
14-119381
PCB ASSY,PWR_DGTZR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,PWR_DGTZR. Compatible with THERMAWAVE equipment. Part No. 14-119381.
THERMAWAVE
14-119387
PCB,BKPLN,CFG,ISA/PCI16+1+3
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,BKPLN,CFG,ISA/PCI16+1+3. Compatible with THERMAWAVE equipment. Part No. 14-119387.
THERMAWAVE
14-119389
Ina. Pcb Assy,Dual Mon,PCI,32MB repl. by 14-119409
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Pcb Assy,Dual Mon,PCI,32MB repl. by 14-119409. Compatible with THERMAWAVE equipment. Part No. 14-119389.
THERMAWAVE
14-119390
Ina,Pcb Assy,Cognex 8100M+ repl. by 14-119412
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Pcb Assy,Cognex 8100M+ repl. by 14-119412. Compatible with THERMAWAVE equipment. Part No. 14-119390.
THERMAWAVE
14-119391
PCB ASSY,CFG,700MHZ,512MB,W/BS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CFG,700MHZ,512MB,W/BS. Compatible with THERMAWAVE equipment. Part No. 14-119391.
THERMAWAVE
14-119392
PCB,CPU,700MHZ,512MB,W/BIOS
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CPU,700MHZ,512MB,W/BIOS. Compatible with THERMAWAVE equipment. Part No. 14-119392.
THERMAWAVE
14-119393
PCB,LIGHT PEN,FSTPNT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,LIGHT PEN,FSTPNT. Compatible with THERMAWAVE equipment. Part No. 14-119393.
THERMAWAVE
14-119394
PCB,CONFIG,LIGHT PEN,FSTPNT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CONFIG,LIGHT PEN,FSTPNT. Compatible with THERMAWAVE equipment. Part No. 14-119394.
THERMAWAVE
14-119395
PCB ASSY,SVG MUX
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SVG MUX. Compatible with THERMAWAVE equipment. Part No. 14-119395.
THERMAWAVE
14-119396
PCB ASSY,SVG DAB
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,SVG DAB. Compatible with THERMAWAVE equipment. Part No. 14-119396.
THERMAWAVE
14-119400
PCB Assy, Fast Ethernet,4 PORTrepl.by 14-119417
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB Assy, Fast Ethernet,4 PORTrepl.by 14-119417. Compatible with THERMAWAVE equipment. Part No. 14-119400.
THERMAWAVE
14-119401
PCB ASSY,CNTRL INTFC 2
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CNTRL INTFC 2. Compatible with THERMAWAVE equipment. Part No. 14-119401.
THERMAWAVE
14-119403
PCB ASSY,TRACKER,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,TRACKER,TP630XP. Compatible with THERMAWAVE equipment. Part No. 14-119403.
THERMAWAVE
14-119412
PCB ASSY,CFG,COGNEX 8100M+ need cable 11-108424 too!!!
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CFG,COGNEX 8100M+ need cable 11-108424 too!!!. Compatible with THERMAWAVE equipment. Part No. 14-119412.
THERMAWAVE
14-119414
PCB ASSY,AUTO FOCUS,XRR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,AUTO FOCUS,XRR. Compatible with THERMAWAVE equipment. Part No. 14-119414.
THERMAWAVE
14-119417
PCB ASSY,ETHERNET,4-PORT BECKH
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,ETHERNET,4-PORT BECKH. Compatible with THERMAWAVE equipment. Part No. 14-119417.
THERMAWAVE
14-119418
PCB ASSY,CFG,MS-XP,QUAD,RS232
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB ASSY,CFG,MS-XP,QUAD,RS232. Compatible with THERMAWAVE equipment. Part No. 14-119418.
THERMAWAVE
16-003717
ALARM,AUDIO
spare_part
High-quality nan for THERMAWAVE CMP tool. ALARM,AUDIO. Compatible with THERMAWAVE equipment. Part No. 16-003717.
THERMAWAVE
16-011062
ALARM,SONALERT,INT TONE,5-30V
spare_part
High-quality nan for THERMAWAVE CMP tool. ALARM,SONALERT,INT TONE,5-30V. Compatible with THERMAWAVE equipment. Part No. 16-011062.
THERMAWAVE
17-005325
CHARGER,12V,200MA
spare_part
High-quality nan for THERMAWAVE CMP tool. CHARGER,12V,200MA. Compatible with THERMAWAVE equipment. Part No. 17-005325.
THERMAWAVE
17-009011
TRANSFORMER,Power,3500VA
spare_part
High-quality nan for THERMAWAVE CMP tool. TRANSFORMER,Power,3500VA. Compatible with THERMAWAVE equipment. Part No. 17-009011.
THERMAWAVE
17-015657
TRANSFORMER,145O W/THRM Switch,CE
spare_part
High-quality nan for THERMAWAVE CMP tool. TRANSFORMER,145O W/THRM Switch,CE. Compatible with THERMAWAVE equipment. Part No. 17-015657.
THERMAWAVE
17-022109
TRANSFORMER,CTO-25A/4-20MA
spare_part
High-quality nan for THERMAWAVE CMP tool. TRANSFORMER,CTO-25A/4-20MA. Compatible with THERMAWAVE equipment. Part No. 17-022109.
THERMAWAVE
18-001168-02
INA,AMP ASSY,DET,MOD,REFL
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,AMP ASSY,DET,MOD,REFL. Compatible with THERMAWAVE equipment. Part No. 18-001168-02.
THERMAWAVE
18-001993
Mirror Assembly,Turn,2ND,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,Turn,2ND,AR. Compatible with THERMAWAVE equipment. Part No. 18-001993.
THERMAWAVE
18-002030
Mirror Assembly,White Light TurnING
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,White Light TurnING. Compatible with THERMAWAVE equipment. Part No. 18-002030.
THERMAWAVE
18-003242
SENSOR Assembly,Chopper,A624
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,Chopper,A624. Compatible with THERMAWAVE equipment. Part No. 18-003242.
THERMAWAVE
18-003376
FAN Assembly,TUBEAXIAL,60HZ
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN Assembly,TUBEAXIAL,60HZ. Compatible with THERMAWAVE equipment. Part No. 18-003376.
THERMAWAVE
18-003384
FAN Assembly,TUBEAXIAL,50HZ
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN Assembly,TUBEAXIAL,50HZ. Compatible with THERMAWAVE equipment. Part No. 18-003384.
THERMAWAVE
18-003617-01
FLUID,DAMPER,5CC
spare_part
High-quality nan for THERMAWAVE CMP tool. FLUID,DAMPER,5CC. Compatible with THERMAWAVE equipment. Part No. 18-003617-01.
THERMAWAVE
18-003617-02
GREASE,WHT LITHIUM
spare_part
High-quality nan for THERMAWAVE CMP tool. GREASE,WHT LITHIUM. Compatible with THERMAWAVE equipment. Part No. 18-003617-02.
THERMAWAVE
18-003617-03
GREASE,HYDriverOCARBON
spare_part
High-quality nan for THERMAWAVE CMP tool. GREASE,HYDriverOCARBON. Compatible with THERMAWAVE equipment. Part No. 18-003617-03.
THERMAWAVE
18-003659
Panel Assembly,RT SIDE
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,RT SIDE. Compatible with THERMAWAVE equipment. Part No. 18-003659.
THERMAWAVE
18-003666
Panel Assembly,LFT SIDE
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,LFT SIDE. Compatible with THERMAWAVE equipment. Part No. 18-003666.
THERMAWAVE
18-003820
Stage,Assembly,X-Y,6X8
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage,Assembly,X-Y,6X8. Compatible with THERMAWAVE equipment. Part No. 18-003820.
THERMAWAVE
18-003953-01
OBS. Motor Assembly,WFR TRANSPORT,Z
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. Motor Assembly,WFR TRANSPORT,Z. Compatible with THERMAWAVE equipment. Part No. 18-003953-01.
THERMAWAVE
18-004033-01
OBS. PAINT,TOUCH-UP,LEVEL HC BLUE
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PAINT,TOUCH-UP,LEVEL HC BLUE. Compatible with THERMAWAVE equipment. Part No. 18-004033-01.
THERMAWAVE
18-004033-02
OBS. PAINT,TOUCH-UP,LIGHT GRAY
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PAINT,TOUCH-UP,LIGHT GRAY. Compatible with THERMAWAVE equipment. Part No. 18-004033-02.
THERMAWAVE
18-004033-03
PAINT,TOUCH-UP,OFF WHITE
spare_part
High-quality nan for THERMAWAVE CMP tool. PAINT,TOUCH-UP,OFF WHITE. Compatible with THERMAWAVE equipment. Part No. 18-004033-03.
THERMAWAVE
18-004284-02
OBS. KEYBOARD Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. KEYBOARD Assembly. Compatible with THERMAWAVE equipment. Part No. 18-004284-02.
THERMAWAVE
18-004855-00
Motor Assembly,Stage,UNIV
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Stage,UNIV. Compatible with THERMAWAVE equipment. Part No. 18-004855-00.
THERMAWAVE
18-004855-01
Motor Assembly,Stage,X
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Stage,X. Compatible with THERMAWAVE equipment. Part No. 18-004855-01.
THERMAWAVE
18-004855-02
Motor Assembly,Stage,Y
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Stage,Y. Compatible with THERMAWAVE equipment. Part No. 18-004855-02.
THERMAWAVE
18-004855-03
Motor Assembly,Stage,Rotary
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Stage,Rotary. Compatible with THERMAWAVE equipment. Part No. 18-004855-03.
THERMAWAVE
18-005430
AUTOFOCUS Assembly,CYL REPLACEMNT
spare_part
High-quality nan for THERMAWAVE CMP tool. AUTOFOCUS Assembly,CYL REPLACEMNT. Compatible with THERMAWAVE equipment. Part No. 18-005430.
THERMAWAVE
18-005895
Motor Assy, Limit SW, AF
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assy, Limit SW, AF. Compatible with THERMAWAVE equipment. Part No. 18-005895.
THERMAWAVE
18-006123
Ina. CENTER/Flat FINDER Assembly,3IN repl. by18-122879
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. CENTER/Flat FINDER Assembly,3IN repl. by18-122879. Compatible with THERMAWAVE equipment. Part No. 18-006123.
THERMAWAVE
18-006298
Wheel Assembly,Chopper,DC,P2
spare_part
High-quality nan for THERMAWAVE CMP tool. Wheel Assembly,Chopper,DC,P2. Compatible with THERMAWAVE equipment. Part No. 18-006298.
THERMAWAVE
18-006484
Mirror Assembly,Turn,AR,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,Turn,AR,T9. Compatible with THERMAWAVE equipment. Part No. 18-006484.
THERMAWAVE
18-006487
Mirror Assembly,Turn,Hene,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,Turn,Hene,T9. Compatible with THERMAWAVE equipment. Part No. 18-006487.
THERMAWAVE
18-006491
Beam Pointer Assembly,Hene,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Pointer Assembly,Hene,T9. Compatible with THERMAWAVE equipment. Part No. 18-006491.
THERMAWAVE
18-006513
Beam Pointer Assembly,TRACKER,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Pointer Assembly,TRACKER,T9. Compatible with THERMAWAVE equipment. Part No. 18-006513.
THERMAWAVE
18-006549
Chopper Assembly,45DEG
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,45DEG. Compatible with THERMAWAVE equipment. Part No. 18-006549.
THERMAWAVE
18-006566
Stage Assembly,Rotary,6X8,TC
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,Rotary,6X8,TC. Compatible with THERMAWAVE equipment. Part No. 18-006566.
THERMAWAVE
18-006596
ATTENUATOR Assembly,Hene,AOM Driver
spare_part
High-quality nan for THERMAWAVE CMP tool. ATTENUATOR Assembly,Hene,AOM Driver. Compatible with THERMAWAVE equipment. Part No. 18-006596.
THERMAWAVE
18-006923
PNEUMATIC Assembly,MODULAR
spare_part
High-quality nan for THERMAWAVE CMP tool. PNEUMATIC Assembly,MODULAR. Compatible with THERMAWAVE equipment. Part No. 18-006923.
THERMAWAVE
18-006974
BENDER Assembly,DAMPED
spare_part
High-quality nan for THERMAWAVE CMP tool. BENDER Assembly,DAMPED. Compatible with THERMAWAVE equipment. Part No. 18-006974.
THERMAWAVE
18-006977
AUTOFOCUS Assembly,Mark3,50X/5X
spare_part
High-quality nan for THERMAWAVE CMP tool. AUTOFOCUS Assembly,Mark3,50X/5X. Compatible with THERMAWAVE equipment. Part No. 18-006977.
THERMAWAVE
18-007106
REFERENCE SupportPORT Assembly,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE SupportPORT Assembly,P20. Compatible with THERMAWAVE equipment. Part No. 18-007106.
THERMAWAVE
18-007175
PATTERN RECOGNITION Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. PATTERN RECOGNITION Assembly. Compatible with THERMAWAVE equipment. Part No. 18-007175.
THERMAWAVE
18-007282
DOOR Assembly,ELEC BOX
spare_part
High-quality nan for THERMAWAVE CMP tool. DOOR Assembly,ELEC BOX. Compatible with THERMAWAVE equipment. Part No. 18-007282.
THERMAWAVE
18-007283
USE UP EXISTING STOCK - then order 18-023806
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-023806. Compatible with THERMAWAVE equipment. Part No. 18-007283.
THERMAWAVE
18-007284
Power Supply Assembly,Analog,+-15V,3A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,Analog,+-15V,3A. Compatible with THERMAWAVE equipment. Part No. 18-007284.
THERMAWAVE
18-007438
Stage Assembly,Rotary,3IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,Rotary,3IN. Compatible with THERMAWAVE equipment. Part No. 18-007438.
THERMAWAVE
18-007478
Detector Assembly,I
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I. Compatible with THERMAWAVE equipment. Part No. 18-007478.
THERMAWAVE
18-007479
Detector Assembly,R
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,R. Compatible with THERMAWAVE equipment. Part No. 18-007479.
THERMAWAVE
18-007481
OBSOLETE - order 61-023002 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 61-023002 instead. Compatible with THERMAWAVE equipment. Part No. 18-007481.
THERMAWAVE
18-007482
Ina,Detector Assy,AUTOFOCUS replaced by 18-026601
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Detector Assy,AUTOFOCUS replaced by 18-026601. Compatible with THERMAWAVE equipment. Part No. 18-007482.
THERMAWAVE
18-007486
SPLITTER Assembly,2IN,Camera
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER Assembly,2IN,Camera. Compatible with THERMAWAVE equipment. Part No. 18-007486.
THERMAWAVE
18-007488
LENS POSITIONER ASSY,A,B,R
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS POSITIONER ASSY,A,B,R. Compatible with THERMAWAVE equipment. Part No. 18-007488.
THERMAWAVE
18-007490
Beam Splitter Assembly,1IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter Assembly,1IN. Compatible with THERMAWAVE equipment. Part No. 18-007490.
THERMAWAVE
18-007497
COLLIMATOR Assembly,White Light
spare_part
High-quality nan for THERMAWAVE CMP tool. COLLIMATOR Assembly,White Light. Compatible with THERMAWAVE equipment. Part No. 18-007497.
THERMAWAVE
18-007523
SPLITTER Assembly,2IN,Laser,50/50
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER Assembly,2IN,Laser,50/50. Compatible with THERMAWAVE equipment. Part No. 18-007523.
THERMAWAVE
18-007528
REFERENCE Assembly,SI/PT MAT
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,SI/PT MAT. Compatible with THERMAWAVE equipment. Part No. 18-007528.
THERMAWAVE
18-007534
Detector Assembly,White Light, T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,White Light, T12. Compatible with THERMAWAVE equipment. Part No. 18-007534.
THERMAWAVE
18-007535
THERMIStandardOR Assembly,Bracket StandardYLE
spare_part
High-quality nan for THERMAWAVE CMP tool. THERMIStandardOR Assembly,Bracket StandardYLE. Compatible with THERMAWAVE equipment. Part No. 18-007535.
THERMAWAVE
18-007547
PL Assembly,QUARTER WAVE,Hene,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,QUARTER WAVE,Hene,TPXP. Compatible with THERMAWAVE equipment. Part No. 18-007547.
THERMAWAVE
18-007548
Mirror Assembly,FNL Turn,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,FNL Turn,TPXP. Compatible with THERMAWAVE equipment. Part No. 18-007548.
THERMAWAVE
18-007549
Dichroic Assembly,LARGE,Hene,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. Dichroic Assembly,LARGE,Hene,TPXP. Compatible with THERMAWAVE equipment. Part No. 18-007549.
THERMAWAVE
18-007555
WEDGE Assembly,AR,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. WEDGE Assembly,AR,T12. Compatible with THERMAWAVE equipment. Part No. 18-007555.
THERMAWAVE
18-007556
Lens Assembly,Hene Input,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,Hene Input,T12. Compatible with THERMAWAVE equipment. Part No. 18-007556.
THERMAWAVE
18-007559
Lens Assembly,ARGON OUTPUT
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,ARGON OUTPUT. Compatible with THERMAWAVE equipment. Part No. 18-007559.
THERMAWAVE
18-007560
Detector Assembly,I-Hene,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I-Hene,T12. Compatible with THERMAWAVE equipment. Part No. 18-007560.
THERMAWAVE
18-007561
Detector Assembly,RTW/R-Hene,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,RTW/R-Hene,T12. Compatible with THERMAWAVE equipment. Part No. 18-007561.
THERMAWAVE
18-007564
Detector Assembly,AUTO FOCUS,RH MT
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,AUTO FOCUS,RH MT. Compatible with THERMAWAVE equipment. Part No. 18-007564.
THERMAWAVE
18-007612
SPLITTER Assembly,ARRAY Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER Assembly,ARRAY Detector. Compatible with THERMAWAVE equipment. Part No. 18-007612.
THERMAWAVE
18-007693
WORKStandardATION Assembly,IMG ANALYSIS
spare_part
High-quality nan for THERMAWAVE CMP tool. WORKStandardATION Assembly,IMG ANALYSIS. Compatible with THERMAWAVE equipment. Part No. 18-007693.
THERMAWAVE
18-007732
CARDCAGE Assembly,ANALOG
spare_part
High-quality nan for THERMAWAVE CMP tool. CARDCAGE Assembly,ANALOG. Compatible with THERMAWAVE equipment. Part No. 18-007732.
THERMAWAVE
18-007748
Modulator Assembly,A-O,Hene,ISO
spare_part
High-quality nan for THERMAWAVE CMP tool. Modulator Assembly,A-O,Hene,ISO. Compatible with THERMAWAVE equipment. Part No. 18-007748.
THERMAWAVE
18-007763
INA,AUTO FOCUS ASSY,MARKIIIA- repl.by 18-018064
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,AUTO FOCUS ASSY,MARKIIIA- repl.by 18-018064. Compatible with THERMAWAVE equipment. Part No. 18-007763.
THERMAWAVE
18-007854
OBSOLETE - order 61-028938 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 61-028938 instead. Compatible with THERMAWAVE equipment. Part No. 18-007854.
THERMAWAVE
18-007862
Ina. Power Supply Assembly,5V,50A repl. by 18-122845
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Power Supply Assembly,5V,50A repl. by 18-122845. Compatible with THERMAWAVE equipment. Part No. 18-007862.
THERMAWAVE
18-007924
Power Supply Assembly,+/-15VDC,5A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,+/-15VDC,5A. Compatible with THERMAWAVE equipment. Part No. 18-007924.
THERMAWAVE
18-007949
Power Supply Assembly,24V MTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,24V MTR. Compatible with THERMAWAVE equipment. Part No. 18-007949.
THERMAWAVE
18-008044
Motor Assembly,ND Filter
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,ND Filter. Compatible with THERMAWAVE equipment. Part No. 18-008044.
THERMAWAVE
18-008049
CUBE Assembly,AR POLARIZING
spare_part
High-quality nan for THERMAWAVE CMP tool. CUBE Assembly,AR POLARIZING. Compatible with THERMAWAVE equipment. Part No. 18-008049.
THERMAWAVE
18-008050
Driver Assembly,AR AOM,110MHZ,NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,AR AOM,110MHZ,NEOS. Compatible with THERMAWAVE equipment. Part No. 18-008050.
THERMAWAVE
18-008055
Driver Assembly,Hene AOM,200MHZ,NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,Hene AOM,200MHZ,NEOS. Compatible with THERMAWAVE equipment. Part No. 18-008055.
THERMAWAVE
18-008068
PL Assembly,1/4 WAVE,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,1/4 WAVE,AR. Compatible with THERMAWAVE equipment. Part No. 18-008068.
THERMAWAVE
18-008100
Motor Assembly,LNR,LARGE
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,LNR,LARGE. Compatible with THERMAWAVE equipment. Part No. 18-008100.
THERMAWAVE
18-008113
Motor Assembly,X-Y,AR TRACKER
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,X-Y,AR TRACKER. Compatible with THERMAWAVE equipment. Part No. 18-008113.
THERMAWAVE
18-008218
SENSOR Assembly,HUMIDITY
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,HUMIDITY. Compatible with THERMAWAVE equipment. Part No. 18-008218.
THERMAWAVE
18-008237
Panel Assembly,PNEUMATIC
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,PNEUMATIC. Compatible with THERMAWAVE equipment. Part No. 18-008237.
THERMAWAVE
18-008280
Bracket Assembly,BeamStandardOP
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket Assembly,BeamStandardOP. Compatible with THERMAWAVE equipment. Part No. 18-008280.
THERMAWAVE
18-008299
Vacuum Reservoir Assembly, P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Vacuum Reservoir Assembly, P20. Compatible with THERMAWAVE equipment. Part No. 18-008299.
THERMAWAVE
18-008301
BLOWER Assembly,ELEC BOX
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,ELEC BOX. Compatible with THERMAWAVE equipment. Part No. 18-008301.
THERMAWAVE
18-008383
Monitor Assembly,W/TILT&SwitchVL
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor Assembly,W/TILT&SwitchVL. Compatible with THERMAWAVE equipment. Part No. 18-008383.
THERMAWAVE
18-008460
Panel Assembly,Robot FRONT
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,Robot FRONT. Compatible with THERMAWAVE equipment. Part No. 18-008460.
THERMAWAVE
18-008541
THERMIStandardOR Assembly,HEAT SINK
spare_part
High-quality nan for THERMAWAVE CMP tool. THERMIStandardOR Assembly,HEAT SINK. Compatible with THERMAWAVE equipment. Part No. 18-008541.
THERMAWAVE
18-008559
SLIT/Filter Assembly,A+B ARRAY,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIT/Filter Assembly,A+B ARRAY,P20. Compatible with THERMAWAVE equipment. Part No. 18-008559.
THERMAWAVE
18-008610
Power Supply Assembly,+5V,Upgrade CPU
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,+5V,Upgrade CPU. Compatible with THERMAWAVE equipment. Part No. 18-008610.
THERMAWAVE
18-008786
HTR Assembly,ObjectiveECTIVE,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR Assembly,ObjectiveECTIVE,P22. Compatible with THERMAWAVE equipment. Part No. 18-008786.
THERMAWAVE
18-008791
Camera Assembly,ROCKER MT
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera Assembly,ROCKER MT. Compatible with THERMAWAVE equipment. Part No. 18-008791.
THERMAWAVE
18-008843
RPM Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. RPM Assembly. Compatible with THERMAWAVE equipment. Part No. 18-008843.
THERMAWAVE
18-008848
Power Supply Assembly,White Light, HO REMT
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,White Light, HO REMT. Compatible with THERMAWAVE equipment. Part No. 18-008848.
THERMAWAVE
18-008850
Filter Assembly,Camera
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,Camera. Compatible with THERMAWAVE equipment. Part No. 18-008850.
THERMAWAVE
18-008925
Power Supply Assembly,24V HEATER
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,24V HEATER. Compatible with THERMAWAVE equipment. Part No. 18-008925.
THERMAWAVE
18-008951
LT SHIELD Assembly,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. LT SHIELD Assembly,T12. Compatible with THERMAWAVE equipment. Part No. 18-008951.
THERMAWAVE
18-008967
Motor Assembly,LIGHT SHIELD,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,LIGHT SHIELD,T12. Compatible with THERMAWAVE equipment. Part No. 18-008967.
THERMAWAVE
18-009013
HTR/THMS ASSY,AF OBJ LENS
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR/THMS ASSY,AF OBJ LENS. Compatible with THERMAWAVE equipment. Part No. 18-009013.
High-quality nan for THERMAWAVE CMP tool. Ina.Power Supply Assembly,5V,50A,repl.by 18-122845. Compatible with THERMAWAVE equipment. Part No. 18-009154.
THERMAWAVE
18-009250
CUBE Assembly,Polarizer,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. CUBE Assembly,Polarizer,P22. Compatible with THERMAWAVE equipment. Part No. 18-009250.
THERMAWAVE
18-009251
POSITIONER Assembly,PINHOLE,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. POSITIONER Assembly,PINHOLE,P22. Compatible with THERMAWAVE equipment. Part No. 18-009251.
THERMAWAVE
18-009252
Detector Assembly,QUADCELL,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,QUADCELL,P22. Compatible with THERMAWAVE equipment. Part No. 18-009252.
THERMAWAVE
18-009253
SPLITTER Assembly,TWIN BLOCK,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER Assembly,TWIN BLOCK,P22. Compatible with THERMAWAVE equipment. Part No. 18-009253.
THERMAWAVE
18-009376
CENTER/Flat FINDER Assembly,5IN
spare_part
High-quality nan for THERMAWAVE CMP tool. CENTER/Flat FINDER Assembly,5IN. Compatible with THERMAWAVE equipment. Part No. 18-009376.
THERMAWAVE
18-009471
OBSOLETE - order 18-025072 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 18-025072 instead. Compatible with THERMAWAVE equipment. Part No. 18-009471.
THERMAWAVE
18-009479
BLOCK Assembly,Beam,SOL Actuated
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK Assembly,Beam,SOL Actuated. Compatible with THERMAWAVE equipment. Part No. 18-009479.
THERMAWAVE
18-009488
Lens Assembly,ADJ Camera
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,ADJ Camera. Compatible with THERMAWAVE equipment. Part No. 18-009488.
THERMAWAVE
18-009778
Kit, Eprom SET,10.98MM,CFF
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Eprom SET,10.98MM,CFF. Compatible with THERMAWAVE equipment. Part No. 18-009778.
THERMAWAVE
18-009858
Ina,Pwr Supply Assy,Spectromtr - repl.by 18-023426 or 61-023435 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Pwr Supply Assy,Spectromtr - repl.by 18-023426 or 61-023435 instead.. Compatible with THERMAWAVE equipment. Part No. 18-009858.
THERMAWAVE
18-009902
Detector Assembly,I,AR,LOW Power,T11
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I,AR,LOW Power,T11. Compatible with THERMAWAVE equipment. Part No. 18-009902.
THERMAWAVE
18-009904
Detector Assembly,R,AR,LOW Power,T11
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,R,AR,LOW Power,T11. Compatible with THERMAWAVE equipment. Part No. 18-009904.
THERMAWAVE
18-009905
Filter Assembly,ND 30%,LOW Power,T11
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,ND 30%,LOW Power,T11. Compatible with THERMAWAVE equipment. Part No. 18-009905.
THERMAWAVE
18-009938
PLUG Assembly,SHORTING,Laser Diode
spare_part
High-quality nan for THERMAWAVE CMP tool. PLUG Assembly,SHORTING,Laser Diode. Compatible with THERMAWAVE equipment. Part No. 18-009938.
THERMAWAVE
18-009941
USE UP EXISTING STOCK - then order 18-022849 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-022849 instead. Compatible with THERMAWAVE equipment. Part No. 18-009941.
THERMAWAVE
18-009966
Driver Assembly,Laser Diode,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,Laser Diode,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 18-009966.
THERMAWAVE
18-009985
PL Assembly,CASS Platform
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,CASS Platform. Compatible with THERMAWAVE equipment. Part No. 18-009985.
THERMAWAVE
18-010005
COMPUMotor StandardPR MTR CNTRL,TEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. COMPUMotor StandardPR MTR CNTRL,TEStandard. Compatible with THERMAWAVE equipment. Part No. 18-010005.
THERMAWAVE
18-010038
TRACKBALL KB50-114/Cable Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. TRACKBALL KB50-114/Cable Assembly. Compatible with THERMAWAVE equipment. Part No. 18-010038.
THERMAWAVE
18-010103
Chopper Assembly,Brushless Motor
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,Brushless Motor. Compatible with THERMAWAVE equipment. Part No. 18-010103.
THERMAWAVE
18-010242
Lens Assy, Objective, Heater, Tested
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assy, Objective, Heater, Tested. Compatible with THERMAWAVE equipment. Part No. 18-010242.
THERMAWAVE
18-010413
Shutter Assembly,WHITE LIGHT
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,WHITE LIGHT. Compatible with THERMAWAVE equipment. Part No. 18-010413.
THERMAWAVE
18-010422
INA,WHT LT Assy,A-SPECTRO repl.by 18-023422
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,WHT LT Assy,A-SPECTRO repl.by 18-023422. Compatible with THERMAWAVE equipment. Part No. 18-010422.
THERMAWAVE
18-010436
Driver,HARD FORMAT,340MB,SCS
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,HARD FORMAT,340MB,SCS. Compatible with THERMAWAVE equipment. Part No. 18-010436.
THERMAWAVE
18-010493
SPLITTER Assembly,2IN,White Light
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER Assembly,2IN,White Light. Compatible with THERMAWAVE equipment. Part No. 18-010493.
THERMAWAVE
18-010504
Obs. Keyboard Assembly,RS422 CONFIG,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Keyboard Assembly,RS422 CONFIG,TP. Compatible with THERMAWAVE equipment. Part No. 18-010504.
THERMAWAVE
18-010511
AIR CONDITIONER Assembly,MK2
spare_part
High-quality nan for THERMAWAVE CMP tool. AIR CONDITIONER Assembly,MK2. Compatible with THERMAWAVE equipment. Part No. 18-010511.
THERMAWAVE
18-010542
Lens Assembly,A-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,A-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-010542.
THERMAWAVE
18-010543
SLIT Assembly,A-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIT Assembly,A-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-010543.
THERMAWAVE
18-010544
Mirror/Aperture Assembly,A-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror/Aperture Assembly,A-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-010544.
THERMAWAVE
18-010545
GRATING Assembly,A-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. GRATING Assembly,A-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-010545.
THERMAWAVE
18-010546
Aperture Assembly,A-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture Assembly,A-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-010546.
THERMAWAVE
18-010547
USE UP EXISTING STOCK - then order 18-025240 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-025240 instead. Compatible with THERMAWAVE equipment. Part No. 18-010547.
THERMAWAVE
18-010557
TRACKBALL Assembly,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. TRACKBALL Assembly,OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-010557.
THERMAWAVE
18-010617
Window Assembly,AR Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Window Assembly,AR Laser. Compatible with THERMAWAVE equipment. Part No. 18-010617.
THERMAWAVE
18-010674
PL Assembly,OpticICS,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,OpticICS,OP2600. Compatible with THERMAWAVE equipment. Part No. 18-010674.
THERMAWAVE
18-010747
Wheel Assembly,Chopper,DC,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Wheel Assembly,Chopper,DC,OP2600. Compatible with THERMAWAVE equipment. Part No. 18-010747.
THERMAWAVE
18-010823
KEYBOARD Assembly,PC/AT CONF
spare_part
High-quality nan for THERMAWAVE CMP tool. KEYBOARD Assembly,PC/AT CONF. Compatible with THERMAWAVE equipment. Part No. 18-010823.
THERMAWAVE
18-010828
USE UP EXISTING STOCK - then order 18-018063 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-018063 instead. Compatible with THERMAWAVE equipment. Part No. 18-010828.
THERMAWAVE
18-010846
Motor/GEARBOX Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor/GEARBOX Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-010846.
THERMAWAVE
18-010918
BOX Assembly,AC Power,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,AC Power,BH. Compatible with THERMAWAVE equipment. Part No. 18-010918.
THERMAWAVE
18-010940
ELEC Assembly,BH,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. ELEC Assembly,BH,OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-010940.
THERMAWAVE
18-010946
BOX Assembly,A-B,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,A-B,OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-010946.
THERMAWAVE
18-010968
FLIPPER Assembly,INTEGRATED
spare_part
High-quality nan for THERMAWAVE CMP tool. FLIPPER Assembly,INTEGRATED. Compatible with THERMAWAVE equipment. Part No. 18-010968.
THERMAWAVE
18-011004
Motor Assembly,PL,864:1,12V
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,PL,864:1,12V. Compatible with THERMAWAVE equipment. Part No. 18-011004.
THERMAWAVE
18-011029
Filter Assembly,WHITE LIGHT
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,WHITE LIGHT. Compatible with THERMAWAVE equipment. Part No. 18-011029.
THERMAWAVE
18-011040
Controller Assembly,PLC/TERM BLK
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller Assembly,PLC/TERM BLK. Compatible with THERMAWAVE equipment. Part No. 18-011040.
THERMAWAVE
18-011085
Filter Assembly,SPIKE
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,SPIKE. Compatible with THERMAWAVE equipment. Part No. 18-011085.
THERMAWAVE
18-011086
Filter Assembly,UV BLOCKER
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,UV BLOCKER. Compatible with THERMAWAVE equipment. Part No. 18-011086.
THERMAWAVE
18-011089
Mirror Assembly,FINACTIVEL Turn,50/50
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,FINACTIVEL Turn,50/50. Compatible with THERMAWAVE equipment. Part No. 18-011089.
THERMAWAVE
18-011153
Shutter Assembly, White Light, No Filter
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly, White Light, No Filter. Compatible with THERMAWAVE equipment. Part No. 18-011153.
THERMAWAVE
18-011177
Panel Assembly,PNEUMATIC
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,PNEUMATIC. Compatible with THERMAWAVE equipment. Part No. 18-011177.
THERMAWAVE
18-011206
PL Assembly,1/4 WAVE PL
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,1/4 WAVE PL. Compatible with THERMAWAVE equipment. Part No. 18-011206.
THERMAWAVE
18-011220
Panel Assembly,TOP,MEAS MOD,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,TOP,MEAS MOD,BH. Compatible with THERMAWAVE equipment. Part No. 18-011220.
THERMAWAVE
18-011237
Driver,HARD,FORMAT,540MB,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,HARD,FORMAT,540MB,TP. Compatible with THERMAWAVE equipment. Part No. 18-011237.
THERMAWAVE
18-011325
PNL ASSY,ROBOT,FRONT,SMIF,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,ROBOT,FRONT,SMIF,OP. Compatible with THERMAWAVE equipment. Part No. 18-011325.
THERMAWAVE
18-011455
Equipe Robot,Z Limit Switch Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Z Limit Switch Assembly. Compatible with THERMAWAVE equipment. Part No. 18-011455.
THERMAWAVE
18-011456
Equipe Robot,THETA Limit Switch Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,THETA Limit Switch Assembly. Compatible with THERMAWAVE equipment. Part No. 18-011456.
THERMAWAVE
18-011457
Equipe Robot,RADIAL Limit Switch ASS
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,RADIAL Limit Switch ASS. Compatible with THERMAWAVE equipment. Part No. 18-011457.
THERMAWAVE
18-011469
OBSOLETE - order 18-021960 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 18-021960 instead. Compatible with THERMAWAVE equipment. Part No. 18-011469.
THERMAWAVE
18-011600
Door Assembly, OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. Door Assembly, OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-011600.
THERMAWAVE
18-011605
SLIDE Assembly,Window,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIDE Assembly,Window,OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-011605.
THERMAWAVE
18-011607
CYLINDER Assembly,Window,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. CYLINDER Assembly,Window,OP2600B. Compatible with THERMAWAVE equipment. Part No. 18-011607.
THERMAWAVE
18-011920
BLOWER Assembly,60HZ,115V
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,60HZ,115V. Compatible with THERMAWAVE equipment. Part No. 18-011920.
THERMAWAVE
18-011921
BLOWER Assembly,60HZ,230V
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,60HZ,230V. Compatible with THERMAWAVE equipment. Part No. 18-011921.
THERMAWAVE
18-011922
BLOWER Assembly,50HZ,110V
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,50HZ,110V. Compatible with THERMAWAVE equipment. Part No. 18-011922.
THERMAWAVE
18-011923
BLOWER Assembly,50HZ,220V
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,50HZ,220V. Compatible with THERMAWAVE equipment. Part No. 18-011923.
THERMAWAVE
18-011983
KEYBOARD Assembly,PC/AT CONFIG,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. KEYBOARD Assembly,PC/AT CONFIG,TP. Compatible with THERMAWAVE equipment. Part No. 18-011983.
THERMAWAVE
18-012099
Filter Assembly,NOTCH,5.5 DEG
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,NOTCH,5.5 DEG. Compatible with THERMAWAVE equipment. Part No. 18-012099.
THERMAWAVE
18-012206
REFERENCE Assembly,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012206.
THERMAWAVE
18-012208
Detector Assembly,Auto Focus,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,Auto Focus,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012208.
THERMAWAVE
18-012209
BEAM SPLITTER ASSY,DET,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAM SPLITTER ASSY,DET,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012209.
THERMAWAVE
18-012214
Shutter Assembly,ND Filter,T
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,ND Filter,T. Compatible with THERMAWAVE equipment. Part No. 18-012214.
THERMAWAVE
18-012216
Filter Assembly,I-PROBE/R-PROBE
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,I-PROBE/R-PROBE. Compatible with THERMAWAVE equipment. Part No. 18-012216.
THERMAWAVE
18-012219
Chopper Assembly,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012219.
THERMAWAVE
18-012220
Obs.Tracker Assembly, TP500 repl. by 18-122814
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.Tracker Assembly, TP500 repl. by 18-122814. Compatible with THERMAWAVE equipment. Part No. 18-012220.
THERMAWAVE
18-012221
Detector Assembly,R-PROBE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,R-PROBE,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012221.
THERMAWAVE
18-012222
Detector Assembly,I-PROBE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I-PROBE,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012222.
THERMAWAVE
18-012223
Detector Assembly, R-Mod, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly, R-Mod, TP500. Compatible with THERMAWAVE equipment. Part No. 18-012223.
THERMAWAVE
18-012224
Detector Assembly,I-MOD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I-MOD,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012224.
THERMAWAVE
18-012226
CDM Assembly,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. CDM Assembly,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012226.
THERMAWAVE
18-012227
LASER BLOCK ASSY, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER BLOCK ASSY, TP500. Compatible with THERMAWAVE equipment. Part No. 18-012227.
THERMAWAVE
18-012228
Laser BLOCK COOLER Assembly,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser BLOCK COOLER Assembly,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012228.
THERMAWAVE
18-012229
WEDGE ASSY,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. WEDGE ASSY,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012229.
THERMAWAVE
18-012231
COMBINER ASSY,W/L,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. COMBINER ASSY,W/L,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012231.
THERMAWAVE
18-012235
Beam Splitter Assembly,PL CB,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter Assembly,PL CB,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012235.
THERMAWAVE
18-012236
Beam Splitter Assembly,Auto Focus,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter Assembly,Auto Focus,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012236.
THERMAWAVE
18-012241
HTR Assembly,OpticICS PL,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR Assembly,OpticICS PL,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012241.
THERMAWAVE
18-012242
Obs.Laser Assembly,Probe,TP500 repl. by 18-015417
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.Laser Assembly,Probe,TP500 repl. by 18-015417. Compatible with THERMAWAVE equipment. Part No. 18-012242.
THERMAWAVE
18-012242
Obs.Laser Assembly,Probe,TP500 repl. by 18-015417
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.Laser Assembly,Probe,TP500 repl. by 18-015417. Compatible with THERMAWAVE equipment. Part No. 18-012242.
THERMAWAVE
18-012243
Laser Assembly,PUMP,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser Assembly,PUMP,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012243.
THERMAWAVE
18-012477
COMBINER Assembly,Laser,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. COMBINER Assembly,Laser,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012477.
THERMAWAVE
18-012480
Motor Assembly,TRACKER,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,TRACKER,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012480.
THERMAWAVE
18-012492
Diode Assembly,PUMP,TP500 , order 18-012243 tested.
spare_part
High-quality nan for THERMAWAVE CMP tool. Diode Assembly,PUMP,TP500 , order 18-012243 tested.. Compatible with THERMAWAVE equipment. Part No. 18-012492.
THERMAWAVE
18-012502
Block Assembly, FNL Turning, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Block Assembly, FNL Turning, TP500. Compatible with THERMAWAVE equipment. Part No. 18-012502.
THERMAWAVE
18-012503
LENS ASSY,AF,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,AF,TP500. Compatible with THERMAWAVE equipment. Part No. 18-012503.
THERMAWAVE
18-012513
OBS,SHUTTER ASSY,LASER SHIELD repl.by 18-029960
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,SHUTTER ASSY,LASER SHIELD repl.by 18-029960. Compatible with THERMAWAVE equipment. Part No. 18-012513.
THERMAWAVE
18-012535
Camera,CCD,MONO,CONFIG & TEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,CCD,MONO,CONFIG & TEStandard. Compatible with THERMAWAVE equipment. Part No. 18-012535.
THERMAWAVE
18-012647
Power Supply Assembly,CPU,5,12,12,24
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,CPU,5,12,12,24. Compatible with THERMAWAVE equipment. Part No. 18-012647.
THERMAWAVE
18-012704
AUTOFOCUS Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. AUTOFOCUS Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-012704.
THERMAWAVE
18-012705
Detector Assembly,RUV,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,RUV,UV. Compatible with THERMAWAVE equipment. Part No. 18-012705.
THERMAWAVE
18-012706
TOWER Assembly,Auto Focus,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. TOWER Assembly,Auto Focus,UV. Compatible with THERMAWAVE equipment. Part No. 18-012706.
THERMAWAVE
18-012707
Detector Assembly,Auto Focus,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,Auto Focus,UV. Compatible with THERMAWAVE equipment. Part No. 18-012707.
THERMAWAVE
18-012708
INA,Chopper Assembly,UV replaced by 18-018892
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,Chopper Assembly,UV replaced by 18-018892. Compatible with THERMAWAVE equipment. Part No. 18-012708.
THERMAWAVE
18-012710
Mirror Assembly,IUV,TurnING,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,IUV,TurnING,UV. Compatible with THERMAWAVE equipment. Part No. 18-012710.
THERMAWAVE
18-012713
Mirror Assembly,MOVING,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,MOVING,UV. Compatible with THERMAWAVE equipment. Part No. 18-012713.
THERMAWAVE
18-012714
Detector Assembly,IUV,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,IUV,UV. Compatible with THERMAWAVE equipment. Part No. 18-012714.
THERMAWAVE
18-012715
Shutter Assembly,UV FiberER,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,UV FiberER,UV. Compatible with THERMAWAVE equipment. Part No. 18-012715.
THERMAWAVE
18-012716
Shutter Assembly,Laser/White Light, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,Laser/White Light, UV. Compatible with THERMAWAVE equipment. Part No. 18-012716.
THERMAWAVE
18-012717
Mirror Assembly,EDGE,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,EDGE,UV. Compatible with THERMAWAVE equipment. Part No. 18-012717.
THERMAWAVE
18-012770
Detector Assembly,QUAD CELL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,QUAD CELL,UV. Compatible with THERMAWAVE equipment. Part No. 18-012770.
THERMAWAVE
18-012771
SPLITTER ASSY,TWIN BLOCK,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. SPLITTER ASSY,TWIN BLOCK,UV. Compatible with THERMAWAVE equipment. Part No. 18-012771.
THERMAWAVE
18-012795
INA,DR,HARD,FORMAT,540MB- order 18-013828 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DR,HARD,FORMAT,540MB- order 18-013828 instead. Compatible with THERMAWAVE equipment. Part No. 18-012795.
THERMAWAVE
18-012795
INA,DR,HARD,FORMAT,540MB- order 18-013828 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DR,HARD,FORMAT,540MB- order 18-013828 instead. Compatible with THERMAWAVE equipment. Part No. 18-012795.
THERMAWAVE
18-012796
Driver,HARD,FORMATTED,540MB,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,HARD,FORMATTED,540MB,TP420. Compatible with THERMAWAVE equipment. Part No. 18-012796.
THERMAWAVE
18-012799
Ina.Detector Array repl. by 18-025072
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Detector Array repl. by 18-025072. Compatible with THERMAWAVE equipment. Part No. 18-012799.
THERMAWAVE
18-012839
BOX Assembly,INTERLOCK,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,INTERLOCK,UV. Compatible with THERMAWAVE equipment. Part No. 18-012839.
THERMAWAVE
18-012962
Driver Assembly,Stage,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,Stage,UV. Compatible with THERMAWAVE equipment. Part No. 18-012962.
THERMAWAVE
18-012972
Lens Assembly,UV CONDENSER,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,UV CONDENSER,UV. Compatible with THERMAWAVE equipment. Part No. 18-012972.
THERMAWAVE
18-012973
LENS ASSY,WHT LT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,WHT LT,UV. Compatible with THERMAWAVE equipment. Part No. 18-012973.
THERMAWAVE
18-013003
BULB Assembly,UPR TUNGStandardEN,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB Assembly,UPR TUNGStandardEN,UV. Compatible with THERMAWAVE equipment. Part No. 18-013003.
THERMAWAVE
18-013004
BULB Assembly,LWR TUNGStandardEN,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB Assembly,LWR TUNGStandardEN,UV. Compatible with THERMAWAVE equipment. Part No. 18-013004.
THERMAWAVE
18-013013
Platform Assembly,Stage,OP2600DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Platform Assembly,Stage,OP2600DUV. Compatible with THERMAWAVE equipment. Part No. 18-013013.
THERMAWAVE
18-013014
Filter Assembly,White Light, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,White Light, UV. Compatible with THERMAWAVE equipment. Part No. 18-013014.
THERMAWAVE
18-013071
Shutter, PWR DR Assy, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter, PWR DR Assy, UV. Compatible with THERMAWAVE equipment. Part No. 18-013071.
THERMAWAVE
18-013072
Detector SupportPORT Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector SupportPORT Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-013072.
THERMAWAVE
18-013073
INTERCONNECT Assembly,Auto Focus,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. INTERCONNECT Assembly,Auto Focus,UV. Compatible with THERMAWAVE equipment. Part No. 18-013073.
THERMAWAVE
18-013075
Monitor Assembly,Chopper,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor Assembly,Chopper,UV. Compatible with THERMAWAVE equipment. Part No. 18-013075.
THERMAWAVE
18-013088
Panel Assembly,PNEUMATIC,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,PNEUMATIC,UV. Compatible with THERMAWAVE equipment. Part No. 18-013088.
THERMAWAVE
18-013147
Power Supply Assembly,+/-8V,5A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,+/-8V,5A. Compatible with THERMAWAVE equipment. Part No. 18-013147.
THERMAWAVE
18-013254
CENTER/Flat FINDER Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CENTER/Flat FINDER Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-013254.
THERMAWAVE
18-013282
PMT Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. PMT Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-013282.
THERMAWAVE
18-013290
Power Supply Assembly,MAIN,DC,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,MAIN,DC,UV. Compatible with THERMAWAVE equipment. Part No. 18-013290.
THERMAWAVE
18-013297
FAN ASSY,LT SOURCE PL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN ASSY,LT SOURCE PL,UV. Compatible with THERMAWAVE equipment. Part No. 18-013297.
THERMAWAVE
18-013331
USE UP EXISTING STOCK - then order 61-023436 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 61-023436 instead.. Compatible with THERMAWAVE equipment. Part No. 18-013331.
THERMAWAVE
18-013401
Switch/LED Assembly,LaserPower INTLK,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch/LED Assembly,LaserPower INTLK,TP500. Compatible with THERMAWAVE equipment. Part No. 18-013401.
THERMAWAVE
18-013519
Stage Assembly,X/Y/THETA,8X12
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y/THETA,8X12. Compatible with THERMAWAVE equipment. Part No. 18-013519.
THERMAWAVE
18-013520
Stage Assembly,X/Y,8X12
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y,8X12. Compatible with THERMAWAVE equipment. Part No. 18-013520.
THERMAWAVE
18-013521
Motor Assembly,X/Y/THETA,8X12
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,X/Y/THETA,8X12. Compatible with THERMAWAVE equipment. Part No. 18-013521.
THERMAWAVE
18-013522
Stage Assembly,ROT W/5IN CHUCK
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,ROT W/5IN CHUCK. Compatible with THERMAWAVE equipment. Part No. 18-013522.
THERMAWAVE
18-013577
BULB Assembly,DEUTERIUM
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB Assembly,DEUTERIUM. Compatible with THERMAWAVE equipment. Part No. 18-013577.
THERMAWAVE
18-013580
Chopper Assembly,DC,OP2600UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,DC,OP2600UV. Compatible with THERMAWAVE equipment. Part No. 18-013580.
THERMAWAVE
18-013658
HTR Assembly,Objective Lens,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR Assembly,Objective Lens,TP500. Compatible with THERMAWAVE equipment. Part No. 18-013658.
THERMAWAVE
18-013761
REFERENCE Assembly,BLOCK,FINE-Z
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,BLOCK,FINE-Z. Compatible with THERMAWAVE equipment. Part No. 18-013761.
THERMAWAVE
18-013792
HEATER Assembly,Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. HEATER Assembly,Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 18-013792.
THERMAWAVE
18-013794
HTR/THMS Assembly,Auto Focus Objective Lens,TP50
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR/THMS Assembly,Auto Focus Objective Lens,TP50. Compatible with THERMAWAVE equipment. Part No. 18-013794.
THERMAWAVE
18-013812
MODULATOR ASSY,AR,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. MODULATOR ASSY,AR,TP. Compatible with THERMAWAVE equipment. Part No. 18-013812.
THERMAWAVE
18-013828
Ina,Driver,HARD,FORMATTED,1GB,P26/T50 repl. by 18-122754
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Driver,HARD,FORMATTED,1GB,P26/T50 repl. by 18-122754. Compatible with THERMAWAVE equipment. Part No. 18-013828.
THERMAWAVE
18-013977
3LT TWR ASSY,OP26/3260/90,TP5
spare_part
High-quality nan for THERMAWAVE CMP tool. 3LT TWR ASSY,OP26/3260/90,TP5. Compatible with THERMAWAVE equipment. Part No. 18-013977.
THERMAWAVE
18-013977
3LT TWR ASSY,OP26/3260/90,TP5
spare_part
High-quality nan for THERMAWAVE CMP tool. 3LT TWR ASSY,OP26/3260/90,TP5. Compatible with THERMAWAVE equipment. Part No. 18-013977.
THERMAWAVE
18-013985
PL Assembly,CASS Platform,PEAK MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assembly,CASS Platform,PEAK MOD. Compatible with THERMAWAVE equipment. Part No. 18-013985.
THERMAWAVE
18-014001
OBSOLETE - order 61-023003 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 61-023003 instead. Compatible with THERMAWAVE equipment. Part No. 18-014001.
THERMAWAVE
18-014007
SEPARATOR Assembly,AIR Filter,AOM
spare_part
High-quality nan for THERMAWAVE CMP tool. SEPARATOR Assembly,AIR Filter,AOM. Compatible with THERMAWAVE equipment. Part No. 18-014007.
THERMAWAVE
18-014047
Ina, WHIRLIGIG Assembly,BPE 2,P34 repl. by 18-021419
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, WHIRLIGIG Assembly,BPE 2,P34 repl. by 18-021419. Compatible with THERMAWAVE equipment. Part No. 18-014047.
THERMAWAVE
18-014093
Ionizer Assembly,NON-INDEXER
spare_part
High-quality nan for THERMAWAVE CMP tool. Ionizer Assembly,NON-INDEXER. Compatible with THERMAWAVE equipment. Part No. 18-014093.
THERMAWAVE
18-014115
Fine-Z and Theta Assembly, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Fine-Z and Theta Assembly, P34. Compatible with THERMAWAVE equipment. Part No. 18-014115.
THERMAWAVE
18-014173
Lens Assembly,Video,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,Video,TP500. Compatible with THERMAWAVE equipment. Part No. 18-014173.
THERMAWAVE
18-014235
EG,Driver,HARD,FORMATTED,1280MB
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,Driver,HARD,FORMATTED,1280MB. Compatible with THERMAWAVE equipment. Part No. 18-014235.
THERMAWAVE
18-014236
INTERFACE BD Assembly,Cognex
spare_part
High-quality nan for THERMAWAVE CMP tool. INTERFACE BD Assembly,Cognex. Compatible with THERMAWAVE equipment. Part No. 18-014236.
THERMAWAVE
18-014287
Power Supply Assembly,MAIN,DC,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,MAIN,DC,OP. Compatible with THERMAWAVE equipment. Part No. 18-014287.
THERMAWAVE
18-014467
Obs, White Light SOURCE Assembly,P34, repl. by 18-122515
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs, White Light SOURCE Assembly,P34, repl. by 18-122515. Compatible with THERMAWAVE equipment. Part No. 18-014467.
THERMAWAVE
18-014467
Obs, White Light SOURCE Assembly,P34, repl. by 18-122515
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs, White Light SOURCE Assembly,P34, repl. by 18-122515. Compatible with THERMAWAVE equipment. Part No. 18-014467.
THERMAWAVE
18-014515
SENSOR Assembly,HUMIDITY,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,HUMIDITY,DUV. Compatible with THERMAWAVE equipment. Part No. 18-014515.
THERMAWAVE
18-014554
Power Drawer Assembly, Electrical Box, CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Drawer Assembly, Electrical Box, CE. Compatible with THERMAWAVE equipment. Part No. 18-014554.
THERMAWAVE
18-014555
CIRCUIT BREAKER Assembly,OP2600,CE
spare_part
High-quality nan for THERMAWAVE CMP tool. CIRCUIT BREAKER Assembly,OP2600,CE. Compatible with THERMAWAVE equipment. Part No. 18-014555.
THERMAWAVE
18-014812
Power Supply Assembly,TUNGStandardEN,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,TUNGStandardEN,UV. Compatible with THERMAWAVE equipment. Part No. 18-014812.
THERMAWAVE
18-015020
Shutter Assembly,CLMP,PROBE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,CLMP,PROBE,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015020.
THERMAWAVE
18-015023
Shutter Assembly,CLMP,PUMP,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,CLMP,PUMP,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015023.
THERMAWAVE
18-015027
Obs.Shutter Assembly,ND Fltr,repl.by 18-122822
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.Shutter Assembly,ND Fltr,repl.by 18-122822. Compatible with THERMAWAVE equipment. Part No. 18-015027.
THERMAWAVE
18-015099
Chopper Assembly,SIDE Beam
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,SIDE Beam. Compatible with THERMAWAVE equipment. Part No. 18-015099.
THERMAWAVE
18-015119
SLIT Assembly, WL-Spectro,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIT Assembly, WL-Spectro,P34. Compatible with THERMAWAVE equipment. Part No. 18-015119.
THERMAWAVE
18-015175
Lens Assembly,Filter,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly,Filter,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015175.
THERMAWAVE
18-015208
HTR Assembly,ObjectiveECTIVE,100X
spare_part
High-quality nan for THERMAWAVE CMP tool. HTR Assembly,ObjectiveECTIVE,100X. Compatible with THERMAWAVE equipment. Part No. 18-015208.
THERMAWAVE
18-015227
Ina. BOX ASSY,PWR,AC/EMO - repl. by 18-028860
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. BOX ASSY,PWR,AC/EMO - repl. by 18-028860. Compatible with THERMAWAVE equipment. Part No. 18-015227.
THERMAWAVE
18-015241
Camera Assembly,CCD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera Assembly,CCD,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015241.
THERMAWAVE
18-015285
LENS ASSY,APT&MIR,WL,SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,APT&MIR,WL,SPECTRO. Compatible with THERMAWAVE equipment. Part No. 18-015285.
THERMAWAVE
18-015286
LENS,OBJ,100X
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS,OBJ,100X. Compatible with THERMAWAVE equipment. Part No. 18-015286.
THERMAWAVE
18-015291
MONOCHROMATOR SPLT GR,TEStandardED
spare_part
High-quality nan for THERMAWAVE CMP tool. MONOCHROMATOR SPLT GR,TEStandardED. Compatible with THERMAWAVE equipment. Part No. 18-015291.
THERMAWAVE
18-015298
Platform Assembly,StandardG,T&R 8X8,P30
spare_part
High-quality nan for THERMAWAVE CMP tool. Platform Assembly,StandardG,T&R 8X8,P30. Compatible with THERMAWAVE equipment. Part No. 18-015298.
THERMAWAVE
18-015301
O*Platform Assembly,StandardG,T&R8X12,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. O*Platform Assembly,StandardG,T&R8X12,OP. Compatible with THERMAWAVE equipment. Part No. 18-015301.
THERMAWAVE
18-015417
Laser Assembly,PROBE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser Assembly,PROBE,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015417.
THERMAWAVE
18-015418
Inactive, Laser Assy, Pump, TP500 replaced by 18-012243
spare_part
High-quality nan for THERMAWAVE CMP tool. Inactive, Laser Assy, Pump, TP500 replaced by 18-012243. Compatible with THERMAWAVE equipment. Part No. 18-015418.
THERMAWAVE
18-015438
BLOCK Assembly,BPE/BPR Optic,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK Assembly,BPE/BPR Optic,P34. Compatible with THERMAWAVE equipment. Part No. 18-015438.
THERMAWAVE
18-015442
RELAY ASSY,BPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. RELAY ASSY,BPR,P34. Compatible with THERMAWAVE equipment. Part No. 18-015442.
THERMAWAVE
18-015449
Motor Assembly,THETA,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,THETA,OP2600. Compatible with THERMAWAVE equipment. Part No. 18-015449.
THERMAWAVE
18-015449
Motor Assembly,THETA,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,THETA,OP2600. Compatible with THERMAWAVE equipment. Part No. 18-015449.
THERMAWAVE
18-015450
Motor Assembly,X/Y,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,X/Y,OP2600. Compatible with THERMAWAVE equipment. Part No. 18-015450.
THERMAWAVE
18-015460
Shutter Assembly,Laser Diode Beam
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,Laser Diode Beam. Compatible with THERMAWAVE equipment. Part No. 18-015460.
THERMAWAVE
18-015504
OBSOLETE - order 18-020051 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 18-020051 instead. Compatible with THERMAWAVE equipment. Part No. 18-015504.
THERMAWAVE
18-015505
Lens Exchange Assembly,15X,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Exchange Assembly,15X,P34. Compatible with THERMAWAVE equipment. Part No. 18-015505.
THERMAWAVE
18-015517
Stage Assembly,X/Y,8X8,PACT,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y,8X8,PACT,OP. Compatible with THERMAWAVE equipment. Part No. 18-015517.
THERMAWAVE
18-015519
Stage Assembly,Rotary,5IN,OpticO
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,Rotary,5IN,OpticO. Compatible with THERMAWAVE equipment. Part No. 18-015519.
THERMAWAVE
18-015537
BLOCK Assembly,Mirror,BPE
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK Assembly,Mirror,BPE. Compatible with THERMAWAVE equipment. Part No. 18-015537.
THERMAWAVE
18-015542
Pinhole Assembly, Adjustable, BPE, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Pinhole Assembly, Adjustable, BPE, P34. Compatible with THERMAWAVE equipment. Part No. 18-015542.
THERMAWAVE
18-015549
Detector Assembly,AUTOFOCUS,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,AUTOFOCUS,P34. Compatible with THERMAWAVE equipment. Part No. 18-015549.
THERMAWAVE
18-015556
Detector Assembly, I-Laser,034
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly, I-Laser,034. Compatible with THERMAWAVE equipment. Part No. 18-015556.
THERMAWAVE
18-015557
Detector Assembly, BPE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly, BPE,P34. Compatible with THERMAWAVE equipment. Part No. 18-015557.
THERMAWAVE
18-015557
Detector Assembly, BPE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly, BPE,P34. Compatible with THERMAWAVE equipment. Part No. 18-015557.
THERMAWAVE
18-015558
Detector Assembly,TILT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,TILT,P34. Compatible with THERMAWAVE equipment. Part No. 18-015558.
THERMAWAVE
18-015689
AMPLIFIER SERVO Assembly,3AXIS,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. AMPLIFIER SERVO Assembly,3AXIS,TP. Compatible with THERMAWAVE equipment. Part No. 18-015689.
THERMAWAVE
18-015698
Platform Assembly,Stage,8X8,PACT
spare_part
High-quality nan for THERMAWAVE CMP tool. Platform Assembly,Stage,8X8,PACT. Compatible with THERMAWAVE equipment. Part No. 18-015698.
THERMAWAVE
18-015731
INA,DETECTOR ASSY,WL-SPCTR,P34 repl. by 18-025243
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DETECTOR ASSY,WL-SPCTR,P34 repl. by 18-025243. Compatible with THERMAWAVE equipment. Part No. 18-015731.
THERMAWAVE
18-015761
DRAWER ASSY,ELEC,UPR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DRAWER ASSY,ELEC,UPR,P34. Compatible with THERMAWAVE equipment. Part No. 18-015761.
THERMAWAVE
18-015766
BLOWER Assembly,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,P34. Compatible with THERMAWAVE equipment. Part No. 18-015766.
THERMAWAVE
18-015858
HSG Assembly,TELESCOPE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG Assembly,TELESCOPE,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015858.
THERMAWAVE
18-015863
MIRROR ASSY,FINAL TURN,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,FINAL TURN,TP500. Compatible with THERMAWAVE equipment. Part No. 18-015863.
THERMAWAVE
18-015869
Detector Assembly,OAL/Polarizer,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,OAL/Polarizer,P3. Compatible with THERMAWAVE equipment. Part No. 18-015869.
THERMAWAVE
18-015892
AMPLIFIER,SERVO,PWM,PCMT,TStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. AMPLIFIER,SERVO,PWM,PCMT,TStandard. Compatible with THERMAWAVE equipment. Part No. 18-015892.
THERMAWAVE
18-015894
Gauge Assembly, PNEU,OP2600JPN
spare_part
High-quality nan for THERMAWAVE CMP tool. Gauge Assembly, PNEU,OP2600JPN. Compatible with THERMAWAVE equipment. Part No. 18-015894.
THERMAWAVE
18-016001
MT Assembly,Laser,OAL,Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. MT Assembly,Laser,OAL,Hene. Compatible with THERMAWAVE equipment. Part No. 18-016001.
THERMAWAVE
18-016017
Polarizer Assembly,OA Laser,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Polarizer Assembly,OA Laser,P34. Compatible with THERMAWAVE equipment. Part No. 18-016017.
THERMAWAVE
18-016057
LAMP Assembly,White Light SOURCE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP Assembly,White Light SOURCE,P34. Compatible with THERMAWAVE equipment. Part No. 18-016057.
THERMAWAVE
18-016158
Ina, P/S Assy,White Light, P34 repl. by 18-122516
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, P/S Assy,White Light, P34 repl. by 18-122516. Compatible with THERMAWAVE equipment. Part No. 18-016158.
THERMAWAVE
18-016160
Power Supply Assembly,UPR DC,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,UPR DC,P34. Compatible with THERMAWAVE equipment. Part No. 18-016160.
THERMAWAVE
18-016169
Driver Assembly,Motor,VEXTA,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,Motor,VEXTA,P34. Compatible with THERMAWAVE equipment. Part No. 18-016169.
THERMAWAVE
18-016170
Driver Assembly, Motor, IMS, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly, Motor, IMS, P34. Compatible with THERMAWAVE equipment. Part No. 18-016170.
THERMAWAVE
18-016291
Mirror Assembly,Mirror,AE,OP52
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,Mirror,AE,OP52. Compatible with THERMAWAVE equipment. Part No. 18-016291.
THERMAWAVE
18-016306
Panel Assembly,PNEU,StandardG/ROB,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,PNEU,StandardG/ROB,P34. Compatible with THERMAWAVE equipment. Part No. 18-016306.
THERMAWAVE
18-016309
BOX Assembly,MAIN DISCONNECT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,MAIN DISCONNECT,P34. Compatible with THERMAWAVE equipment. Part No. 18-016309.
THERMAWAVE
18-016312
Power Supply Assembly,5,12,15,24V
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,5,12,15,24V. Compatible with THERMAWAVE equipment. Part No. 18-016312.
THERMAWAVE
18-016345
LENS ASSY, 1/4 WAVE PL,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY, 1/4 WAVE PL,TP500. Compatible with THERMAWAVE equipment. Part No. 18-016345.
THERMAWAVE
18-016395
Shutter Assembly,White Light, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,White Light, P34. Compatible with THERMAWAVE equipment. Part No. 18-016395.
THERMAWAVE
18-016429
INA,GRATING ASSY,DIFFRACTION
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,GRATING ASSY,DIFFRACTION. Compatible with THERMAWAVE equipment. Part No. 18-016429.
THERMAWAVE
18-016464
MIRROR ASSY, TWIN PARABL, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY, TWIN PARABL, P34. Compatible with THERMAWAVE equipment. Part No. 18-016464.
THERMAWAVE
18-016505
Pneumatic Assembly, Quick Disconnect
spare_part
High-quality nan for THERMAWAVE CMP tool. Pneumatic Assembly, Quick Disconnect. Compatible with THERMAWAVE equipment. Part No. 18-016505.
THERMAWAVE
18-016634
Steppergig Assembly, Stepper, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Steppergig Assembly, Stepper, P34. Compatible with THERMAWAVE equipment. Part No. 18-016634.
THERMAWAVE
18-016654
X/Y/THETA Assembly,W/OpticO UpgradeR
spare_part
High-quality nan for THERMAWAVE CMP tool. X/Y/THETA Assembly,W/OpticO UpgradeR. Compatible with THERMAWAVE equipment. Part No. 18-016654.
THERMAWAVE
18-016707
Mirror Assembly,UV SOURCE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,UV SOURCE,P34. Compatible with THERMAWAVE equipment. Part No. 18-016707.
THERMAWAVE
18-016884
Ionizer Assembly,OP,BULKHEAD
spare_part
High-quality nan for THERMAWAVE CMP tool. Ionizer Assembly,OP,BULKHEAD. Compatible with THERMAWAVE equipment. Part No. 18-016884.
THERMAWAVE
18-016898
Detector Assy, UV-WL, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assy, UV-WL, P34. Compatible with THERMAWAVE equipment. Part No. 18-016898.
THERMAWAVE
18-017117
Filter Assembly, MVG, with Lens, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly, MVG, with Lens, P34. Compatible with THERMAWAVE equipment. Part No. 18-017117.
THERMAWAVE
18-017187
DOCKING Assembly,BOTTOM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DOCKING Assembly,BOTTOM,P34. Compatible with THERMAWAVE equipment. Part No. 18-017187.
THERMAWAVE
18-017259
Stage Assembly,X,Y,THETA,OP3260
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X,Y,THETA,OP3260. Compatible with THERMAWAVE equipment. Part No. 18-017259.
THERMAWAVE
18-017260
Stage Assembly,X/Y,8X8,OP3260
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y,8X8,OP3260. Compatible with THERMAWAVE equipment. Part No. 18-017260.
THERMAWAVE
18-017318
Block Assembly, 2", B/S Source, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Block Assembly, 2", B/S Source, P34. Compatible with THERMAWAVE equipment. Part No. 18-017318.
THERMAWAVE
18-017321
LENS ASSY,OFF-AXIS,FOCUS,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,OFF-AXIS,FOCUS,P34. Compatible with THERMAWAVE equipment. Part No. 18-017321.
THERMAWAVE
18-017323
Ina. Driver,FORMATTED,2GB,P30 repl. by 18-122765
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Driver,FORMATTED,2GB,P30 repl. by 18-122765. Compatible with THERMAWAVE equipment. Part No. 18-017323.
THERMAWAVE
18-017334
Stage Assembly,Rotary,OP3260
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,Rotary,OP3260. Compatible with THERMAWAVE equipment. Part No. 18-017334.
THERMAWAVE
18-017342
Shutter Assembly, White Light, No Filter, TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly, White Light, No Filter, TP. Compatible with THERMAWAVE equipment. Part No. 18-017342.
THERMAWAVE
18-017381
BOX ASSY,MN DISCONN,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX ASSY,MN DISCONN,P35. Compatible with THERMAWAVE equipment. Part No. 18-017381.
THERMAWAVE
18-017466
PL Assy, Cassette Platform, JPN
spare_part
High-quality nan for THERMAWAVE CMP tool. PL Assy, Cassette Platform, JPN. Compatible with THERMAWAVE equipment. Part No. 18-017466.
THERMAWAVE
18-017518
CHUCK Assembly,FINE-Z StandardG
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK Assembly,FINE-Z StandardG. Compatible with THERMAWAVE equipment. Part No. 18-017518.
THERMAWAVE
18-017525
GRATING ASSY,WL-SPECTRO,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. GRATING ASSY,WL-SPECTRO,P34. Compatible with THERMAWAVE equipment. Part No. 18-017525.
THERMAWAVE
18-017578
Stage Assembly,X/Y/THETA,8X12,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y/THETA,8X12,DUV. Compatible with THERMAWAVE equipment. Part No. 18-017578.
THERMAWAVE
18-017579
Stage Assembly,X/Y,8X12,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X/Y,8X12,DUV. Compatible with THERMAWAVE equipment. Part No. 18-017579.
THERMAWAVE
18-017603
Ina.BOX Assembly,Auto Focus DriverVR,P34 repl. by 18-122961
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.BOX Assembly,Auto Focus DriverVR,P34 repl. by 18-122961. Compatible with THERMAWAVE equipment. Part No. 18-017603.
THERMAWAVE
18-017607
Mirror Assembly,MOVING,P34 better 18-030929
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,MOVING,P34 better 18-030929. Compatible with THERMAWAVE equipment. Part No. 18-017607.
THERMAWAVE
18-017651
AMPLIFIER ASSY, SERVO, 3AXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. AMPLIFIER ASSY, SERVO, 3AXIS. Compatible with THERMAWAVE equipment. Part No. 18-017651.
THERMAWAVE
18-017679
Ina. Camera Aaay, CCD, T41 repl. by 18-123014
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Camera Aaay, CCD, T41 repl. by 18-123014. Compatible with THERMAWAVE equipment. Part No. 18-017679.
THERMAWAVE
18-017683
SENSOR Assembly,HUMIDITY,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,HUMIDITY,P34. Compatible with THERMAWAVE equipment. Part No. 18-017683.
THERMAWAVE
18-017841
Stage, Cradle Assy, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage, Cradle Assy, P35. Compatible with THERMAWAVE equipment. Part No. 18-017841.
THERMAWAVE
18-017868
EG,HEATER Assembly,100X,NIKON,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,HEATER Assembly,100X,NIKON,P34. Compatible with THERMAWAVE equipment. Part No. 18-017868.
THERMAWAVE
18-017962
Shutter Assembly,SE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,SE,P34. Compatible with THERMAWAVE equipment. Part No. 18-017962.
THERMAWAVE
18-018028
DETECTOR ASSY,A&B,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,A&B,P34. Compatible with THERMAWAVE equipment. Part No. 18-018028.
THERMAWAVE
18-018030
REF Assembly,ENCL,SAMPLES ARW
spare_part
High-quality nan for THERMAWAVE CMP tool. REF Assembly,ENCL,SAMPLES ARW. Compatible with THERMAWAVE equipment. Part No. 18-018030.
THERMAWAVE
18-018045
REFERENCE Assembly,REF ENCL
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,REF ENCL. Compatible with THERMAWAVE equipment. Part No. 18-018045.
THERMAWAVE
18-018063
Autofocus Assembly, Mark IV, HC
spare_part
High-quality nan for THERMAWAVE CMP tool. Autofocus Assembly, Mark IV, HC. Compatible with THERMAWAVE equipment. Part No. 18-018063.
THERMAWAVE
18-018064
Autofocus Assembly, Mark IIIA, HC
spare_part
High-quality nan for THERMAWAVE CMP tool. Autofocus Assembly, Mark IIIA, HC. Compatible with THERMAWAVE equipment. Part No. 18-018064.
THERMAWAVE
18-018152
Mirror Assembly,DPG,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror Assembly,DPG,P34. Compatible with THERMAWAVE equipment. Part No. 18-018152.
THERMAWAVE
18-018153
INA,Deterctor assy, see product mngr notes, repl. by 18-025241
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,Deterctor assy, see product mngr notes, repl. by 18-025241. Compatible with THERMAWAVE equipment. Part No. 18-018153.
THERMAWAVE
18-018201
ENCLOSURE Assembly,REF,OP2600DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCLOSURE Assembly,REF,OP2600DUV. Compatible with THERMAWAVE equipment. Part No. 18-018201.
THERMAWAVE
18-018237
Motor Assembly,THETA,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,THETA,P34. Compatible with THERMAWAVE equipment. Part No. 18-018237.
THERMAWAVE
18-018294
Detector Assembly,I/WHTLT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I/WHTLT,P34. Compatible with THERMAWAVE equipment. Part No. 18-018294.
THERMAWAVE
18-018295
Detector Assembly,I/UV,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,I/UV,P34. Compatible with THERMAWAVE equipment. Part No. 18-018295.
THERMAWAVE
18-018296
Switch/LAMP Assembly,User INTF,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch/LAMP Assembly,User INTF,P34. Compatible with THERMAWAVE equipment. Part No. 18-018296.
THERMAWAVE
18-018353
LED Assembly,CRS Z,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. LED Assembly,CRS Z,P34. Compatible with THERMAWAVE equipment. Part No. 18-018353.
THERMAWAVE
18-018354
Motor Assembly,CRS-Z Motor,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,CRS-Z Motor,P34. Compatible with THERMAWAVE equipment. Part No. 18-018354.
THERMAWAVE
18-018355
Switch Assembly,NR LIM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Switch Assembly,NR LIM,P34. Compatible with THERMAWAVE equipment. Part No. 18-018355.
THERMAWAVE
18-018372
INA,TOP ASSY,REF BLOCK,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,TOP ASSY,REF BLOCK,P35. Compatible with THERMAWAVE equipment. Part No. 18-018372.
THERMAWAVE
18-018467
Inact.,Panel Assembly,PNEU,Opticical,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Inact.,Panel Assembly,PNEU,Opticical,P34. Compatible with THERMAWAVE equipment. Part No. 18-018467.
THERMAWAVE
18-018473
FAN Assembly,24V,LWR DriverWR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN Assembly,24V,LWR DriverWR,P34. Compatible with THERMAWAVE equipment. Part No. 18-018473.
THERMAWAVE
18-018533
VACUUM ASSY,REF ENCL
spare_part
High-quality nan for THERMAWAVE CMP tool. VACUUM ASSY,REF ENCL. Compatible with THERMAWAVE equipment. Part No. 18-018533.
THERMAWAVE
18-018741
Power Supply Assembly,Hene,24V,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,Hene,24V,P34. Compatible with THERMAWAVE equipment. Part No. 18-018741.
THERMAWAVE
18-018758
DETECTOR ASSY, I-MOD,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY, I-MOD,TP630. Compatible with THERMAWAVE equipment. Part No. 18-018758.
THERMAWAVE
18-018885
PADDLE Assembly,10.5LG,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE Assembly,10.5LG,P35. Compatible with THERMAWAVE equipment. Part No. 18-018885.
THERMAWAVE
18-018892
Chopper Assembly,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Chopper Assembly,UV. Compatible with THERMAWAVE equipment. Part No. 18-018892.
THERMAWAVE
18-018955
Aperture Assembly, Rotary, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture Assembly, Rotary, P34. Compatible with THERMAWAVE equipment. Part No. 18-018955.
THERMAWAVE
18-019015
Ina.Door Assy,Pass-Thru,300MM repl. by 18-122896
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Door Assy,Pass-Thru,300MM repl. by 18-122896. Compatible with THERMAWAVE equipment. Part No. 18-019015.
THERMAWAVE
18-019022
Assy, Wave Plate, QTR, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Wave Plate, QTR, P34. Compatible with THERMAWAVE equipment. Part No. 18-019022.
THERMAWAVE
18-019124
BLOWER Assembly,UPR DriverWR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,UPR DriverWR,P34. Compatible with THERMAWAVE equipment. Part No. 18-019124.
THERMAWAVE
18-019147
Power Supply Assembly,+-8,+-15
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,+-8,+-15. Compatible with THERMAWAVE equipment. Part No. 18-019147.
THERMAWAVE
18-019155
Fitting Assembly, 3/80D QD, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Fitting Assembly, 3/80D QD, T41. Compatible with THERMAWAVE equipment. Part No. 18-019155.
THERMAWAVE
18-019156
Fitting, Assembly, 1/40D QD, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Fitting, Assembly, 1/40D QD, T41. Compatible with THERMAWAVE equipment. Part No. 18-019156.
THERMAWAVE
18-019243
Heater Assembly with Thermistor, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Heater Assembly with Thermistor, P34. Compatible with THERMAWAVE equipment. Part No. 18-019243.
THERMAWAVE
18-019366
Assy, Optic, Pneumatic Panel
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Optic, Pneumatic Panel. Compatible with THERMAWAVE equipment. Part No. 18-019366.
THERMAWAVE
18-019413
Panel Assembly,PNEU,Opticical,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assembly,PNEU,Opticical,P34. Compatible with THERMAWAVE equipment. Part No. 18-019413.
THERMAWAVE
18-019427
PZT Assembly,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PZT Assembly,P34. Compatible with THERMAWAVE equipment. Part No. 18-019427.
THERMAWAVE
18-019428
Sensor Assy, LVDT, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Sensor Assy, LVDT, P34. Compatible with THERMAWAVE equipment. Part No. 18-019428.
THERMAWAVE
18-019446
SHUTTER ASSY,WT LT,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. SHUTTER ASSY,WT LT,300MM. Compatible with THERMAWAVE equipment. Part No. 18-019446.
THERMAWAVE
18-019495
Stage Assembly,THETA,NEW BD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,THETA,NEW BD,TP500. Compatible with THERMAWAVE equipment. Part No. 18-019495.
THERMAWAVE
18-019496
Stage Assembly,X,Y&THETA,NEWBD,T50
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X,Y&THETA,NEWBD,T50. Compatible with THERMAWAVE equipment. Part No. 18-019496.
THERMAWAVE
18-019497
Platform Assembly,Stage,NEW BD,T500
spare_part
High-quality nan for THERMAWAVE CMP tool. Platform Assembly,Stage,NEW BD,T500. Compatible with THERMAWAVE equipment. Part No. 18-019497.
THERMAWAVE
18-019528
Panel Assy, Pneu, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel Assy, Pneu, P35. Compatible with THERMAWAVE equipment. Part No. 18-019528.
THERMAWAVE
18-019557
Assy, Reference, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Reference, T41. Compatible with THERMAWAVE equipment. Part No. 18-019557.
THERMAWAVE
18-019584
Power Supply Assembly,LWR DWR,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly,LWR DWR,T41. Compatible with THERMAWAVE equipment. Part No. 18-019584.
THERMAWAVE
18-019589
PNL ASSY,FRONT,SMIF,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,FRONT,SMIF,P34. Compatible with THERMAWAVE equipment. Part No. 18-019589.
THERMAWAVE
18-019611
DriverIVE Assembly,Motor,IMS,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. DriverIVE Assembly,Motor,IMS,T41. Compatible with THERMAWAVE equipment. Part No. 18-019611.
THERMAWAVE
18-019700
Assy, W/Filter, AF, TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, W/Filter, AF, TP630. Compatible with THERMAWAVE equipment. Part No. 18-019700.
THERMAWAVE
18-019702
BLOWER Assembly,UV SOURCE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER Assembly,UV SOURCE,P34. Compatible with THERMAWAVE equipment. Part No. 18-019702.
THERMAWAVE
18-019752
FAN Assembly,UPR DriverWR,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN Assembly,UPR DriverWR,OP52XX. Compatible with THERMAWAVE equipment. Part No. 18-019752.
High-quality nan for THERMAWAVE CMP tool. Ina, Wafer, Pattern, Standard,OP, 200MM repl.by 18-122776. Compatible with THERMAWAVE equipment. Part No. 18-019763.
THERMAWAVE
18-019847
THERMISTOR ASSY,COOLER,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. THERMISTOR ASSY,COOLER,T41. Compatible with THERMAWAVE equipment. Part No. 18-019847.
THERMAWAVE
18-020051
Lens Assembly, Exchange, 5X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly, Exchange, 5X, P34. Compatible with THERMAWAVE equipment. Part No. 18-020051.
THERMAWAVE
18-020061
Motor Assembly,Lens Exchange,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Lens Exchange,P34. Compatible with THERMAWAVE equipment. Part No. 18-020061.
THERMAWAVE
18-020108
Heater Assembly, Objective (SEC only), order 18-122971
spare_part
High-quality nan for THERMAWAVE CMP tool. Heater Assembly, Objective (SEC only), order 18-122971. Compatible with THERMAWAVE equipment. Part No. 18-020108.
THERMAWAVE
18-020124
Docking Assembly, BOT,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. Docking Assembly, BOT,P35. Compatible with THERMAWAVE equipment. Part No. 18-020124.
THERMAWAVE
18-020137
SENSOR Assembly,DOCKING,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. SENSOR Assembly,DOCKING,P35. Compatible with THERMAWAVE equipment. Part No. 18-020137.
THERMAWAVE
18-020270
UV-SOURCE Assembly,AIR TIGHT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. UV-SOURCE Assembly,AIR TIGHT,P34. Compatible with THERMAWAVE equipment. Part No. 18-020270.
THERMAWAVE
18-020285
BULB Assembly,UV,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB Assembly,UV,P34. Compatible with THERMAWAVE equipment. Part No. 18-020285.
THERMAWAVE
18-020397
REFERENCE Assembly,SAMPLES,A,W,R
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,SAMPLES,A,W,R. Compatible with THERMAWAVE equipment. Part No. 18-020397.
THERMAWAVE
18-020397
REFERENCE Assembly,SAMPLES,A,W,R
spare_part
High-quality nan for THERMAWAVE CMP tool. REFERENCE Assembly,SAMPLES,A,W,R. Compatible with THERMAWAVE equipment. Part No. 18-020397.
THERMAWAVE
18-020399
EG,Opticion,PC DESKTOP, 3.0, GO, P3
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,Opticion,PC DESKTOP, 3.0, GO, P3. Compatible with THERMAWAVE equipment. Part No. 18-020399.
THERMAWAVE
18-020474
PNEU Valve Assembly,ISO,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PNEU Valve Assembly,ISO,P34. Compatible with THERMAWAVE equipment. Part No. 18-020474.
THERMAWAVE
18-020545
FITTING Assembly,QD SET,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING Assembly,QD SET,P34. Compatible with THERMAWAVE equipment. Part No. 18-020545.
THERMAWAVE
18-020559
Lens Assembly, Exchange, 15X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly, Exchange, 15X, P34. Compatible with THERMAWAVE equipment. Part No. 18-020559.
THERMAWAVE
18-020578
Driver Assembly,TAPE BACKUP,T3
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,TAPE BACKUP,T3. Compatible with THERMAWAVE equipment. Part No. 18-020578.
THERMAWAVE
18-020805
Stage Cradle Assembly, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Cradle Assembly, T41. Compatible with THERMAWAVE equipment. Part No. 18-020805.
THERMAWAVE
18-020838
Detector Assembly, IUV, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly, IUV, UV. Compatible with THERMAWAVE equipment. Part No. 18-020838.
THERMAWAVE
18-020839
BRKT ASSY,A-ARRAY
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT ASSY,A-ARRAY. Compatible with THERMAWAVE equipment. Part No. 18-020839.
THERMAWAVE
18-020840
BRKT ASSY,B-ARRAY
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT ASSY,B-ARRAY. Compatible with THERMAWAVE equipment. Part No. 18-020840.
THERMAWAVE
18-020953
Detector Assembly,D,W/Filter,OP5XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,D,W/Filter,OP5XX. Compatible with THERMAWAVE equipment. Part No. 18-020953.
THERMAWAVE
18-021032
Shutter Assembly,SE PATH,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter Assembly,SE PATH,P34. Compatible with THERMAWAVE equipment. Part No. 18-021032.
THERMAWAVE
18-021041
V-BLOCK Assembly,CERAMIC,TP/OP
spare_part
High-quality nan for THERMAWAVE CMP tool. V-BLOCK Assembly,CERAMIC,TP/OP. Compatible with THERMAWAVE equipment. Part No. 18-021041.
THERMAWAVE
18-021121
Laser Assembly,TEStandardED,MELLES,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser Assembly,TEStandardED,MELLES,P34. Compatible with THERMAWAVE equipment. Part No. 18-021121.
THERMAWAVE
18-021136
Driver Assembly,User INTFC,NT,P46
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,User INTFC,NT,P46. Compatible with THERMAWAVE equipment. Part No. 18-021136.
THERMAWAVE
18-021157
SOFT START ASSY, AC BOX, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. SOFT START ASSY, AC BOX, P34. Compatible with THERMAWAVE equipment. Part No. 18-021157.
THERMAWAVE
18-021159
CHUCK ASSEMBLY,VACUUM,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK ASSEMBLY,VACUUM,300MM. Compatible with THERMAWAVE equipment. Part No. 18-021159.
THERMAWAVE
18-021201
Driver,FORMATTED,9.1GB,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,FORMATTED,9.1GB,NT. Compatible with THERMAWAVE equipment. Part No. 18-021201.
THERMAWAVE
18-021225
Lens Assembly, Exchange, 100X, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens Assembly, Exchange, 100X, P34. Compatible with THERMAWAVE equipment. Part No. 18-021225.
THERMAWAVE
18-021230
Stage Assembly,X-Y CRS Z,8X8,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly,X-Y CRS Z,8X8,P34. Compatible with THERMAWAVE equipment. Part No. 18-021230.
THERMAWAVE
18-021305
MIRROR ASSY,TWIN,AE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,TWIN,AE,P34. Compatible with THERMAWAVE equipment. Part No. 18-021305.
THERMAWAVE
18-021358
LENS POSITIONER ASSY,BPR,P30
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS POSITIONER ASSY,BPR,P30. Compatible with THERMAWAVE equipment. Part No. 18-021358.
THERMAWAVE
18-021360
DRAWER ASSY,LWR,NT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DRAWER ASSY,LWR,NT,P34. Compatible with THERMAWAVE equipment. Part No. 18-021360.
THERMAWAVE
18-021392
Laser Assembly,AE Hene,10X EXP
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser Assembly,AE Hene,10X EXP. Compatible with THERMAWAVE equipment. Part No. 18-021392.
THERMAWAVE
18-021398
Assy, Theta, Fine Z, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Theta, Fine Z, T41. Compatible with THERMAWAVE equipment. Part No. 18-021398.
THERMAWAVE
18-021419
Ina, WHIRLIGIG Assembly,AE,P34 repl by 18-122820
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, WHIRLIGIG Assembly,AE,P34 repl by 18-122820. Compatible with THERMAWAVE equipment. Part No. 18-021419.
THERMAWAVE
18-021419
Ina, WHIRLIGIG Assembly,AE,P34 repl by 18-122820
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, WHIRLIGIG Assembly,AE,P34 repl by 18-122820. Compatible with THERMAWAVE equipment. Part No. 18-021419.
THERMAWAVE
18-021524
Monitor Assembly, 15", LCD
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor Assembly, 15", LCD. Compatible with THERMAWAVE equipment. Part No. 18-021524.
THERMAWAVE
18-021617
Filter Assembly,Camera,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,Camera,P34. Compatible with THERMAWAVE equipment. Part No. 18-021617.
THERMAWAVE
18-021690
Monitor Assembly,15IN LCD,FLD
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor Assembly,15IN LCD,FLD. Compatible with THERMAWAVE equipment. Part No. 18-021690.
THERMAWAVE
18-021701
Stage Assy, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assy, P35. Compatible with THERMAWAVE equipment. Part No. 18-021701.
THERMAWAVE
18-021711
PNL ASSY, DOOR, FRNT RT, NT, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY, DOOR, FRNT RT, NT, P34. Compatible with THERMAWAVE equipment. Part No. 18-021711.
THERMAWAVE
18-021723
Block Assembly, Main, MG, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Block Assembly, Main, MG, P34. Compatible with THERMAWAVE equipment. Part No. 18-021723.
THERMAWAVE
18-021726
PULL Assembly,MECH,DOCKING,StandardG,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. PULL Assembly,MECH,DOCKING,StandardG,P35. Compatible with THERMAWAVE equipment. Part No. 18-021726.
THERMAWAVE
18-021788
MIRROR ASSY, FNL TURN, ADJ, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY, FNL TURN, ADJ, P34. Compatible with THERMAWAVE equipment. Part No. 18-021788.
THERMAWAVE
18-021856
Ina.Wafer Bow/Warp/Stress Module-Chuck Assy repl. by 18-122678
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Wafer Bow/Warp/Stress Module-Chuck Assy repl. by 18-122678. Compatible with THERMAWAVE equipment. Part No. 18-021856.
THERMAWAVE
18-021920
LOADER Assembly,CASS,Manual,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. LOADER Assembly,CASS,Manual,P34. Compatible with THERMAWAVE equipment. Part No. 18-021920.
THERMAWAVE
18-021960
BOX Assembly,ELEC,SMIF,OP/TP
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,ELEC,SMIF,OP/TP. Compatible with THERMAWAVE equipment. Part No. 18-021960.
THERMAWAVE
18-021971
DOCKING Assembly,BOT,20MMBORE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DOCKING Assembly,BOT,20MMBORE,P34. Compatible with THERMAWAVE equipment. Part No. 18-021971.
THERMAWAVE
18-022010
DR ASSY,CD ROM,32X,SCSI,CONFIG
spare_part
High-quality nan for THERMAWAVE CMP tool. DR ASSY,CD ROM,32X,SCSI,CONFIG. Compatible with THERMAWAVE equipment. Part No. 18-022010.
High-quality nan for THERMAWAVE CMP tool. Ina, LT TWR ASSY, 4-LTS/ALM, DB9M repl.by 18-122776. Compatible with THERMAWAVE equipment. Part No. 18-022045.
THERMAWAVE
18-022253
BOX ASSY,MAIN DISCONNECT,30A
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX ASSY,MAIN DISCONNECT,30A. Compatible with THERMAWAVE equipment. Part No. 18-022253.
THERMAWAVE
18-022363
INA,Dr,Frmted,NT,OP16/32/52 See Tech Support for correct PN
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,Dr,Frmted,NT,OP16/32/52 See Tech Support for correct PN. Compatible with THERMAWAVE equipment. Part No. 18-022363.
THERMAWAVE
18-022537
OBSOLETE - Order 18-030951 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - Order 18-030951 instead.. Compatible with THERMAWAVE equipment. Part No. 18-022537.
THERMAWAVE
18-022558
CHUCK/FINE-Z ASSY,OP53XX
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK/FINE-Z ASSY,OP53XX. Compatible with THERMAWAVE equipment. Part No. 18-022558.
THERMAWAVE
18-022559
Brkt Assy, A-B, P35
spare_part
High-quality nan for THERMAWAVE CMP tool. Brkt Assy, A-B, P35. Compatible with THERMAWAVE equipment. Part No. 18-022559.
THERMAWAVE
18-022560
SW Assembly, A-B BK CNTRL PNL, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. SW Assembly, A-B BK CNTRL PNL, P34. Compatible with THERMAWAVE equipment. Part No. 18-022560.
THERMAWAVE
18-022625
Valve Assembly,ISO,SEALED
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve Assembly,ISO,SEALED. Compatible with THERMAWAVE equipment. Part No. 18-022625.
THERMAWAVE
18-022643
Drive Assembly, Fiber Laser, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Drive Assembly, Fiber Laser, OP. Compatible with THERMAWAVE equipment. Part No. 18-022643.
THERMAWAVE
18-022754
PWR BOX ASSY,300MM,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR BOX ASSY,300MM,ME. Compatible with THERMAWAVE equipment. Part No. 18-022754.
THERMAWAVE
18-022766
HSG ASSY, FAN,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG ASSY, FAN,ME. Compatible with THERMAWAVE equipment. Part No. 18-022766.
THERMAWAVE
18-022799
Chuck/Fine Z Assembly, TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Chuck/Fine Z Assembly, TP630. Compatible with THERMAWAVE equipment. Part No. 18-022799.
THERMAWAVE
18-022843
Ina.Diode Assembly, Fiber Laser, OP 18-023044 should be ordered
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Diode Assembly, Fiber Laser, OP 18-023044 should be ordered. Compatible with THERMAWAVE equipment. Part No. 18-022843.
THERMAWAVE
18-022849
PWR SUPPLY ASSY,FBR OPT LSR
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,FBR OPT LSR. Compatible with THERMAWAVE equipment. Part No. 18-022849.
THERMAWAVE
18-022855
Ina, Assy, Power Supply, White Light, OP5XXX repl.by18-122516
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Assy, Power Supply, White Light, OP5XXX repl.by18-122516. Compatible with THERMAWAVE equipment. Part No. 18-022855.
THERMAWAVE
18-022934
Assy, Detector, AF, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Detector, AF, T41. Compatible with THERMAWAVE equipment. Part No. 18-022934.
THERMAWAVE
18-023019
Stage, Assembly, XIYICRSE - Z, 20MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage, Assembly, XIYICRSE - Z, 20MM. Compatible with THERMAWAVE equipment. Part No. 18-023019.
THERMAWAVE
18-023028
Filter Assembly,HOT,IR,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter Assembly,HOT,IR,P22. Compatible with THERMAWAVE equipment. Part No. 18-023028.
THERMAWAVE
18-023044
Laser ASSY,FBR,Tested,OP, (18-122905 for 7xxx only in April 06)
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser ASSY,FBR,Tested,OP, (18-122905 for 7xxx only in April 06). Compatible with THERMAWAVE equipment. Part No. 18-023044.
THERMAWAVE
18-023045
DIODE ASSY,LSR,BURN IN,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. DIODE ASSY,LSR,BURN IN,OP. Compatible with THERMAWAVE equipment. Part No. 18-023045.
THERMAWAVE
18-023049
Stage Assembly, X/Y, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage Assembly, X/Y, TP500. Compatible with THERMAWAVE equipment. Part No. 18-023049.
THERMAWAVE
18-023072
Ina.Converter Assembly, NTSC/VGA, see notes for replacement PN
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Converter Assembly, NTSC/VGA, see notes for replacement PN. Compatible with THERMAWAVE equipment. Part No. 18-023072.
THERMAWAVE
18-023122
Printer Assy, w/ Buffer, OP32
spare_part
High-quality nan for THERMAWAVE CMP tool. Printer Assy, w/ Buffer, OP32. Compatible with THERMAWAVE equipment. Part No. 18-023122.
THERMAWAVE
18-023130
Assy, Printer, w/ Buffer, P35, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Assy, Printer, w/ Buffer, P35, T41. Compatible with THERMAWAVE equipment. Part No. 18-023130.
THERMAWAVE
18-023146
Collimator Assembly, Fiber Laser, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Collimator Assembly, Fiber Laser, OP. Compatible with THERMAWAVE equipment. Part No. 18-023146.
THERMAWAVE
18-023154
Inactive, Order 18-030774 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. Inactive, Order 18-030774 instead.. Compatible with THERMAWAVE equipment. Part No. 18-023154.
THERMAWAVE
18-023178
Driver Assembly,Step Motion, Vextra
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver Assembly,Step Motion, Vextra. Compatible with THERMAWAVE equipment. Part No. 18-023178.
THERMAWAVE
18-023286
PWR SUPPLY ASSY, LCD, +12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY, LCD, +12VDC. Compatible with THERMAWAVE equipment. Part No. 18-023286.
THERMAWAVE
18-023386
OBSOLETE - See Product Mgr Notes for replacement P/N.
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - See Product Mgr Notes for replacement P/N.. Compatible with THERMAWAVE equipment. Part No. 18-023386.
THERMAWAVE
18-023422
White Light Assy, A-Spectrometer, Astec
spare_part
High-quality nan for THERMAWAVE CMP tool. White Light Assy, A-Spectrometer, Astec. Compatible with THERMAWAVE equipment. Part No. 18-023422.
THERMAWAVE
18-023425
PWR SUPPLY ASSY,AST,WT LT,DUVI
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,AST,WT LT,DUVI. Compatible with THERMAWAVE equipment. Part No. 18-023425.
THERMAWAVE
18-023426
Power Supply Assembly, AST, White Light, 32XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply Assembly, AST, White Light, 32XX. Compatible with THERMAWAVE equipment. Part No. 18-023426.
THERMAWAVE
18-023437
PWR SUPPLY ASSY,AST,WT LT,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,AST,WT LT,BH. Compatible with THERMAWAVE equipment. Part No. 18-023437.
THERMAWAVE
18-023484
SF,MAIN ASSY,VANE SW MONITOR
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,MAIN ASSY,VANE SW MONITOR. Compatible with THERMAWAVE equipment. Part No. 18-023484.
THERMAWAVE
18-023501
INA,WEDGE ASSY,CHUCK,WBWS,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,WEDGE ASSY,CHUCK,WBWS,OP. Compatible with THERMAWAVE equipment. Part No. 18-023501.
THERMAWAVE
18-023502
INA,ROCKER ASSY,CHUCK,WBWS,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,ROCKER ASSY,CHUCK,WBWS,OP. Compatible with THERMAWAVE equipment. Part No. 18-023502.
THERMAWAVE
18-023503
INA,LIFTER ASSY,CHUCK,WBWS,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,LIFTER ASSY,CHUCK,WBWS,OP. Compatible with THERMAWAVE equipment. Part No. 18-023503.
THERMAWAVE
18-023624
HEAT EXCHANGE ASSY, LWR,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. HEAT EXCHANGE ASSY, LWR,DES. Compatible with THERMAWAVE equipment. Part No. 18-023624.
THERMAWAVE
18-023653
Wafer Bow/Warp/Stress Module-Fine Z Assy
spare_part
High-quality nan for THERMAWAVE CMP tool. Wafer Bow/Warp/Stress Module-Fine Z Assy. Compatible with THERMAWAVE equipment. Part No. 18-023653.
THERMAWAVE
18-023690
MTG ASSY,REF,OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. MTG ASSY,REF,OP5XXX. Compatible with THERMAWAVE equipment. Part No. 18-023690.
THERMAWAVE
18-023786
Ina.Box Assy,PWR,AC/EMO,P35/T41 repl. by 18-122773
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Box Assy,PWR,AC/EMO,P35/T41 repl. by 18-122773. Compatible with THERMAWAVE equipment. Part No. 18-023786.
THERMAWAVE
18-023787
Obs. AMPLIFIER ASSY,VIDEO DIST repl.by 30-022282
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. AMPLIFIER ASSY,VIDEO DIST repl.by 30-022282. Compatible with THERMAWAVE equipment. Part No. 18-023787.
THERMAWAVE
18-023806
Inact. Pwr Supply Assy, MN, +5V, +-12 replace by 18-122485
spare_part
High-quality nan for THERMAWAVE CMP tool. Inact. Pwr Supply Assy, MN, +5V, +-12 replace by 18-122485. Compatible with THERMAWAVE equipment. Part No. 18-023806.
THERMAWAVE
18-023834
UTILITY ASSY,V2.0,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. UTILITY ASSY,V2.0,DES. Compatible with THERMAWAVE equipment. Part No. 18-023834.
THERMAWAVE
18-023872
Detector Assy, E-Array, MPX
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assy, E-Array, MPX. Compatible with THERMAWAVE equipment. Part No. 18-023872.
THERMAWAVE
18-024344
LENS ASSY,EXCHANGE,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,EXCHANGE,T41. Compatible with THERMAWAVE equipment. Part No. 18-024344.
THERMAWAVE
18-024355
Relay Assy, Diode Added, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Relay Assy, Diode Added, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 18-024355.
THERMAWAVE
18-024514
CHOPPER ASSY,SIDE BEAM,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. CHOPPER ASSY,SIDE BEAM,P62. Compatible with THERMAWAVE equipment. Part No. 18-024514.
THERMAWAVE
18-024587
SPECTROMETER ASSY,1024HOLO,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. SPECTROMETER ASSY,1024HOLO,P62. Compatible with THERMAWAVE equipment. Part No. 18-024587.
THERMAWAVE
18-024799
MIRROR ASSY,BIG DIPPER,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,BIG DIPPER,P62. Compatible with THERMAWAVE equipment. Part No. 18-024799.
THERMAWAVE
18-025002
PNL ASSY, L SIDE, ME
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY, L SIDE, ME. Compatible with THERMAWAVE equipment. Part No. 18-025002.
THERMAWAVE
18-025018
FIXTURE ASSY,LAMP,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. FIXTURE ASSY,LAMP,ME. Compatible with THERMAWAVE equipment. Part No. 18-025018.
THERMAWAVE
18-025055
DETECTOR ASSY,TILT,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,TILT,P62. Compatible with THERMAWAVE equipment. Part No. 18-025055.
THERMAWAVE
18-025072
Detector2 assy SEE Product Manager Notes
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector2 assy SEE Product Manager Notes. Compatible with THERMAWAVE equipment. Part No. 18-025072.
THERMAWAVE
18-025148
TUBE ASSY,PRE-ALIGNED,MPX
spare_part
High-quality nan for THERMAWAVE CMP tool. TUBE ASSY,PRE-ALIGNED,MPX. Compatible with THERMAWAVE equipment. Part No. 18-025148.
THERMAWAVE
18-025240
DETECTOR ASSY, A-SPECTRP2
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY, A-SPECTRP2. Compatible with THERMAWAVE equipment. Part No. 18-025240.
THERMAWAVE
18-025241
DETECTOR ASSY, UNIVRESAL 2
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY, UNIVRESAL 2. Compatible with THERMAWAVE equipment. Part No. 18-025241.
THERMAWAVE
18-025243
DETECTOR ASSY,WL-SPECTRO2
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,WL-SPECTRO2. Compatible with THERMAWAVE equipment. Part No. 18-025243.
THERMAWAVE
18-025251
BRKT ASSY,A-B SW,NEP
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT ASSY,A-B SW,NEP. Compatible with THERMAWAVE equipment. Part No. 18-025251.
THERMAWAVE
18-025578
CASTER ASSY,300MM,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. CASTER ASSY,300MM,ME. Compatible with THERMAWAVE equipment. Part No. 18-025578.
THERMAWAVE
18-025667
PNL ASSY,RT,LVR,MM,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,RT,LVR,MM,300MM. Compatible with THERMAWAVE equipment. Part No. 18-025667.
THERMAWAVE
18-025668
PNL ASSY,LFT,LVR,MM,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,LFT,LVR,MM,300MM. Compatible with THERMAWAVE equipment. Part No. 18-025668.
THERMAWAVE
18-025669
PNL ASSY,RR,LVR,MM,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,RR,LVR,MM,300MM. Compatible with THERMAWAVE equipment. Part No. 18-025669.
THERMAWAVE
18-025670
CHOPPER ASSY,W/PRTCL CNTRL,SDB
spare_part
High-quality nan for THERMAWAVE CMP tool. CHOPPER ASSY,W/PRTCL CNTRL,SDB. Compatible with THERMAWAVE equipment. Part No. 18-025670.
THERMAWAVE
18-025672
UV-WL SOURCE ASSY,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. UV-WL SOURCE ASSY,P62. Compatible with THERMAWAVE equipment. Part No. 18-025672.
THERMAWAVE
18-026096
SOLENOID ASSY,WL,SRC,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. SOLENOID ASSY,WL,SRC,P62. Compatible with THERMAWAVE equipment. Part No. 18-026096.
THERMAWAVE
18-026361
USE UP EXISTING STOCK - then order 18-030471 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-030471 instead.. Compatible with THERMAWAVE equipment. Part No. 18-026361.
THERMAWAVE
18-026362
USE UP EXISTING STOCK - then order 18-029942 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 18-029942 instead.. Compatible with THERMAWAVE equipment. Part No. 18-026362.
THERMAWAVE
18-026437
LASER ASSY,AE,HENE,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER ASSY,AE,HENE,P62. Compatible with THERMAWAVE equipment. Part No. 18-026437.
THERMAWAVE
18-026438
DETECTOR ASSY,AUTOFOCUS,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,AUTOFOCUS,P62. Compatible with THERMAWAVE equipment. Part No. 18-026438.
THERMAWAVE
18-026601
DETECTOR ASSY, AUTO FOCUS-LG
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY, AUTO FOCUS-LG. Compatible with THERMAWAVE equipment. Part No. 18-026601.
THERMAWAVE
18-026615
PWR SUPPLY ASSY,WHT LT,BB
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,WHT LT,BB. Compatible with THERMAWAVE equipment. Part No. 18-026615.
THERMAWAVE
18-027212
BRACKET ASSY,A/B SW,SGL CAS
spare_part
High-quality nan for THERMAWAVE CMP tool. BRACKET ASSY,A/B SW,SGL CAS. Compatible with THERMAWAVE equipment. Part No. 18-027212.
THERMAWAVE
18-027239
SERVER ASSY,MOTION,PCI,OP73
spare_part
High-quality nan for THERMAWAVE CMP tool. SERVER ASSY,MOTION,PCI,OP73. Compatible with THERMAWAVE equipment. Part No. 18-027239.
THERMAWAVE
18-027545
DR ASSY,STEPPER MOTION,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. DR ASSY,STEPPER MOTION,P62. Compatible with THERMAWAVE equipment. Part No. 18-027545.
THERMAWAVE
18-027681
DR,FORMATTED,NT,MOTION
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,FORMATTED,NT,MOTION. Compatible with THERMAWAVE equipment. Part No. 18-027681.
THERMAWAVE
18-028120
SF,CAMR ASSY,PLNX,TM745I,TSTD
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,CAMR ASSY,PLNX,TM745I,TSTD. Compatible with THERMAWAVE equipment. Part No. 18-028120.
THERMAWAVE
18-028193
PNL ASSY,PNEU,OPTICS,OP73XX
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL ASSY,PNEU,OPTICS,OP73XX. Compatible with THERMAWAVE equipment. Part No. 18-028193.
THERMAWAVE
18-028414
DGTL INTFC ASSY,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. DGTL INTFC ASSY,ME. Compatible with THERMAWAVE equipment. Part No. 18-028414.
THERMAWAVE
18-028731
FILTER ASSY,UV,PNEU,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER ASSY,UV,PNEU,P62. Compatible with THERMAWAVE equipment. Part No. 18-028731.
THERMAWAVE
18-028737
BRKT ASSY,SW,2PORT,KVM,TP/NT
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT ASSY,SW,2PORT,KVM,TP/NT. Compatible with THERMAWAVE equipment. Part No. 18-028737.
THERMAWAVE
18-029924
HEATER ASSY,MOD,HALRING
spare_part
High-quality nan for THERMAWAVE CMP tool. HEATER ASSY,MOD,HALRING. Compatible with THERMAWAVE equipment. Part No. 18-029924.
THERMAWAVE
18-029942
DETECTOR ASSY,I/WL,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,I/WL,P62. Compatible with THERMAWAVE equipment. Part No. 18-029942.
THERMAWAVE
18-030098
PISTON ASSY,REF,0.153
spare_part
High-quality nan for THERMAWAVE CMP tool. PISTON ASSY,REF,0.153. Compatible with THERMAWAVE equipment. Part No. 18-030098.
THERMAWAVE
18-030451
STG/CRADLE ASSY,LNR,LDSCR Z
spare_part
High-quality nan for THERMAWAVE CMP tool. STG/CRADLE ASSY,LNR,LDSCR Z. Compatible with THERMAWAVE equipment. Part No. 18-030451.
THERMAWAVE
18-030471
DETECTOR ASSY,I/UV,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,I/UV,P62. Compatible with THERMAWAVE equipment. Part No. 18-030471.
THERMAWAVE
18-030650
LENS ASSY,HTR,MPLAN 100X
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS ASSY,HTR,MPLAN 100X. Compatible with THERMAWAVE equipment. Part No. 18-030650.
THERMAWAVE
18-030702
OBS,DR,HARD,FORMATTED,OP53XX
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,DR,HARD,FORMATTED,OP53XX. Compatible with THERMAWAVE equipment. Part No. 18-030702.
THERMAWAVE
18-030779
Ina. MONITOR ASSY,OP52XX,VIEW repl. by 18-122650
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. MONITOR ASSY,OP52XX,VIEW repl. by 18-122650. Compatible with THERMAWAVE equipment. Part No. 18-030779.
THERMAWAVE
18-030817
Ina.Monitor Assy,BH,View repl. by 18-122655
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Monitor Assy,BH,View repl. by 18-122655. Compatible with THERMAWAVE equipment. Part No. 18-030817.
THERMAWAVE
18-030929
MIRROR ASSY,BIG DIPPER,7340
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,BIG DIPPER,7340. Compatible with THERMAWAVE equipment. Part No. 18-030929.
THERMAWAVE
18-030951
HEATER ASSY,HALO ROT,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. HEATER ASSY,HALO ROT,DES. Compatible with THERMAWAVE equipment. Part No. 18-030951.
THERMAWAVE
18-031139
Ina,DR,Formetted,NTOP73XX repl. by 18-122669
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,DR,Formetted,NTOP73XX repl. by 18-122669. Compatible with THERMAWAVE equipment. Part No. 18-031139.
THERMAWAVE
18-031493
EG,SOURCE ASSY,LT,XENON
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,SOURCE ASSY,LT,XENON. Compatible with THERMAWAVE equipment. Part No. 18-031493.
THERMAWAVE
18-031638
DR ASSY,CFG,SCSI PC CARD
spare_part
High-quality nan for THERMAWAVE CMP tool. DR ASSY,CFG,SCSI PC CARD. Compatible with THERMAWAVE equipment. Part No. 18-031638.
THERMAWAVE
18-112478
COMBINER ASSY,FIBER LASER
spare_part
High-quality nan for THERMAWAVE CMP tool. COMBINER ASSY,FIBER LASER. Compatible with THERMAWAVE equipment. Part No. 18-112478.
THERMAWAVE
18-122295
EG, DR ASSY, LINEAR STG, X/Y/T
spare_part
High-quality nan for THERMAWAVE CMP tool. EG, DR ASSY, LINEAR STG, X/Y/T. Compatible with THERMAWAVE equipment. Part No. 18-122295.
THERMAWAVE
18-122298
BOX ASSY,AC/EMO PWR,DES300
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX ASSY,AC/EMO PWR,DES300. Compatible with THERMAWAVE equipment. Part No. 18-122298.
THERMAWAVE
18-122356
Obs, Laser Assy,Fiber,Probe,TP repl. by 18-123001
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs, Laser Assy,Fiber,Probe,TP repl. by 18-123001. Compatible with THERMAWAVE equipment. Part No. 18-122356.
THERMAWAVE
18-122357
Obs. Laser Assy,Fiber,Pump,TP repl.by 18-123000
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Laser Assy,Fiber,Pump,TP repl.by 18-123000. Compatible with THERMAWAVE equipment. Part No. 18-122357.
THERMAWAVE
18-122387
MIRROR ASSY,UV SOURCE
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,UV SOURCE. Compatible with THERMAWAVE equipment. Part No. 18-122387.
THERMAWAVE
18-122391
MIRROR ASSY,BIG DIPPER
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,BIG DIPPER. Compatible with THERMAWAVE equipment. Part No. 18-122391.
THERMAWAVE
18-122396
EG,REFERENCE ASSY,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,REFERENCE ASSY,TP630XP. Compatible with THERMAWAVE equipment. Part No. 18-122396.
THERMAWAVE
18-122405
DETECTOR ASSY,I-WL
spare_part
High-quality nan for THERMAWAVE CMP tool. DETECTOR ASSY,I-WL. Compatible with THERMAWAVE equipment. Part No. 18-122405.
THERMAWAVE
18-122438
Obs, Lsr Cooler Assy,TP500-630 repl. by 18-123002
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs, Lsr Cooler Assy,TP500-630 repl. by 18-123002. Compatible with THERMAWAVE equipment. Part No. 18-122438.
THERMAWAVE
18-122474
CNTRLR ASSY,LT TWR,DL205 TP
spare_part
High-quality nan for THERMAWAVE CMP tool. CNTRLR ASSY,LT TWR,DL205 TP. Compatible with THERMAWAVE equipment. Part No. 18-122474.
THERMAWAVE
18-122477
DISK ASSY,PCMCIA,5GB,FRMT
spare_part
High-quality nan for THERMAWAVE CMP tool. DISK ASSY,PCMCIA,5GB,FRMT. Compatible with THERMAWAVE equipment. Part No. 18-122477.
THERMAWAVE
18-122485
PWR SUPPLY ASSY, 5V/+-12V,400W
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY, 5V/+-12V,400W. Compatible with THERMAWAVE equipment. Part No. 18-122485.
THERMAWAVE
18-122485
PWR SUPPLY ASSY, 5V/+-12V,400W
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY, 5V/+-12V,400W. Compatible with THERMAWAVE equipment. Part No. 18-122485.
THERMAWAVE
18-122499
SPOOL ASSY, B/S SOURCE
spare_part
High-quality nan for THERMAWAVE CMP tool. SPOOL ASSY, B/S SOURCE. Compatible with THERMAWAVE equipment. Part No. 18-122499.
THERMAWAVE
18-122506
APERTURE ASSY,ROT,OP7341
spare_part
High-quality nan for THERMAWAVE CMP tool. APERTURE ASSY,ROT,OP7341. Compatible with THERMAWAVE equipment. Part No. 18-122506.
THERMAWAVE
18-122515
SOURCE ASSY,WHT LT,SNS
spare_part
High-quality nan for THERMAWAVE CMP tool. SOURCE ASSY,WHT LT,SNS. Compatible with THERMAWAVE equipment. Part No. 18-122515.
THERMAWAVE
18-122516
PWR SPLY ASSY,WHT LT,SNS
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SPLY ASSY,WHT LT,SNS. Compatible with THERMAWAVE equipment. Part No. 18-122516.
THERMAWAVE
18-122539
Ina.DR ASSY,CFG,USCSI,73XX repl. by 18-122669
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.DR ASSY,CFG,USCSI,73XX repl. by 18-122669. Compatible with THERMAWAVE equipment. Part No. 18-122539.
THERMAWAVE
18-122540
Ina, DR A.,CFG,USCSI,OP5XXX repl.by 18-122672
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, DR A.,CFG,USCSI,OP5XXX repl.by 18-122672. Compatible with THERMAWAVE equipment. Part No. 18-122540.
THERMAWAVE
18-122541
EG,STG/CRADLE ASSY,LNR,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,STG/CRADLE ASSY,LNR,TP630XP. Compatible with THERMAWAVE equipment. Part No. 18-122541.
THERMAWAVE
18-122551
MOTOR ASSY,CRS-Z BRAKE
spare_part
High-quality nan for THERMAWAVE CMP tool. MOTOR ASSY,CRS-Z BRAKE. Compatible with THERMAWAVE equipment. Part No. 18-122551.
THERMAWAVE
18-122568
DR ASSY,STG X-Y,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. DR ASSY,STG X-Y,TP630XP. Compatible with THERMAWAVE equipment. Part No. 18-122568.
THERMAWAVE
18-122577
MIRROR ASSY,TWIN,AE
spare_part
High-quality nan for THERMAWAVE CMP tool. MIRROR ASSY,TWIN,AE. Compatible with THERMAWAVE equipment. Part No. 18-122577.
THERMAWAVE
18-122578
SERVO-GIG ASSY,PITCH-YAW
spare_part
High-quality nan for THERMAWAVE CMP tool. SERVO-GIG ASSY,PITCH-YAW. Compatible with THERMAWAVE equipment. Part No. 18-122578.
THERMAWAVE
18-122598
MT ASSY,RELAY LENS,BPR,MPLA
spare_part
High-quality nan for THERMAWAVE CMP tool. MT ASSY,RELAY LENS,BPR,MPLA. Compatible with THERMAWAVE equipment. Part No. 18-122598.
THERMAWAVE
18-122630
Ina.Converter Assy,NTSC-VGA,W/MT. See notes for repl. part numbers.
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Converter Assy,NTSC-VGA,W/MT. See notes for repl. part numbers.. Compatible with THERMAWAVE equipment. Part No. 18-122630.
THERMAWAVE
18-122644
LASER & MT ASSY,ALIGNED
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER & MT ASSY,ALIGNED. Compatible with THERMAWAVE equipment. Part No. 18-122644.
THERMAWAVE
18-122649
MONITOR ASSY,OP/TP,VIEW
spare_part
High-quality nan for THERMAWAVE CMP tool. MONITOR ASSY,OP/TP,VIEW. Compatible with THERMAWAVE equipment. Part No. 18-122649.
THERMAWAVE
18-122650
MONITOR ASSY,OP52XX,VIEW
spare_part
High-quality nan for THERMAWAVE CMP tool. MONITOR ASSY,OP52XX,VIEW. Compatible with THERMAWAVE equipment. Part No. 18-122650.
THERMAWAVE
18-122669
DR,HARD,W/IMAGE,73XX
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,73XX. Compatible with THERMAWAVE equipment. Part No. 18-122669.
THERMAWAVE
18-122671
DR,HARD,W/IMAGE,5341 INTEL
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,5341 INTEL. Compatible with THERMAWAVE equipment. Part No. 18-122671.
THERMAWAVE
18-122672
DR,HARD,W/IMAG,DUAL BOOT
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAG,DUAL BOOT. Compatible with THERMAWAVE equipment. Part No. 18-122672.
THERMAWAVE
18-122678
CHUCK ASSY,200/300MM, WBWS
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK ASSY,200/300MM, WBWS. Compatible with THERMAWAVE equipment. Part No. 18-122678.
THERMAWAVE
18-122753
SHUTTER ASSY,SE,SOFT STOP
spare_part
High-quality nan for THERMAWAVE CMP tool. SHUTTER ASSY,SE,SOFT STOP. Compatible with THERMAWAVE equipment. Part No. 18-122753.
THERMAWAVE
18-122755
DR,HARD,W/IMAGE,DOS/CGNX
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,DOS/CGNX. Compatible with THERMAWAVE equipment. Part No. 18-122755.
THERMAWAVE
18-122758
MT ASSY,SW VIEW IP,TP6XX
spare_part
High-quality nan for THERMAWAVE CMP tool. MT ASSY,SW VIEW IP,TP6XX. Compatible with THERMAWAVE equipment. Part No. 18-122758.
THERMAWAVE
18-122760
CHUCK ASSY,FN Z&L/C,WBWS300
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK ASSY,FN Z&L/C,WBWS300. Compatible with THERMAWAVE equipment. Part No. 18-122760.
THERMAWAVE
18-122762
CHUCK ASSY,L/C,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK ASSY,L/C,300MM. Compatible with THERMAWAVE equipment. Part No. 18-122762.
THERMAWAVE
18-122764
Ina.,DR,HARD,W/LIC,NT,HSMS,1.0 repl.by 18-122765
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.,DR,HARD,W/LIC,NT,HSMS,1.0 repl.by 18-122765. Compatible with THERMAWAVE equipment. Part No. 18-122764.
THERMAWAVE
18-122773
BOX,ASSY,AC/EMO PWR,F47,30A
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX,ASSY,AC/EMO PWR,F47,30A. Compatible with THERMAWAVE equipment. Part No. 18-122773.
THERMAWAVE
18-122776
LT TOWER ASSY,4,RYGB,DB9-M
spare_part
High-quality nan for THERMAWAVE CMP tool. LT TOWER ASSY,4,RYGB,DB9-M. Compatible with THERMAWAVE equipment. Part No. 18-122776.
THERMAWAVE
18-122790
WEDGE INSERT ASSY,CADDY 200
spare_part
High-quality nan for THERMAWAVE CMP tool. WEDGE INSERT ASSY,CADDY 200. Compatible with THERMAWAVE equipment. Part No. 18-122790.
THERMAWAVE
18-122791
WEDGE INSERT ASSY,FOUP ADPT
spare_part
High-quality nan for THERMAWAVE CMP tool. WEDGE INSERT ASSY,FOUP ADPT. Compatible with THERMAWAVE equipment. Part No. 18-122791.
THERMAWAVE
18-122818
MOTOR WITH CBL ASSY,SVO GIG
spare_part
High-quality nan for THERMAWAVE CMP tool. MOTOR WITH CBL ASSY,SVO GIG. Compatible with THERMAWAVE equipment. Part No. 18-122818.
THERMAWAVE
18-122822
SHUTTER ASSY,ND FLTR,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. SHUTTER ASSY,ND FLTR,TPXP. Compatible with THERMAWAVE equipment. Part No. 18-122822.
THERMAWAVE
18-122827
DR,HARD,W/IMAGE,MOCON
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,MOCON. Compatible with THERMAWAVE equipment. Part No. 18-122827.
THERMAWAVE
18-122835
PWR SUPPLY ASSY,LCD,+12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,LCD,+12VDC. Compatible with THERMAWAVE equipment. Part No. 18-122835.
THERMAWAVE
18-122845
PWR SUPPLY ASSY,5V,50A,+1/-12V
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY ASSY,5V,50A,+1/-12V. Compatible with THERMAWAVE equipment. Part No. 18-122845.
THERMAWAVE
18-122863
CHUCK/HTR ASSY,LOW-CNTCT,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK/HTR ASSY,LOW-CNTCT,TP. Compatible with THERMAWAVE equipment. Part No. 18-122863.
THERMAWAVE
18-122875
DR,HARD,W/IMAGE,NT,HSMS,2.0
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,NT,HSMS,2.0. Compatible with THERMAWAVE equipment. Part No. 18-122875.
THERMAWAVE
18-122877
END EFFECTOR,EFD,SS/SIO2
spare_part
High-quality nan for THERMAWAVE CMP tool. END EFFECTOR,EFD,SS/SIO2. Compatible with THERMAWAVE equipment. Part No. 18-122877.
THERMAWAVE
18-122878
VDC,ASSY,ENCLOSURE,208/230V
spare_part
High-quality nan for THERMAWAVE CMP tool. VDC,ASSY,ENCLOSURE,208/230V. Compatible with THERMAWAVE equipment. Part No. 18-122878.
THERMAWAVE
18-122898
DR,HARD,W/IMAGE,XP OS,STD
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,XP OS,STD. Compatible with THERMAWAVE equipment. Part No. 18-122898.
THERMAWAVE
18-122902
DR,HARD,W/IMAGE,DOS,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD,W/IMAGE,DOS,TP630. Compatible with THERMAWAVE equipment. Part No. 18-122902.
THERMAWAVE
18-122932
SHIPMENT ASSY, CMPTR SYSTEM
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIPMENT ASSY, CMPTR SYSTEM. Compatible with THERMAWAVE equipment. Part No. 18-122932.
THERMAWAVE
18-122958
CONV ASSY,NTSC-VGA5,OP3,TP5
spare_part
High-quality nan for THERMAWAVE CMP tool. CONV ASSY,NTSC-VGA5,OP3,TP5. Compatible with THERMAWAVE equipment. Part No. 18-122958.
THERMAWAVE
18-122962
CONV ASSY,NTSC-VGA5,OP52
spare_part
High-quality nan for THERMAWAVE CMP tool. CONV ASSY,NTSC-VGA5,OP52. Compatible with THERMAWAVE equipment. Part No. 18-122962.
THERMAWAVE
18-123000
LASER ASSY,FIBER,PUMP,TP avail end of Jan 06
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER ASSY,FIBER,PUMP,TP avail end of Jan 06. Compatible with THERMAWAVE equipment. Part No. 18-123000.
THERMAWAVE
18-123001
LASER ASSY,FIBER,PROBE,TP avail end of Jan 06
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER ASSY,FIBER,PROBE,TP avail end of Jan 06. Compatible with THERMAWAVE equipment. Part No. 18-123001.
THERMAWAVE
18-123006
SYRINGE ASSY,W/ LEADSCR LUBE
spare_part
High-quality nan for THERMAWAVE CMP tool. SYRINGE ASSY,W/ LEADSCR LUBE. Compatible with THERMAWAVE equipment. Part No. 18-123006.
THERMAWAVE
19-001144
Inductor, FIXED,10UH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, FIXED,10UH. Compatible with THERMAWAVE equipment. Part No. 19-001144.
THERMAWAVE
19-001147
Inductor, FIXED,1UH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, FIXED,1UH. Compatible with THERMAWAVE equipment. Part No. 19-001147.
THERMAWAVE
19-002204
Inductor, Choke, 1UH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, Choke, 1UH. Compatible with THERMAWAVE equipment. Part No. 19-002204.
THERMAWAVE
19-002379
Inductor, Choke, 1UH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, Choke, 1UH. Compatible with THERMAWAVE equipment. Part No. 19-002379.
THERMAWAVE
19-005198
Inductor, FIXED,SHLD,10%,330uH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, FIXED,SHLD,10%,330uH. Compatible with THERMAWAVE equipment. Part No. 19-005198.
THERMAWAVE
19-005199
Inductor, FIXED,SHLD,10%,390uH
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, FIXED,SHLD,10%,390uH. Compatible with THERMAWAVE equipment. Part No. 19-005199.
THERMAWAVE
19-012596
Inductor, FERRITE,10UH,25%
spare_part
High-quality nan for THERMAWAVE CMP tool. Inductor, FERRITE,10UH,25%. Compatible with THERMAWAVE equipment. Part No. 19-012596.
THERMAWAVE
20-002763
Filter,EMI,LO PS,FDTHRU,12-32
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,EMI,LO PS,FDTHRU,12-32. Compatible with THERMAWAVE equipment. Part No. 20-002763.
THERMAWAVE
20-003040
Filter,JMK KK-02-83-30
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,JMK KK-02-83-30. Compatible with THERMAWAVE equipment. Part No. 20-003040.
THERMAWAVE
20-006099
***MUST order next higher assembly***
spare_part
High-quality nan for THERMAWAVE CMP tool. ***MUST order next higher assembly***. Compatible with THERMAWAVE equipment. Part No. 20-006099.
THERMAWAVE
20-014305
FILTER,EMI,250V,20A,SUPPRESS
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,EMI,250V,20A,SUPPRESS. Compatible with THERMAWAVE equipment. Part No. 20-014305.
THERMAWAVE
20-045863
COMP,VOLT DIP,230VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. COMP,VOLT DIP,230VAC. Compatible with THERMAWAVE equipment. Part No. 20-045863.
THERMAWAVE
21-002523
Power Supply,+15V,3AMP,HCC15-3-A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,+15V,3AMP,HCC15-3-A. Compatible with THERMAWAVE equipment. Part No. 21-002523.
THERMAWAVE
21-006091
Power Supply,48VOLT,COMPU MTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,48VOLT,COMPU MTR. Compatible with THERMAWAVE equipment. Part No. 21-006091.
THERMAWAVE
21-007861
Ina, Power Supply,Switch,5V/50A repl.by 21-045988
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Power Supply,Switch,5V/50A repl.by 21-045988. Compatible with THERMAWAVE equipment. Part No. 21-007861.
THERMAWAVE
21-007908
Power Supply,AR Laser,OMNICHROME
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,AR Laser,OMNICHROME. Compatible with THERMAWAVE equipment. Part No. 21-007908.
THERMAWAVE
21-007947
USE UP EXISTING STOCK - then order 21-030628 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 21-030628 instead.. Compatible with THERMAWAVE equipment. Part No. 21-007947.
THERMAWAVE
21-007972
OBSOLETE - order 61-028938 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 61-028938 instead. Compatible with THERMAWAVE equipment. Part No. 21-007972.
THERMAWAVE
21-008056
Driver,AOM,200MHZ,Hene,NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,AOM,200MHZ,Hene,NEOS. Compatible with THERMAWAVE equipment. Part No. 21-008056.
THERMAWAVE
21-008057
Driver,AOM,110MHZ,AR,NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,AOM,110MHZ,AR,NEOS. Compatible with THERMAWAVE equipment. Part No. 21-008057.
THERMAWAVE
21-008421
Power Supply,CPU-SwitchR
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,CPU-SwitchR. Compatible with THERMAWAVE equipment. Part No. 21-008421.
THERMAWAVE
21-008878
Driver,Laser Diode,670NM,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Laser Diode,670NM,P20. Compatible with THERMAWAVE equipment. Part No. 21-008878.
THERMAWAVE
21-009575
Obs. Power Supply,Switch AC TO DC,18V repl.by 21-022817
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Power Supply,Switch AC TO DC,18V repl.by 21-022817. Compatible with THERMAWAVE equipment. Part No. 21-009575.
THERMAWAVE
21-010181
CONVERTER,DC-DC,5W,5V-5V
spare_part
High-quality nan for THERMAWAVE CMP tool. CONVERTER,DC-DC,5W,5V-5V. Compatible with THERMAWAVE equipment. Part No. 21-010181.
THERMAWAVE
21-010240
Power Supply,AR Laser,UNI,2111A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,AR Laser,UNI,2111A. Compatible with THERMAWAVE equipment. Part No. 21-010240.
THERMAWAVE
21-010650
Power Supply,PLC,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,PLC,BH. Compatible with THERMAWAVE equipment. Part No. 21-010650.
THERMAWAVE
21-011367
Power Supply,+24V,2A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,+24V,2A. Compatible with THERMAWAVE equipment. Part No. 21-011367.
THERMAWAVE
21-011447
Equipe Robot,AMP MODULE IAXIS
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,AMP MODULE IAXIS. Compatible with THERMAWAVE equipment. Part No. 21-011447.
THERMAWAVE
21-011448
Equipe Robot,Power SupplyMODULE
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Power SupplyMODULE. Compatible with THERMAWAVE equipment. Part No. 21-011448.
THERMAWAVE
21-011711
Power Supply,+/-12V,5A,115 WATT
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,+/-12V,5A,115 WATT. Compatible with THERMAWAVE equipment. Part No. 21-011711.
THERMAWAVE
21-012259
Ina,Power Supply,600W MAX,4MODULE repl. by 21-045977
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Power Supply,600W MAX,4MODULE repl. by 21-045977. Compatible with THERMAWAVE equipment. Part No. 21-012259.
THERMAWAVE
21-012855
Ina. Power Supply,TUNG,115V,1.6A repl. by 18-123012
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Power Supply,TUNG,115V,1.6A repl. by 18-123012. Compatible with THERMAWAVE equipment. Part No. 21-012855.
THERMAWAVE
21-012856
Power Supply,DEUTERIUM,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,DEUTERIUM,UV. Compatible with THERMAWAVE equipment. Part No. 21-012856.
THERMAWAVE
21-014234
EG,Power Supply,White Light, JAG
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,Power Supply,White Light, JAG. Compatible with THERMAWAVE equipment. Part No. 21-014234.
THERMAWAVE
21-014324
Power Supply,DC-DC CONVERTER
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,DC-DC CONVERTER. Compatible with THERMAWAVE equipment. Part No. 21-014324.
THERMAWAVE
21-014621
PWR SUPPLY,24VDC,2.1A,50W
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,24VDC,2.1A,50W. Compatible with THERMAWAVE equipment. Part No. 21-014621.
THERMAWAVE
21-014621
PWR SUPPLY,24VDC,2.1A,50W
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,24VDC,2.1A,50W. Compatible with THERMAWAVE equipment. Part No. 21-014621.
THERMAWAVE
21-015067
Power Supply,DEUTERIUM
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,DEUTERIUM. Compatible with THERMAWAVE equipment. Part No. 21-015067.
THERMAWAVE
21-015685
PWR SUPPLY,+5,+/-12&15,+24V
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,+5,+/-12&15,+24V. Compatible with THERMAWAVE equipment. Part No. 21-015685.
THERMAWAVE
21-015686
Power Supply,+5,+/-15&8,+24V
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,+5,+/-15&8,+24V. Compatible with THERMAWAVE equipment. Part No. 21-015686.
THERMAWAVE
21-015909
Ina, Power Supply,24VDC, repl.by 18-122781
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Power Supply,24VDC, repl.by 18-122781. Compatible with THERMAWAVE equipment. Part No. 21-015909.
THERMAWAVE
21-018728
PWR SUPPLY,8,15,24V
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,8,15,24V. Compatible with THERMAWAVE equipment. Part No. 21-018728.
THERMAWAVE
21-021109
Power Supply,24VDC,.6A,15W
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply,24VDC,.6A,15W. Compatible with THERMAWAVE equipment. Part No. 21-021109.
THERMAWAVE
21-022006
PWR SUPPLY,PLC W/24VDC OPUT
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,PLC W/24VDC OPUT. Compatible with THERMAWAVE equipment. Part No. 21-022006.
THERMAWAVE
21-022779
Power Supply, 5V/12V, 10A, 24V, 15A
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply, 5V/12V, 10A, 24V, 15A. Compatible with THERMAWAVE equipment. Part No. 21-022779.
THERMAWAVE
21-022817
Power Supply, Aztec, White Light
spare_part
High-quality nan for THERMAWAVE CMP tool. Power Supply, Aztec, White Light. Compatible with THERMAWAVE equipment. Part No. 21-022817.
THERMAWAVE
21-023309
PWR SUPPLY,15IN,LCD
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,15IN,LCD. Compatible with THERMAWAVE equipment. Part No. 21-023309.
THERMAWAVE
21-023805
Inac. PWR SUPPLY, MAIN, +5, +/-12V replaced by 21-045974
spare_part
High-quality nan for THERMAWAVE CMP tool. Inac. PWR SUPPLY, MAIN, +5, +/-12V replaced by 21-045974. Compatible with THERMAWAVE equipment. Part No. 21-023805.
THERMAWAVE
21-028181
PWR SUPPLY,NO1,STG,LINEAR
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,NO1,STG,LINEAR. Compatible with THERMAWAVE equipment. Part No. 21-028181.
THERMAWAVE
21-028182
Ina. Amplifier, NO1,STG,Liner repl. by 21-045992
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Amplifier, NO1,STG,Liner repl. by 21-045992. Compatible with THERMAWAVE equipment. Part No. 21-028182.
THERMAWAVE
21-031541
INA,EG,PWR SUPPLY,XENON,AUTO
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,EG,PWR SUPPLY,XENON,AUTO. Compatible with THERMAWAVE equipment. Part No. 21-031541.
THERMAWAVE
21-045977
PWR SUPPLY,+5,+12,-12,+24
spare_part
High-quality nan for THERMAWAVE CMP tool. PWR SUPPLY,+5,+12,-12,+24. Compatible with THERMAWAVE equipment. Part No. 21-045977.
THERMAWAVE
21-045993
CONVERTER,DC-DC,5W,12V TO 5V
spare_part
High-quality nan for THERMAWAVE CMP tool. CONVERTER,DC-DC,5W,12V TO 5V. Compatible with THERMAWAVE equipment. Part No. 21-045993.
THERMAWAVE
22-009657
Battery, 8.4V, 500mah, AA SZ, T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Battery, 8.4V, 500mah, AA SZ, T12. Compatible with THERMAWAVE equipment. Part No. 22-009657.
THERMAWAVE
22-014740
BATTERY,5.5V NI-CAD
spare_part
High-quality nan for THERMAWAVE CMP tool. BATTERY,5.5V NI-CAD. Compatible with THERMAWAVE equipment. Part No. 22-014740.
THERMAWAVE
22-046610
BATTERY, 1 HG,ROBOT,KAWASAK
spare_part
High-quality nan for THERMAWAVE CMP tool. BATTERY, 1 HG,ROBOT,KAWASAK. Compatible with THERMAWAVE equipment. Part No. 22-046610.
THERMAWAVE
22-046611
BATTERY,VME,CNTRLR,ROBOT,KA
spare_part
High-quality nan for THERMAWAVE CMP tool. BATTERY,VME,CNTRLR,ROBOT,KA. Compatible with THERMAWAVE equipment. Part No. 22-046611.
THERMAWAVE
23-003409
Meter,Panel,DC
spare_part
High-quality nan for THERMAWAVE CMP tool. Meter,Panel,DC. Compatible with THERMAWAVE equipment. Part No. 23-003409.
THERMAWAVE
24-001842
Fuse, MDL,1 AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDL,1 AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-001842.
THERMAWAVE
24-001843
Fuse, MDL,2 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDL,2 AMP. Compatible with THERMAWAVE equipment. Part No. 24-001843.
THERMAWAVE
24-002800
Fuse, MDA,4AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,4AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-002800.
THERMAWAVE
24-002801
Fuse, MDA,6 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,6 AMP. Compatible with THERMAWAVE equipment. Part No. 24-002801.
THERMAWAVE
24-003333
CIRCUIT BREAKER,MAGNETIC,AA1
spare_part
High-quality nan for THERMAWAVE CMP tool. CIRCUIT BREAKER,MAGNETIC,AA1. Compatible with THERMAWAVE equipment. Part No. 24-003333.
THERMAWAVE
24-003334
FUSEHOLDER,Panel MT
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSEHOLDER,Panel MT. Compatible with THERMAWAVE equipment. Part No. 24-003334.
THERMAWAVE
24-003559
ControllerACTOR,3POLE,25AMP,24VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. ControllerACTOR,3POLE,25AMP,24VAC. Compatible with THERMAWAVE equipment. Part No. 24-003559.
THERMAWAVE
24-003574
Fuse, 15 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 15 AMP. Compatible with THERMAWAVE equipment. Part No. 24-003574.
THERMAWAVE
24-003607
Fuse, MDA,10AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,10AMP. Compatible with THERMAWAVE equipment. Part No. 24-003607.
THERMAWAVE
24-003652
CIRCUIT BREAKER,20A,10,000AC
spare_part
High-quality nan for THERMAWAVE CMP tool. CIRCUIT BREAKER,20A,10,000AC. Compatible with THERMAWAVE equipment. Part No. 24-003652.
THERMAWAVE
24-003686
Fuse, MDL,3/4 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDL,3/4 AMP. Compatible with THERMAWAVE equipment. Part No. 24-003686.
THERMAWAVE
24-003789
Fuse, PCMT,PICO 2,3/4 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, PCMT,PICO 2,3/4 AMP. Compatible with THERMAWAVE equipment. Part No. 24-003789.
THERMAWAVE
24-006673
Fuse, MDA,20AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,20AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-006673.
THERMAWAVE
24-006956
FUSEHOLDER,SOLDER TAB
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSEHOLDER,SOLDER TAB. Compatible with THERMAWAVE equipment. Part No. 24-006956.
THERMAWAVE
24-007081
Fuse, MDA,5AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,5AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-007081.
THERMAWAVE
24-007082
Fuse, MDA,1-1/2AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,1-1/2AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-007082.
THERMAWAVE
24-007083
Fuse, MDA,8AMP,250VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,8AMP,250VAC. Compatible with THERMAWAVE equipment. Part No. 24-007083.
THERMAWAVE
24-009830
PROTECTOR,OVER VOLTAGE,12A
spare_part
High-quality nan for THERMAWAVE CMP tool. PROTECTOR,OVER VOLTAGE,12A. Compatible with THERMAWAVE equipment. Part No. 24-009830.
THERMAWAVE
24-009849
Fuse, BLOCK,2POLE Screw TERMINACTIVELS
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, BLOCK,2POLE Screw TERMINACTIVELS. Compatible with THERMAWAVE equipment. Part No. 24-009849.
THERMAWAVE
24-010096
Fuse, RESETTABLE,2.5AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, RESETTABLE,2.5AMP. Compatible with THERMAWAVE equipment. Part No. 24-010096.
THERMAWAVE
24-011405
Fuse, MDA,7AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,7AMP. Compatible with THERMAWAVE equipment. Part No. 24-011405.
THERMAWAVE
24-011406
Fuse, MDA,15AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MDA,15AMP. Compatible with THERMAWAVE equipment. Part No. 24-011406.
THERMAWAVE
24-012690
FUSE,SMT,PICO,.50A,FB,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,SMT,PICO,.50A,FB,125V. Compatible with THERMAWAVE equipment. Part No. 24-012690.
THERMAWAVE
24-012939
CIRCUIT BREAKER,20AMP,DNIEC947
spare_part
High-quality nan for THERMAWAVE CMP tool. CIRCUIT BREAKER,20AMP,DNIEC947. Compatible with THERMAWAVE equipment. Part No. 24-012939.
THERMAWAVE
24-013287
FUSEHOLDER,Panel MT,HTB,RT ANG
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSEHOLDER,Panel MT,HTB,RT ANG. Compatible with THERMAWAVE equipment. Part No. 24-013287.
THERMAWAVE
24-015284
ControllerACTOR,4POLE,35A,24V
spare_part
High-quality nan for THERMAWAVE CMP tool. ControllerACTOR,4POLE,35A,24V. Compatible with THERMAWAVE equipment. Part No. 24-015284.
THERMAWAVE
24-015870
Fuse, MICRO,2AMP,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MICRO,2AMP,125V. Compatible with THERMAWAVE equipment. Part No. 24-015870.
THERMAWAVE
24-015922
Fuse, 5.0A,SLO-BLO,250V,5X20
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 5.0A,SLO-BLO,250V,5X20. Compatible with THERMAWAVE equipment. Part No. 24-015922.
THERMAWAVE
24-015923
Fuse, 4.0A,SLO-BLO,250V,5X20
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 4.0A,SLO-BLO,250V,5X20. Compatible with THERMAWAVE equipment. Part No. 24-015923.
THERMAWAVE
24-015924
Fuse, 2.0A,SLO-BLW,250V,5X20
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 2.0A,SLO-BLW,250V,5X20. Compatible with THERMAWAVE equipment. Part No. 24-015924.
THERMAWAVE
24-015925
Fuse, 1.0A,SL0-BLO,250V,5X20
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 1.0A,SL0-BLO,250V,5X20. Compatible with THERMAWAVE equipment. Part No. 24-015925.
THERMAWAVE
24-015927
FUSEHOLDER,PCMT,5X20,W/GRIP
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSEHOLDER,PCMT,5X20,W/GRIP. Compatible with THERMAWAVE equipment. Part No. 24-015927.
THERMAWAVE
24-015937
Fuse, MICRO,O.5AMP,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MICRO,O.5AMP,125V. Compatible with THERMAWAVE equipment. Part No. 24-015937.
THERMAWAVE
24-015938
Fuse, MICRO,4AMP,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, MICRO,4AMP,125V. Compatible with THERMAWAVE equipment. Part No. 24-015938.
THERMAWAVE
24-016005
Fuse, 5.0A,SL0-BLO,125V,2AG
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 5.0A,SL0-BLO,125V,2AG. Compatible with THERMAWAVE equipment. Part No. 24-016005.
THERMAWAVE
24-016054
FUSE,10A,SLO-BLO,250V,5X20M
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,10A,SLO-BLO,250V,5X20M. Compatible with THERMAWAVE equipment. Part No. 24-016054.
THERMAWAVE
24-017845
FUSEHOLDER,P/S,15AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSEHOLDER,P/S,15AMP. Compatible with THERMAWAVE equipment. Part No. 24-017845.
THERMAWAVE
24-019526
FUSE,25A,SLO-BLO,125V,1-1/4
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,25A,SLO-BLO,125V,1-1/4. Compatible with THERMAWAVE equipment. Part No. 24-019526.
THERMAWAVE
24-020388
FUSE,MICRO,3AMP,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,MICRO,3AMP,125V. Compatible with THERMAWAVE equipment. Part No. 24-020388.
THERMAWAVE
24-020912
Fuse, 3AB SB,3AMPS,250V
spare_part
High-quality nan for THERMAWAVE CMP tool. Fuse, 3AB SB,3AMPS,250V. Compatible with THERMAWAVE equipment. Part No. 24-020912.
THERMAWAVE
24-021124
ControllerACTOR,3POLE,30A,24VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. ControllerACTOR,3POLE,30A,24VDC. Compatible with THERMAWAVE equipment. Part No. 24-021124.
THERMAWAVE
24-022184
FUSE,MICRO,0.25AMP,125V
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,MICRO,0.25AMP,125V. Compatible with THERMAWAVE equipment. Part No. 24-022184.
THERMAWAVE
24-046710
GFI,240V 16A MAX,10MA FAULT
spare_part
High-quality nan for THERMAWAVE CMP tool. GFI,240V 16A MAX,10MA FAULT. Compatible with THERMAWAVE equipment. Part No. 24-046710.
THERMAWAVE
24-046725
FUSE PLUG,PANEL,CNTRLR,KAWA
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE PLUG,PANEL,CNTRLR,KAWA. Compatible with THERMAWAVE equipment. Part No. 24-046725.
THERMAWAVE
24-046726
FUSE,KIT,C65-A,CNTRLR,KAWAS
spare_part
High-quality nan for THERMAWAVE CMP tool. FUSE,KIT,C65-A,CNTRLR,KAWAS. Compatible with THERMAWAVE equipment. Part No. 24-046726.
THERMAWAVE
25-002366
OBSOLETE - End of life, do not order.
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - End of life, do not order.. Compatible with THERMAWAVE equipment. Part No. 25-002366.
THERMAWAVE
25-006315
Laser,Hene,5.5MW,.08MM Beam DI
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser,Hene,5.5MW,.08MM Beam DI. Compatible with THERMAWAVE equipment. Part No. 25-006315.
THERMAWAVE
25-008879
INA,HD,LASER DIODE,670NM,P20 repl. by 25-026863
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,HD,LASER DIODE,670NM,P20 repl. by 25-026863. Compatible with THERMAWAVE equipment. Part No. 25-008879.
THERMAWAVE
25-010239
Laser,AR,UNIPHASE,2211
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser,AR,UNIPHASE,2211. Compatible with THERMAWAVE equipment. Part No. 25-010239.
THERMAWAVE
25-022838
Laser, Diode, Fiber PGT, 670NM
spare_part
High-quality nan for THERMAWAVE CMP tool. Laser, Diode, Fiber PGT, 670NM. Compatible with THERMAWAVE equipment. Part No. 25-022838.
THERMAWAVE
25-026863
LASER DIODE,670NM,MPX
spare_part
High-quality nan for THERMAWAVE CMP tool. LASER DIODE,670NM,MPX. Compatible with THERMAWAVE equipment. Part No. 25-026863.
THERMAWAVE
26-016241
ENCODER,Y-Stage,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCODER,Y-Stage,UV. Compatible with THERMAWAVE equipment. Part No. 26-016241.
THERMAWAVE
26-016242
ENCODER,X-Stage,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCODER,X-Stage,UV. Compatible with THERMAWAVE equipment. Part No. 26-016242.
THERMAWAVE
26-021050
Encoder, Linear, 220MM, 1uM
spare_part
High-quality nan for THERMAWAVE CMP tool. Encoder, Linear, 220MM, 1uM. Compatible with THERMAWAVE equipment. Part No. 26-021050.
THERMAWAVE
26-022528
ENCODER,Assembly,X-Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCODER,Assembly,X-Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 26-022528.
THERMAWAVE
26-022529
ENCODER,Assembly,Y-Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCODER,Assembly,Y-Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 26-022529.
THERMAWAVE
27-001476
TERM,PIN,.025SQ,3POS
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,PIN,.025SQ,3POS. Compatible with THERMAWAVE equipment. Part No. 27-001476.
THERMAWAVE
27-002498
TERM,SOC StandardRIP,AUGAT 510AG91D
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,SOC StandardRIP,AUGAT 510AG91D. Compatible with THERMAWAVE equipment. Part No. 27-002498.
THERMAWAVE
27-003400
TERM,PIN,CRIMP,14-20AWG
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,PIN,CRIMP,14-20AWG. Compatible with THERMAWAVE equipment. Part No. 27-003400.
THERMAWAVE
27-003646
TERM,BLOCK,RAIL MT,8-24AWG
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,BLOCK,RAIL MT,8-24AWG. Compatible with THERMAWAVE equipment. Part No. 27-003646.
THERMAWAVE
27-003658
TERM,RING LUG,#6,RED,18-22AWG
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,RING LUG,#6,RED,18-22AWG. Compatible with THERMAWAVE equipment. Part No. 27-003658.
THERMAWAVE
27-003696
TERM,SOC,RG/U-174
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,SOC,RG/U-174. Compatible with THERMAWAVE equipment. Part No. 27-003696.
THERMAWAVE
27-003798
TERM,BLOCK,09POS
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,BLOCK,09POS. Compatible with THERMAWAVE equipment. Part No. 27-003798.
THERMAWAVE
27-005082
TERM,PIN,CRIMP,14-20 AWG
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,PIN,CRIMP,14-20 AWG. Compatible with THERMAWAVE equipment. Part No. 27-005082.
THERMAWAVE
27-005565
TERM,PIN,.025SQ,2POS
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,PIN,.025SQ,2POS. Compatible with THERMAWAVE equipment. Part No. 27-005565.
THERMAWAVE
27-005956
TERM,INS POStandard,2-56THD
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,INS POStandard,2-56THD. Compatible with THERMAWAVE equipment. Part No. 27-005956.
THERMAWAVE
27-007089
Terminator, Block, Jumper, Wago, Adj Pos
spare_part
High-quality nan for THERMAWAVE CMP tool. Terminator, Block, Jumper, Wago, Adj Pos. Compatible with THERMAWAVE equipment. Part No. 27-007089.
THERMAWAVE
28-003441
FAN,TUBEAXIAL,TN3A2-020174
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN,TUBEAXIAL,TN3A2-020174. Compatible with THERMAWAVE equipment. Part No. 28-003441.
THERMAWAVE
28-007863
BLOWER,ELEC BOX
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER,ELEC BOX. Compatible with THERMAWAVE equipment. Part No. 28-007863.
THERMAWAVE
28-010576
Filter,ULPA,36INX36INX<30IN HT
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,ULPA,36INX36INX<30IN HT. Compatible with THERMAWAVE equipment. Part No. 28-010576.
THERMAWAVE
28-013896
Fan/Filter Unit and Micro Environment 110V
spare_part
High-quality nan for THERMAWAVE CMP tool. Fan/Filter Unit and Micro Environment 110V. Compatible with THERMAWAVE equipment. Part No. 28-013896.
THERMAWAVE
28-014741
FAN,DIRECT COOLING,486CPU
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN,DIRECT COOLING,486CPU. Compatible with THERMAWAVE equipment. Part No. 28-014741.
THERMAWAVE
28-015123
FAN/FLTR,UNIT&MICRO ENVIR 220V
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN/FLTR,UNIT&MICRO ENVIR 220V. Compatible with THERMAWAVE equipment. Part No. 28-015123.
THERMAWAVE
28-016285
FAN,3.62SQX1IN,24V,DC
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN,3.62SQX1IN,24V,DC. Compatible with THERMAWAVE equipment. Part No. 28-016285.
THERMAWAVE
28-019455
BLOWER,24VDC,33CFM
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOWER,24VDC,33CFM. Compatible with THERMAWAVE equipment. Part No. 28-019455.
THERMAWAVE
28-023544
IMPLR,12.4IN DIAX5.08H,115V
spare_part
High-quality nan for THERMAWAVE CMP tool. IMPLR,12.4IN DIAX5.08H,115V. Compatible with THERMAWAVE equipment. Part No. 28-023544.
THERMAWAVE
28-049003
FAN,119X38MM,24VDC,106CFM
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN,119X38MM,24VDC,106CFM. Compatible with THERMAWAVE equipment. Part No. 28-049003.
THERMAWAVE
29-002548
LAMP,150W,EKE
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,150W,EKE. Compatible with THERMAWAVE equipment. Part No. 29-002548.
THERMAWAVE
29-002610
FiberER Optic BUNDLE,4FT,B448
spare_part
High-quality nan for THERMAWAVE CMP tool. FiberER Optic BUNDLE,4FT,B448. Compatible with THERMAWAVE equipment. Part No. 29-002610.
THERMAWAVE
29-003329
LAMP,NEON,GREEN,105-125V
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,NEON,GREEN,105-125V. Compatible with THERMAWAVE equipment. Part No. 29-003329.
THERMAWAVE
29-003339
LAMP,SUB-MINI,28V,.04 AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,SUB-MINI,28V,.04 AMP. Compatible with THERMAWAVE equipment. Part No. 29-003339.
THERMAWAVE
29-010501
LAMP,SPECTROMeter,SPECIAL
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,SPECTROMeter,SPECIAL. Compatible with THERMAWAVE equipment. Part No. 29-010501.
THERMAWAVE
29-010887
LAMP,MINI,T33/4,313,28V,.17A
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,MINI,T33/4,313,28V,.17A. Compatible with THERMAWAVE equipment. Part No. 29-010887.
THERMAWAVE
29-010888
LAMPHOLDER,AMBER,.750MT,T33/4
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMPHOLDER,AMBER,.750MT,T33/4. Compatible with THERMAWAVE equipment. Part No. 29-010888.
THERMAWAVE
29-011073
FiberER Optic BUNDLE,SStandard JCKT,72IN
spare_part
High-quality nan for THERMAWAVE CMP tool. FiberER Optic BUNDLE,SStandard JCKT,72IN. Compatible with THERMAWAVE equipment. Part No. 29-011073.
THERMAWAVE
29-012104
INA,LAMP,QUARTZ Halogen,UV repl. by 29-023390
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,LAMP,QUARTZ Halogen,UV repl. by 29-023390. Compatible with THERMAWAVE equipment. Part No. 29-012104.
THERMAWAVE
29-012106
LAMP,BASE,BOTTOM WIRES
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,BASE,BOTTOM WIRES. Compatible with THERMAWAVE equipment. Part No. 29-012106.
THERMAWAVE
29-013586
BULB,DEUTERIUM,W/FLANGE,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB,DEUTERIUM,W/FLANGE,UV. Compatible with THERMAWAVE equipment. Part No. 29-013586.
THERMAWAVE
29-014965
BULB,DEUTERIUM,W/FLANGE,EUV
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB,DEUTERIUM,W/FLANGE,EUV. Compatible with THERMAWAVE equipment. Part No. 29-014965.
THERMAWAVE
29-015507
LAMP,LED,CLUStandardER,24VAC
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,LED,CLUStandardER,24VAC. Compatible with THERMAWAVE equipment. Part No. 29-015507.
THERMAWAVE
29-017553
FiberER Optic,RANDOMIZED,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. FiberER Optic,RANDOMIZED,P34. Compatible with THERMAWAVE equipment. Part No. 29-017553.
THERMAWAVE
29-018048
BULB,DEUTERIUM,W/FLANGE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB,DEUTERIUM,W/FLANGE,P34. Compatible with THERMAWAVE equipment. Part No. 29-018048.
THERMAWAVE
29-019063
BULB,BACK Light, FLT Panel LCD
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB,BACK Light, FLT Panel LCD. Compatible with THERMAWAVE equipment. Part No. 29-019063.
THERMAWAVE
29-019425
FIBER OPT BUNDLE,SS JCKT,60
spare_part
High-quality nan for THERMAWAVE CMP tool. FIBER OPT BUNDLE,SS JCKT,60. Compatible with THERMAWAVE equipment. Part No. 29-019425.
THERMAWAVE
29-020700
FiberER,Optic BUNDLE,48IN,CUStandardOM
spare_part
High-quality nan for THERMAWAVE CMP tool. FiberER,Optic BUNDLE,48IN,CUStandardOM. Compatible with THERMAWAVE equipment. Part No. 29-020700.
THERMAWAVE
29-022613
FILTER,HEPA,.99995%,LW SP,B
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,HEPA,.99995%,LW SP,B. Compatible with THERMAWAVE equipment. Part No. 29-022613.
THERMAWAVE
29-023390
Lamp, Quartz, Halogen, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Lamp, Quartz, Halogen, UV. Compatible with THERMAWAVE equipment. Part No. 29-023390.
THERMAWAVE
29-023593
LAMP,FIXTURE,FLUOR,36IN
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,FIXTURE,FLUOR,36IN. Compatible with THERMAWAVE equipment. Part No. 29-023593.
THERMAWAVE
29-025810
BULB,DEUTM,SEE THRU,W-FLG
spare_part
High-quality nan for THERMAWAVE CMP tool. BULB,DEUTM,SEE THRU,W-FLG. Compatible with THERMAWAVE equipment. Part No. 29-025810.
THERMAWAVE
29-025815
LAMP,QUARTZ,HALOGEN,12V,20W
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,QUARTZ,HALOGEN,12V,20W. Compatible with THERMAWAVE equipment. Part No. 29-025815.
THERMAWAVE
29-049181
LAMP,FLUORESCENT,28W
spare_part
High-quality nan for THERMAWAVE CMP tool. LAMP,FLUORESCENT,28W. Compatible with THERMAWAVE equipment. Part No. 29-049181.
THERMAWAVE
30-002638
TRACKBALL,LQ200-192-5
spare_part
High-quality nan for THERMAWAVE CMP tool. TRACKBALL,LQ200-192-5. Compatible with THERMAWAVE equipment. Part No. 30-002638.
THERMAWAVE
30-003028
DISK,5-1/4IN,FLPY,DS/DD
spare_part
High-quality nan for THERMAWAVE CMP tool. DISK,5-1/4IN,FLPY,DS/DD. Compatible with THERMAWAVE equipment. Part No. 30-003028.
THERMAWAVE
30-003067
CARTRIDGE,TAPE,1/4IN,StandardREAMING
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,TAPE,1/4IN,StandardREAMING. Compatible with THERMAWAVE equipment. Part No. 30-003067.
THERMAWAVE
30-003098
PCB,CLOCK/CALENDAR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,CLOCK/CALENDAR. Compatible with THERMAWAVE equipment. Part No. 30-003098.
THERMAWAVE
30-005027
CARTRIDGE,TAPE,1/4INX600FT
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,TAPE,1/4INX600FT. Compatible with THERMAWAVE equipment. Part No. 30-005027.
THERMAWAVE
30-005366
INA,CNTRLR,ROBOT,5-AXES
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,CNTRLR,ROBOT,5-AXES. Compatible with THERMAWAVE equipment. Part No. 30-005366.
THERMAWAVE
30-006132
PEN,Light, PC-AT
spare_part
High-quality nan for THERMAWAVE CMP tool. PEN,Light, PC-AT. Compatible with THERMAWAVE equipment. Part No. 30-006132.
THERMAWAVE
30-006182
OBSOLETE - order 30-019051 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 30-019051 instead. Compatible with THERMAWAVE equipment. Part No. 30-006182.
THERMAWAVE
30-006590
RIBBON,Printer,EPSON, FX850
spare_part
High-quality nan for THERMAWAVE CMP tool. RIBBON,Printer,EPSON, FX850. Compatible with THERMAWAVE equipment. Part No. 30-006590.
THERMAWAVE
30-007271
Drive,Floppy,3-1/2IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Drive,Floppy,3-1/2IN. Compatible with THERMAWAVE equipment. Part No. 30-007271.
THERMAWAVE
30-007272
Driver,TAPE,SCSI,1/4 StandardREAMI
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,TAPE,SCSI,1/4 StandardREAMI. Compatible with THERMAWAVE equipment. Part No. 30-007272.
THERMAWAVE
30-007646
DISK,3-1/2IN,FLPY,CERTIFIED
spare_part
High-quality nan for THERMAWAVE CMP tool. DISK,3-1/2IN,FLPY,CERTIFIED. Compatible with THERMAWAVE equipment. Part No. 30-007646.
THERMAWAVE
30-007684
COMPUTER,SUN,IPC
spare_part
High-quality nan for THERMAWAVE CMP tool. COMPUTER,SUN,IPC. Compatible with THERMAWAVE equipment. Part No. 30-007684.
THERMAWAVE
30-007688
Driver,Optic DISK,650MB,SCSI,5-1/4IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Optic DISK,650MB,SCSI,5-1/4IN. Compatible with THERMAWAVE equipment. Part No. 30-007688.
THERMAWAVE
30-007691
TRANSCEIVER,ETHERNET
spare_part
High-quality nan for THERMAWAVE CMP tool. TRANSCEIVER,ETHERNET. Compatible with THERMAWAVE equipment. Part No. 30-007691.
THERMAWAVE
30-007701
WORKStandardATION,COMPUTER SYStandardEM
spare_part
High-quality nan for THERMAWAVE CMP tool. WORKStandardATION,COMPUTER SYStandardEM. Compatible with THERMAWAVE equipment. Part No. 30-007701.
THERMAWAVE
30-008029
Obsolete Driver,HARD DISK,170MB,SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. Obsolete Driver,HARD DISK,170MB,SCSI. Compatible with THERMAWAVE equipment. Part No. 30-008029.
THERMAWAVE
30-008118
Obs.Tape,Data,Mini,Formatted repl. by 31-013337
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.Tape,Data,Mini,Formatted repl. by 31-013337. Compatible with THERMAWAVE equipment. Part No. 30-008118.
THERMAWAVE
30-008159
Driver,StandardRM TAPE,AT/XT
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,StandardRM TAPE,AT/XT. Compatible with THERMAWAVE equipment. Part No. 30-008159.
THERMAWAVE
30-009184
PEN,Light, PC-AT,FISH EYE
spare_part
High-quality nan for THERMAWAVE CMP tool. PEN,Light, PC-AT,FISH EYE. Compatible with THERMAWAVE equipment. Part No. 30-009184.
THERMAWAVE
30-009302
Printer,BUFFER,HWP-4000
spare_part
High-quality nan for THERMAWAVE CMP tool. Printer,BUFFER,HWP-4000. Compatible with THERMAWAVE equipment. Part No. 30-009302.
THERMAWAVE
30-009995
TRACKBALL,KB50-114
spare_part
High-quality nan for THERMAWAVE CMP tool. TRACKBALL,KB50-114. Compatible with THERMAWAVE equipment. Part No. 30-009995.
THERMAWAVE
30-010441
DISK,HARD,REM,270MB,SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. DISK,HARD,REM,270MB,SCSI. Compatible with THERMAWAVE equipment. Part No. 30-010441.
THERMAWAVE
30-010503
Keyboard,RS422/PCAT/PCXT,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Keyboard,RS422/PCAT/PCXT,TP. Compatible with THERMAWAVE equipment. Part No. 30-010503.
THERMAWAVE
30-010527
TRACKBALL,RUGGED,W/CVR
spare_part
High-quality nan for THERMAWAVE CMP tool. TRACKBALL,RUGGED,W/CVR. Compatible with THERMAWAVE equipment. Part No. 30-010527.
THERMAWAVE
30-010571
Monitor,Video,13IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor,Video,13IN. Compatible with THERMAWAVE equipment. Part No. 30-010571.
THERMAWAVE
30-010647
I/O MODULE,PLC
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MODULE,PLC. Compatible with THERMAWAVE equipment. Part No. 30-010647.
THERMAWAVE
30-010649
MEMORY,CPU,PLC,4K EEprom,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. MEMORY,CPU,PLC,4K EEprom,BH. Compatible with THERMAWAVE equipment. Part No. 30-010649.
THERMAWAVE
30-010651
CPU,PLC,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. CPU,PLC,BH. Compatible with THERMAWAVE equipment. Part No. 30-010651.
THERMAWAVE
30-011443
Equipe Robot,Standard,COMP,W/OEPRM8NVR
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Standard,COMP,W/OEPRM8NVR. Compatible with THERMAWAVE equipment. Part No. 30-011443.
THERMAWAVE
30-011502
Equipe Robot,TEACH TERMINACTIVEL
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,TEACH TERMINACTIVEL. Compatible with THERMAWAVE equipment. Part No. 30-011502.
THERMAWAVE
30-012197
PEN,Light, DT251
spare_part
High-quality nan for THERMAWAVE CMP tool. PEN,Light, DT251. Compatible with THERMAWAVE equipment. Part No. 30-012197.
THERMAWAVE
30-013019
CARTRIDGE,PRINT,HP694,BLK
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PRINT,HP694,BLK. Compatible with THERMAWAVE equipment. Part No. 30-013019.
THERMAWAVE
30-013337
TAPE,DATA,MINI,TRAVAN,400MB
spare_part
High-quality nan for THERMAWAVE CMP tool. TAPE,DATA,MINI,TRAVAN,400MB. Compatible with THERMAWAVE equipment. Part No. 30-013337.
THERMAWAVE
30-013338
Inc, Driver,TAPEBACKUP,T1000,QIC-80 repl. by 61-013339
spare_part
High-quality nan for THERMAWAVE CMP tool. Inc, Driver,TAPEBACKUP,T1000,QIC-80 repl. by 61-013339. Compatible with THERMAWAVE equipment. Part No. 30-013338.
THERMAWAVE
30-014660
Ina, Printer,DESKJET HP895 repl. by 30-135730
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Printer,DESKJET HP895 repl. by 30-135730. Compatible with THERMAWAVE equipment. Part No. 30-014660.
THERMAWAVE
30-014661
OBSOLETE - order 30-030344 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 30-030344 instead. Compatible with THERMAWAVE equipment. Part No. 30-014661.
THERMAWAVE
30-014662
Cartridge, Printer, HP870/890/895/950
spare_part
High-quality nan for THERMAWAVE CMP tool. Cartridge, Printer, HP870/890/895/950. Compatible with THERMAWAVE equipment. Part No. 30-014662.
THERMAWAVE
30-014663
CARTRIDGE,PRINT,HP870,COLOR
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PRINT,HP870,COLOR. Compatible with THERMAWAVE equipment. Part No. 30-014663.
THERMAWAVE
30-014664
CARTRIDGE,PRINT,HP1600,CYAN
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PRINT,HP1600,CYAN. Compatible with THERMAWAVE equipment. Part No. 30-014664.
THERMAWAVE
30-014665
CARTRIDGE,PRINT,HP1600,YELLOW
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PRINT,HP1600,YELLOW. Compatible with THERMAWAVE equipment. Part No. 30-014665.
THERMAWAVE
30-014666
CARTRIDGE,PRINT,HP1600,MAGENTA
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PRINT,HP1600,MAGENTA. Compatible with THERMAWAVE equipment. Part No. 30-014666.
THERMAWAVE
30-014983
Printer,Video,MONO,120/240V
spare_part
High-quality nan for THERMAWAVE CMP tool. Printer,Video,MONO,120/240V. Compatible with THERMAWAVE equipment. Part No. 30-014983.
THERMAWAVE
30-015461
Keyboard, 101KEYS,IBM COMPAT
spare_part
High-quality nan for THERMAWAVE CMP tool. Keyboard, 101KEYS,IBM COMPAT. Compatible with THERMAWAVE equipment. Part No. 30-015461.
THERMAWAVE
30-015486
Keyboard, PC-AT,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Keyboard, PC-AT,OP2600. Compatible with THERMAWAVE equipment. Part No. 30-015486.
THERMAWAVE
30-015755
PEN,Light, DT661,5FT Cable
spare_part
High-quality nan for THERMAWAVE CMP tool. PEN,Light, DT661,5FT Cable. Compatible with THERMAWAVE equipment. Part No. 30-015755.
THERMAWAVE
30-015756
PEN,Light, DT661,3FT Cable
spare_part
High-quality nan for THERMAWAVE CMP tool. PEN,Light, DT661,3FT Cable. Compatible with THERMAWAVE equipment. Part No. 30-015756.
THERMAWAVE
30-015939
Driver,TAPE BACKUP,SCSI,2.3GB
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,TAPE BACKUP,SCSI,2.3GB. Compatible with THERMAWAVE equipment. Part No. 30-015939.
THERMAWAVE
30-016549
INA, Printer,DESKJET,HP694C repl.by 30-014660
spare_part
High-quality nan for THERMAWAVE CMP tool. INA, Printer,DESKJET,HP694C repl.by 30-014660. Compatible with THERMAWAVE equipment. Part No. 30-016549.
THERMAWAVE
30-016561
Ina.TAPE,DATA,3210XL,QIC-3210,128M repl. by 18-122477
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.TAPE,DATA,3210XL,QIC-3210,128M repl. by 18-122477. Compatible with THERMAWAVE equipment. Part No. 30-016561.
THERMAWAVE
30-018069
Keyboard, PC/AT, PS2, Min
spare_part
High-quality nan for THERMAWAVE CMP tool. Keyboard, PC/AT, PS2, Min. Compatible with THERMAWAVE equipment. Part No. 30-018069.
THERMAWAVE
30-018313
DISPLAY,NTSC,6.4IN,FLT Panel,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. DISPLAY,NTSC,6.4IN,FLT Panel,P34. Compatible with THERMAWAVE equipment. Part No. 30-018313.
THERMAWAVE
30-019051
Obsolete mon, replaced by 30-023157, repl. by 30-023382
spare_part
High-quality nan for THERMAWAVE CMP tool. Obsolete mon, replaced by 30-023157, repl. by 30-023382. Compatible with THERMAWAVE equipment. Part No. 30-019051.
THERMAWAVE
30-020303
TAPE,DATA,TRAVAN,TR-2,800MB
spare_part
High-quality nan for THERMAWAVE CMP tool. TAPE,DATA,TRAVAN,TR-2,800MB. Compatible with THERMAWAVE equipment. Part No. 30-020303.
THERMAWAVE
30-020304
DR,TAPEBACKUP,INTL TR3 FLPYCNT
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,TAPEBACKUP,INTL TR3 FLPYCNT. Compatible with THERMAWAVE equipment. Part No. 30-020304.
THERMAWAVE
30-020922
INA,DISK,2GB,JAZ repl. by 30-031482
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DISK,2GB,JAZ repl. by 30-031482. Compatible with THERMAWAVE equipment. Part No. 30-020922.
THERMAWAVE
30-020925
Driver,CD ROM,32X,SCSI
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,CD ROM,32X,SCSI. Compatible with THERMAWAVE equipment. Part No. 30-020925.
THERMAWAVE
30-020926
INA,DR,DISK BACKUP,2GB,INT,JAZ order 61-031577 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DR,DISK BACKUP,2GB,INT,JAZ order 61-031577 instead. Compatible with THERMAWAVE equipment. Part No. 30-020926.
THERMAWAVE
30-020930
MOUSE,PS/2,2 BUTTON W/ScrewOLL
spare_part
High-quality nan for THERMAWAVE CMP tool. MOUSE,PS/2,2 BUTTON W/ScrewOLL. Compatible with THERMAWAVE equipment. Part No. 30-020930.
THERMAWAVE
30-021034
INA,DR,HARD,8BIT SCSI NRW,4.5G replaced by 30-029584
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,DR,HARD,8BIT SCSI NRW,4.5G replaced by 30-029584. Compatible with THERMAWAVE equipment. Part No. 30-021034.
THERMAWAVE
30-021337
Cartridge, Printer, HP890,895 Color
spare_part
High-quality nan for THERMAWAVE CMP tool. Cartridge, Printer, HP890,895 Color. Compatible with THERMAWAVE equipment. Part No. 30-021337.
THERMAWAVE
30-021492
Ina.Printer,Buffer,2MB repl. by 30-135747
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Printer,Buffer,2MB repl. by 30-135747. Compatible with THERMAWAVE equipment. Part No. 30-021492.
THERMAWAVE
30-021663
INA,CONVERTER,NTSC TO VGA,JAM repl.by 61-112889
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,CONVERTER,NTSC TO VGA,JAM repl.by 61-112889. Compatible with THERMAWAVE equipment. Part No. 30-021663.
THERMAWAVE
30-021898
Monitor, 15" LDC, OI, NT, 300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor, 15" LDC, OI, NT, 300MM. Compatible with THERMAWAVE equipment. Part No. 30-021898.
THERMAWAVE
30-021975
Monitor,LCD,15.1IN,W/BEZEL
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor,LCD,15.1IN,W/BEZEL. Compatible with THERMAWAVE equipment. Part No. 30-021975.
THERMAWAVE
30-022005
CPU,PLC,C-SERIES
spare_part
High-quality nan for THERMAWAVE CMP tool. CPU,PLC,C-SERIES. Compatible with THERMAWAVE equipment. Part No. 30-022005.
THERMAWAVE
30-022018
I/O MDL,PLC,ANNALG INPT,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MDL,PLC,ANNALG INPT,DES. Compatible with THERMAWAVE equipment. Part No. 30-022018.
THERMAWAVE
30-022070
SEPARATOR,VGA,ANLG,1IN/20 UT
spare_part
High-quality nan for THERMAWAVE CMP tool. SEPARATOR,VGA,ANLG,1IN/20 UT. Compatible with THERMAWAVE equipment. Part No. 30-022070.
THERMAWAVE
30-023010
Trackball, D Connector, White, Ring
spare_part
High-quality nan for THERMAWAVE CMP tool. Trackball, D Connector, White, Ring. Compatible with THERMAWAVE equipment. Part No. 30-023010.
THERMAWAVE
30-023126
Cartridge, Printer, HP950/952, Color
spare_part
High-quality nan for THERMAWAVE CMP tool. Cartridge, Printer, HP950/952, Color. Compatible with THERMAWAVE equipment. Part No. 30-023126.
THERMAWAVE
30-023157
Ina monitor,UAI repl. by 30-023382
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina monitor,UAI repl. by 30-023382. Compatible with THERMAWAVE equipment. Part No. 30-023157.
THERMAWAVE
30-023382
ina. MONITOR,PC,BULKHEAD repl. by 30-135736
spare_part
High-quality nan for THERMAWAVE CMP tool. ina. MONITOR,PC,BULKHEAD repl. by 30-135736. Compatible with THERMAWAVE equipment. Part No. 30-023382.
THERMAWAVE
30-023452
Ina.Converter,NTSC TO VGA,Fast repl.by30-135770
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Converter,NTSC TO VGA,Fast repl.by30-135770. Compatible with THERMAWAVE equipment. Part No. 30-023452.
THERMAWAVE
30-027489
CONVRTR,PRTCL,SECS-1/HSMS
spare_part
High-quality nan for THERMAWAVE CMP tool. CONVRTR,PRTCL,SECS-1/HSMS. Compatible with THERMAWAVE equipment. Part No. 30-027489.
THERMAWAVE
30-029584
Ina,DR,HARD DISK,UNFORMATD,SCSI ST318418N repl by 30-031565
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,DR,HARD DISK,UNFORMATD,SCSI ST318418N repl by 30-031565. Compatible with THERMAWAVE equipment. Part No. 30-029584.
THERMAWAVE
30-029834
ECS/01-K1.3-1 (Slave node)
spare_part
High-quality nan for THERMAWAVE CMP tool. ECS/01-K1.3-1 (Slave node). Compatible with THERMAWAVE equipment. Part No. 30-029834.
THERMAWAVE
30-029835
ECS/01-K1.3-2 (Master node)
spare_part
High-quality nan for THERMAWAVE CMP tool. ECS/01-K1.3-2 (Master node). Compatible with THERMAWAVE equipment. Part No. 30-029835.
THERMAWAVE
30-029976
Memory,4MB Module
spare_part
High-quality nan for THERMAWAVE CMP tool. Memory,4MB Module. Compatible with THERMAWAVE equipment. Part No. 30-029976.
THERMAWAVE
30-030881
I/O MDL,RTD INPUT,4PT,DL205
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MDL,RTD INPUT,4PT,DL205. Compatible with THERMAWAVE equipment. Part No. 30-030881.
THERMAWAVE
30-030882
I/O MDL,DGTL INPUT,16PT
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MDL,DGTL INPUT,16PT. Compatible with THERMAWAVE equipment. Part No. 30-030882.
THERMAWAVE
30-031482
Ina,DISK,HARD DRIVE,PCMCIA,2GB repl.by 18-122477
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,DISK,HARD DRIVE,PCMCIA,2GB repl.by 18-122477. Compatible with THERMAWAVE equipment. Part No. 30-031482.
THERMAWAVE
30-031483
ADPT,COMPACTFLASH,TYPE-1
spare_part
High-quality nan for THERMAWAVE CMP tool. ADPT,COMPACTFLASH,TYPE-1. Compatible with THERMAWAVE equipment. Part No. 30-031483.
THERMAWAVE
30-031490
CARD,256MB,COMPACTFLASH
spare_part
High-quality nan for THERMAWAVE CMP tool. CARD,256MB,COMPACTFLASH. Compatible with THERMAWAVE equipment. Part No. 30-031490.
THERMAWAVE
30-031491
DR,SCSI,PC CARD,ONE SLOT
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,SCSI,PC CARD,ONE SLOT. Compatible with THERMAWAVE equipment. Part No. 30-031491.
THERMAWAVE
30-031565
DR,HARD DISK,USCSI,36GB
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,HARD DISK,USCSI,36GB. Compatible with THERMAWAVE equipment. Part No. 30-031565.
THERMAWAVE
30-031567
COMPUTER,CLUSTER,8ND
spare_part
High-quality nan for THERMAWAVE CMP tool. COMPUTER,CLUSTER,8ND. Compatible with THERMAWAVE equipment. Part No. 30-031567.
THERMAWAVE
30-135724
I/O MDL,RELAY OUT,12PT,1.5A
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MDL,RELAY OUT,12PT,1.5A. Compatible with THERMAWAVE equipment. Part No. 30-135724.
THERMAWAVE
30-135725
I/O MDL,8CH,12 BIT ANLG IN
spare_part
High-quality nan for THERMAWAVE CMP tool. I/O MDL,8CH,12 BIT ANLG IN. Compatible with THERMAWAVE equipment. Part No. 30-135725.
THERMAWAVE
30-135728
MOUSE,MS INTELLI,2BUTT,PS/2
spare_part
High-quality nan for THERMAWAVE CMP tool. MOUSE,MS INTELLI,2BUTT,PS/2. Compatible with THERMAWAVE equipment. Part No. 30-135728.
THERMAWAVE
30-135730
Ina, Printrer,Deskjet,HP6122 repl.by 30-135747
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Printrer,Deskjet,HP6122 repl.by 30-135747. Compatible with THERMAWAVE equipment. Part No. 30-135730.
THERMAWAVE
30-135731
DR,CD/DVD ROM
spare_part
High-quality nan for THERMAWAVE CMP tool. DR,CD/DVD ROM. Compatible with THERMAWAVE equipment. Part No. 30-135731.
THERMAWAVE
30-135736
MONITOR,PC,15IN,CRT,VIEWSONIC
spare_part
High-quality nan for THERMAWAVE CMP tool. MONITOR,PC,15IN,CRT,VIEWSONIC. Compatible with THERMAWAVE equipment. Part No. 30-135736.
THERMAWAVE
30-135740
EG,SMIT,E84,OHV/AGV LOG FUNCTN
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,SMIT,E84,OHV/AGV LOG FUNCTN. Compatible with THERMAWAVE equipment. Part No. 30-135740.
THERMAWAVE
30-135741
EG,XMIT,E84,OHV/AGV
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,XMIT,E84,OHV/AGV. Compatible with THERMAWAVE equipment. Part No. 30-135741.
THERMAWAVE
30-135742
EG,NETWORK SEC,75MBPS,31ATT
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,NETWORK SEC,75MBPS,31ATT. Compatible with THERMAWAVE equipment. Part No. 30-135742.
THERMAWAVE
30-135744
AMPLIFIER,VIDEO,DIST,4CH,12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. AMPLIFIER,VIDEO,DIST,4CH,12VDC. Compatible with THERMAWAVE equipment. Part No. 30-135744.
THERMAWAVE
30-135747
PRINTER,INKJET HP1200D
spare_part
High-quality nan for THERMAWAVE CMP tool. PRINTER,INKJET HP1200D. Compatible with THERMAWAVE equipment. Part No. 30-135747.
THERMAWAVE
30-135748
CARTRIDGE,PTR,HP1200,CYAN
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PTR,HP1200,CYAN. Compatible with THERMAWAVE equipment. Part No. 30-135748.
THERMAWAVE
30-135749
CARTRIDGE,PTR,HP1200,MAGENTA
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PTR,HP1200,MAGENTA. Compatible with THERMAWAVE equipment. Part No. 30-135749.
THERMAWAVE
30-135750
CARTRIDGE,PTR,HP1200,YELLOW
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PTR,HP1200,YELLOW. Compatible with THERMAWAVE equipment. Part No. 30-135750.
THERMAWAVE
30-135751
CARTRIDGE,PTR,HP1200,BLACK
spare_part
High-quality nan for THERMAWAVE CMP tool. CARTRIDGE,PTR,HP1200,BLACK. Compatible with THERMAWAVE equipment. Part No. 30-135751.
THERMAWAVE
31-001749
ELEMENTS,BENDER
spare_part
High-quality nan for THERMAWAVE CMP tool. ELEMENTS,BENDER. Compatible with THERMAWAVE equipment. Part No. 31-001749.
THERMAWAVE
31-003158
DAMPER,LANCHEStandardER
spare_part
High-quality nan for THERMAWAVE CMP tool. DAMPER,LANCHEStandardER. Compatible with THERMAWAVE equipment. Part No. 31-003158.
THERMAWAVE
31-003527
ILLUMINACTIVETOR,FiberER OpticICS
spare_part
High-quality nan for THERMAWAVE CMP tool. ILLUMINACTIVETOR,FiberER OpticICS. Compatible with THERMAWAVE equipment. Part No. 31-003527.
THERMAWAVE
31-003538
Stage,Rotary,6X8
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage,Rotary,6X8. Compatible with THERMAWAVE equipment. Part No. 31-003538.
THERMAWAVE
31-003608
Stage,X-Y,6X8
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage,X-Y,6X8. Compatible with THERMAWAVE equipment. Part No. 31-003608.
THERMAWAVE
31-004854
Motor,Stepper,Stage,100OZ/IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,Stepper,Stage,100OZ/IN. Compatible with THERMAWAVE equipment. Part No. 31-004854.
THERMAWAVE
31-004865
HD,Laser,Hene,5MW
spare_part
High-quality nan for THERMAWAVE CMP tool. HD,Laser,Hene,5MW. Compatible with THERMAWAVE equipment. Part No. 31-004865.
THERMAWAVE
31-009571
ILLUMINACTIVETOR,P23
spare_part
High-quality nan for THERMAWAVE CMP tool. ILLUMINACTIVETOR,P23. Compatible with THERMAWAVE equipment. Part No. 31-009571.
THERMAWAVE
34-008066
HEATER,StandardRIP 24.5 OHMS
spare_part
High-quality nan for THERMAWAVE CMP tool. HEATER,StandardRIP 24.5 OHMS. Compatible with THERMAWAVE equipment. Part No. 34-008066.
THERMAWAVE
34-008502
ThermoStandardAT,BIMTL DISC,12ODEG F
spare_part
High-quality nan for THERMAWAVE CMP tool. ThermoStandardAT,BIMTL DISC,12ODEG F. Compatible with THERMAWAVE equipment. Part No. 34-008502.
THERMAWAVE
34-027139
ORDER NEXT HIGHER Assembly instead (11-028261)
spare_part
High-quality nan for THERMAWAVE CMP tool. ORDER NEXT HIGHER Assembly instead (11-028261). Compatible with THERMAWAVE equipment. Part No. 34-027139.
THERMAWAVE
34-055661
HEATER,LIFT PIN,EFD
spare_part
High-quality nan for THERMAWAVE CMP tool. HEATER,LIFT PIN,EFD. Compatible with THERMAWAVE equipment. Part No. 34-055661.
THERMAWAVE
34-055663
THERMOSTAT,DISC,350F OPEN
spare_part
High-quality nan for THERMAWAVE CMP tool. THERMOSTAT,DISC,350F OPEN. Compatible with THERMAWAVE equipment. Part No. 34-055663.
THERMAWAVE
35-021199
Ionizer,5285EU-22,SIL
spare_part
High-quality nan for THERMAWAVE CMP tool. Ionizer,5285EU-22,SIL. Compatible with THERMAWAVE equipment. Part No. 35-021199.
THERMAWAVE
35-021739
Ionizer,QUADBAR,4630EU
spare_part
High-quality nan for THERMAWAVE CMP tool. Ionizer,QUADBAR,4630EU. Compatible with THERMAWAVE equipment. Part No. 35-021739.
THERMAWAVE
35-022019
DC INPUT MDL,16PTS,24V DES
spare_part
High-quality nan for THERMAWAVE CMP tool. DC INPUT MDL,16PTS,24V DES. Compatible with THERMAWAVE equipment. Part No. 35-022019.
THERMAWAVE
35-022019
DC INPUT MDL,16PTS,24V DES
spare_part
High-quality nan for THERMAWAVE CMP tool. DC INPUT MDL,16PTS,24V DES. Compatible with THERMAWAVE equipment. Part No. 35-022019.
THERMAWAVE
35-056069
IONIZER,AEROBAR,28-INCH,ICON
spare_part
High-quality nan for THERMAWAVE CMP tool. IONIZER,AEROBAR,28-INCH,ICON. Compatible with THERMAWAVE equipment. Part No. 35-056069.
THERMAWAVE
35-056070
CNTRLR,IONIZER,5520,ICON
spare_part
High-quality nan for THERMAWAVE CMP tool. CNTRLR,IONIZER,5520,ICON. Compatible with THERMAWAVE equipment. Part No. 35-056070.
THERMAWAVE
36-015233
CD-ROM,FIELD SERVICE
spare_part
High-quality nan for THERMAWAVE CMP tool. CD-ROM,FIELD SERVICE. Compatible with THERMAWAVE equipment. Part No. 36-015233.
THERMAWAVE
40-001394
MT,AUTO FOCUS Lens
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,AUTO FOCUS Lens. Compatible with THERMAWAVE equipment. Part No. 40-001394.
THERMAWAVE
40-001433
PISTON,DAMPER
spare_part
High-quality nan for THERMAWAVE CMP tool. PISTON,DAMPER. Compatible with THERMAWAVE equipment. Part No. 40-001433.
THERMAWAVE
40-001457
CLAMP,Filter TRAY
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,Filter TRAY. Compatible with THERMAWAVE equipment. Part No. 40-001457.
THERMAWAVE
40-001495
HSG,DAMPER FLUID
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,DAMPER FLUID. Compatible with THERMAWAVE equipment. Part No. 40-001495.
THERMAWAVE
40-001564
OBS,SPACER,LINER BRG
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,SPACER,LINER BRG. Compatible with THERMAWAVE equipment. Part No. 40-001564.
THERMAWAVE
40-001731
BAR,CLAMP
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,CLAMP. Compatible with THERMAWAVE equipment. Part No. 40-001731.
THERMAWAVE
40-001732
BAR,INNER CLAMP
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,INNER CLAMP. Compatible with THERMAWAVE equipment. Part No. 40-001732.
THERMAWAVE
40-001733
BAR,OUTER CLAMPING
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,OUTER CLAMPING. Compatible with THERMAWAVE equipment. Part No. 40-001733.
THERMAWAVE
40-001747
DOG,BENDER CLAMPING
spare_part
High-quality nan for THERMAWAVE CMP tool. DOG,BENDER CLAMPING. Compatible with THERMAWAVE equipment. Part No. 40-001747.
THERMAWAVE
40-001748
RETAINER,BENDER END
spare_part
High-quality nan for THERMAWAVE CMP tool. RETAINER,BENDER END. Compatible with THERMAWAVE equipment. Part No. 40-001748.
THERMAWAVE
40-001803
MT,SPOOL SPLITTER
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,SPOOL SPLITTER. Compatible with THERMAWAVE equipment. Part No. 40-001803.
THERMAWAVE
40-001835
CVR,Detector SHIELD
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,Detector SHIELD. Compatible with THERMAWAVE equipment. Part No. 40-001835.
THERMAWAVE
40-001939
PCB FAB,Stepper DriverVR
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB FAB,Stepper DriverVR. Compatible with THERMAWAVE equipment. Part No. 40-001939.
THERMAWAVE
40-002021
StandardRUT,LID SupportPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardRUT,LID SupportPORT. Compatible with THERMAWAVE equipment. Part No. 40-002021.
THERMAWAVE
40-002039
CONE,FAN TRANSITION
spare_part
High-quality nan for THERMAWAVE CMP tool. CONE,FAN TRANSITION. Compatible with THERMAWAVE equipment. Part No. 40-002039.
THERMAWAVE
40-002286
SPACER,SLOTTED
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,SLOTTED. Compatible with THERMAWAVE equipment. Part No. 40-002286.
THERMAWAVE
40-002287-02
OBS. Bushing,Detector,DELRIN
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. Bushing,Detector,DELRIN. Compatible with THERMAWAVE equipment. Part No. 40-002287-02.
THERMAWAVE
40-002406-02
OBS. StandardRAP,GND
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. StandardRAP,GND. Compatible with THERMAWAVE equipment. Part No. 40-002406-02.
THERMAWAVE
40-002619
END,ROD,AIR CYLINDER
spare_part
High-quality nan for THERMAWAVE CMP tool. END,ROD,AIR CYLINDER. Compatible with THERMAWAVE equipment. Part No. 40-002619.
THERMAWAVE
40-002714
Bushing,CONN
spare_part
High-quality nan for THERMAWAVE CMP tool. Bushing,CONN. Compatible with THERMAWAVE equipment. Part No. 40-002714.
THERMAWAVE
40-002841
MT,TURRET AIR CYLINDER
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,TURRET AIR CYLINDER. Compatible with THERMAWAVE equipment. Part No. 40-002841.
THERMAWAVE
40-002850
Aperture,AR Laser,TRACKER
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture,AR Laser,TRACKER. Compatible with THERMAWAVE equipment. Part No. 40-002850.
THERMAWAVE
40-002944
Screw,THETA,LOCK-DOWN
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,THETA,LOCK-DOWN. Compatible with THERMAWAVE equipment. Part No. 40-002944.
THERMAWAVE
40-003054
PROTECTOR,ROUND
spare_part
High-quality nan for THERMAWAVE CMP tool. PROTECTOR,ROUND. Compatible with THERMAWAVE equipment. Part No. 40-003054.
THERMAWAVE
40-003243
BAR,Laser P/S ADAPTER
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,Laser P/S ADAPTER. Compatible with THERMAWAVE equipment. Part No. 40-003243.
THERMAWAVE
40-003316
RETAINER,CAPTIVE Screw
spare_part
High-quality nan for THERMAWAVE CMP tool. RETAINER,CAPTIVE Screw. Compatible with THERMAWAVE equipment. Part No. 40-003316.
THERMAWAVE
40-003377
RETAINER,Wheel
spare_part
High-quality nan for THERMAWAVE CMP tool. RETAINER,Wheel. Compatible with THERMAWAVE equipment. Part No. 40-003377.
THERMAWAVE
40-003379
HUB,Chopper Wheel
spare_part
High-quality nan for THERMAWAVE CMP tool. HUB,Chopper Wheel. Compatible with THERMAWAVE equipment. Part No. 40-003379.
THERMAWAVE
40-003788
PL,BNC MT
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,BNC MT. Compatible with THERMAWAVE equipment. Part No. 40-003788.
THERMAWAVE
40-003943
GASKET,AR Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,AR Laser. Compatible with THERMAWAVE equipment. Part No. 40-003943.
THERMAWAVE
40-003974
SLIDE,Camera
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIDE,Camera. Compatible with THERMAWAVE equipment. Part No. 40-003974.
THERMAWAVE
40-004337
PL,WEDGE,Detector BOX,RH
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,WEDGE,Detector BOX,RH. Compatible with THERMAWAVE equipment. Part No. 40-004337.
THERMAWAVE
40-004338
HOLDER,Lens
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,Lens. Compatible with THERMAWAVE equipment. Part No. 40-004338.
THERMAWAVE
40-004340
Isolator,Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,Detector. Compatible with THERMAWAVE equipment. Part No. 40-004340.
THERMAWAVE
40-004341
SPACER,Filter
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,Filter. Compatible with THERMAWAVE equipment. Part No. 40-004341.
THERMAWAVE
40-004395
SupportPORT,TERM BLOCK,CPU P/S
spare_part
High-quality nan for THERMAWAVE CMP tool. SupportPORT,TERM BLOCK,CPU P/S. Compatible with THERMAWAVE equipment. Part No. 40-004395.
THERMAWAVE
40-004608
CHUCK,StandardANDARD K-Stage
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK,StandardANDARD K-Stage. Compatible with THERMAWAVE equipment. Part No. 40-004608.
THERMAWAVE
40-004695
OBS,DOOR,FRONT,RT
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,DOOR,FRONT,RT. Compatible with THERMAWAVE equipment. Part No. 40-004695.
THERMAWAVE
40-004860-01
OBS. BASE,Hene Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. BASE,Hene Laser. Compatible with THERMAWAVE equipment. Part No. 40-004860-01.
THERMAWAVE
40-004860-02
OBS. BASE,Hene Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. BASE,Hene Laser. Compatible with THERMAWAVE equipment. Part No. 40-004860-02.
THERMAWAVE
40-004939
TUBE,White Light SOURCE
spare_part
High-quality nan for THERMAWAVE CMP tool. TUBE,White Light SOURCE. Compatible with THERMAWAVE equipment. Part No. 40-004939.
THERMAWAVE
43-002697
CLAMP,HOSE,4.5IN DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,HOSE,4.5IN DIA. Compatible with THERMAWAVE equipment. Part No. 43-002697.
THERMAWAVE
43-003096
GLIDE,LEVELING,RIGID
spare_part
High-quality nan for THERMAWAVE CMP tool. GLIDE,LEVELING,RIGID. Compatible with THERMAWAVE equipment. Part No. 43-003096.
THERMAWAVE
43-003408
Adaptor,CONN HSG,3-4-15PIN
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,CONN HSG,3-4-15PIN. Compatible with THERMAWAVE equipment. Part No. 43-003408.
THERMAWAVE
43-005168
StandardRIP,THICK FLEX,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardRIP,THICK FLEX,T9. Compatible with THERMAWAVE equipment. Part No. 43-005168.
THERMAWAVE
43-005197
MT,COARSE FOCUS,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,COARSE FOCUS,T9. Compatible with THERMAWAVE equipment. Part No. 43-005197.
THERMAWAVE
43-005362
MT,Detector,Auto Focus,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,Detector,Auto Focus,T9. Compatible with THERMAWAVE equipment. Part No. 43-005362.
THERMAWAVE
43-005482
MT,Chopper Motor
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,Chopper Motor. Compatible with THERMAWAVE equipment. Part No. 43-005482.
THERMAWAVE
43-005650
Bracket,TRACKBALL,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,TRACKBALL,P16. Compatible with THERMAWAVE equipment. Part No. 43-005650.
THERMAWAVE
43-005800
CLAMP,WAuto FocusER ARM,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,WAuto FocusER ARM,P16. Compatible with THERMAWAVE equipment. Part No. 43-005800.
THERMAWAVE
43-005880
SPACER,Lens,I-Hene,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,Lens,I-Hene,T9. Compatible with THERMAWAVE equipment. Part No. 43-005880.
THERMAWAVE
43-005882
RING,Lens,I-Hene,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. RING,Lens,I-Hene,T9. Compatible with THERMAWAVE equipment. Part No. 43-005882.
THERMAWAVE
43-005934
SPOOL,HOLDING,EMITTER,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. SPOOL,HOLDING,EMITTER,T9. Compatible with THERMAWAVE equipment. Part No. 43-005934.
THERMAWAVE
43-006119
MT,PCB,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,PCB,P16. Compatible with THERMAWAVE equipment. Part No. 43-006119.
THERMAWAVE
43-006173
MT,BASE,Chopper Wheel
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,BASE,Chopper Wheel. Compatible with THERMAWAVE equipment. Part No. 43-006173.
THERMAWAVE
43-006225
MT,1IN SPLITTER,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,1IN SPLITTER,P16. Compatible with THERMAWAVE equipment. Part No. 43-006225.
THERMAWAVE
43-006523
MT,SLIT,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,SLIT,P16. Compatible with THERMAWAVE equipment. Part No. 43-006523.
THERMAWAVE
43-006776
CLAMP,FLEXURE,A/F DAMPER
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,FLEXURE,A/F DAMPER. Compatible with THERMAWAVE equipment. Part No. 43-006776.
THERMAWAVE
43-006778
PIStandardON,LARGE A/F DAMPER
spare_part
High-quality nan for THERMAWAVE CMP tool. PIStandardON,LARGE A/F DAMPER. Compatible with THERMAWAVE equipment. Part No. 43-006778.
THERMAWAVE
43-006780
MT,HSG,DIRECT Rotary ATTACHED
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,HSG,DIRECT Rotary ATTACHED. Compatible with THERMAWAVE equipment. Part No. 43-006780.
THERMAWAVE
43-006782
CLAMP,COLLAR,A/F DAMPER PIStandardON
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,COLLAR,A/F DAMPER PIStandardON. Compatible with THERMAWAVE equipment. Part No. 43-006782.
THERMAWAVE
43-006796
Adaptor,FINE FOCUS
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,FINE FOCUS. Compatible with THERMAWAVE equipment. Part No. 43-006796.
THERMAWAVE
43-006972
CLAMP,BSHG,Detector ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,BSHG,Detector ADJ. Compatible with THERMAWAVE equipment. Part No. 43-006972.
THERMAWAVE
43-007101
Bracket,REF SECURING
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,REF SECURING. Compatible with THERMAWAVE equipment. Part No. 43-007101.
THERMAWAVE
43-007324
Bracket,MTG,AT,Window
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,MTG,AT,Window. Compatible with THERMAWAVE equipment. Part No. 43-007324.
THERMAWAVE
43-007783
Adaptor,Motor
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,Motor. Compatible with THERMAWAVE equipment. Part No. 43-007783.
THERMAWAVE
43-007784
MT,Motor
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,Motor. Compatible with THERMAWAVE equipment. Part No. 43-007784.
THERMAWAVE
43-007792
Bracket,Motor SIDE WIRE Harness
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,Motor SIDE WIRE Harness. Compatible with THERMAWAVE equipment. Part No. 43-007792.
THERMAWAVE
43-007818
MT,Hene Laser,TALL,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,Hene Laser,TALL,T12. Compatible with THERMAWAVE equipment. Part No. 43-007818.
THERMAWAVE
43-008468
Bracket,HIDDEN Panel LATCH
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,HIDDEN Panel LATCH. Compatible with THERMAWAVE equipment. Part No. 43-008468.
THERMAWAVE
43-009143
MT,SLIT,C&F FINDER,5IN
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,SLIT,C&F FINDER,5IN. Compatible with THERMAWAVE equipment. Part No. 43-009143.
THERMAWAVE
43-009161
MT,PCB,C&F FINDER,5IN
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,PCB,C&F FINDER,5IN. Compatible with THERMAWAVE equipment. Part No. 43-009161.
THERMAWAVE
43-009189
CHUCK,Vacuum,5IN,OVER CENTER
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK,Vacuum,5IN,OVER CENTER. Compatible with THERMAWAVE equipment. Part No. 43-009189.
THERMAWAVE
43-009190
Adaptor,CHUCK,5IN,OVER CENTER
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,CHUCK,5IN,OVER CENTER. Compatible with THERMAWAVE equipment. Part No. 43-009190.
THERMAWAVE
43-009194
TOWER,Vacuum FEED,5IN
spare_part
High-quality nan for THERMAWAVE CMP tool. TOWER,Vacuum FEED,5IN. Compatible with THERMAWAVE equipment. Part No. 43-009194.
THERMAWAVE
43-009223
MT,FLOATING AR Laser,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,FLOATING AR Laser,T12. Compatible with THERMAWAVE equipment. Part No. 43-009223.
THERMAWAVE
43-009283
SF31,MT,Robot,LG RCH,26WF
spare_part
High-quality nan for THERMAWAVE CMP tool. SF31,MT,Robot,LG RCH,26WF. Compatible with THERMAWAVE equipment. Part No. 43-009283.
THERMAWAVE
43-009438
SF31,MT,Cable,Robot,26 WFR
spare_part
High-quality nan for THERMAWAVE CMP tool. SF31,MT,Cable,Robot,26 WFR. Compatible with THERMAWAVE equipment. Part No. 43-009438.
THERMAWAVE
43-009439
SF31,CLAMP,Cable,Robot,26 WFR
spare_part
High-quality nan for THERMAWAVE CMP tool. SF31,CLAMP,Cable,Robot,26 WFR. Compatible with THERMAWAVE equipment. Part No. 43-009439.
THERMAWAVE
43-009628
Bracket, Flag, AF Lens Exchange, UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket, Flag, AF Lens Exchange, UV. Compatible with THERMAWAVE equipment. Part No. 43-009628.
THERMAWAVE
43-010201
Adaptor,Laser Power Meter,NEWPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,Laser Power Meter,NEWPORT. Compatible with THERMAWAVE equipment. Part No. 43-010201.
THERMAWAVE
43-010316
CLAMP,FiberER OpticIC SLEEVE
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,FiberER OpticIC SLEEVE. Compatible with THERMAWAVE equipment. Part No. 43-010316.
THERMAWAVE
43-010338
WEDGE,CASS,SHAuto FocusT,ALI
spare_part
High-quality nan for THERMAWAVE CMP tool. WEDGE,CASS,SHAuto FocusT,ALI. Compatible with THERMAWAVE equipment. Part No. 43-010338.
THERMAWAVE
43-010528
SUPPORT, WINDOW, SIDE, BH
spare_part
High-quality nan for THERMAWAVE CMP tool. SUPPORT, WINDOW, SIDE, BH. Compatible with THERMAWAVE equipment. Part No. 43-010528.
THERMAWAVE
43-010530
Bracket,Actuator,Window,BULKHEAD
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,Actuator,Window,BULKHEAD. Compatible with THERMAWAVE equipment. Part No. 43-010530.
THERMAWAVE
43-010539
Bracket,Actuator,RT,Window,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,Actuator,RT,Window,BH. Compatible with THERMAWAVE equipment. Part No. 43-010539.
THERMAWAVE
43-010654
CLAMP,AIR BAFFLE
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,AIR BAFFLE. Compatible with THERMAWAVE equipment. Part No. 43-010654.
THERMAWAVE
43-010681
CLAMP,Filter,AR Laser EXHAUStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAMP,Filter,AR Laser EXHAUStandard. Compatible with THERMAWAVE equipment. Part No. 43-010681.
THERMAWAVE
43-010682
BAR,CLAMP,SCW Platform
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,CLAMP,SCW Platform. Compatible with THERMAWAVE equipment. Part No. 43-010682.
THERMAWAVE
43-010696
Bracket,IR Filter
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,IR Filter. Compatible with THERMAWAVE equipment. Part No. 43-010696.
THERMAWAVE
43-010898
PAD,LEVELING,3IN DIA,3/4-10
spare_part
High-quality nan for THERMAWAVE CMP tool. PAD,LEVELING,3IN DIA,3/4-10. Compatible with THERMAWAVE equipment. Part No. 43-010898.
THERMAWAVE
43-011818
Bracket,Lens SPRAYER
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,Lens SPRAYER. Compatible with THERMAWAVE equipment. Part No. 43-011818.
THERMAWAVE
43-012180
ina,Bracket,MT,Power Supply repl. by 44-068011
spare_part
High-quality nan for THERMAWAVE CMP tool. ina,Bracket,MT,Power Supply repl. by 44-068011. Compatible with THERMAWAVE equipment. Part No. 43-012180.
THERMAWAVE
43-013719
Chuck, Vacuum, Fine-Z, Stage
spare_part
High-quality nan for THERMAWAVE CMP tool. Chuck, Vacuum, Fine-Z, Stage. Compatible with THERMAWAVE equipment. Part No. 43-013719.
THERMAWAVE
43-013852
Bracket,SPRAYER,REF SECURING
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,SPRAYER,REF SECURING. Compatible with THERMAWAVE equipment. Part No. 43-013852.
THERMAWAVE
43-014329
CHUCK,Vacuum,5IN,GLASS
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK,Vacuum,5IN,GLASS. Compatible with THERMAWAVE equipment. Part No. 43-014329.
THERMAWAVE
43-014446
BAR,Ionizer CLAMP,OP3260
spare_part
High-quality nan for THERMAWAVE CMP tool. BAR,Ionizer CLAMP,OP3260. Compatible with THERMAWAVE equipment. Part No. 43-014446.
THERMAWAVE
43-014551
CHUCK,Vacuum,3IN OVER CENTER
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK,Vacuum,3IN OVER CENTER. Compatible with THERMAWAVE equipment. Part No. 43-014551.
THERMAWAVE
43-015260
BRKT,CONN,Z-AXIS,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,CONN,Z-AXIS,OP2600. Compatible with THERMAWAVE equipment. Part No. 43-015260.
THERMAWAVE
43-015261
BRKT,CONN,Y-AXIS,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,CONN,Y-AXIS,OP2600. Compatible with THERMAWAVE equipment. Part No. 43-015261.
THERMAWAVE
43-015297
MT,X-Y,DETECTOR A,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,X-Y,DETECTOR A,P34. Compatible with THERMAWAVE equipment. Part No. 43-015297.
THERMAWAVE
43-015309
MT,X-Y,DETECTOR B,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,X-Y,DETECTOR B,P34. Compatible with THERMAWAVE equipment. Part No. 43-015309.
THERMAWAVE
43-015452
Bracket,Stage Cable GUIDE,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket,Stage Cable GUIDE,OP2600. Compatible with THERMAWAVE equipment. Part No. 43-015452.
THERMAWAVE
43-015485
MT,TUBE,LENS,FL100,WL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,TUBE,LENS,FL100,WL,P34. Compatible with THERMAWAVE equipment. Part No. 43-015485.
THERMAWAVE
43-015546
MT, Spool, 3IN Splitter, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MT, Spool, 3IN Splitter, P34. Compatible with THERMAWAVE equipment. Part No. 43-015546.
THERMAWAVE
43-015547
MT, SPOOL,2IN SPLITTER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. MT, SPOOL,2IN SPLITTER,P34. Compatible with THERMAWAVE equipment. Part No. 43-015547.
THERMAWAVE
43-016421
ADPT, KEYBOARD,PS2/AT,5F,6M
spare_part
High-quality nan for THERMAWAVE CMP tool. ADPT, KEYBOARD,PS2/AT,5F,6M. Compatible with THERMAWAVE equipment. Part No. 43-016421.
THERMAWAVE
43-017662
BRKT,MTG,TOP CVR,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,MTG,TOP CVR,P35. Compatible with THERMAWAVE equipment. Part No. 43-017662.
THERMAWAVE
43-017883
Seismic Achor Brachets, TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Seismic Achor Brachets, TP. Compatible with THERMAWAVE equipment. Part No. 43-017883.
THERMAWAVE
43-019105
Bracket, Monitor, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Bracket, Monitor, OP. Compatible with THERMAWAVE equipment. Part No. 43-019105.
THERMAWAVE
43-021024
Adaptor,BNC F TO RCA M
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,BNC F TO RCA M. Compatible with THERMAWAVE equipment. Part No. 43-021024.
THERMAWAVE
43-021259
BRKT,SHIPPING,STAGE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,SHIPPING,STAGE,P34. Compatible with THERMAWAVE equipment. Part No. 43-021259.
THERMAWAVE
43-021488
BRKT,ANCHOR,SEISMIC
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,ANCHOR,SEISMIC. Compatible with THERMAWAVE equipment. Part No. 43-021488.
THERMAWAVE
43-021838
INA,SUPP,WEDGE,PIN-LIFTER,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,SUPP,WEDGE,PIN-LIFTER,P35. Compatible with THERMAWAVE equipment. Part No. 43-021838.
THERMAWAVE
43-022150
INA,BRKT,MTG,ACTUATOR,LIFTR
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,BRKT,MTG,ACTUATOR,LIFTR. Compatible with THERMAWAVE equipment. Part No. 43-022150.
THERMAWAVE
43-022151
INA,CLAMP,ACTUATOR,PIN-LIFTER
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,CLAMP,ACTUATOR,PIN-LIFTER. Compatible with THERMAWAVE equipment. Part No. 43-022151.
THERMAWAVE
43-022735
Clamp, Cradle, 300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Clamp, Cradle, 300MM. Compatible with THERMAWAVE equipment. Part No. 43-022735.
THERMAWAVE
43-023237
200 mm FOUP Adapter
spare_part
High-quality nan for THERMAWAVE CMP tool. 200 mm FOUP Adapter. Compatible with THERMAWAVE equipment. Part No. 43-023237.
THERMAWAVE
43-023565
150 mm FOUP Adapter
spare_part
High-quality nan for THERMAWAVE CMP tool. 150 mm FOUP Adapter. Compatible with THERMAWAVE equipment. Part No. 43-023565.
THERMAWAVE
43-023853
MT, FC Connector, SQ, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. MT, FC Connector, SQ, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 43-023853.
THERMAWAVE
43-024544
MT,FNL TURNING MIRR,LOGIC
spare_part
High-quality nan for THERMAWAVE CMP tool. MT,FNL TURNING MIRR,LOGIC. Compatible with THERMAWAVE equipment. Part No. 43-024544.
THERMAWAVE
43-024554
Adaptor, Foup, 200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor, Foup, 200MM. Compatible with THERMAWAVE equipment. Part No. 43-024554.
THERMAWAVE
43-025958
CHUCK,VACUUM,POLISHED,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CHUCK,VACUUM,POLISHED,300MM. Compatible with THERMAWAVE equipment. Part No. 43-025958.
THERMAWAVE
43-029125
BRKT,MT,PAS,TIMBRE
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,MT,PAS,TIMBRE. Compatible with THERMAWAVE equipment. Part No. 43-029125.
THERMAWAVE
43-030510
BRKT,PWR MOD MTG,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,PWR MOD MTG,DES. Compatible with THERMAWAVE equipment. Part No. 43-030510.
THERMAWAVE
43-056504
BRKT,AEROBAR IONIZER MT
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,AEROBAR IONIZER MT. Compatible with THERMAWAVE equipment. Part No. 43-056504.
THERMAWAVE
43-056505
BRKT,CLIP AEROBAR IONIZER
spare_part
High-quality nan for THERMAWAVE CMP tool. BRKT,CLIP AEROBAR IONIZER. Compatible with THERMAWAVE equipment. Part No. 43-056505.
THERMAWAVE
43-056570
INA,EG,CHUCK,VACUUM PIN-LIFTER
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,EG,CHUCK,VACUUM PIN-LIFTER. Compatible with THERMAWAVE equipment. Part No. 43-056570.
THERMAWAVE
43-056662
ADPT,PADDLE #1,ROBOT,KAWASA
spare_part
High-quality nan for THERMAWAVE CMP tool. ADPT,PADDLE #1,ROBOT,KAWASA. Compatible with THERMAWAVE equipment. Part No. 43-056662.
THERMAWAVE
44-005203
BLOCK,Rotary PIVOT,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,Rotary PIVOT,T9. Compatible with THERMAWAVE equipment. Part No. 44-005203.
THERMAWAVE
44-005670
PL,Adaptor,Rotary,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Adaptor,Rotary,P16. Compatible with THERMAWAVE equipment. Part No. 44-005670.
THERMAWAVE
44-005756
Aperture,MTL,Hene Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture,MTL,Hene Laser. Compatible with THERMAWAVE equipment. Part No. 44-005756.
THERMAWAVE
44-005893
TBL,FRICTIONLESS,60MMX105MM
spare_part
High-quality nan for THERMAWAVE CMP tool. TBL,FRICTIONLESS,60MMX105MM. Compatible with THERMAWAVE equipment. Part No. 44-005893.
THERMAWAVE
44-006506
BLOCK,Lens/DET,I-Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,Lens/DET,I-Hene. Compatible with THERMAWAVE equipment. Part No. 44-006506.
THERMAWAVE
44-006542
PL,Stepper INTERFACE
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Stepper INTERFACE. Compatible with THERMAWAVE equipment. Part No. 44-006542.
THERMAWAVE
44-006600
BLOCK,FNL TRN Mirror
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,FNL TRN Mirror. Compatible with THERMAWAVE equipment. Part No. 44-006600.
THERMAWAVE
44-006777
PL,MT,LARGE PIStandardON
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,MT,LARGE PIStandardON. Compatible with THERMAWAVE equipment. Part No. 44-006777.
THERMAWAVE
44-006973
HOLDER,Detector,ADJ CELL
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,Detector,ADJ CELL. Compatible with THERMAWAVE equipment. Part No. 44-006973.
THERMAWAVE
44-007100
BLOCK,REF CLIP
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,REF CLIP. Compatible with THERMAWAVE equipment. Part No. 44-007100.
THERMAWAVE
44-007402
PL,OpticICS,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,OpticICS,P20. Compatible with THERMAWAVE equipment. Part No. 44-007402.
THERMAWAVE
44-007511
PL,CVR,I/O Panel
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,CVR,I/O Panel. Compatible with THERMAWAVE equipment. Part No. 44-007511.
THERMAWAVE
44-007512
PL,RS-232 Connector,I/O Panel
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,RS-232 Connector,I/O Panel. Compatible with THERMAWAVE equipment. Part No. 44-007512.
THERMAWAVE
44-007531
BOX,A/F MKII/III
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX,A/F MKII/III. Compatible with THERMAWAVE equipment. Part No. 44-007531.
THERMAWAVE
44-007606
BOX,ARRAY DET,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX,ARRAY DET,P20. Compatible with THERMAWAVE equipment. Part No. 44-007606.
THERMAWAVE
44-007615
PL,Laser MT
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Laser MT. Compatible with THERMAWAVE equipment. Part No. 44-007615.
THERMAWAVE
44-007623
BASE,I-Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. BASE,I-Detector. Compatible with THERMAWAVE equipment. Part No. 44-007623.
THERMAWAVE
44-007809
PL,Adaptor,Power Supply
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Adaptor,Power Supply. Compatible with THERMAWAVE equipment. Part No. 44-007809.
THERMAWAVE
44-007865
PL,FEED-TRHU TERM,1/O Panel
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,FEED-TRHU TERM,1/O Panel. Compatible with THERMAWAVE equipment. Part No. 44-007865.
THERMAWAVE
44-008014
OBS,PL,AIR SEAL,OMCHME,Laser BE
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,PL,AIR SEAL,OMCHME,Laser BE. Compatible with THERMAWAVE equipment. Part No. 44-008014.
THERMAWAVE
44-008151
PL,LWR AIRSHIELD,2CASS
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,LWR AIRSHIELD,2CASS. Compatible with THERMAWAVE equipment. Part No. 44-008151.
THERMAWAVE
44-009344
CASE,Single Wafer 150 mm
spare_part
High-quality nan for THERMAWAVE CMP tool. CASE,Single Wafer 150 mm. Compatible with THERMAWAVE equipment. Part No. 44-009344.
THERMAWAVE
44-009873
PL,TOP,Cassette LOCATING
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,TOP,Cassette LOCATING. Compatible with THERMAWAVE equipment. Part No. 44-009873.
THERMAWAVE
44-009874
PL,BOTTOM,Cassette LOCATING
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,BOTTOM,Cassette LOCATING. Compatible with THERMAWAVE equipment. Part No. 44-009874.
THERMAWAVE
44-009890
PL,Cassette,100-200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Cassette,100-200MM. Compatible with THERMAWAVE equipment. Part No. 44-009890.
THERMAWAVE
44-009972
PL,P/S Isolation IF TP500 repl.by 44-068025
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,P/S Isolation IF TP500 repl.by 44-068025. Compatible with THERMAWAVE equipment. Part No. 44-009972.
THERMAWAVE
44-010339
BASE,CASS,ROT
spare_part
High-quality nan for THERMAWAVE CMP tool. BASE,CASS,ROT. Compatible with THERMAWAVE equipment. Part No. 44-010339.
THERMAWAVE
44-010353
PL,ALIGNMENT,W.H
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,ALIGNMENT,W.H. Compatible with THERMAWAVE equipment. Part No. 44-010353.
THERMAWAVE
44-010376
Adaptor,CAS,6IN,BULKHEAD
spare_part
High-quality nan for THERMAWAVE CMP tool. Adaptor,CAS,6IN,BULKHEAD. Compatible with THERMAWAVE equipment. Part No. 44-010376.
THERMAWAVE
44-010679
BLOCK,PULLEY,TENSION
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,PULLEY,TENSION. Compatible with THERMAWAVE equipment. Part No. 44-010679.
THERMAWAVE
44-010780
LOOP, SLEEVE, 3/32 CABLE, BH
spare_part
High-quality nan for THERMAWAVE CMP tool. LOOP, SLEEVE, 3/32 CABLE, BH. Compatible with THERMAWAVE equipment. Part No. 44-010780.
THERMAWAVE
44-010794
PL,CVR,VGA INTERNAL Cable
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,CVR,VGA INTERNAL Cable. Compatible with THERMAWAVE equipment. Part No. 44-010794.
THERMAWAVE
44-011243
PL,TOP,Cassette LOC,26 SLOT
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,TOP,Cassette LOC,26 SLOT. Compatible with THERMAWAVE equipment. Part No. 44-011243.
THERMAWAVE
44-011244
PL,BOTTOM,Cassette,26 SLOT
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,BOTTOM,Cassette,26 SLOT. Compatible with THERMAWAVE equipment. Part No. 44-011244.
THERMAWAVE
44-011663
PL,BASE,Detector,AC,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,BASE,Detector,AC,TP500. Compatible with THERMAWAVE equipment. Part No. 44-011663.
THERMAWAVE
44-011782
PL,Adaptor,INDEXER,SMIF,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Adaptor,INDEXER,SMIF,OP. Compatible with THERMAWAVE equipment. Part No. 44-011782.
THERMAWAVE
44-011926
PL,Adaptor,BLOWER MT
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,Adaptor,BLOWER MT. Compatible with THERMAWAVE equipment. Part No. 44-011926.
THERMAWAVE
44-015194
PL,BOTTOM,CASS LOCATE,TWKK
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,BOTTOM,CASS LOCATE,TWKK. Compatible with THERMAWAVE equipment. Part No. 44-015194.
THERMAWAVE
44-015757
HOLDER,LIGHT PEN
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,LIGHT PEN. Compatible with THERMAWAVE equipment. Part No. 44-015757.
THERMAWAVE
44-015865
SLIDE,FULL EXTENSION,30IN
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIDE,FULL EXTENSION,30IN. Compatible with THERMAWAVE equipment. Part No. 44-015865.
THERMAWAVE
44-016207
PL, Adaptor, Monitor, 15", SVGA, BH
spare_part
High-quality nan for THERMAWAVE CMP tool. PL, Adaptor, Monitor, 15", SVGA, BH. Compatible with THERMAWAVE equipment. Part No. 44-016207.
THERMAWAVE
44-016394
PL, Adaptor, Monitor, 15", Retrofit
spare_part
High-quality nan for THERMAWAVE CMP tool. PL, Adaptor, Monitor, 15", Retrofit. Compatible with THERMAWAVE equipment. Part No. 44-016394.
THERMAWAVE
44-016723
HOLDER,BOTTOM,Polarizer P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,BOTTOM,Polarizer P34. Compatible with THERMAWAVE equipment. Part No. 44-016723.
THERMAWAVE
44-017242
Pad, Moving Mirror, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Pad, Moving Mirror, P34. Compatible with THERMAWAVE equipment. Part No. 44-017242.
THERMAWAVE
44-017675
Baffle, Fan, OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. Baffle, Fan, OP2600B. Compatible with THERMAWAVE equipment. Part No. 44-017675.
THERMAWAVE
44-019240
PL, User, Interface
spare_part
High-quality nan for THERMAWAVE CMP tool. PL, User, Interface. Compatible with THERMAWAVE equipment. Part No. 44-019240.
THERMAWAVE
44-019241
PL, Front End, User, Interface
spare_part
High-quality nan for THERMAWAVE CMP tool. PL, Front End, User, Interface. Compatible with THERMAWAVE equipment. Part No. 44-019241.
THERMAWAVE
44-019298
BLOCK,V,CERAMIC,DCKNG,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,V,CERAMIC,DCKNG,P34. Compatible with THERMAWAVE equipment. Part No. 44-019298.
THERMAWAVE
44-021490
Block, SEISMIC Craddle, T41
spare_part
High-quality nan for THERMAWAVE CMP tool. Block, SEISMIC Craddle, T41. Compatible with THERMAWAVE equipment. Part No. 44-021490.
THERMAWAVE
44-022400
PL,MONITOR,FIELD,RETRO,TP400
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,MONITOR,FIELD,RETRO,TP400. Compatible with THERMAWAVE equipment. Part No. 44-022400.
THERMAWAVE
44-023156
PL, ADPT, MON, OP16/26/32
spare_part
High-quality nan for THERMAWAVE CMP tool. PL, ADPT, MON, OP16/26/32. Compatible with THERMAWAVE equipment. Part No. 44-023156.
THERMAWAVE
44-023380
PL,ADPT, Monitor,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,ADPT, Monitor,BH. Compatible with THERMAWAVE equipment. Part No. 44-023380.
THERMAWAVE
44-023652
FOUP, 300MM, 25 Slot ASYST
spare_part
High-quality nan for THERMAWAVE CMP tool. FOUP, 300MM, 25 Slot ASYST. Compatible with THERMAWAVE equipment. Part No. 44-023652.
THERMAWAVE
44-023792
Block, Base/Align, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Block, Base/Align, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 44-023792.
THERMAWAVE
44-023793
Block, Col, Align, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Block, Col, Align, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 44-023793.
THERMAWAVE
44-023794
Block, Pol, Align, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Block, Pol, Align, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 44-023794.
THERMAWAVE
44-023795
Block, Pol Bar, Align, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Block, Pol Bar, Align, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 44-023795.
THERMAWAVE
44-030885
BASE,9-SLOT,24V,DL205 TYPE
spare_part
High-quality nan for THERMAWAVE CMP tool. BASE,9-SLOT,24V,DL205 TYPE. Compatible with THERMAWAVE equipment. Part No. 44-030885.
THERMAWAVE
44-068100
PAD,P-ALIGNER CCD,KWI
spare_part
High-quality nan for THERMAWAVE CMP tool. PAD,P-ALIGNER CCD,KWI. Compatible with THERMAWAVE equipment. Part No. 44-068100.
THERMAWAVE
45-006917
Controller,Robot,3AXES,PREALIGNER
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller,Robot,3AXES,PREALIGNER. Compatible with THERMAWAVE equipment. Part No. 45-006917.
THERMAWAVE
45-006918
Robot with Prealigner
spare_part
High-quality nan for THERMAWAVE CMP tool. Robot with Prealigner. Compatible with THERMAWAVE equipment. Part No. 45-006918.
THERMAWAVE
45-007901
Robot,LONG REACH
spare_part
High-quality nan for THERMAWAVE CMP tool. Robot,LONG REACH. Compatible with THERMAWAVE equipment. Part No. 45-007901.
THERMAWAVE
45-008600
OBSOLETE - order 45-014824 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 45-014824 instead. Compatible with THERMAWAVE equipment. Part No. 45-008600.
THERMAWAVE
45-008602
OBSOLETE - order 61-014191 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 61-014191 instead. Compatible with THERMAWAVE equipment. Part No. 45-008602.
THERMAWAVE
45-009176
Robot,WFR HDLR,CFF,6.8 Z,LNG R
spare_part
High-quality nan for THERMAWAVE CMP tool. Robot,WFR HDLR,CFF,6.8 Z,LNG R. Compatible with THERMAWAVE equipment. Part No. 45-009176.
THERMAWAVE
45-009353
Stage,Rotary,6IN CHUCK,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage,Rotary,6IN CHUCK,P20. Compatible with THERMAWAVE equipment. Part No. 45-009353.
THERMAWAVE
45-014191
DO NOT ORDER - use 61-014191 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. DO NOT ORDER - use 61-014191 instead.. Compatible with THERMAWAVE equipment. Part No. 45-014191.
THERMAWAVE
45-014191
DO NOT ORDER - use 61-014191 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. DO NOT ORDER - use 61-014191 instead.. Compatible with THERMAWAVE equipment. Part No. 45-014191.
THERMAWAVE
45-014308
Stage,X-Y,8X8,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Stage,X-Y,8X8,TP500. Compatible with THERMAWAVE equipment. Part No. 45-014308.
THERMAWAVE
45-014824
Robot,ATM-105-1-CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Robot,ATM-105-1-CE. Compatible with THERMAWAVE equipment. Part No. 45-014824.
THERMAWAVE
45-014862
INDEXER,W/Bracket&Laser SAuto Focus ENCL
spare_part
High-quality nan for THERMAWAVE CMP tool. INDEXER,W/Bracket&Laser SAuto Focus ENCL. Compatible with THERMAWAVE equipment. Part No. 45-014862.
THERMAWAVE
45-015259
Use up stock - then order 45-014824 ROBOT,ATM-105-1-CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Use up stock - then order 45-014824 ROBOT,ATM-105-1-CE. Compatible with THERMAWAVE equipment. Part No. 45-015259.
THERMAWAVE
45-016202
INDEXER,SMIF,150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. INDEXER,SMIF,150MM. Compatible with THERMAWAVE equipment. Part No. 45-016202.
THERMAWAVE
45-016468
Controller,Equipe,ESC-212
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller,Equipe,ESC-212. Compatible with THERMAWAVE equipment. Part No. 45-016468.
THERMAWAVE
45-016469
PRE-ALIGNER,Equipe,PRE-201
spare_part
High-quality nan for THERMAWAVE CMP tool. PRE-ALIGNER,Equipe,PRE-201. Compatible with THERMAWAVE equipment. Part No. 45-016469.
THERMAWAVE
45-016807
Robot,3-AXES,13Z,5.25 ARMS
spare_part
High-quality nan for THERMAWAVE CMP tool. Robot,3-AXES,13Z,5.25 ARMS. Compatible with THERMAWAVE equipment. Part No. 45-016807.
THERMAWAVE
45-016809
ROBOT TRACK,36IN
spare_part
High-quality nan for THERMAWAVE CMP tool. ROBOT TRACK,36IN. Compatible with THERMAWAVE equipment. Part No. 45-016809.
THERMAWAVE
45-016812
Controller, Robot, ESC218T, Equipe
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller, Robot, ESC218T, Equipe. Compatible with THERMAWAVE equipment. Part No. 45-016812.
THERMAWAVE
45-017557
STAGE,MID,COLLIMATING PARABLD
spare_part
High-quality nan for THERMAWAVE CMP tool. STAGE,MID,COLLIMATING PARABLD. Compatible with THERMAWAVE equipment. Part No. 45-017557.
THERMAWAVE
45-019188
Controller,UTIL MOD,5-PORT,CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Controller,UTIL MOD,5-PORT,CE. Compatible with THERMAWAVE equipment. Part No. 45-019188.
THERMAWAVE
45-019189
ANTENNA,FLUOROTRAC RFID,INT
spare_part
High-quality nan for THERMAWAVE CMP tool. ANTENNA,FLUOROTRAC RFID,INT. Compatible with THERMAWAVE equipment. Part No. 45-019189.
THERMAWAVE
45-019794
CNTRLR,TRACK,FLUOROWARE
spare_part
High-quality nan for THERMAWAVE CMP tool. CNTRLR,TRACK,FLUOROWARE. Compatible with THERMAWAVE equipment. Part No. 45-019794.
THERMAWAVE
45-019796
INDEXER,W/Bracket&Laser,INTG ANT
spare_part
High-quality nan for THERMAWAVE CMP tool. INDEXER,W/Bracket&Laser,INTG ANT. Compatible with THERMAWAVE equipment. Part No. 45-019796.
THERMAWAVE
45-020773
STAGE X/Y/CRS-Z,12X12,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. STAGE X/Y/CRS-Z,12X12,T41. Compatible with THERMAWAVE equipment. Part No. 45-020773.
THERMAWAVE
45-021741
INA,LOAD PORT,300MM,25 SLOT
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,LOAD PORT,300MM,25 SLOT. Compatible with THERMAWAVE equipment. Part No. 45-021741.
THERMAWAVE
45-021914
LOADER CASS,Manual,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. LOADER CASS,Manual,200MM. Compatible with THERMAWAVE equipment. Part No. 45-021914.
THERMAWAVE
45-021927
Ina, Pre-Aligner, 150-300MM, 301B repl. 45-030907
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, Pre-Aligner, 150-300MM, 301B repl. 45-030907. Compatible with THERMAWAVE equipment. Part No. 45-021927.
THERMAWAVE
45-022565
Tag Reader (2 ea)
spare_part
High-quality nan for THERMAWAVE CMP tool. Tag Reader (2 ea). Compatible with THERMAWAVE equipment. Part No. 45-022565.
THERMAWAVE
45-022712
EG,PRE-ALIGNER,200MM,BTM PLUG
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PRE-ALIGNER,200MM,BTM PLUG. Compatible with THERMAWAVE equipment. Part No. 45-022712.
THERMAWAVE
45-023939
LOAD PORT,300MM,W/E84,WWMAP
spare_part
High-quality nan for THERMAWAVE CMP tool. LOAD PORT,300MM,W/E84,WWMAP. Compatible with THERMAWAVE equipment. Part No. 45-023939.
THERMAWAVE
45-025338
Load Port, 25Slot, BTB, WM, E84
spare_part
High-quality nan for THERMAWAVE CMP tool. Load Port, 25Slot, BTB, WM, E84. Compatible with THERMAWAVE equipment. Part No. 45-025338.
THERMAWAVE
45-026701
CNTRLR,MAIN,LT CURTAIN
spare_part
High-quality nan for THERMAWAVE CMP tool. CNTRLR,MAIN,LT CURTAIN. Compatible with THERMAWAVE equipment. Part No. 45-026701.
THERMAWAVE
45-027168
DO NOT ORDER: Order 61-030056 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. DO NOT ORDER: Order 61-030056 instead. Compatible with THERMAWAVE equipment. Part No. 45-027168.
THERMAWAVE
45-027169
DO NOT ORDER - Order 61-030230 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. DO NOT ORDER - Order 61-030230 instead.. Compatible with THERMAWAVE equipment. Part No. 45-027169.
THERMAWAVE
45-028290
SF,PRE-ALIGNER,301B-CG-CE
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,PRE-ALIGNER,301B-CG-CE. Compatible with THERMAWAVE equipment. Part No. 45-028290.
High-quality nan for THERMAWAVE CMP tool. Ina,Load Port,25W, BTB, IR+RF, OHT repl.by 45-143217. Compatible with THERMAWAVE equipment. Part No. 45-030079.
THERMAWAVE
45-030743
SF,LOADPORT,VRSAPRT2200 W/SHTL
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,LOADPORT,VRSAPRT2200 W/SHTL. Compatible with THERMAWAVE equipment. Part No. 45-030743.
THERMAWAVE
45-030886
CNTRLR,WINPLC,DL205,ENET
spare_part
High-quality nan for THERMAWAVE CMP tool. CNTRLR,WINPLC,DL205,ENET. Compatible with THERMAWAVE equipment. Part No. 45-030886.
THERMAWAVE
45-030907
SF,PRE-ALIGNER,301BUI-CE-S2
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,PRE-ALIGNER,301BUI-CE-S2. Compatible with THERMAWAVE equipment. Part No. 45-030907.
THERMAWAVE
45-143204
SF,LOADPT,VRSPRT2200,W/O SHT
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,LOADPT,VRSPRT2200,W/O SHT. Compatible with THERMAWAVE equipment. Part No. 45-143204.
THERMAWAVE
45-143205
EG,SF,LOADPORT,BRKS,CASSLOAD
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,SF,LOADPORT,BRKS,CASSLOAD. Compatible with THERMAWAVE equipment. Part No. 45-143205.
THERMAWAVE
45-143212
EG,LOADPORT,300mm ISOPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,LOADPORT,300mm ISOPORT. Compatible with THERMAWAVE equipment. Part No. 45-143212.
THERMAWAVE
45-143214
ADPT,CASS,MOCA
spare_part
High-quality nan for THERMAWAVE CMP tool. ADPT,CASS,MOCA. Compatible with THERMAWAVE equipment. Part No. 45-143214.
THERMAWAVE
45-143215.1
INSERT,CASS,MOCA,KIT A
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT,CASS,MOCA,KIT A. Compatible with THERMAWAVE equipment. Part No. 45-143215.1.
THERMAWAVE
45-143215.3
INSERT,CASS,MOCA,KIT C
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT,CASS,MOCA,KIT C. Compatible with THERMAWAVE equipment. Part No. 45-143215.3.
THERMAWAVE
45-143217
Ina. EG, Load Port, ISPORT, 2 BTN repl. by 18-122884 for TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. EG, Load Port, ISPORT, 2 BTN repl. by 18-122884 for TP630. Compatible with THERMAWAVE equipment. Part No. 45-143217.
THERMAWAVE
45-143220
ROBOT,2-LINK,2-PADDLE
spare_part
High-quality nan for THERMAWAVE CMP tool. ROBOT,2-LINK,2-PADDLE. Compatible with THERMAWAVE equipment. Part No. 45-143220.
THERMAWAVE
45-143224
PRE-ALIGN,PIN LIFT&AUTO SIZ
spare_part
High-quality nan for THERMAWAVE CMP tool. PRE-ALIGN,PIN LIFT&AUTO SIZ. Compatible with THERMAWAVE equipment. Part No. 45-143224.
THERMAWAVE
45-143225
EG,ROBOT,3-LINK,2-PADDLE
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,ROBOT,3-LINK,2-PADDLE. Compatible with THERMAWAVE equipment. Part No. 45-143225.
THERMAWAVE
45-143227
LIFT PIN ASSY,COOLG CHK,LWR
spare_part
High-quality nan for THERMAWAVE CMP tool. LIFT PIN ASSY,COOLG CHK,LWR. Compatible with THERMAWAVE equipment. Part No. 45-143227.
THERMAWAVE
45-143238
?PRE-ALIGN,CCD,200-300MM,SP repl. 45-143244
spare_part
High-quality nan for THERMAWAVE CMP tool. ?PRE-ALIGN,CCD,200-300MM,SP repl. 45-143244. Compatible with THERMAWAVE equipment. Part No. 45-143238.
THERMAWAVE
45-143244
EG,PRE-ALIGNER,SPARE,KAW
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PRE-ALIGNER,SPARE,KAW. Compatible with THERMAWAVE equipment. Part No. 45-143244.
THERMAWAVE
46-003170
RING,RETAINING,.250SHAuto FocusT DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. RING,RETAINING,.250SHAuto FocusT DIA. Compatible with THERMAWAVE equipment. Part No. 46-003170.
THERMAWAVE
46-003677
OBS,CHAIN,MINI,.1475PITCHX16.9
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,CHAIN,MINI,.1475PITCHX16.9. Compatible with THERMAWAVE equipment. Part No. 46-003677.
THERMAWAVE
46-005182
RACK,COARSE FOCUS,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. RACK,COARSE FOCUS,T9. Compatible with THERMAWAVE equipment. Part No. 46-005182.
THERMAWAVE
46-005781
RACK,COARSE FOCUS-A
spare_part
High-quality nan for THERMAWAVE CMP tool. RACK,COARSE FOCUS-A. Compatible with THERMAWAVE equipment. Part No. 46-005781.
THERMAWAVE
46-007455
RING,RETAINING,4MM,.025THK
spare_part
High-quality nan for THERMAWAVE CMP tool. RING,RETAINING,4MM,.025THK. Compatible with THERMAWAVE equipment. Part No. 46-007455.
THERMAWAVE
46-011944
PULLEY,CASS,TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. PULLEY,CASS,TILT. Compatible with THERMAWAVE equipment. Part No. 46-011944.
THERMAWAVE
46-018525
leadsrew, acme, 3/8-16, theta
spare_part
High-quality nan for THERMAWAVE CMP tool. leadsrew, acme, 3/8-16, theta. Compatible with THERMAWAVE equipment. Part No. 46-018525.
THERMAWAVE
47-002586
SPRING,COMP,.24ODX5/8LG,SStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,COMP,.24ODX5/8LG,SStandard. Compatible with THERMAWAVE equipment. Part No. 47-002586.
THERMAWAVE
47-002647
SPRING,GAS,#FB12G-P1-60#
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,GAS,#FB12G-P1-60#. Compatible with THERMAWAVE equipment. Part No. 47-002647.
THERMAWAVE
47-003718
SPRING,GAS,90LBS
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,GAS,90LBS. Compatible with THERMAWAVE equipment. Part No. 47-003718.
THERMAWAVE
47-006140
SPRING,GAS,120LB
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,GAS,120LB. Compatible with THERMAWAVE equipment. Part No. 47-006140.
THERMAWAVE
47-006387
SPRING,Mirror MT,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,Mirror MT,T9. Compatible with THERMAWAVE equipment. Part No. 47-006387.
THERMAWAVE
47-007864
SPRING,GAS,30LB
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,GAS,30LB. Compatible with THERMAWAVE equipment. Part No. 47-007864.
THERMAWAVE
47-009689
Spring, Comp, .180Diax.75LG
spare_part
High-quality nan for THERMAWAVE CMP tool. Spring, Comp, .180Diax.75LG. Compatible with THERMAWAVE equipment. Part No. 47-009689.
THERMAWAVE
47-010549
SPRING,COMP,.240DIAX.50LX.020
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,COMP,.240DIAX.50LX.020. Compatible with THERMAWAVE equipment. Part No. 47-010549.
THERMAWAVE
54-002741
COUPLING,PNEU,QUICK DISCONNECT
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,PNEU,QUICK DISCONNECT. Compatible with THERMAWAVE equipment. Part No. 54-002741.
THERMAWAVE
54-003068
COUPLING,W3-S5
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,W3-S5. Compatible with THERMAWAVE equipment. Part No. 54-003068.
THERMAWAVE
54-003687
COUPLING,BLWS,.25:.37ID,.75
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,BLWS,.25:.37ID,.75. Compatible with THERMAWAVE equipment. Part No. 54-003687.
THERMAWAVE
54-005181
SHAFT,Rotary PIVOT,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. SHAFT,Rotary PIVOT,T9. Compatible with THERMAWAVE equipment. Part No. 54-005181.
THERMAWAVE
54-005350
StandardANDOFF,3/8HEX,10-32X11/16,SS
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardANDOFF,3/8HEX,10-32X11/16,SS. Compatible with THERMAWAVE equipment. Part No. 54-005350.
THERMAWAVE
54-006423
COUPLING,.25IDX.75ODX.845LG
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,.25IDX.75ODX.845LG. Compatible with THERMAWAVE equipment. Part No. 54-006423.
THERMAWAVE
54-006445
PINION,DIRECT Driver PRECISION,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. PINION,DIRECT Driver PRECISION,T9. Compatible with THERMAWAVE equipment. Part No. 54-006445.
THERMAWAVE
54-006873
StandardANDOFF,3/16HEX,FEM
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardANDOFF,3/16HEX,FEM. Compatible with THERMAWAVE equipment. Part No. 54-006873.
THERMAWAVE
54-007131
PIN,REF MT LOCATOR
spare_part
High-quality nan for THERMAWAVE CMP tool. PIN,REF MT LOCATOR. Compatible with THERMAWAVE equipment. Part No. 54-007131.
THERMAWAVE
54-007358
BOX,Platform SupportPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX,Platform SupportPORT. Compatible with THERMAWAVE equipment. Part No. 54-007358.
THERMAWAVE
54-007449
COLLAR,COUPLING LOCKING
spare_part
High-quality nan for THERMAWAVE CMP tool. COLLAR,COUPLING LOCKING. Compatible with THERMAWAVE equipment. Part No. 54-007449.
THERMAWAVE
54-007450
COUPLING,1/4ID BELLOWS
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,1/4ID BELLOWS. Compatible with THERMAWAVE equipment. Part No. 54-007450.
THERMAWAVE
54-007933
SPACER,VERT Beam Pointer
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,VERT Beam Pointer. Compatible with THERMAWAVE equipment. Part No. 54-007933.
THERMAWAVE
54-008232
SHIM,5X ObjectiveECTIVE
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,5X ObjectiveECTIVE. Compatible with THERMAWAVE equipment. Part No. 54-008232.
THERMAWAVE
54-008923
WASHER,.31IDX.43ODX.094THK
spare_part
High-quality nan for THERMAWAVE CMP tool. WASHER,.31IDX.43ODX.094THK. Compatible with THERMAWAVE equipment. Part No. 54-008923.
THERMAWAVE
54-009296
BELLOWS,4.13IDX5.50DX2.5LG
spare_part
High-quality nan for THERMAWAVE CMP tool. BELLOWS,4.13IDX5.50DX2.5LG. Compatible with THERMAWAVE equipment. Part No. 54-009296.
THERMAWAVE
54-009582
SHIM,PLAS,MG HENE
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,PLAS,MG HENE. Compatible with THERMAWAVE equipment. Part No. 54-009582.
THERMAWAVE
54-009622
SHAFT,LINK,AF LENS EXCH,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. SHAFT,LINK,AF LENS EXCH,UV. Compatible with THERMAWAVE equipment. Part No. 54-009622.
THERMAWAVE
54-009950
SHIM,BRASS,1MIL THK,.62WX2.0LG
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,BRASS,1MIL THK,.62WX2.0LG. Compatible with THERMAWAVE equipment. Part No. 54-009950.
THERMAWAVE
54-009951
SHIM,BRASS,2MIL THK,.62WX2.0LG
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,BRASS,2MIL THK,.62WX2.0LG. Compatible with THERMAWAVE equipment. Part No. 54-009951.
THERMAWAVE
54-009952
SHIM,BRASS,5MIL THK,.62WX2.0LG
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,BRASS,5MIL THK,.62WX2.0LG. Compatible with THERMAWAVE equipment. Part No. 54-009952.
THERMAWAVE
54-009953
SHIM,BRASS,10MIL THK,.62WX2.0L
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIM,BRASS,10MIL THK,.62WX2.0L. Compatible with THERMAWAVE equipment. Part No. 54-009953.
THERMAWAVE
54-009986
PIN,DOWEL,.0937DIAX1.00LG,303
spare_part
High-quality nan for THERMAWAVE CMP tool. PIN,DOWEL,.0937DIAX1.00LG,303. Compatible with THERMAWAVE equipment. Part No. 54-009986.
THERMAWAVE
54-010054
COUPLING,BLWS,.25X.37,SS
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,BLWS,.25X.37,SS. Compatible with THERMAWAVE equipment. Part No. 54-010054.
THERMAWAVE
54-010055
COLLAR,.25BOREX.69ODX.28W,SStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. COLLAR,.25BOREX.69ODX.28W,SStandard. Compatible with THERMAWAVE equipment. Part No. 54-010055.
THERMAWAVE
54-010056
COLLAR,.375BOREX.94ODX.34W,SStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. COLLAR,.375BOREX.94ODX.34W,SStandard. Compatible with THERMAWAVE equipment. Part No. 54-010056.
THERMAWAVE
54-010115
TUBE,AR Laser Beam,UNIPHASE
spare_part
High-quality nan for THERMAWAVE CMP tool. TUBE,AR Laser Beam,UNIPHASE. Compatible with THERMAWAVE equipment. Part No. 54-010115.
THERMAWAVE
54-010315
SLEEVE,FiberER OpticIC
spare_part
High-quality nan for THERMAWAVE CMP tool. SLEEVE,FiberER OpticIC. Compatible with THERMAWAVE equipment. Part No. 54-010315.
THERMAWAVE
54-010334
SHAuto FocusT,SM,CASS,ROT
spare_part
High-quality nan for THERMAWAVE CMP tool. SHAuto FocusT,SM,CASS,ROT. Compatible with THERMAWAVE equipment. Part No. 54-010334.
THERMAWAVE
54-010688
SPACER,WASHER,CASS Assembly,LOWER
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,WASHER,CASS Assembly,LOWER. Compatible with THERMAWAVE equipment. Part No. 54-010688.
THERMAWAVE
54-010855
SPACER,SHFT,.187IDX.25ODX.094
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,SHFT,.187IDX.25ODX.094. Compatible with THERMAWAVE equipment. Part No. 54-010855.
THERMAWAVE
54-010877
INA,HARDSTOP,UPR&LWR LIMIT
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,HARDSTOP,UPR&LWR LIMIT. Compatible with THERMAWAVE equipment. Part No. 54-010877.
THERMAWAVE
54-010969
SPACER,WASHER,SStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,WASHER,SStandard. Compatible with THERMAWAVE equipment. Part No. 54-010969.
THERMAWAVE
54-011933
SPACER,.060THK
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,.060THK. Compatible with THERMAWAVE equipment. Part No. 54-011933.
THERMAWAVE
54-011943
SHAuto FocusT,LG,Cassette,TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. SHAuto FocusT,LG,Cassette,TILT. Compatible with THERMAWAVE equipment. Part No. 54-011943.
THERMAWAVE
54-011976
StandardOP,Cassette TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. StandardOP,Cassette TILT. Compatible with THERMAWAVE equipment. Part No. 54-011976.
THERMAWAVE
54-012727
COUPLING,BLWS,29.5MMX16MM,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,BLWS,29.5MMX16MM,UV. Compatible with THERMAWAVE equipment. Part No. 54-012727.
THERMAWAVE
54-015525
COUPLING,1/4ID,MEMBRANE
spare_part
High-quality nan for THERMAWAVE CMP tool. COUPLING,1/4ID,MEMBRANE. Compatible with THERMAWAVE equipment. Part No. 54-015525.
THERMAWAVE
54-016501
OBSOLETE - order 58-016501 instead.
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE - order 58-016501 instead.. Compatible with THERMAWAVE equipment. Part No. 54-016501.
THERMAWAVE
54-017116
SPACER,FLTR HSG,MVG FLTR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. SPACER,FLTR HSG,MVG FLTR,P34. Compatible with THERMAWAVE equipment. Part No. 54-017116.
THERMAWAVE
54-020129
SHAFT,SENSOR,DOCKING,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. SHAFT,SENSOR,DOCKING,P35. Compatible with THERMAWAVE equipment. Part No. 54-020129.
THERMAWAVE
54-021332
Coupling, Flex, 25X8MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Coupling, Flex, 25X8MM. Compatible with THERMAWAVE equipment. Part No. 54-021332.
THERMAWAVE
54-021433
SPRING,COMP,.240DIAX.50LX.020
spare_part
High-quality nan for THERMAWAVE CMP tool. SPRING,COMP,.240DIAX.50LX.020. Compatible with THERMAWAVE equipment. Part No. 54-021433.
THERMAWAVE
54-022450
Standoff, RBT, BLKHD, Desorber
spare_part
High-quality nan for THERMAWAVE CMP tool. Standoff, RBT, BLKHD, Desorber. Compatible with THERMAWAVE equipment. Part No. 54-022450.
THERMAWAVE
54-022564
Copper Interlock (2 ea)
spare_part
High-quality nan for THERMAWAVE CMP tool. Copper Interlock (2 ea). Compatible with THERMAWAVE equipment. Part No. 54-022564.
THERMAWAVE
56-003021
Isolator,VIBRATION,CYLINDriverICAL
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,VIBRATION,CYLINDriverICAL. Compatible with THERMAWAVE equipment. Part No. 56-003021.
THERMAWAVE
56-003022
Isolator,VIBRATION,SQUARE
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,VIBRATION,SQUARE. Compatible with THERMAWAVE equipment. Part No. 56-003022.
THERMAWAVE
56-003022
Isolator,VIBRATION,SQUARE
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,VIBRATION,SQUARE. Compatible with THERMAWAVE equipment. Part No. 56-003022.
THERMAWAVE
56-006069
CUSHION,Shipping,T6
spare_part
High-quality nan for THERMAWAVE CMP tool. CUSHION,Shipping,T6. Compatible with THERMAWAVE equipment. Part No. 56-006069.
THERMAWAVE
56-006869
CUSHION,10DX1/4THKX5/16ID
spare_part
High-quality nan for THERMAWAVE CMP tool. CUSHION,10DX1/4THKX5/16ID. Compatible with THERMAWAVE equipment. Part No. 56-006869.
THERMAWAVE
56-007459
BUMPER,RBR,9/16HX3/4OD
spare_part
High-quality nan for THERMAWAVE CMP tool. BUMPER,RBR,9/16HX3/4OD. Compatible with THERMAWAVE equipment. Part No. 56-007459.
THERMAWAVE
56-009155
Isolator,PRECISION VIBRATION
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,PRECISION VIBRATION. Compatible with THERMAWAVE equipment. Part No. 56-009155.
THERMAWAVE
56-009156
Isolator,FAStandard,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,FAStandard,TPXP. Compatible with THERMAWAVE equipment. Part No. 56-009156.
THERMAWAVE
56-009892
LEVER,SENSOR TRIP,Cassette PL
spare_part
High-quality nan for THERMAWAVE CMP tool. LEVER,SENSOR TRIP,Cassette PL. Compatible with THERMAWAVE equipment. Part No. 56-009892.
THERMAWAVE
56-010328
ARM,CASS,MOT,ROT
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,CASS,MOT,ROT. Compatible with THERMAWAVE equipment. Part No. 56-010328.
THERMAWAVE
56-010345
DISK,FRICTION,CASS,ROT
spare_part
High-quality nan for THERMAWAVE CMP tool. DISK,FRICTION,CASS,ROT. Compatible with THERMAWAVE equipment. Part No. 56-010345.
THERMAWAVE
56-010358
ARM,RT,CAS,TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,RT,CAS,TILT. Compatible with THERMAWAVE equipment. Part No. 56-010358.
THERMAWAVE
56-010452
PADDLE,4-8IN,LONG RCH,RSD PAD
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,4-8IN,LONG RCH,RSD PAD. Compatible with THERMAWAVE equipment. Part No. 56-010452.
THERMAWAVE
56-010559
PADDLE,1IN WIDE,OVERCENTER RAD
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,1IN WIDE,OVERCENTER RAD. Compatible with THERMAWAVE equipment. Part No. 56-010559.
THERMAWAVE
56-011931
ARM,FLIPPER,Cassette
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,FLIPPER,Cassette. Compatible with THERMAWAVE equipment. Part No. 56-011931.
THERMAWAVE
56-011945
ARM,LG,Cassette Motor TILT
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,LG,Cassette Motor TILT. Compatible with THERMAWAVE equipment. Part No. 56-011945.
THERMAWAVE
56-013986
LEVER,SENSOR,TRIP,EXTND MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. LEVER,SENSOR,TRIP,EXTND MOD. Compatible with THERMAWAVE equipment. Part No. 56-013986.
THERMAWAVE
56-014338
Latch, Door,CE
spare_part
High-quality nan for THERMAWAVE CMP tool. Latch, Door,CE. Compatible with THERMAWAVE equipment. Part No. 56-014338.
THERMAWAVE
56-016670
LINK,EYELET,LENS EXCH,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. LINK,EYELET,LENS EXCH,P34. Compatible with THERMAWAVE equipment. Part No. 56-016670.
THERMAWAVE
56-017234
PADDLE,OVER CENTER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,OVER CENTER,P34. Compatible with THERMAWAVE equipment. Part No. 56-017234.
THERMAWAVE
56-017234
PADDLE,OVER CENTER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,OVER CENTER,P34. Compatible with THERMAWAVE equipment. Part No. 56-017234.
THERMAWAVE
56-017298
Isolator,VIB,MAStandardER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,VIB,MAStandardER,P34. Compatible with THERMAWAVE equipment. Part No. 56-017298.
THERMAWAVE
56-017299
Isolator,VIB,ACTIVE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,VIB,ACTIVE,P34. Compatible with THERMAWAVE equipment. Part No. 56-017299.
THERMAWAVE
56-017330
EG,PADDLE,1.50X9.50,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PADDLE,1.50X9.50,P35. Compatible with THERMAWAVE equipment. Part No. 56-017330.
THERMAWAVE
56-020088
Isolator,MAStandardER,VIB,16IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,MAStandardER,VIB,16IN. Compatible with THERMAWAVE equipment. Part No. 56-020088.
THERMAWAVE
56-020090
Isolator,SLAVE,VIB,16IN,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Isolator,SLAVE,VIB,16IN,P34. Compatible with THERMAWAVE equipment. Part No. 56-020090.
THERMAWAVE
56-020407
Ina. paddle, Thin, 1.50x10.50, P35 repl. by 56-080728
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. paddle, Thin, 1.50x10.50, P35 repl. by 56-080728. Compatible with THERMAWAVE equipment. Part No. 56-020407.
THERMAWAVE
56-020407
Ina. paddle, Thin, 1.50x10.50, P35 repl. by 56-080728
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. paddle, Thin, 1.50x10.50, P35 repl. by 56-080728. Compatible with THERMAWAVE equipment. Part No. 56-020407.
THERMAWAVE
56-029076
PADDLE,OVER CENTER,DRILL,DE
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,OVER CENTER,DRILL,DE. Compatible with THERMAWAVE equipment. Part No. 56-029076.
THERMAWAVE
56-080665
PADDLE,ELIMINATED ESD,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,ELIMINATED ESD,OP2600. Compatible with THERMAWAVE equipment. Part No. 56-080665.
THERMAWAVE
56-080666
Ina,PADDLE,THIN,EFD,300MM repl by 56-080714
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,PADDLE,THIN,EFD,300MM repl by 56-080714. Compatible with THERMAWAVE equipment. Part No. 56-080666.
THERMAWAVE
56-080690
INA,PADDLE, 1.0 X 5.7, OP 2600
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,PADDLE, 1.0 X 5.7, OP 2600. Compatible with THERMAWAVE equipment. Part No. 56-080690.
THERMAWAVE
56-080715
Ina. EG,PADDLE,.03 THINNER,200MM repl. by 56-080724
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. EG,PADDLE,.03 THINNER,200MM repl. by 56-080724. Compatible with THERMAWAVE equipment. Part No. 56-080715.
THERMAWAVE
56-080716
PADDLE,VACUUM,ROBOT,KAWASAK
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,VACUUM,ROBOT,KAWASAK. Compatible with THERMAWAVE equipment. Part No. 56-080716.
THERMAWAVE
56-080717
ARM,PIN LIFTER PEEK SET,WRI
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,PIN LIFTER PEEK SET,WRI. Compatible with THERMAWAVE equipment. Part No. 56-080717.
THERMAWAVE
56-080720
PADDLE,EFD, KAWASAKI ROBOT
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,EFD, KAWASAKI ROBOT. Compatible with THERMAWAVE equipment. Part No. 56-080720.
THERMAWAVE
56-080723
PADDLE,STEPPED,KAWASAKI
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,STEPPED,KAWASAKI. Compatible with THERMAWAVE equipment. Part No. 56-080723.
THERMAWAVE
56-080724
PADDLE,.03 THK,200MM,REL SPEC
spare_part
High-quality nan for THERMAWAVE CMP tool. PADDLE,.03 THK,200MM,REL SPEC. Compatible with THERMAWAVE equipment. Part No. 56-080724.
THERMAWAVE
56-080725
END EFFECTOR,EFD,HOT,THIN
spare_part
High-quality nan for THERMAWAVE CMP tool. END EFFECTOR,EFD,HOT,THIN. Compatible with THERMAWAVE equipment. Part No. 56-080725.
THERMAWAVE
56-080726
END EFFECTOR,EFD,COLD,THIN
spare_part
High-quality nan for THERMAWAVE CMP tool. END EFFECTOR,EFD,COLD,THIN. Compatible with THERMAWAVE equipment. Part No. 56-080726.
THERMAWAVE
56-080728
EG,PADDLE,NO POLISH,1.50X10.50
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PADDLE,NO POLISH,1.50X10.50. Compatible with THERMAWAVE equipment. Part No. 56-080728.
THERMAWAVE
58-002629
FITTING,ELBOW,10-32 VEF
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,ELBOW,10-32 VEF. Compatible with THERMAWAVE equipment. Part No. 58-002629.
THERMAWAVE
58-002737
FITTING,AIR LINE,10-32X.062
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,AIR LINE,10-32X.062. Compatible with THERMAWAVE equipment. Part No. 58-002737.
THERMAWAVE
58-002789
FITTING,HOSE BARB,.125 X 10-32
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,HOSE BARB,.125 X 10-32. Compatible with THERMAWAVE equipment. Part No. 58-002789.
THERMAWAVE
58-002955
Valve,FLOW CNTRL,GRL10-32
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,FLOW CNTRL,GRL10-32. Compatible with THERMAWAVE equipment. Part No. 58-002955.
THERMAWAVE
58-003026
INSERT,PNEU COUPLING,5.0,1/8IN
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT,PNEU COUPLING,5.0,1/8IN. Compatible with THERMAWAVE equipment. Part No. 58-003026.
THERMAWAVE
58-003771
REGULATOR,0-90 PSI
spare_part
High-quality nan for THERMAWAVE CMP tool. REGULATOR,0-90 PSI. Compatible with THERMAWAVE equipment. Part No. 58-003771.
THERMAWAVE
58-003772
REGULATOR,0-30 PSI
spare_part
High-quality nan for THERMAWAVE CMP tool. REGULATOR,0-30 PSI. Compatible with THERMAWAVE equipment. Part No. 58-003772.
THERMAWAVE
58-005064
Valve,CHECK,PNEU,MINI INLINE
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,CHECK,PNEU,MINI INLINE. Compatible with THERMAWAVE equipment. Part No. 58-005064.
THERMAWAVE
58-006204
CYLINDER,1/2IN StandardROKE,CYCLED
spare_part
High-quality nan for THERMAWAVE CMP tool. CYLINDER,1/2IN StandardROKE,CYCLED. Compatible with THERMAWAVE equipment. Part No. 58-006204.
THERMAWAVE
58-008605
Valve,PNEUMATIC Isolator
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,PNEUMATIC Isolator. Compatible with THERMAWAVE equipment. Part No. 58-008605.
THERMAWAVE
58-010583
Valve,FLOW CNTRL,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,FLOW CNTRL,BH. Compatible with THERMAWAVE equipment. Part No. 58-010583.
THERMAWAVE
58-010895
Ina,Regulator,0-160PSI W/GAUGE repl. by58-081946
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,Regulator,0-160PSI W/GAUGE repl. by58-081946. Compatible with THERMAWAVE equipment. Part No. 58-010895.
THERMAWAVE
58-011191
FITTING,HOSE BARB,1/4MPT,1/4ID
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,HOSE BARB,1/4MPT,1/4ID. Compatible with THERMAWAVE equipment. Part No. 58-011191.
THERMAWAVE
58-011192
FITTING,HOSE BARB,1/4MPTX1/8ID
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,HOSE BARB,1/4MPTX1/8ID. Compatible with THERMAWAVE equipment. Part No. 58-011192.
THERMAWAVE
58-011193
INSERT,PNEU COUPLING,1/4FLOW
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT,PNEU COUPLING,1/4FLOW. Compatible with THERMAWAVE equipment. Part No. 58-011193.
THERMAWAVE
58-011195
TUBING,PNEU,1/4ID,CLEAR
spare_part
High-quality nan for THERMAWAVE CMP tool. TUBING,PNEU,1/4ID,CLEAR. Compatible with THERMAWAVE equipment. Part No. 58-011195.
THERMAWAVE
58-011391
FITTING,FEMALE BARB,1/8NPTX1/8
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,FEMALE BARB,1/8NPTX1/8. Compatible with THERMAWAVE equipment. Part No. 58-011391.
THERMAWAVE
58-011454
Equipe Robot,VACUM Valve
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,VACUM Valve. Compatible with THERMAWAVE equipment. Part No. 58-011454.
THERMAWAVE
58-011892
FITTING,1/8NPT TO 5/32OD TUBE
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,1/8NPT TO 5/32OD TUBE. Compatible with THERMAWAVE equipment. Part No. 58-011892.
THERMAWAVE
58-012919
Valve Solenoid,12VDC,NO
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve Solenoid,12VDC,NO. Compatible with THERMAWAVE equipment. Part No. 58-012919.
THERMAWAVE
58-013839
ORIFICE REStandardR,.005,10-32M,
spare_part
High-quality nan for THERMAWAVE CMP tool. ORIFICE REStandardR,.005,10-32M,. Compatible with THERMAWAVE equipment. Part No. 58-013839.
THERMAWAVE
58-014426
ORIFICE,RES,.008,10-32M,1/16
spare_part
High-quality nan for THERMAWAVE CMP tool. ORIFICE,RES,.008,10-32M,1/16. Compatible with THERMAWAVE equipment. Part No. 58-014426.
THERMAWAVE
58-014502
FTG,QD,CPLG,1/4X1/4NPT
spare_part
High-quality nan for THERMAWAVE CMP tool. FTG,QD,CPLG,1/4X1/4NPT. Compatible with THERMAWAVE equipment. Part No. 58-014502.
THERMAWAVE
58-014578
FITTING,FERRULE, 1/4 TUBE
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,FERRULE, 1/4 TUBE. Compatible with THERMAWAVE equipment. Part No. 58-014578.
THERMAWAVE
58-014579
FITTING,1/8NPT,1/4OD TUBE,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,1/8NPT,1/4OD TUBE,BH. Compatible with THERMAWAVE equipment. Part No. 58-014579.
THERMAWAVE
58-015221
FITTING,PNEU,FERRULE,.25ID,
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,PNEU,FERRULE,.25ID,. Compatible with THERMAWAVE equipment. Part No. 58-015221.
THERMAWAVE
58-015330
GAUGE,VAC,30MM,HG
spare_part
High-quality nan for THERMAWAVE CMP tool. GAUGE,VAC,30MM,HG. Compatible with THERMAWAVE equipment. Part No. 58-015330.
THERMAWAVE
58-015331
GAUGE,PRESS,0-160 KPA
spare_part
High-quality nan for THERMAWAVE CMP tool. GAUGE,PRESS,0-160 KPA. Compatible with THERMAWAVE equipment. Part No. 58-015331.
THERMAWAVE
58-016841
FITTING,FEMALE,1/8NPT-1/40D
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,FEMALE,1/8NPT-1/40D. Compatible with THERMAWAVE equipment. Part No. 58-016841.
THERMAWAVE
58-016851
FITTING,FLOW CNTRL,M5-1/8
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,FLOW CNTRL,M5-1/8. Compatible with THERMAWAVE equipment. Part No. 58-016851.
THERMAWAVE
58-016852
Fitting, Male, M5 - 1/8
spare_part
High-quality nan for THERMAWAVE CMP tool. Fitting, Male, M5 - 1/8. Compatible with THERMAWAVE equipment. Part No. 58-016852.
THERMAWAVE
58-016882
FITTING,REDUCER,5/32-1/8
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,REDUCER,5/32-1/8. Compatible with THERMAWAVE equipment. Part No. 58-016882.
THERMAWAVE
58-017296
Fitting, Male, 10-32 to 5/32
spare_part
High-quality nan for THERMAWAVE CMP tool. Fitting, Male, 10-32 to 5/32. Compatible with THERMAWAVE equipment. Part No. 58-017296.
THERMAWAVE
58-017521
Valve,LEVELING,Isolator,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,LEVELING,Isolator,P3. Compatible with THERMAWAVE equipment. Part No. 58-017521.
THERMAWAVE
58-017772
CYLINDER,PNEUMATIC,16X15MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CYLINDER,PNEUMATIC,16X15MM. Compatible with THERMAWAVE equipment. Part No. 58-017772.
THERMAWAVE
58-017776
Valve, Solenoid, 5-Port, 24 VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve, Solenoid, 5-Port, 24 VDC. Compatible with THERMAWAVE equipment. Part No. 58-017776.
THERMAWAVE
58-017779
Valve,Solenoid,2-PORT,N.O
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,Solenoid,2-PORT,N.O. Compatible with THERMAWAVE equipment. Part No. 58-017779.
THERMAWAVE
58-017807
MANIFOLD,2 STATIONS
spare_part
High-quality nan for THERMAWAVE CMP tool. MANIFOLD,2 STATIONS. Compatible with THERMAWAVE equipment. Part No. 58-017807.
THERMAWAVE
58-017808
Valve,Solenoid,3-PORT,DIRCT
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,Solenoid,3-PORT,DIRCT. Compatible with THERMAWAVE equipment. Part No. 58-017808.
THERMAWAVE
58-017812
Valve,CHECK,UNION,3/8OD
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,CHECK,UNION,3/8OD. Compatible with THERMAWAVE equipment. Part No. 58-017812.
THERMAWAVE
58-018434
Valve,Solenoid,3 PORT,N.C.
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,Solenoid,3 PORT,N.C.. Compatible with THERMAWAVE equipment. Part No. 58-018434.
THERMAWAVE
58-018437
GAUGE,VAC,30IN,HG,PNL MT
spare_part
High-quality nan for THERMAWAVE CMP tool. GAUGE,VAC,30IN,HG,PNL MT. Compatible with THERMAWAVE equipment. Part No. 58-018437.
THERMAWAVE
58-018746
INSERT, QUICK, DISCONN, 1/8ID
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT, QUICK, DISCONN, 1/8ID. Compatible with THERMAWAVE equipment. Part No. 58-018746.
THERMAWAVE
58-019263
FITTING,COUPLINGQD, 1/8NPT
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,COUPLINGQD, 1/8NPT. Compatible with THERMAWAVE equipment. Part No. 58-019263.
THERMAWAVE
58-019327
CYLINDER,PNEU,25MMX15MM,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. CYLINDER,PNEU,25MMX15MM,P35. Compatible with THERMAWAVE equipment. Part No. 58-019327.
THERMAWAVE
58-020031
Fitting, 1/8NPT-1/4, ORF 0.9
spare_part
High-quality nan for THERMAWAVE CMP tool. Fitting, 1/8NPT-1/4, ORF 0.9. Compatible with THERMAWAVE equipment. Part No. 58-020031.
THERMAWAVE
58-020392
VALVE,SOLENOID,3PORT,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. VALVE,SOLENOID,3PORT,T41. Compatible with THERMAWAVE equipment. Part No. 58-020392.
THERMAWAVE
58-021565
Valve,THROTTLE,StandardRAIGHT,M4
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,THROTTLE,StandardRAIGHT,M4. Compatible with THERMAWAVE equipment. Part No. 58-021565.
THERMAWAVE
58-021714
Cylinder, Pneu, 20MMX, 15MM, Doc
spare_part
High-quality nan for THERMAWAVE CMP tool. Cylinder, Pneu, 20MMX, 15MM, Doc. Compatible with THERMAWAVE equipment. Part No. 58-021714.
THERMAWAVE
58-022409
VALVE,PNEUMATIC ISOLATOR,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. VALVE,PNEUMATIC ISOLATOR,TP. Compatible with THERMAWAVE equipment. Part No. 58-022409.
THERMAWAVE
58-023233
Filter, Replace, .01UM, Comp Air
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, Replace, .01UM, Comp Air. Compatible with THERMAWAVE equipment. Part No. 58-023233.
THERMAWAVE
58-023234
FILTER,.01UM, COMPAIR
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,.01UM, COMPAIR. Compatible with THERMAWAVE equipment. Part No. 58-023234.
THERMAWAVE
58-023235
Filter, Replace, .03PPM, Oil
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, Replace, .03PPM, Oil. Compatible with THERMAWAVE equipment. Part No. 58-023235.
THERMAWAVE
58-023980
E84 Overhead Interface Device
spare_part
High-quality nan for THERMAWAVE CMP tool. E84 Overhead Interface Device. Compatible with THERMAWAVE equipment. Part No. 58-023980.
THERMAWAVE
58-025747
EG, Regulator, Vacuum, 1/4 NPT
spare_part
High-quality nan for THERMAWAVE CMP tool. EG, Regulator, Vacuum, 1/4 NPT. Compatible with THERMAWAVE equipment. Part No. 58-025747.
THERMAWAVE
58-029812
FILTER, ASSY,COALESCING
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER, ASSY,COALESCING. Compatible with THERMAWAVE equipment. Part No. 58-029812.
THERMAWAVE
58-081899
REGULATOR,FLTR, AUTO DRAIN
spare_part
High-quality nan for THERMAWAVE CMP tool. REGULATOR,FLTR, AUTO DRAIN. Compatible with THERMAWAVE equipment. Part No. 58-081899.
THERMAWAVE
58-081900
REGULATOR,M5X8,.7MPA
spare_part
High-quality nan for THERMAWAVE CMP tool. REGULATOR,M5X8,.7MPA. Compatible with THERMAWAVE equipment. Part No. 58-081900.
THERMAWAVE
58-081901
VALVE,3PORT VACUUM,.2CV
spare_part
High-quality nan for THERMAWAVE CMP tool. VALVE,3PORT VACUUM,.2CV. Compatible with THERMAWAVE equipment. Part No. 58-081901.
THERMAWAVE
59-002592
HANDLE,PULL,CONCEALED
spare_part
High-quality nan for THERMAWAVE CMP tool. HANDLE,PULL,CONCEALED. Compatible with THERMAWAVE equipment. Part No. 59-002592.
THERMAWAVE
59-002670
EJECTOR,CARD
spare_part
High-quality nan for THERMAWAVE CMP tool. EJECTOR,CARD. Compatible with THERMAWAVE equipment. Part No. 59-002670.
THERMAWAVE
59-002698
GASKET,DOOR-WHITE VINYL
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,DOOR-WHITE VINYL. Compatible with THERMAWAVE equipment. Part No. 59-002698.
THERMAWAVE
59-002733
HOSE,DriverYER,4IN DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. HOSE,DriverYER,4IN DIA. Compatible with THERMAWAVE equipment. Part No. 59-002733.
THERMAWAVE
59-002742
FITTING,HOSE BARB,PMC22-02
spare_part
High-quality nan for THERMAWAVE CMP tool. FITTING,HOSE BARB,PMC22-02. Compatible with THERMAWAVE equipment. Part No. 59-002742.
THERMAWAVE
59-002743
INSERT,QUICK DISCONNECT
spare_part
High-quality nan for THERMAWAVE CMP tool. INSERT,QUICK DISCONNECT. Compatible with THERMAWAVE equipment. Part No. 59-002743.
THERMAWAVE
59-002996
Ina. Latch,PAWL,65LI-1RAA repl by 61-154019
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. Latch,PAWL,65LI-1RAA repl by 61-154019. Compatible with THERMAWAVE equipment. Part No. 59-002996.
THERMAWAVE
59-003637
LATCH,DriverAW,.91 REACH
spare_part
High-quality nan for THERMAWAVE CMP tool. LATCH,DriverAW,.91 REACH. Compatible with THERMAWAVE equipment. Part No. 59-003637.
THERMAWAVE
59-005334
E-RING,.875ID,SS
spare_part
High-quality nan for THERMAWAVE CMP tool. E-RING,.875ID,SS. Compatible with THERMAWAVE equipment. Part No. 59-005334.
THERMAWAVE
59-006543
MAGNET,BUTTON,.50DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. MAGNET,BUTTON,.50DIA. Compatible with THERMAWAVE equipment. Part No. 59-006543.
THERMAWAVE
59-006680
Gasket, ADH Back, SIL, .5X.25
spare_part
High-quality nan for THERMAWAVE CMP tool. Gasket, ADH Back, SIL, .5X.25. Compatible with THERMAWAVE equipment. Part No. 59-006680.
THERMAWAVE
59-006724
O-RING,2-113,9/16X3/4X3/32
spare_part
High-quality nan for THERMAWAVE CMP tool. O-RING,2-113,9/16X3/4X3/32. Compatible with THERMAWAVE equipment. Part No. 59-006724.
THERMAWAVE
59-007417
HINGE, ADJ TORQUE
spare_part
High-quality nan for THERMAWAVE CMP tool. HINGE, ADJ TORQUE. Compatible with THERMAWAVE equipment. Part No. 59-007417.
THERMAWAVE
59-007422
Latch, Hidden, PNL Tool Oper
spare_part
High-quality nan for THERMAWAVE CMP tool. Latch, Hidden, PNL Tool Oper. Compatible with THERMAWAVE equipment. Part No. 59-007422.
THERMAWAVE
59-007454
KNOB,#10HSCS PRESS ON,5/8OD
spare_part
High-quality nan for THERMAWAVE CMP tool. KNOB,#10HSCS PRESS ON,5/8OD. Compatible with THERMAWAVE equipment. Part No. 59-007454.
THERMAWAVE
59-008434
RCVR Assembly,Panel LATCH
spare_part
High-quality nan for THERMAWAVE CMP tool. RCVR Assembly,Panel LATCH. Compatible with THERMAWAVE equipment. Part No. 59-008434.
THERMAWAVE
59-008467
RCVR Assembly,Panel LATCH W/PLGR,ANG
spare_part
High-quality nan for THERMAWAVE CMP tool. RCVR Assembly,Panel LATCH W/PLGR,ANG. Compatible with THERMAWAVE equipment. Part No. 59-008467.
THERMAWAVE
59-009583
HOSE,4.0DIA,PVC REINFCD,GD BLU
spare_part
High-quality nan for THERMAWAVE CMP tool. HOSE,4.0DIA,PVC REINFCD,GD BLU. Compatible with THERMAWAVE equipment. Part No. 59-009583.
THERMAWAVE
59-010624
O-RING,3/32X1.25ID,VITON
spare_part
High-quality nan for THERMAWAVE CMP tool. O-RING,3/32X1.25ID,VITON. Compatible with THERMAWAVE equipment. Part No. 59-010624.
THERMAWAVE
59-011117
LATCH,DOOR,HIDDEN,MOD,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. LATCH,DOOR,HIDDEN,MOD,BH. Compatible with THERMAWAVE equipment. Part No. 59-011117.
THERMAWAVE
59-011146
GASKET,AIR,WH/MM
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,AIR,WH/MM. Compatible with THERMAWAVE equipment. Part No. 59-011146.
THERMAWAVE
59-011157
GASKET,CENTER,AIR,WH/MM
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,CENTER,AIR,WH/MM. Compatible with THERMAWAVE equipment. Part No. 59-011157.
THERMAWAVE
59-013545
KENS,O-RING,WH PADDLE
spare_part
High-quality nan for THERMAWAVE CMP tool. KENS,O-RING,WH PADDLE. Compatible with THERMAWAVE equipment. Part No. 59-013545.
THERMAWAVE
59-019432
HOSE,DRYER,6IN DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. HOSE,DRYER,6IN DIA. Compatible with THERMAWAVE equipment. Part No. 59-019432.
THERMAWAVE
59-019974
Grommet, Wire, UV Source, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Grommet, Wire, UV Source, P34. Compatible with THERMAWAVE equipment. Part No. 59-019974.
THERMAWAVE
59-019977
GASKET,SHUTTER,UV SOURCE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,SHUTTER,UV SOURCE,P34. Compatible with THERMAWAVE equipment. Part No. 59-019977.
THERMAWAVE
59-019978
USE UP EXISTING STOCK - then order 59-031403 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. USE UP EXISTING STOCK - then order 59-031403 instead. Compatible with THERMAWAVE equipment. Part No. 59-019978.
THERMAWAVE
59-021634
LATCH,CARRIER,WFR,SGL,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. LATCH,CARRIER,WFR,SGL,300MM. Compatible with THERMAWAVE equipment. Part No. 59-021634.
THERMAWAVE
59-031119
O-RING,.989IDX.07W,VITON
spare_part
High-quality nan for THERMAWAVE CMP tool. O-RING,.989IDX.07W,VITON. Compatible with THERMAWAVE equipment. Part No. 59-031119.
THERMAWAVE
59-031403
GASKET,CVR,UV-SOURCE
spare_part
High-quality nan for THERMAWAVE CMP tool. GASKET,CVR,UV-SOURCE. Compatible with THERMAWAVE equipment. Part No. 59-031403.
THERMAWAVE
60-002590
GUARD,FINGER,BLOWER
spare_part
High-quality nan for THERMAWAVE CMP tool. GUARD,FINGER,BLOWER. Compatible with THERMAWAVE equipment. Part No. 60-002590.
THERMAWAVE
60-005062
CVR,PLAS,Transistor,TO-3
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,PLAS,Transistor,TO-3. Compatible with THERMAWAVE equipment. Part No. 60-005062.
THERMAWAVE
60-006779
HSG,LARGE PIStandardON
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,LARGE PIStandardON. Compatible with THERMAWAVE equipment. Part No. 60-006779.
THERMAWAVE
60-007095
FAN TRANSITION Assembly
spare_part
High-quality nan for THERMAWAVE CMP tool. FAN TRANSITION Assembly. Compatible with THERMAWAVE equipment. Part No. 60-007095.
THERMAWAVE
60-007333
CVR,TW Detector,PCB RF SHIELD
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TW Detector,PCB RF SHIELD. Compatible with THERMAWAVE equipment. Part No. 60-007333.
THERMAWAVE
60-007498
Panel,WFR PASS-THRU,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel,WFR PASS-THRU,P20. Compatible with THERMAWAVE equipment. Part No. 60-007498.
THERMAWAVE
60-007604
CVR,DETECTOR,B,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,DETECTOR,B,P20. Compatible with THERMAWAVE equipment. Part No. 60-007604.
THERMAWAVE
60-008153
CVR,SupportPORT,PL,AIRSHIELD
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,SupportPORT,PL,AIRSHIELD. Compatible with THERMAWAVE equipment. Part No. 60-008153.
THERMAWAVE
60-008749
CVR,Auto Focus ACCESS,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,Auto Focus ACCESS,P22. Compatible with THERMAWAVE equipment. Part No. 60-008749.
THERMAWAVE
60-008812
CVR,AR Laser,MAIN CAVITY,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,AR Laser,MAIN CAVITY,T12. Compatible with THERMAWAVE equipment. Part No. 60-008812.
THERMAWAVE
60-008913
POpticOP,REAR,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. POpticOP,REAR,T12. Compatible with THERMAWAVE equipment. Part No. 60-008913.
THERMAWAVE
60-009440
SF31,CVR,Cable,Robot,26 WFR
spare_part
High-quality nan for THERMAWAVE CMP tool. SF31,CVR,Cable,Robot,26 WFR. Compatible with THERMAWAVE equipment. Part No. 60-009440.
THERMAWAVE
60-009579
CVR,TRACKER Motor,SHORT SHAuto FocusT
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TRACKER Motor,SHORT SHAuto FocusT. Compatible with THERMAWAVE equipment. Part No. 60-009579.
THERMAWAVE
60-009620
HSG,LINK,Auto Focus Lens EXCH,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,LINK,Auto Focus Lens EXCH,UV. Compatible with THERMAWAVE equipment. Part No. 60-009620.
THERMAWAVE
60-009625
CVR,HSG,Auto Focus Lens EXCH,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,HSG,Auto Focus Lens EXCH,UV. Compatible with THERMAWAVE equipment. Part No. 60-009625.
THERMAWAVE
60-010244
PNL,RT,LWR,W.H.,BULKHEAD
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,RT,LWR,W.H.,BULKHEAD. Compatible with THERMAWAVE equipment. Part No. 60-010244.
THERMAWAVE
60-010245
PNL, LFT, Lower, W.H., Bulkhead
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL, LFT, Lower, W.H., Bulkhead. Compatible with THERMAWAVE equipment. Part No. 60-010245.
THERMAWAVE
60-010267
CVR,OpticICS PL
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,OpticICS PL. Compatible with THERMAWAVE equipment. Part No. 60-010267.
THERMAWAVE
60-010286
CVR,KICK,MON
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,KICK,MON. Compatible with THERMAWAVE equipment. Part No. 60-010286.
THERMAWAVE
60-010655
BAFFLE, AIR
spare_part
High-quality nan for THERMAWAVE CMP tool. BAFFLE, AIR. Compatible with THERMAWAVE equipment. Part No. 60-010655.
THERMAWAVE
60-010977
DUCT,FLANGE,6IN
spare_part
High-quality nan for THERMAWAVE CMP tool. DUCT,FLANGE,6IN. Compatible with THERMAWAVE equipment. Part No. 60-010977.
THERMAWAVE
60-011581
HSG,Objective Lens,Auto Focus,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,Objective Lens,Auto Focus,UV. Compatible with THERMAWAVE equipment. Part No. 60-011581.
THERMAWAVE
60-011824
SHIELD,Light, R-MOD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIELD,Light, R-MOD,TP500. Compatible with THERMAWAVE equipment. Part No. 60-011824.
THERMAWAVE
60-011826
SHIELD,Light, I MOD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIELD,Light, I MOD,TP500. Compatible with THERMAWAVE equipment. Part No. 60-011826.
THERMAWAVE
60-011827
SHIELD,Light, I PROBE,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIELD,Light, I PROBE,TP500. Compatible with THERMAWAVE equipment. Part No. 60-011827.
THERMAWAVE
60-011902
FLAG,TRAVEL,LWR Limit
spare_part
High-quality nan for THERMAWAVE CMP tool. FLAG,TRAVEL,LWR Limit. Compatible with THERMAWAVE equipment. Part No. 60-011902.
THERMAWAVE
60-011903
FLAG,TRAVEL,UPR Limit
spare_part
High-quality nan for THERMAWAVE CMP tool. FLAG,TRAVEL,UPR Limit. Compatible with THERMAWAVE equipment. Part No. 60-011903.
THERMAWAVE
60-012912
HSG,Aperture PMT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,Aperture PMT,UV. Compatible with THERMAWAVE equipment. Part No. 60-012912.
THERMAWAVE
60-012913
HSG,Aperture,.6MM,PMT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,Aperture,.6MM,PMT,UV. Compatible with THERMAWAVE equipment. Part No. 60-012913.
THERMAWAVE
60-012915
HSG,Aperture,.225MM,PMT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,Aperture,.225MM,PMT,UV. Compatible with THERMAWAVE equipment. Part No. 60-012915.
THERMAWAVE
60-013298
PNL, Top, Meas Mod, BH
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL, Top, Meas Mod, BH. Compatible with THERMAWAVE equipment. Part No. 60-013298.
THERMAWAVE
60-013638
Panel,REAR,WHM,SMIF\UVI
spare_part
High-quality nan for THERMAWAVE CMP tool. Panel,REAR,WHM,SMIF\UVI. Compatible with THERMAWAVE equipment. Part No. 60-013638.
THERMAWAVE
60-013664
SHIELD,EMO Switch,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. SHIELD,EMO Switch,BH. Compatible with THERMAWAVE equipment. Part No. 60-013664.
THERMAWAVE
60-013987
FLAG,PIVOT,SENSOR TRIP,MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. FLAG,PIVOT,SENSOR TRIP,MOD. Compatible with THERMAWAVE equipment. Part No. 60-013987.
THERMAWAVE
60-015193
BOX Assembly,110/220VAC,OP2600I
spare_part
High-quality nan for THERMAWAVE CMP tool. BOX Assembly,110/220VAC,OP2600I. Compatible with THERMAWAVE equipment. Part No. 60-015193.
THERMAWAVE
60-015271
CVR,DETECTOR A,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,DETECTOR A,P34. Compatible with THERMAWAVE equipment. Part No. 60-015271.
THERMAWAVE
60-015277
CVR,DETECTOR B,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,DETECTOR B,P34. Compatible with THERMAWAVE equipment. Part No. 60-015277.
THERMAWAVE
60-015397
PNL,SWITCH,FRONT
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,SWITCH,FRONT. Compatible with THERMAWAVE equipment. Part No. 60-015397.
THERMAWAVE
60-015713
PNL,CONTROLLER REAR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,CONTROLLER REAR,P34. Compatible with THERMAWAVE equipment. Part No. 60-015713.
THERMAWAVE
60-015906
HSG,AMPLIFIER SERVO,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,AMPLIFIER SERVO,TP500. Compatible with THERMAWAVE equipment. Part No. 60-015906.
THERMAWAVE
60-016016
CVR,APT MIRROR,WL SPEC
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,APT MIRROR,WL SPEC. Compatible with THERMAWAVE equipment. Part No. 60-016016.
THERMAWAVE
60-016055
CVR,GRATING,WL-SPCTR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,GRATING,WL-SPCTR,P34. Compatible with THERMAWAVE equipment. Part No. 60-016055.
THERMAWAVE
60-016229
INDEXER Kit, ENCLOSURE 150/200
spare_part
High-quality nan for THERMAWAVE CMP tool. INDEXER Kit, ENCLOSURE 150/200. Compatible with THERMAWAVE equipment. Part No. 60-016229.
THERMAWAVE
60-016244
ENCLOSURE,FRONT CVR,INDEXER
spare_part
High-quality nan for THERMAWAVE CMP tool. ENCLOSURE,FRONT CVR,INDEXER. Compatible with THERMAWAVE equipment. Part No. 60-016244.
THERMAWAVE
60-016504
HSG, Spring, Turn, Mirror, TP
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG, Spring, Turn, Mirror, TP. Compatible with THERMAWAVE equipment. Part No. 60-016504.
THERMAWAVE
60-017674
COLLAR,LENS,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. COLLAR,LENS,OP2600B. Compatible with THERMAWAVE equipment. Part No. 60-017674.
THERMAWAVE
60-019399
DIFFUSER ASSY,6IN,THIN OXIDE
spare_part
High-quality nan for THERMAWAVE CMP tool. DIFFUSER ASSY,6IN,THIN OXIDE. Compatible with THERMAWAVE equipment. Part No. 60-019399.
THERMAWAVE
60-020944
CVR,WHT LT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,WHT LT,P34. Compatible with THERMAWAVE equipment. Part No. 60-020944.
THERMAWAVE
60-021236
CVR,HOME SENSOR,RTRY,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,HOME SENSOR,RTRY,OP. Compatible with THERMAWAVE equipment. Part No. 60-021236.
THERMAWAVE
60-021298
HSG,LINK,AF LENS EXCH,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. HSG,LINK,AF LENS EXCH,P34. Compatible with THERMAWAVE equipment. Part No. 60-021298.
THERMAWAVE
60-021738
Cover, Louver, Quadbar, Indexer
spare_part
High-quality nan for THERMAWAVE CMP tool. Cover, Louver, Quadbar, Indexer. Compatible with THERMAWAVE equipment. Part No. 60-021738.
THERMAWAVE
60-021763
CVR,TRACKBALL,OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TRACKBALL,OP3290. Compatible with THERMAWAVE equipment. Part No. 60-021763.
THERMAWAVE
60-022121
CVR,PLC,SLOT
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,PLC,SLOT. Compatible with THERMAWAVE equipment. Part No. 60-022121.
THERMAWAVE
60-022992
CVR,KEEPER,NT,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,KEEPER,NT,300MM. Compatible with THERMAWAVE equipment. Part No. 60-022992.
THERMAWAVE
60-023008
Cover, Shipping, Diode, Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Cover, Shipping, Diode, Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 60-023008.
THERMAWAVE
60-023209
WINDOW,DIV,BHD,NT,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WINDOW,DIV,BHD,NT,300MM. Compatible with THERMAWAVE equipment. Part No. 60-023209.
THERMAWAVE
60-023242
Cover, Fiber Laser, CA, OP3XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Cover, Fiber Laser, CA, OP3XXX. Compatible with THERMAWAVE equipment. Part No. 60-023242.
THERMAWAVE
60-024624
Ina.Door,Wafers,Pass-Thru,T41 repl. by 60-144535
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Door,Wafers,Pass-Thru,T41 repl. by 60-144535. Compatible with THERMAWAVE equipment. Part No. 60-024624.
THERMAWAVE
60-025396
PNL,INTFC,LVR,300MM,ME
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,INTFC,LVR,300MM,ME. Compatible with THERMAWAVE equipment. Part No. 60-025396.
THERMAWAVE
60-025400
TUBE,COOLING W/FTG,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. TUBE,COOLING W/FTG,UV. Compatible with THERMAWAVE equipment. Part No. 60-025400.
THERMAWAVE
60-025544
EG,SHIELD,3FT,GOLD,T8,505NM
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,SHIELD,3FT,GOLD,T8,505NM. Compatible with THERMAWAVE equipment. Part No. 60-025544.
THERMAWAVE
60-030850
CVR,TOP,REAR,MID,HTR,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TOP,REAR,MID,HTR,DES. Compatible with THERMAWAVE equipment. Part No. 60-030850.
THERMAWAVE
60-030851
CVR,TOP,REAR,MID,HTR,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TOP,REAR,MID,HTR,DES. Compatible with THERMAWAVE equipment. Part No. 60-030851.
THERMAWAVE
60-030852
CVR,TOP,REAR,RT,HTR,DES
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,TOP,REAR,RT,HTR,DES. Compatible with THERMAWAVE equipment. Part No. 60-030852.
THERMAWAVE
60-031107
PNL, R Vent, I/O, SPT-FRM, DC
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL, R Vent, I/O, SPT-FRM, DC. Compatible with THERMAWAVE equipment. Part No. 60-031107.
THERMAWAVE
60-144227
CVR,QTZ,300MM LFT PIN EFD
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,QTZ,300MM LFT PIN EFD. Compatible with THERMAWAVE equipment. Part No. 60-144227.
THERMAWAVE
60-144246
CLAM SHELL,200MM,SINGLE WFR
spare_part
High-quality nan for THERMAWAVE CMP tool. CLAM SHELL,200MM,SINGLE WFR. Compatible with THERMAWAVE equipment. Part No. 60-144246.
THERMAWAVE
60-144322
PNL,FRNT,TOP,300MM,ME,W/EMO
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,FRNT,TOP,300MM,ME,W/EMO. Compatible with THERMAWAVE equipment. Part No. 60-144322.
THERMAWAVE
60-144352
EG,SKIRT,SAFETY,LP S3
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,SKIRT,SAFETY,LP S3. Compatible with THERMAWAVE equipment. Part No. 60-144352.
THERMAWAVE
60-144365
EG, CVR, UTILITY
spare_part
High-quality nan for THERMAWAVE CMP tool. EG, CVR, UTILITY. Compatible with THERMAWAVE equipment. Part No. 60-144365.
THERMAWAVE
60-144408
CVR,VAC,OUTER GROOVES
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,VAC,OUTER GROOVES. Compatible with THERMAWAVE equipment. Part No. 60-144408.
THERMAWAVE
60-144562
CVR,S2 LP, 200MM ADPT
spare_part
High-quality nan for THERMAWAVE CMP tool. CVR,S2 LP, 200MM ADPT. Compatible with THERMAWAVE equipment. Part No. 60-144562.
THERMAWAVE
60-144563
PNL,REAR,LVR
spare_part
High-quality nan for THERMAWAVE CMP tool. PNL,REAR,LVR. Compatible with THERMAWAVE equipment. Part No. 60-144563.
THERMAWAVE
61-003466
Kit, Laser Filter
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Laser Filter. Compatible with THERMAWAVE equipment. Part No. 61-003466.
THERMAWAVE
61-003471
Kit, ThermoCOUPLE
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, ThermoCOUPLE. Compatible with THERMAWAVE equipment. Part No. 61-003471.
THERMAWAVE
61-003479
Kit, CLEANING,FLOPPY DISK HD
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, CLEANING,FLOPPY DISK HD. Compatible with THERMAWAVE equipment. Part No. 61-003479.
THERMAWAVE
61-003640
Kit, Tooling,123PC,BETA
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,123PC,BETA. Compatible with THERMAWAVE equipment. Part No. 61-003640.
THERMAWAVE
61-003796
Kit, FAN,TUBEAXIAL,60HZ
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, FAN,TUBEAXIAL,60HZ. Compatible with THERMAWAVE equipment. Part No. 61-003796.
THERMAWAVE
61-003797
Kit, FAN,TUBEAXIAL,50HZ
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, FAN,TUBEAXIAL,50HZ. Compatible with THERMAWAVE equipment. Part No. 61-003797.
THERMAWAVE
61-004148
Kit, GPIB Opticion,TP300
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, GPIB Opticion,TP300. Compatible with THERMAWAVE equipment. Part No. 61-004148.
THERMAWAVE
61-004184
Kit, Tooling,Robot Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,Robot Alignment. Compatible with THERMAWAVE equipment. Part No. 61-004184.
THERMAWAVE
61-004192
Kit, Upgrade,EXTERNAL Video
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,EXTERNAL Video. Compatible with THERMAWAVE equipment. Part No. 61-004192.
THERMAWAVE
61-004311
Kit, Cable,WAuto FocusER HANDLER
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Cable,WAuto FocusER HANDLER. Compatible with THERMAWAVE equipment. Part No. 61-004311.
THERMAWAVE
61-004867
Kit, SECS II Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SECS II Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-004867.
THERMAWAVE
61-005033
Kit, HARDWARE,PADDLE ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, HARDWARE,PADDLE ADJ. Compatible with THERMAWAVE equipment. Part No. 61-005033.
THERMAWAVE
61-005078
Kit, PORT RF VOLTMeter
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, PORT RF VOLTMeter. Compatible with THERMAWAVE equipment. Part No. 61-005078.
THERMAWAVE
61-005352
Kit, Tooling,20 TO 80 Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,20 TO 80 Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-005352.
THERMAWAVE
61-005448
Kit, CONV,20 TO 80 Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, CONV,20 TO 80 Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-005448.
THERMAWAVE
61-005778
Kit, Hene Laser,MG/SPECTRA
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Hene Laser,MG/SPECTRA. Compatible with THERMAWAVE equipment. Part No. 61-005778.
THERMAWAVE
61-006632
Kit, Upgrade,2MEG MEMORY
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,2MEG MEMORY. Compatible with THERMAWAVE equipment. Part No. 61-006632.
THERMAWAVE
61-007674
Kit, Upgrade,AUTOFOCUS,MKIII,I19
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,AUTOFOCUS,MKIII,I19. Compatible with THERMAWAVE equipment. Part No. 61-007674.
THERMAWAVE
61-007683
Kit, ETHERNET,SYStandardEM
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, ETHERNET,SYStandardEM. Compatible with THERMAWAVE equipment. Part No. 61-007683.
THERMAWAVE
61-007718
Kit, Upgrade,DCRMOD
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,DCRMOD. Compatible with THERMAWAVE equipment. Part No. 61-007718.
THERMAWAVE
61-007813
Kit, SHIP,Robot,Standard 64DEG
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SHIP,Robot,Standard 64DEG. Compatible with THERMAWAVE equipment. Part No. 61-007813.
THERMAWAVE
61-007814
Kit, SHIP,Robot,PRE 64DEG
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SHIP,Robot,PRE 64DEG. Compatible with THERMAWAVE equipment. Part No. 61-007814.
THERMAWAVE
61-007815
Kit, SHIP,Robot,Standard SGLPAD
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SHIP,Robot,Standard SGLPAD. Compatible with THERMAWAVE equipment. Part No. 61-007815.
THERMAWAVE
61-007816
Kit, SHIP,Robot,PRE SGLPAD
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SHIP,Robot,PRE SGLPAD. Compatible with THERMAWAVE equipment. Part No. 61-007816.
THERMAWAVE
61-008124
Kit, Tooling,Optici-Probe SupportP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,Optici-Probe SupportP. Compatible with THERMAWAVE equipment. Part No. 61-008124.
THERMAWAVE
61-008241
Kit, Retrofit,OMNICHROME,I19
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,OMNICHROME,I19. Compatible with THERMAWAVE equipment. Part No. 61-008241.
THERMAWAVE
61-008603
OBS,Kit, SPARES,SITE SupportPORT,P2
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,Kit, SPARES,SITE SupportPORT,P2. Compatible with THERMAWAVE equipment. Part No. 61-008603.
THERMAWAVE
61-008609
Kit, Upgrade,CPU CARDCAGE
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,CPU CARDCAGE. Compatible with THERMAWAVE equipment. Part No. 61-008609.
THERMAWAVE
61-008625
Kit, SECSII,TP400 Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SECSII,TP400 Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-008625.
THERMAWAVE
61-008803
Kit, Consumable,TP400XP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable,TP400XP. Compatible with THERMAWAVE equipment. Part No. 61-008803.
THERMAWAVE
61-008830
Kit, Upgrade,Camera,4812-4912
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,Camera,4812-4912. Compatible with THERMAWAVE equipment. Part No. 61-008830.
THERMAWAVE
61-008856
Kit, Upgrade,IMAGER,100X
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,IMAGER,100X. Compatible with THERMAWAVE equipment. Part No. 61-008856.
THERMAWAVE
61-008904
Kit, BLUE TOPO Retrofit
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, BLUE TOPO Retrofit. Compatible with THERMAWAVE equipment. Part No. 61-008904.
THERMAWAVE
61-008955
Kit, SECSII Opticion,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SECSII Opticion,P20. Compatible with THERMAWAVE equipment. Part No. 61-008955.
THERMAWAVE
61-009100
Kit, LEVEL I SPARES,TP400XP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, LEVEL I SPARES,TP400XP. Compatible with THERMAWAVE equipment. Part No. 61-009100.
THERMAWAVE
61-009101
Kit, LEVEL II SPARES,TP400XP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, LEVEL II SPARES,TP400XP. Compatible with THERMAWAVE equipment. Part No. 61-009101.
THERMAWAVE
61-009109
Kit, BLWR,CNFGL,60HZ,115V
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, BLWR,CNFGL,60HZ,115V. Compatible with THERMAWAVE equipment. Part No. 61-009109.
THERMAWAVE
61-009398
Kit, ESD Retrofit,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, ESD Retrofit,P20. Compatible with THERMAWAVE equipment. Part No. 61-009398.
THERMAWAVE
61-009788
Kit, BLWR,CNFGL,60HZ,220V
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, BLWR,CNFGL,60HZ,220V. Compatible with THERMAWAVE equipment. Part No. 61-009788.
THERMAWAVE
61-009790
Kit, BLWR,CNFGL,50HZ,220V
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, BLWR,CNFGL,50HZ,220V. Compatible with THERMAWAVE equipment. Part No. 61-009790.
THERMAWAVE
61-009848
Kit, Retrofit,OVP/Fuse, TP400
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,OVP/Fuse, TP400. Compatible with THERMAWAVE equipment. Part No. 61-009848.
THERMAWAVE
61-009900
Kit, Retrofit,LOW Power ARGON
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,LOW Power ARGON. Compatible with THERMAWAVE equipment. Part No. 61-009900.
THERMAWAVE
61-010092
Kit, Aperture,R-SPECTRO Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Aperture,R-SPECTRO Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-010092.
THERMAWAVE
61-010299
Kit, Retrofit,Laser,UNIPHASE
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,Laser,UNIPHASE. Compatible with THERMAWAVE equipment. Part No. 61-010299.
THERMAWAVE
61-010400
Kit, SHIP,AUTO LOAD,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SHIP,AUTO LOAD,TP420. Compatible with THERMAWAVE equipment. Part No. 61-010400.
THERMAWAVE
61-010438
Kit, Field Upgrade,TP400/TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Field Upgrade,TP400/TP420. Compatible with THERMAWAVE equipment. Part No. 61-010438.
THERMAWAVE
61-010499
Kit, VGA PCB,Field Retrofit,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, VGA PCB,Field Retrofit,OP. Compatible with THERMAWAVE equipment. Part No. 61-010499.
THERMAWAVE
61-010758
Kit, SCW CLAMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SCW CLAMP. Compatible with THERMAWAVE equipment. Part No. 61-010758.
THERMAWAVE
61-010761
Kit, Opticion,GEM/SECS,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Opticion,GEM/SECS,TP420. Compatible with THERMAWAVE equipment. Part No. 61-010761.
THERMAWAVE
61-010875
Kit, Upgrade,UNIPHASE Laser,I15
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,UNIPHASE Laser,I15. Compatible with THERMAWAVE equipment. Part No. 61-010875.
THERMAWAVE
61-010889
Array Spectrometer Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Array Spectrometer Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-010889.
THERMAWAVE
61-011217
Kit, Vacuum Upgrade
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Vacuum Upgrade. Compatible with THERMAWAVE equipment. Part No. 61-011217.
THERMAWAVE
61-011248
OP2600 Site Support Spares Kit
spare_part
High-quality nan for THERMAWAVE CMP tool. OP2600 Site Support Spares Kit. Compatible with THERMAWAVE equipment. Part No. 61-011248.
THERMAWAVE
61-011975
Kit, NITROGEN PURGE,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, NITROGEN PURGE,OP. Compatible with THERMAWAVE equipment. Part No. 61-011975.
THERMAWAVE
61-012179
OBS,KIT,LIGHT PEN PCB REPLCMNT
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,KIT,LIGHT PEN PCB REPLCMNT. Compatible with THERMAWAVE equipment. Part No. 61-012179.
THERMAWAVE
61-012592
Kit, Vacuum Switch Assembly,145IN WC
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Vacuum Switch Assembly,145IN WC. Compatible with THERMAWAVE equipment. Part No. 61-012592.
THERMAWAVE
61-012859
Kit, Upgrade,OP,2.03
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,OP,2.03. Compatible with THERMAWAVE equipment. Part No. 61-012859.
THERMAWAVE
61-013283
Kit, Motor Assembly,THETA
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Motor Assembly,THETA. Compatible with THERMAWAVE equipment. Part No. 61-013283.
THERMAWAVE
61-013284
Kit, Motor Assembly,X/Y
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Motor Assembly,X/Y. Compatible with THERMAWAVE equipment. Part No. 61-013284.
THERMAWAVE
61-013339
Kit, StandardREAMING TAPE REPLACEMENT
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, StandardREAMING TAPE REPLACEMENT. Compatible with THERMAWAVE equipment. Part No. 61-013339.
THERMAWAVE
61-013497
Monochrome Video Printer
spare_part
High-quality nan for THERMAWAVE CMP tool. Monochrome Video Printer. Compatible with THERMAWAVE equipment. Part No. 61-013497.
THERMAWAVE
61-013589
Kit, Upgrade,CPU PENTIUM 120MHZ,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,CPU PENTIUM 120MHZ,OP. Compatible with THERMAWAVE equipment. Part No. 61-013589.
THERMAWAVE
61-013605
TP500 Site Support Spares Kit
spare_part
High-quality nan for THERMAWAVE CMP tool. TP500 Site Support Spares Kit. Compatible with THERMAWAVE equipment. Part No. 61-013605.
THERMAWAVE
61-013606
Level I Consumables, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Level I Consumables, TP500. Compatible with THERMAWAVE equipment. Part No. 61-013606.
THERMAWAVE
61-013655
Kit, OpticICS PL Align, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, OpticICS PL Align, TP500. Compatible with THERMAWAVE equipment. Part No. 61-013655.
THERMAWAVE
61-013668
KIT,INSTALL VIDEO BLSTR SE100
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,INSTALL VIDEO BLSTR SE100. Compatible with THERMAWAVE equipment. Part No. 61-013668.
THERMAWAVE
61-013837
Kit, Retrofit,AOM Assembly,HSG,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,AOM Assembly,HSG,TP. Compatible with THERMAWAVE equipment. Part No. 61-013837.
THERMAWAVE
61-013888
Kit, Upgrade,THETA W/OpticO
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,THETA W/OpticO. Compatible with THERMAWAVE equipment. Part No. 61-013888.
THERMAWAVE
61-014065
Kit, TP420 Software,6.03A REL
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, TP420 Software,6.03A REL. Compatible with THERMAWAVE equipment. Part No. 61-014065.
THERMAWAVE
61-014191
Kit, Controller,Robot,ESC200
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Controller,Robot,ESC200. Compatible with THERMAWAVE equipment. Part No. 61-014191.
THERMAWAVE
61-014191
Kit, Controller,Robot,ESC200
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Controller,Robot,ESC200. Compatible with THERMAWAVE equipment. Part No. 61-014191.
THERMAWAVE
61-014334
4 Color Signal Light Tower, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. 4 Color Signal Light Tower, TP500. Compatible with THERMAWAVE equipment. Part No. 61-014334.
THERMAWAVE
61-014458
Kit, Opticion,GEM/SECS,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Opticion,GEM/SECS,TP500. Compatible with THERMAWAVE equipment. Part No. 61-014458.
THERMAWAVE
61-014608
Kit, Tooling,REGIONAL,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,REGIONAL,OP2600. Compatible with THERMAWAVE equipment. Part No. 61-014608.
THERMAWAVE
61-014733
Kit, Opticion,MICRO ENVIR,220V
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Opticion,MICRO ENVIR,220V. Compatible with THERMAWAVE equipment. Part No. 61-014733.
THERMAWAVE
61-014744
Kit, OP Software,2.04D REL
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, OP Software,2.04D REL. Compatible with THERMAWAVE equipment. Part No. 61-014744.
THERMAWAVE
61-014800
Kit, OpticionS,GLASS CHUCK
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, OpticionS,GLASS CHUCK. Compatible with THERMAWAVE equipment. Part No. 61-014800.
High-quality nan for THERMAWAVE CMP tool. Obs. Kit, SITE,Field Service,ToolingS&TEStandard EQU. Compatible with THERMAWAVE equipment. Part No. 61-014970.
THERMAWAVE
61-014971
Kit, Tooling,DUV SupportPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,DUV SupportPORT. Compatible with THERMAWAVE equipment. Part No. 61-014971.
THERMAWAVE
61-014972
Obs. Kit, Tooling,TPXP SupportPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Kit, Tooling,TPXP SupportPORT. Compatible with THERMAWAVE equipment. Part No. 61-014972.
THERMAWAVE
61-014973
Kit, Optic Align, TP/IMG
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Optic Align, TP/IMG. Compatible with THERMAWAVE equipment. Part No. 61-014973.
THERMAWAVE
61-014974
Kit, Tooling,OP SupportPORT
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Tooling,OP SupportPORT. Compatible with THERMAWAVE equipment. Part No. 61-014974.
THERMAWAVE
61-015456
Kit, Micro Environment, Spares, 110V
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Micro Environment, Spares, 110V. Compatible with THERMAWAVE equipment. Part No. 61-015456.
THERMAWAVE
61-015527
TP500 Consumables Spares Kit, Level 2
spare_part
High-quality nan for THERMAWAVE CMP tool. TP500 Consumables Spares Kit, Level 2. Compatible with THERMAWAVE equipment. Part No. 61-015527.
THERMAWAVE
61-015528
KIT,CONSUMABLE,LVL2,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,CONSUMABLE,LVL2,OP2600. Compatible with THERMAWAVE equipment. Part No. 61-015528.
THERMAWAVE
61-015530
Kit, Upgrade,Cable/CON,StandardG,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,Cable/CON,StandardG,OP. Compatible with THERMAWAVE equipment. Part No. 61-015530.
THERMAWAVE
61-015559
Kit, Vacuum Switch Assembly,200IN WC
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Vacuum Switch Assembly,200IN WC. Compatible with THERMAWAVE equipment. Part No. 61-015559.
THERMAWAVE
61-015616
Kit, Driver,REMOVABLE,INStandardALL,M
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Driver,REMOVABLE,INStandardALL,M. Compatible with THERMAWAVE equipment. Part No. 61-015616.
THERMAWAVE
61-015689
Kit, Retrofit,AMP,SRV Assembly,3AXS
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit,AMP,SRV Assembly,3AXS. Compatible with THERMAWAVE equipment. Part No. 61-015689.
THERMAWAVE
61-016089
Kit, Bracket,HOLD TRACKER,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Bracket,HOLD TRACKER,TP500. Compatible with THERMAWAVE equipment. Part No. 61-016089.
THERMAWAVE
61-016254
Japanese Safety
spare_part
High-quality nan for THERMAWAVE CMP tool. Japanese Safety. Compatible with THERMAWAVE equipment. Part No. 61-016254.
THERMAWAVE
61-016534
Kit, Upgrade,INDEXER,Laser SAuto Focus Label
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,INDEXER,Laser SAuto Focus Label. Compatible with THERMAWAVE equipment. Part No. 61-016534.
THERMAWAVE
61-016708
Kit, Option, 3" Chuck
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Option, 3" Chuck. Compatible with THERMAWAVE equipment. Part No. 61-016708.
THERMAWAVE
61-017133
Kit, Software,TP500,MMS,1.1C,REL
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Software,TP500,MMS,1.1C,REL. Compatible with THERMAWAVE equipment. Part No. 61-017133.
THERMAWAVE
61-018780
Kit, HARDWARE,TURBO,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, HARDWARE,TURBO,OP2600B. Compatible with THERMAWAVE equipment. Part No. 61-018780.
THERMAWAVE
61-018795
Kit, Upgrade,Vacuum,REF ENCL
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,Vacuum,REF ENCL. Compatible with THERMAWAVE equipment. Part No. 61-018795.
THERMAWAVE
61-018882
KIT,IONIZER,.MINI-ENVIR
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,IONIZER,.MINI-ENVIR. Compatible with THERMAWAVE equipment. Part No. 61-018882.
THERMAWAVE
61-019246
Kit, Field Upgrade,Monitor,TP/OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Field Upgrade,Monitor,TP/OP. Compatible with THERMAWAVE equipment. Part No. 61-019246.
THERMAWAVE
61-019251
Kit, Option, EUV, 190nm, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Option, EUV, 190nm, OP. Compatible with THERMAWAVE equipment. Part No. 61-019251.
THERMAWAVE
61-019533
KIT,THETA MTR,NEW AMP BD,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,THETA MTR,NEW AMP BD,TP500. Compatible with THERMAWAVE equipment. Part No. 61-019533.
THERMAWAVE
61-019596
Kit, ASIAN RECEPTACLE
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, ASIAN RECEPTACLE. Compatible with THERMAWAVE equipment. Part No. 61-019596.
THERMAWAVE
61-020161
KIT,MINI-ENVIR,OP52XXI
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,MINI-ENVIR,OP52XXI. Compatible with THERMAWAVE equipment. Part No. 61-020161.
THERMAWAVE
61-020189
4 Color Signal Light Tower, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. 4 Color Signal Light Tower, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-020189.
THERMAWAVE
61-020426
Kit, Ionizer, OP52XXI
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Ionizer, OP52XXI. Compatible with THERMAWAVE equipment. Part No. 61-020426.
THERMAWAVE
61-020468
Kit, Opticical Switch,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Opticical Switch,OP2600. Compatible with THERMAWAVE equipment. Part No. 61-020468.
THERMAWAVE
61-020701
Kit, ISO Valve, Upgrade, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, ISO Valve, Upgrade, P34. Compatible with THERMAWAVE equipment. Part No. 61-020701.
THERMAWAVE
61-020806
Seismic Achor Brachets, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Seismic Achor Brachets, OP. Compatible with THERMAWAVE equipment. Part No. 61-020806.
THERMAWAVE
61-020942
D-Array Filter Upgrade Kit
spare_part
High-quality nan for THERMAWAVE CMP tool. D-Array Filter Upgrade Kit. Compatible with THERMAWAVE equipment. Part No. 61-020942.
THERMAWAVE
61-021048
KIT,UPG,DCKNG,BOLT+V-BLOCK,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,DCKNG,BOLT+V-BLOCK,P34. Compatible with THERMAWAVE equipment. Part No. 61-021048.
THERMAWAVE
61-021076
Kit, Field Service,Video TO VGA
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Field Service,Video TO VGA. Compatible with THERMAWAVE equipment. Part No. 61-021076.
THERMAWAVE
61-021089
Kit, Upgrade,NT,OP3290DUV/I
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,NT,OP3290DUV/I. Compatible with THERMAWAVE equipment. Part No. 61-021089.
THERMAWAVE
61-021122
Kit, Laser CHANGE,MELLES,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Laser CHANGE,MELLES,P34. Compatible with THERMAWAVE equipment. Part No. 61-021122.
THERMAWAVE
61-021126
Kit, Laser CHANGE,MELLES,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Laser CHANGE,MELLES,300MM. Compatible with THERMAWAVE equipment. Part No. 61-021126.
THERMAWAVE
61-021171
Kit, FLD UpgradeD,FLTR MT&WDG RINGS
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, FLD UpgradeD,FLTR MT&WDG RINGS. Compatible with THERMAWAVE equipment. Part No. 61-021171.
THERMAWAVE
61-021235
Kit, HOME SENSOR,RTRY,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, HOME SENSOR,RTRY,OP. Compatible with THERMAWAVE equipment. Part No. 61-021235.
THERMAWAVE
61-021319
Kit, Consumables, Lvl 1, TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumables, Lvl 1, TP630. Compatible with THERMAWAVE equipment. Part No. 61-021319.
THERMAWAVE
61-021327
Kit, Limit Switch, Z-Stage, OP/TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Limit Switch, Z-Stage, OP/TP. Compatible with THERMAWAVE equipment. Part No. 61-021327.
THERMAWAVE
61-021418
Kit, Option, 4 Lt Twr, OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Option, 4 Lt Twr, OP3290. Compatible with THERMAWAVE equipment. Part No. 61-021418.
THERMAWAVE
61-021420
Kit, Upgrade,BPE AIR SHIELD,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,BPE AIR SHIELD,P34. Compatible with THERMAWAVE equipment. Part No. 61-021420.
THERMAWAVE
61-021476
Kit, Field Replacement,D2 Power Supply
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Field Replacement,D2 Power Supply. Compatible with THERMAWAVE equipment. Part No. 61-021476.
THERMAWAVE
61-021564
Kit, Upgrade,Panel,Optic PL,PNEU,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,Panel,Optic PL,PNEU,P34. Compatible with THERMAWAVE equipment. Part No. 61-021564.
THERMAWAVE
61-021569
Kit, Consumable, Level 1, OP3290DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level 1, OP3290DUV. Compatible with THERMAWAVE equipment. Part No. 61-021569.
THERMAWAVE
61-021570
Kit, Site Support Spares, OP3290DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Site Support Spares, OP3290DUV. Compatible with THERMAWAVE equipment. Part No. 61-021570.
THERMAWAVE
61-021571
Kit, Site Support Spares, OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Site Support Spares, OP3290. Compatible with THERMAWAVE equipment. Part No. 61-021571.
THERMAWAVE
61-021572
Kit, Consumable, Level II, OP3290DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level II, OP3290DUV. Compatible with THERMAWAVE equipment. Part No. 61-021572.
THERMAWAVE
61-021573
Kit, Consumable, Level 1, OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level 1, OP3290. Compatible with THERMAWAVE equipment. Part No. 61-021573.
THERMAWAVE
61-021574
Kit, Consumable, Level II, OP3290
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level II, OP3290. Compatible with THERMAWAVE equipment. Part No. 61-021574.
THERMAWAVE
61-021633
Kit, Upgrade,NT,OP1600/2600/I
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,NT,OP1600/2600/I. Compatible with THERMAWAVE equipment. Part No. 61-021633.
THERMAWAVE
61-021645
Kit, Upgrade,NT,OP2600DUV/I
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,NT,OP2600DUV/I. Compatible with THERMAWAVE equipment. Part No. 61-021645.
THERMAWAVE
61-021668
Kit, Upgrade,NT,OP,LT TWR MODS
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,NT,OP,LT TWR MODS. Compatible with THERMAWAVE equipment. Part No. 61-021668.
THERMAWAVE
61-021756
Kit, RE-LAMP Switch/LAMP,52XXNON-NT
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, RE-LAMP Switch/LAMP,52XXNON-NT. Compatible with THERMAWAVE equipment. Part No. 61-021756.
THERMAWAVE
61-021778
Kit, Ionizer,QUADBAR,4630EU
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Ionizer,QUADBAR,4630EU. Compatible with THERMAWAVE equipment. Part No. 61-021778.
THERMAWAVE
61-021861
Kit, Consumable, Level I, OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level I, OP52XX. Compatible with THERMAWAVE equipment. Part No. 61-021861.
THERMAWAVE
61-021862
Kit, Consumable, Level II, OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Level II, OP52XX. Compatible with THERMAWAVE equipment. Part No. 61-021862.
THERMAWAVE
61-021876
RGB Monitor Adaptor Upgrade Kit
spare_part
High-quality nan for THERMAWAVE CMP tool. RGB Monitor Adaptor Upgrade Kit. Compatible with THERMAWAVE equipment. Part No. 61-021876.
THERMAWAVE
61-021963
Kit, Option, Robot Guard, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Option, Robot Guard, P34. Compatible with THERMAWAVE equipment. Part No. 61-021963.
THERMAWAVE
61-021974
Kit, Trackball,StandardRG HT Connector,OP/TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Trackball,StandardRG HT Connector,OP/TP. Compatible with THERMAWAVE equipment. Part No. 61-021974.
THERMAWAVE
61-021976
Kit, Upgrade,DOCK CYL,PULL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,DOCK CYL,PULL,P34. Compatible with THERMAWAVE equipment. Part No. 61-021976.
THERMAWAVE
61-022361
Kit, Printer/BUFFER,2MB
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Printer/BUFFER,2MB. Compatible with THERMAWAVE equipment. Part No. 61-022361.
THERMAWAVE
61-022362
Kit, Upgrade,JAZ BACKUP,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade,JAZ BACKUP,TP420. Compatible with THERMAWAVE equipment. Part No. 61-022362.
THERMAWAVE
61-022420
Kit, 15IN LCD REPLACE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, 15IN LCD REPLACE,P34. Compatible with THERMAWAVE equipment. Part No. 61-022420.
THERMAWAVE
61-022457
Kit, Site Support Spares, OP5210
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Site Support Spares, OP5210. Compatible with THERMAWAVE equipment. Part No. 61-022457.
THERMAWAVE
61-022458
Kit, Site Support Spares, OP5220
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Site Support Spares, OP5220. Compatible with THERMAWAVE equipment. Part No. 61-022458.
THERMAWAVE
61-022687
Kit, GO,OP5XXX/3XXX,NT (See Marketing for Quoting)
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, GO,OP5XXX/3XXX,NT (See Marketing for Quoting). Compatible with THERMAWAVE equipment. Part No. 61-022687.
THERMAWAVE
61-022924
Kit, Upgrade TO NT,GO,OP5XXX/3XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade TO NT,GO,OP5XXX/3XXX. Compatible with THERMAWAVE equipment. Part No. 61-022924.
THERMAWAVE
61-022939
Kit, NTSC/VGA, OP32XX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, NTSC/VGA, OP32XX. Compatible with THERMAWAVE equipment. Part No. 61-022939.
THERMAWAVE
61-023002
Kit, Retrofit, Fiber Laser, OP3XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit, Fiber Laser, OP3XXX. Compatible with THERMAWAVE equipment. Part No. 61-023002.
THERMAWAVE
61-023003
Kit, Retrofit, Fiber Laser, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Retrofit, Fiber Laser, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-023003.
THERMAWAVE
61-023073
OBSOLETE: Kit, Field Service,NTSC/VGA,Replacement,32
spare_part
High-quality nan for THERMAWAVE CMP tool. OBSOLETE: Kit, Field Service,NTSC/VGA,Replacement,32. Compatible with THERMAWAVE equipment. Part No. 61-023073.
THERMAWAVE
61-023131
Kit, FLDSRV,HP895 Printer Replacement
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, FLDSRV,HP895 Printer Replacement. Compatible with THERMAWAVE equipment. Part No. 61-023131.
THERMAWAVE
61-023187
Kit, SE Upgrade, Drift Correction, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, SE Upgrade, Drift Correction, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-023187.
THERMAWAVE
61-023190
KIT,FLDSRV,BUFFER,NT UPG
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FLDSRV,BUFFER,NT UPG. Compatible with THERMAWAVE equipment. Part No. 61-023190.
THERMAWAVE
61-023192
Kit, Monitor, High Resolution, Upgrade, TP/OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Monitor, High Resolution, Upgrade, TP/OP. Compatible with THERMAWAVE equipment. Part No. 61-023192.
THERMAWAVE
61-023193
KIT,MON,HIGH RES UPG,OP52XX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,MON,HIGH RES UPG,OP52XX. Compatible with THERMAWAVE equipment. Part No. 61-023193.
THERMAWAVE
61-023238
Kit, Filtration, D2 Cooling, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Filtration, D2 Cooling, P34. Compatible with THERMAWAVE equipment. Part No. 61-023238.
THERMAWAVE
61-023271
Kit, Motor, Stage, X/Y, TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Motor, Stage, X/Y, TP500. Compatible with THERMAWAVE equipment. Part No. 61-023271.
THERMAWAVE
61-023421
KIT,ASTEC PS,WHT LT,BULK RETRO
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ASTEC PS,WHT LT,BULK RETRO. Compatible with THERMAWAVE equipment. Part No. 61-023421.
THERMAWAVE
61-023435
KIT,ASTEC PS,WHT LT,32XX,RE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ASTEC PS,WHT LT,32XX,RE. Compatible with THERMAWAVE equipment. Part No. 61-023435.
THERMAWAVE
61-023436
KIT,ASTEC PS,WHT LT,DUVI,RE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ASTEC PS,WHT LT,DUVI,RE. Compatible with THERMAWAVE equipment. Part No. 61-023436.
THERMAWAVE
61-023442
KIT, W/L ASSY,32XX,FLDSVC,RE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, W/L ASSY,32XX,FLDSVC,RE. Compatible with THERMAWAVE equipment. Part No. 61-023442.
THERMAWAVE
61-023467
KIT,ACCESS,PRTR,HP950 SERIES
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ACCESS,PRTR,HP950 SERIES. Compatible with THERMAWAVE equipment. Part No. 61-023467.
THERMAWAVE
61-023485
SF,KIT,INST,VANE SW MON
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,KIT,INST,VANE SW MON. Compatible with THERMAWAVE equipment. Part No. 61-023485.
THERMAWAVE
61-023710
Kit, Upgrade, Jaz Backup Drive, OP26
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade, Jaz Backup Drive, OP26. Compatible with THERMAWAVE equipment. Part No. 61-023710.
THERMAWAVE
61-023712
Kit, Upgrade, Jaz Backup Drive, OP32
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Upgrade, Jaz Backup Drive, OP32. Compatible with THERMAWAVE equipment. Part No. 61-023712.
THERMAWAVE
61-024572
SF, Kit,UPG,745I Camera
spare_part
High-quality nan for THERMAWAVE CMP tool. SF, Kit,UPG,745I Camera. Compatible with THERMAWAVE equipment. Part No. 61-024572.
THERMAWAVE
61-025395
KIT,RETRO,PRTCL CNTRL,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,RETRO,PRTCL CNTRL,300MM. Compatible with THERMAWAVE equipment. Part No. 61-025395.
THERMAWAVE
61-025546
KIT, CID, OMRON, 300FL, Asyst
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, CID, OMRON, 300FL, Asyst. Compatible with THERMAWAVE equipment. Part No. 61-025546.
THERMAWAVE
61-025706
Kit, Consumable, Lvl 1
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Consumable, Lvl 1. Compatible with THERMAWAVE equipment. Part No. 61-025706.
THERMAWAVE
61-026109
Kit, Prtcl Cntrl HW, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Prtcl Cntrl HW, P34. Compatible with THERMAWAVE equipment. Part No. 61-026109.
THERMAWAVE
61-026889
KIT,JAPANESE,SAFETY,OP52XXI
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,JAPANESE,SAFETY,OP52XXI. Compatible with THERMAWAVE equipment. Part No. 61-026889.
THERMAWAVE
61-026959
Kit,UPG,450MHZ,128MB
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit,UPG,450MHZ,128MB. Compatible with THERMAWAVE equipment. Part No. 61-026959.
THERMAWAVE
61-027357
SF,KIT,S2,SFTY,200MM,ADPTR
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,KIT,S2,SFTY,200MM,ADPTR. Compatible with THERMAWAVE equipment. Part No. 61-027357.
THERMAWAVE
61-027380
KIT, TOOLS, WBWS
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, TOOLS, WBWS. Compatible with THERMAWAVE equipment. Part No. 61-027380.
THERMAWAVE
61-027535
KIT,RETROFIT,JPN SFTY
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,RETROFIT,JPN SFTY. Compatible with THERMAWAVE equipment. Part No. 61-027535.
THERMAWAVE
61-027674
KIT,BULB ASSY,UV,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,BULB ASSY,UV,P34. Compatible with THERMAWAVE equipment. Part No. 61-027674.
THERMAWAVE
61-028150
KIT,UV AIR FILTER,OP52/53XX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UV AIR FILTER,OP52/53XX. Compatible with THERMAWAVE equipment. Part No. 61-028150.
THERMAWAVE
61-028938
KIT,UPG,HENE LASER,AC/DC
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,HENE LASER,AC/DC. Compatible with THERMAWAVE equipment. Part No. 61-028938.
THERMAWAVE
61-029289
KIT,PNL,BLOCK-OFF,LOAD PORT
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,PNL,BLOCK-OFF,LOAD PORT. Compatible with THERMAWAVE equipment. Part No. 61-029289.
THERMAWAVE
61-029536
SF,KIT,150mm WFR,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,KIT,150mm WFR,TP500. Compatible with THERMAWAVE equipment. Part No. 61-029536.
THERMAWAVE
61-029649
KIT,UPG,700MHZ CPU,OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,700MHZ CPU,OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-029649.
THERMAWAVE
61-029691
KIT,UPG,BACK SIDE CONT,200M
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,BACK SIDE CONT,200M. Compatible with THERMAWAVE equipment. Part No. 61-029691.
THERMAWAVE
61-029791
SF,KIT,300MM WFR,WBWS
spare_part
High-quality nan for THERMAWAVE CMP tool. SF,KIT,300MM WFR,WBWS. Compatible with THERMAWAVE equipment. Part No. 61-029791.
THERMAWAVE
61-029867
KIT,RETROFIT,JAZ DRIVE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,RETROFIT,JAZ DRIVE. Compatible with THERMAWAVE equipment. Part No. 61-029867.
THERMAWAVE
61-030046
KIT, DOOR UPGRADE, TP500I
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, DOOR UPGRADE, TP500I. Compatible with THERMAWAVE equipment. Part No. 61-030046.
THERMAWAVE
61-030056
KIT,ROBOT,DUAL ARM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ROBOT,DUAL ARM. Compatible with THERMAWAVE equipment. Part No. 61-030056.
THERMAWAVE
61-030230
KIT,ROBOT,CONTROLLER
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ROBOT,CONTROLLER. Compatible with THERMAWAVE equipment. Part No. 61-030230.
THERMAWAVE
61-030231
KIT,EFFECTOR,END,TOP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,EFFECTOR,END,TOP. Compatible with THERMAWAVE equipment. Part No. 61-030231.
THERMAWAVE
61-030232
Ina,KIT,EFFECTOR,End,Bottom
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,KIT,EFFECTOR,End,Bottom. Compatible with THERMAWAVE equipment. Part No. 61-030232.
THERMAWAVE
61-030548
KIT,PRTCL,CNTRL,NO REAR UI
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,PRTCL,CNTRL,NO REAR UI. Compatible with THERMAWAVE equipment. Part No. 61-030548.
THERMAWAVE
61-030810
KIT,CONSUMABLE,OP734X
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,CONSUMABLE,OP734X. Compatible with THERMAWAVE equipment. Part No. 61-030810.
THERMAWAVE
61-031132
KIT,TOOL,DIFF PRESSURE GAGE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,TOOL,DIFF PRESSURE GAGE. Compatible with THERMAWAVE equipment. Part No. 61-031132.
THERMAWAVE
61-031168
KIT,UV AIR,FIELD UPG
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UV AIR,FIELD UPG. Compatible with THERMAWAVE equipment. Part No. 61-031168.
THERMAWAVE
61-031447
KIT,VACUUM UPG,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,VACUUM UPG,300MM. Compatible with THERMAWAVE equipment. Part No. 61-031447.
THERMAWAVE
61-031577
SEE Prod. mangr.notes before ordering - Kit,upg,pc card dr,PCMCIA
spare_part
High-quality nan for THERMAWAVE CMP tool. SEE Prod. mangr.notes before ordering - Kit,upg,pc card dr,PCMCIA. Compatible with THERMAWAVE equipment. Part No. 61-031577.
THERMAWAVE
61-112546
KIT,OPTION,PEEK CASS KA202-80S
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,OPTION,PEEK CASS KA202-80S. Compatible with THERMAWAVE equipment. Part No. 61-112546.
THERMAWAVE
61-112889
KIT,FLD,NTSC-VGA CONV REPL
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FLD,NTSC-VGA CONV REPL. Compatible with THERMAWAVE equipment. Part No. 61-112889.
THERMAWAVE
61-136945
KIT,MFG,SW,TWMOTN,3.0.2.0
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,MFG,SW,TWMOTN,3.0.2.0. Compatible with THERMAWAVE equipment. Part No. 61-136945.
THERMAWAVE
61-136945.1
KIT,UPG,SW,TWMOTN,3.0.2.0
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,SW,TWMOTN,3.0.2.0. Compatible with THERMAWAVE equipment. Part No. 61-136945.1.
THERMAWAVE
61-153574
KIT,OPN,TIMBRE,INTEG,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,OPN,TIMBRE,INTEG,300MM. Compatible with THERMAWAVE equipment. Part No. 61-153574.
THERMAWAVE
61-153613
KIT,PADDLES,THIN,EFD,12.75
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,PADDLES,THIN,EFD,12.75. Compatible with THERMAWAVE equipment. Part No. 61-153613.
THERMAWAVE
61-153615
Ina, KIT,ROBOT,DUAL ARM, SCARA repl. by 61-153751
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, KIT,ROBOT,DUAL ARM, SCARA repl. by 61-153751. Compatible with THERMAWAVE equipment. Part No. 61-153615.
THERMAWAVE
61-153656
KIT,UPG,SCSI SUBSYSTEM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,SCSI SUBSYSTEM. Compatible with THERMAWAVE equipment. Part No. 61-153656.
THERMAWAVE
61-153664
Ina. KIT,LT TWR ENABLE,DL205TYPE repl. by 61-154000
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina. KIT,LT TWR ENABLE,DL205TYPE repl. by 61-154000. Compatible with THERMAWAVE equipment. Part No. 61-153664.
THERMAWAVE
61-153674
KIT,CABLE,STG AND CHK,GND
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,CABLE,STG AND CHK,GND. Compatible with THERMAWAVE equipment. Part No. 61-153674.
THERMAWAVE
61-153707
KIT,UPG,HDW RELIABLTY,3OOMM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,HDW RELIABLTY,3OOMM. Compatible with THERMAWAVE equipment. Part No. 61-153707.
THERMAWAVE
61-153707
KIT,UPG,HDW RELIABLTY,3OOMM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,HDW RELIABLTY,3OOMM. Compatible with THERMAWAVE equipment. Part No. 61-153707.
THERMAWAVE
61-153708
KIT,UPG,HDW RELIABLTY,3OOMM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,HDW RELIABLTY,3OOMM. Compatible with THERMAWAVE equipment. Part No. 61-153708.
THERMAWAVE
61-153711
KIT,UPG,WHT LGHT,STABILITY
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,WHT LGHT,STABILITY. Compatible with THERMAWAVE equipment. Part No. 61-153711.
THERMAWAVE
61-153712
KIT,UPG,OI COOLING,FRONT
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,OI COOLING,FRONT. Compatible with THERMAWAVE equipment. Part No. 61-153712.
THERMAWAVE
61-153713
KIT,UPG,OI COOLING,REAR
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,OI COOLING,REAR. Compatible with THERMAWAVE equipment. Part No. 61-153713.
THERMAWAVE
61-153714
KIT,UPG,VIB ISOLATOR CLEAN,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,VIB ISOLATOR CLEAN,OP. Compatible with THERMAWAVE equipment. Part No. 61-153714.
THERMAWAVE
61-153716
KIT,FLD,UPG,USCSI,73XX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FLD,UPG,USCSI,73XX. Compatible with THERMAWAVE equipment. Part No. 61-153716.
THERMAWAVE
61-153717
KIT,FLD,UPG,USCSI,OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FLD,UPG,USCSI,OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-153717.
THERMAWAVE
61-153718
KIT,UPG,STG ENCODER CBL
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,STG ENCODER CBL. Compatible with THERMAWAVE equipment. Part No. 61-153718.
THERMAWAVE
61-153723
KIT,FIELD UPG,STG GND,OP734
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FIELD UPG,STG GND,OP734. Compatible with THERMAWAVE equipment. Part No. 61-153723.
THERMAWAVE
61-153733
EG,KIT,LNR STG UPG,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,KIT,LNR STG UPG,TP630. Compatible with THERMAWAVE equipment. Part No. 61-153733.
THERMAWAVE
61-153744
KIT,UPG,MSE KBD
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,MSE KBD. Compatible with THERMAWAVE equipment. Part No. 61-153744.
THERMAWAVE
61-153751
KIT,UPG,CIP,ROBOT,DUAL ARM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,CIP,ROBOT,DUAL ARM. Compatible with THERMAWAVE equipment. Part No. 61-153751.
THERMAWAVE
61-153795
KIT,F47,230VAC,4-FOUP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,F47,230VAC,4-FOUP. Compatible with THERMAWAVE equipment. Part No. 61-153795.
THERMAWAVE
61-153797
KIT,F47,230VAC,2-FOUP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,F47,230VAC,2-FOUP. Compatible with THERMAWAVE equipment. Part No. 61-153797.
THERMAWAVE
61-153798
KIT,LIGHT PEN,REPLACEMENT
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,LIGHT PEN,REPLACEMENT. Compatible with THERMAWAVE equipment. Part No. 61-153798.
THERMAWAVE
61-153914
KIT,RETROFIT,TRACKER/NDF,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,RETROFIT,TRACKER/NDF,TP. Compatible with THERMAWAVE equipment. Part No. 61-153914.
THERMAWAVE
61-153933
KIT,UPG,200/300 WBWS,CHK&Z
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,200/300 WBWS,CHK&Z. Compatible with THERMAWAVE equipment. Part No. 61-153933.
THERMAWAVE
61-153962
KIT,UPG,ISOPORT,E84 ADPTR
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,ISOPORT,E84 ADPTR. Compatible with THERMAWAVE equipment. Part No. 61-153962.
THERMAWAVE
61-153971
KIT,UPG,LOW PARTICLE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,LOW PARTICLE. Compatible with THERMAWAVE equipment. Part No. 61-153971.
THERMAWAVE
61-153972
KIT,UPG,MATRX TO ATI DUAL MON
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,MATRX TO ATI DUAL MON. Compatible with THERMAWAVE equipment. Part No. 61-153972.
THERMAWAVE
61-153973
KIT,PRINTER UPGRADE
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,PRINTER UPGRADE. Compatible with THERMAWAVE equipment. Part No. 61-153973.
THERMAWAVE
61-153989
KIT,UPG,Z-PARTICLE,3LP EFEM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,Z-PARTICLE,3LP EFEM. Compatible with THERMAWAVE equipment. Part No. 61-153989.
THERMAWAVE
61-153996
KIT,UPG,FLD,OP MS-XP OS
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,FLD,OP MS-XP OS. Compatible with THERMAWAVE equipment. Part No. 61-153996.
THERMAWAVE
61-154002
KIT,4LT TWR,1X,F OR R,TP,NT
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,4LT TWR,1X,F OR R,TP,NT. Compatible with THERMAWAVE equipment. Part No. 61-154002.
THERMAWAVE
61-154006
KIT,FLD,NTSC-VGA CONV REPL,OP5
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FLD,NTSC-VGA CONV REPL,OP5. Compatible with THERMAWAVE equipment. Part No. 61-154006.
THERMAWAVE
61-154008
KIT,UPG,FLD,MS-XP PRE-INSTALL
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,FLD,MS-XP PRE-INSTALL. Compatible with THERMAWAVE equipment. Part No. 61-154008.
THERMAWAVE
61-154021
KIT,UPG,FIELD,STG GND,TP630XP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,UPG,FIELD,STG GND,TP630XP. Compatible with THERMAWAVE equipment. Part No. 61-154021.
THERMAWAVE
61-154023
KIT, RETRO, OPTICS PL GND
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, RETRO, OPTICS PL GND. Compatible with THERMAWAVE equipment. Part No. 61-154023.
THERMAWAVE
61-154067
KIT,OPTN,PADDLE,200,KAWA,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,OPTN,PADDLE,200,KAWA,OP. Compatible with THERMAWAVE equipment. Part No. 61-154067.
THERMAWAVE
61-154079
KIT,ISOLATOR,ALIGNMENT,MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,ISOLATOR,ALIGNMENT,MOD. Compatible with THERMAWAVE equipment. Part No. 61-154079.
THERMAWAVE
61-154098
KIT,FBR LSR PROBE REPLACEMN
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FBR LSR PROBE REPLACEMN. Compatible with THERMAWAVE equipment. Part No. 61-154098.
THERMAWAVE
61-154099
KIT,FBR LSR PUMP REPLACEMNT
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,FBR LSR PUMP REPLACEMNT. Compatible with THERMAWAVE equipment. Part No. 61-154099.
THERMAWAVE
61-173661
KIT,TOOL,ALIGN,FBR LSR,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,TOOL,ALIGN,FBR LSR,TP. Compatible with THERMAWAVE equipment. Part No. 61-173661.
THERMAWAVE
63-002355
BRG,BALL,1/4X1/2,B2-11-S
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,BALL,1/4X1/2,B2-11-S. Compatible with THERMAWAVE equipment. Part No. 63-002355.
THERMAWAVE
63-002584
BRG,BALL,1/4IN
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,BALL,1/4IN. Compatible with THERMAWAVE equipment. Part No. 63-002584.
THERMAWAVE
63-002631
BRG,BALL,FLANGED .375IDX.875OD
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,BALL,FLANGED .375IDX.875OD. Compatible with THERMAWAVE equipment. Part No. 63-002631.
THERMAWAVE
63-003675
BRG,FLNG,.25IDX.62OD
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,FLNG,.25IDX.62OD. Compatible with THERMAWAVE equipment. Part No. 63-003675.
THERMAWAVE
63-005384
SwitchIVEL,Linear MTR,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. SwitchIVEL,Linear MTR,T9. Compatible with THERMAWAVE equipment. Part No. 63-005384.
THERMAWAVE
63-006138
BALL,TOOLING,.375DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. BALL,TOOLING,.375DIA. Compatible with THERMAWAVE equipment. Part No. 63-006138.
THERMAWAVE
63-006534
Camera,MECH Switch,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,MECH Switch,T9. Compatible with THERMAWAVE equipment. Part No. 63-006534.
THERMAWAVE
63-006705
Bushing,Adaptor,.188ID
spare_part
High-quality nan for THERMAWAVE CMP tool. Bushing,Adaptor,.188ID. Compatible with THERMAWAVE equipment. Part No. 63-006705.
THERMAWAVE
63-006971
Bushing,Detector, ADJ CELL
spare_part
High-quality nan for THERMAWAVE CMP tool. Bushing,Detector, ADJ CELL. Compatible with THERMAWAVE equipment. Part No. 63-006971.
THERMAWAVE
63-008469
PLUNGER,HIDDEN Panel LATCH
spare_part
High-quality nan for THERMAWAVE CMP tool. PLUNGER,HIDDEN Panel LATCH. Compatible with THERMAWAVE equipment. Part No. 63-008469.
THERMAWAVE
63-009546
BRG,SwitchIVEL,FiberER OpticIC
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,SwitchIVEL,FiberER OpticIC. Compatible with THERMAWAVE equipment. Part No. 63-009546.
THERMAWAVE
63-009626
BRG,LINK,Auto Focus Lens EXCH,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,LINK,Auto Focus Lens EXCH,UV. Compatible with THERMAWAVE equipment. Part No. 63-009626.
THERMAWAVE
63-009981
Bushing,LINK,Auto Focus Lens EXCH,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Bushing,LINK,Auto Focus Lens EXCH,UV. Compatible with THERMAWAVE equipment. Part No. 63-009981.
THERMAWAVE
63-010383
BRG,25MM IDX37MM IDX7MM THK
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,25MM IDX37MM IDX7MM THK. Compatible with THERMAWAVE equipment. Part No. 63-010383.
THERMAWAVE
63-010384
BRG,35MM IDX72MM ODX9MM THK
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,35MM IDX72MM ODX9MM THK. Compatible with THERMAWAVE equipment. Part No. 63-010384.
THERMAWAVE
63-010644
BRG,NEEDLE,1/4IDX7/160DX.4L
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,NEEDLE,1/4IDX7/160DX.4L. Compatible with THERMAWAVE equipment. Part No. 63-010644.
THERMAWAVE
63-010790
BRG,FLNG,1-3/4IDX1-15/16OD
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,FLNG,1-3/4IDX1-15/16OD. Compatible with THERMAWAVE equipment. Part No. 63-010790.
THERMAWAVE
63-010854
BRG,BALL,.1875IDX.375OD
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,BALL,.1875IDX.375OD. Compatible with THERMAWAVE equipment. Part No. 63-010854.
THERMAWAVE
63-011010
PLUNGER,1/4-20X1IN
spare_part
High-quality nan for THERMAWAVE CMP tool. PLUNGER,1/4-20X1IN. Compatible with THERMAWAVE equipment. Part No. 63-011010.
THERMAWAVE
63-011066
BRG,1.125ODX.500IDX.25
spare_part
High-quality nan for THERMAWAVE CMP tool. BRG,1.125ODX.500IDX.25. Compatible with THERMAWAVE equipment. Part No. 63-011066.
THERMAWAVE
63-011147
Shock Absorber,1/2-20,.30 Travel
spare_part
High-quality nan for THERMAWAVE CMP tool. Shock Absorber,1/2-20,.30 Travel. Compatible with THERMAWAVE equipment. Part No. 63-011147.
THERMAWAVE
63-011802
Camera,ROTATION Cassette
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,ROTATION Cassette. Compatible with THERMAWAVE equipment. Part No. 63-011802.
THERMAWAVE
63-011803
Camera,TILT Cassette
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,TILT Cassette. Compatible with THERMAWAVE equipment. Part No. 63-011803.
THERMAWAVE
63-011839
Bushing,TILT,FLIPPER
spare_part
High-quality nan for THERMAWAVE CMP tool. Bushing,TILT,FLIPPER. Compatible with THERMAWAVE equipment. Part No. 63-011839.
THERMAWAVE
63-013292
Camera,Auto Focus Lens Exchange,MarkI
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,Auto Focus Lens Exchange,MarkI. Compatible with THERMAWAVE equipment. Part No. 63-013292.
THERMAWAVE
63-013988
PIVOT,Cassette PL,MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. PIVOT,Cassette PL,MOD. Compatible with THERMAWAVE equipment. Part No. 63-013988.
THERMAWAVE
63-026688
EG,PIVOT,CASSETTE,INTEL
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,PIVOT,CASSETTE,INTEL. Compatible with THERMAWAVE equipment. Part No. 63-026688.
THERMAWAVE
65-001920
Beam Splitter,Dichroic
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter,Dichroic. Compatible with THERMAWAVE equipment. Part No. 65-001920.
THERMAWAVE
65-001922
Mirror,Turn,Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,Turn,Hene. Compatible with THERMAWAVE equipment. Part No. 65-001922.
THERMAWAVE
65-001923
Mirror,Turn,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,Turn,AR. Compatible with THERMAWAVE equipment. Part No. 65-001923.
THERMAWAVE
65-001924
Mirror,Turn,White Light
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,Turn,White Light. Compatible with THERMAWAVE equipment. Part No. 65-001924.
THERMAWAVE
65-001925
Beam Splitter,White Light
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter,White Light. Compatible with THERMAWAVE equipment. Part No. 65-001925.
THERMAWAVE
65-001926
Beam Pointer,COATED BOTH SIDES
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Pointer,COATED BOTH SIDES. Compatible with THERMAWAVE equipment. Part No. 65-001926.
THERMAWAVE
65-001927
Beam Pointer,AR,X-Y TRACKER
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Pointer,AR,X-Y TRACKER. Compatible with THERMAWAVE equipment. Part No. 65-001927.
THERMAWAVE
65-001929
Lens,Input,Beam EXPANDER,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Input,Beam EXPANDER,AR. Compatible with THERMAWAVE equipment. Part No. 65-001929.
THERMAWAVE
65-001930
Lens,700MM,ARGON Beam EXIT
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,700MM,ARGON Beam EXIT. Compatible with THERMAWAVE equipment. Part No. 65-001930.
THERMAWAVE
65-001936
Lens,22MM,RMOD/IMOD Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,22MM,RMOD/IMOD Detector. Compatible with THERMAWAVE equipment. Part No. 65-001936.
THERMAWAVE
65-002724
Lens,Objective,50X
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Objective,50X. Compatible with THERMAWAVE equipment. Part No. 65-002724.
THERMAWAVE
65-002725
Lens,Objective,5X
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Objective,5X. Compatible with THERMAWAVE equipment. Part No. 65-002725.
THERMAWAVE
65-003271
PL,QUARTER-WAVE,4MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,QUARTER-WAVE,4MM. Compatible with THERMAWAVE equipment. Part No. 65-003271.
THERMAWAVE
65-003300
Filter,Opticical,Y-52
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,Y-52. Compatible with THERMAWAVE equipment. Part No. 65-003300.
THERMAWAVE
65-003423
Filter,Opticical,W-12
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,W-12. Compatible with THERMAWAVE equipment. Part No. 65-003423.
THERMAWAVE
65-003455
Filter,Dichroic,YEL SUBTRACTIV
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Dichroic,YEL SUBTRACTIV. Compatible with THERMAWAVE equipment. Part No. 65-003455.
THERMAWAVE
65-003480
Filter,Opticical,ND,DIFFUser
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,ND,DIFFUser. Compatible with THERMAWAVE equipment. Part No. 65-003480.
THERMAWAVE
65-003481
Filter,Opticical,LB,DIFFUser
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,LB,DIFFUser. Compatible with THERMAWAVE equipment. Part No. 65-003481.
THERMAWAVE
65-003493
Filter,Opticical,WEDGE,400-700NM
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,WEDGE,400-700NM. Compatible with THERMAWAVE equipment. Part No. 65-003493.
THERMAWAVE
65-003793
Modulator,A-O,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. Modulator,A-O,AR. Compatible with THERMAWAVE equipment. Part No. 65-003793.
THERMAWAVE
65-004219
Dichroic,Robot LEVELING
spare_part
High-quality nan for THERMAWAVE CMP tool. Dichroic,Robot LEVELING. Compatible with THERMAWAVE equipment. Part No. 65-004219.
THERMAWAVE
65-004254
Dichroic,Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. Dichroic,Hene. Compatible with THERMAWAVE equipment. Part No. 65-004254.
THERMAWAVE
65-005455
Mirror,FNL TRN
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,FNL TRN. Compatible with THERMAWAVE equipment. Part No. 65-005455.
THERMAWAVE
65-005481
Wheel,Chopper
spare_part
High-quality nan for THERMAWAVE CMP tool. Wheel,Chopper. Compatible with THERMAWAVE equipment. Part No. 65-005481.
THERMAWAVE
65-006059
Lens,Objective,80X
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Objective,80X. Compatible with THERMAWAVE equipment. Part No. 65-006059.
THERMAWAVE
65-006218
Shutter,White Light, 6MM DIA,P16
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter,White Light, 6MM DIA,P16. Compatible with THERMAWAVE equipment. Part No. 65-006218.
THERMAWAVE
65-006667
Filter,AR DET
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,AR DET. Compatible with THERMAWAVE equipment. Part No. 65-006667.
THERMAWAVE
65-006988
Filter,Opticical,Y-52,A/R
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,Y-52,A/R. Compatible with THERMAWAVE equipment. Part No. 65-006988.
THERMAWAVE
65-007372
PINHOLE,400MICRON MT
spare_part
High-quality nan for THERMAWAVE CMP tool. PINHOLE,400MICRON MT. Compatible with THERMAWAVE equipment. Part No. 65-007372.
THERMAWAVE
65-007380
Filter,A&B,2ND ND ABSORBER
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,A&B,2ND ND ABSORBER. Compatible with THERMAWAVE equipment. Part No. 65-007380.
THERMAWAVE
65-007739
FILTER,BANDPASS,672 NM
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,BANDPASS,672 NM. Compatible with THERMAWAVE equipment. Part No. 65-007739.
THERMAWAVE
65-007742
Crystal,Hene AOM,200MHZ NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Crystal,Hene AOM,200MHZ NEOS. Compatible with THERMAWAVE equipment. Part No. 65-007742.
THERMAWAVE
65-007743
Crystal,AR AOM,110MHZ NEOS
spare_part
High-quality nan for THERMAWAVE CMP tool. Crystal,AR AOM,110MHZ NEOS. Compatible with THERMAWAVE equipment. Part No. 65-007743.
THERMAWAVE
65-007754
Lens,Detector,PLANO-CONV
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Detector,PLANO-CONV. Compatible with THERMAWAVE equipment. Part No. 65-007754.
THERMAWAVE
65-007801
Filter,DIFFUser,I-Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,DIFFUser,I-Hene. Compatible with THERMAWAVE equipment. Part No. 65-007801.
THERMAWAVE
65-007932
Shutter,Beam Pointer
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter,Beam Pointer. Compatible with THERMAWAVE equipment. Part No. 65-007932.
THERMAWAVE
65-008539
Filter,LP-15
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,LP-15. Compatible with THERMAWAVE equipment. Part No. 65-008539.
THERMAWAVE
65-008829
Filter,Opticical,GREEN,#11,4X4IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Opticical,GREEN,#11,4X4IN. Compatible with THERMAWAVE equipment. Part No. 65-008829.
THERMAWAVE
65-008903
Aperture,AR Laser,2ND TM
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture,AR Laser,2ND TM. Compatible with THERMAWAVE equipment. Part No. 65-008903.
THERMAWAVE
65-009233
WAVEPL,1/4,ZERO-ORDER,676NM
spare_part
High-quality nan for THERMAWAVE CMP tool. WAVEPL,1/4,ZERO-ORDER,676NM. Compatible with THERMAWAVE equipment. Part No. 65-009233.
THERMAWAVE
65-009234
POLARIZER,BROADBAND,CUBE,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. POLARIZER,BROADBAND,CUBE,P22. Compatible with THERMAWAVE equipment. Part No. 65-009234.
THERMAWAVE
65-009674
Beam Splitter,SLOPED,MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter,SLOPED,MOD. Compatible with THERMAWAVE equipment. Part No. 65-009674.
THERMAWAVE
65-010324
GRATING,CONCAVE,700NM BLAZE
spare_part
High-quality nan for THERMAWAVE CMP tool. GRATING,CONCAVE,700NM BLAZE. Compatible with THERMAWAVE equipment. Part No. 65-010324.
THERMAWAVE
65-010405
BEAM SPLITTER, 2IN, CAMERA
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAM SPLITTER, 2IN, CAMERA. Compatible with THERMAWAVE equipment. Part No. 65-010405.
THERMAWAVE
65-010965
Filter,LONG PASS,SPIKE KILL
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,LONG PASS,SPIKE KILL. Compatible with THERMAWAVE equipment. Part No. 65-010965.
THERMAWAVE
65-011047
Filter,Bandpass,470NM,1DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,Bandpass,470NM,1DIA. Compatible with THERMAWAVE equipment. Part No. 65-011047.
THERMAWAVE
65-011251
Ina.Splitter,Beam,Laser Combine repl. by 65-157634
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Splitter,Beam,Laser Combine repl. by 65-157634. Compatible with THERMAWAVE equipment. Part No. 65-011251.
THERMAWAVE
65-011290
Lens,80X ObjectiveECTIVE,SPEC
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,80X ObjectiveECTIVE,SPEC. Compatible with THERMAWAVE equipment. Part No. 65-011290.
THERMAWAVE
65-012055
ObjectiveECTIVE,REFLECTIVE,15X
spare_part
High-quality nan for THERMAWAVE CMP tool. ObjectiveECTIVE,REFLECTIVE,15X. Compatible with THERMAWAVE equipment. Part No. 65-012055.
THERMAWAVE
65-012065
Mirror,Turn,UV,1.00DIAX.236THK
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,Turn,UV,1.00DIAX.236THK. Compatible with THERMAWAVE equipment. Part No. 65-012065.
THERMAWAVE
65-012193
Aperture,225MICRONSX3/8DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture,225MICRONSX3/8DIA. Compatible with THERMAWAVE equipment. Part No. 65-012193.
THERMAWAVE
65-012730
Mirror,FStandard SRF,AL,.75ODX.18THK
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,FStandard SRF,AL,.75ODX.18THK. Compatible with THERMAWAVE equipment. Part No. 65-012730.
THERMAWAVE
65-012820
FiberER Optic BUNDLE,NYL,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. FiberER Optic BUNDLE,NYL,UV. Compatible with THERMAWAVE equipment. Part No. 65-012820.
THERMAWAVE
65-013318
WAVEPL,1/4,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. WAVEPL,1/4,TP500. Compatible with THERMAWAVE equipment. Part No. 65-013318.
THERMAWAVE
65-013788
INA,MODULATOR,AO,110MHZ,AR
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,MODULATOR,AO,110MHZ,AR. Compatible with THERMAWAVE equipment. Part No. 65-013788.
THERMAWAVE
65-014581
Aperture,500 MICRONX3/8 DIA
spare_part
High-quality nan for THERMAWAVE CMP tool. Aperture,500 MICRONX3/8 DIA. Compatible with THERMAWAVE equipment. Part No. 65-014581.
THERMAWAVE
65-014942
Lens, Objective, 5X NA = .15, WD=20MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens, Objective, 5X NA = .15, WD=20MM. Compatible with THERMAWAVE equipment. Part No. 65-014942.
THERMAWAVE
65-015017
Paraboloid,OFF AXIS,45DEG
spare_part
High-quality nan for THERMAWAVE CMP tool. Paraboloid,OFF AXIS,45DEG. Compatible with THERMAWAVE equipment. Part No. 65-015017.
THERMAWAVE
65-015178
BEAM SPLITTER,1IN DIA,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAM SPLITTER,1IN DIA,P34. Compatible with THERMAWAVE equipment. Part No. 65-015178.
THERMAWAVE
65-015290
Monochromator,SPLT GR,UNTStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Monochromator,SPLT GR,UNTStandard. Compatible with THERMAWAVE equipment. Part No. 65-015290.
THERMAWAVE
65-015369
Mirror,FNL Turn, 2IN D,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,FNL Turn, 2IN D,P34. Compatible with THERMAWAVE equipment. Part No. 65-015369.
THERMAWAVE
65-015473
Mirror,3/4D,SLVR COATED,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,3/4D,SLVR COATED,P34. Compatible with THERMAWAVE equipment. Part No. 65-015473.
THERMAWAVE
65-015487
Waveplate, Zero-Order, 633NM, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Waveplate, Zero-Order, 633NM, P34. Compatible with THERMAWAVE equipment. Part No. 65-015487.
THERMAWAVE
65-015502
Lens,Objective,100X
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens,Objective,100X. Compatible with THERMAWAVE equipment. Part No. 65-015502.
THERMAWAVE
65-015550
Obs. Laser,Hene,AE,P34 repl. by 18-021392
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Laser,Hene,AE,P34 repl. by 18-021392. Compatible with THERMAWAVE equipment. Part No. 65-015550.
THERMAWAVE
65-015905
Paraboloid,OFF-AXIS 20D 100MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Paraboloid,OFF-AXIS 20D 100MM. Compatible with THERMAWAVE equipment. Part No. 65-015905.
THERMAWAVE
65-015905
Paraboloid,OFF-AXIS 20D 100MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Paraboloid,OFF-AXIS 20D 100MM. Compatible with THERMAWAVE equipment. Part No. 65-015905.
THERMAWAVE
65-016217
FILTER,CUT-OFF,180NM,.75D,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,CUT-OFF,180NM,.75D,P34. Compatible with THERMAWAVE equipment. Part No. 65-016217.
THERMAWAVE
65-016220
GRATING,Flat,UV SPECTR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. GRATING,Flat,UV SPECTR,P34. Compatible with THERMAWAVE equipment. Part No. 65-016220.
THERMAWAVE
65-016389
Shutter,White Light, 6MM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Shutter,White Light, 6MM,P34. Compatible with THERMAWAVE equipment. Part No. 65-016389.
THERMAWAVE
65-016563
Paraboloid,UV,COLIM 50.8MM,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Paraboloid,UV,COLIM 50.8MM,P34. Compatible with THERMAWAVE equipment. Part No. 65-016563.
THERMAWAVE
65-017509
Ina,FILTER,SPECTRUM FLAT,P34, repl by 65-029518
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,FILTER,SPECTRUM FLAT,P34, repl by 65-029518. Compatible with THERMAWAVE equipment. Part No. 65-017509.
THERMAWAVE
65-018951
Polarizer,MGF2 ROCHON,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Polarizer,MGF2 ROCHON,P34. Compatible with THERMAWAVE equipment. Part No. 65-018951.
THERMAWAVE
65-018952
Filter,470NM,WL Align, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,470NM,WL Align, OP. Compatible with THERMAWAVE equipment. Part No. 65-018952.
THERMAWAVE
65-018953
Filter,720NM,WL Align, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,720NM,WL Align, OP. Compatible with THERMAWAVE equipment. Part No. 65-018953.
THERMAWAVE
65-020320
Filter,NG4,WL SOURCE,BBSE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter,NG4,WL SOURCE,BBSE,P34. Compatible with THERMAWAVE equipment. Part No. 65-020320.
THERMAWAVE
65-021107
Filter, NG5, White Light Source, BBSE, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, NG5, White Light Source, BBSE, P34. Compatible with THERMAWAVE equipment. Part No. 65-021107.
THERMAWAVE
65-021394
BEAM EXPANDER,10X,OAL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAM EXPANDER,10X,OAL,P34. Compatible with THERMAWAVE equipment. Part No. 65-021394.
THERMAWAVE
65-021486
Beamsplitter, Source
spare_part
High-quality nan for THERMAWAVE CMP tool. Beamsplitter, Source. Compatible with THERMAWAVE equipment. Part No. 65-021486.
THERMAWAVE
65-021487
Beamsplitter, Final Turn,OP5240
spare_part
High-quality nan for THERMAWAVE CMP tool. Beamsplitter, Final Turn,OP5240. Compatible with THERMAWAVE equipment. Part No. 65-021487.
THERMAWAVE
65-021557
Filter, Blower, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, Blower, P34. Compatible with THERMAWAVE equipment. Part No. 65-021557.
THERMAWAVE
65-021670
Polarizer,1.5DEG,ROCHON
spare_part
High-quality nan for THERMAWAVE CMP tool. Polarizer,1.5DEG,ROCHON. Compatible with THERMAWAVE equipment. Part No. 65-021670.
THERMAWAVE
65-021755
Filter, Order Sort, Sharp Edge
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, Order Sort, Sharp Edge. Compatible with THERMAWAVE equipment. Part No. 65-021755.
THERMAWAVE
65-021935
Filter, IR, 1.0DX3MM THK, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Filter, IR, 1.0DX3MM THK, P34. Compatible with THERMAWAVE equipment. Part No. 65-021935.
THERMAWAVE
65-021953
WINDOW,DESORBER,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. WINDOW,DESORBER,P34. Compatible with THERMAWAVE equipment. Part No. 65-021953.
THERMAWAVE
65-022389
BEAM SPLITTER,60MM,LSR,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAM SPLITTER,60MM,LSR,P34. Compatible with THERMAWAVE equipment. Part No. 65-022389.
THERMAWAVE
65-022840
Lens, Achromat, 50.1MM Fl
spare_part
High-quality nan for THERMAWAVE CMP tool. Lens, Achromat, 50.1MM Fl. Compatible with THERMAWAVE equipment. Part No. 65-022840.
THERMAWAVE
65-022841
Polarizer, Cube, NB, 670NM
spare_part
High-quality nan for THERMAWAVE CMP tool. Polarizer, Cube, NB, 670NM. Compatible with THERMAWAVE equipment. Part No. 65-022841.
THERMAWAVE
65-023021
Mirror,HOT NIR BLOCKING,P22
spare_part
High-quality nan for THERMAWAVE CMP tool. Mirror,HOT NIR BLOCKING,P22. Compatible with THERMAWAVE equipment. Part No. 65-023021.
THERMAWAVE
65-023367
Beam Splitter, Screw Combination
spare_part
High-quality nan for THERMAWAVE CMP tool. Beam Splitter, Screw Combination. Compatible with THERMAWAVE equipment. Part No. 65-023367.
THERMAWAVE
65-024343
LENS,OBJ,10MM, REFL,P62
spare_part
High-quality nan for THERMAWAVE CMP tool. LENS,OBJ,10MM, REFL,P62. Compatible with THERMAWAVE equipment. Part No. 65-024343.
THERMAWAVE
65-026571
FILTER,NTL DNS,T=40%,D=.375
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,NTL DNS,T=40%,D=.375. Compatible with THERMAWAVE equipment. Part No. 65-026571.
THERMAWAVE
65-029518
FILTER,SPECTRUM FLT,IRE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. FILTER,SPECTRUM FLT,IRE,P34. Compatible with THERMAWAVE equipment. Part No. 65-029518.
THERMAWAVE
65-030296
PARABOLOID,OAP,UVSRC,50MM
spare_part
High-quality nan for THERMAWAVE CMP tool. PARABOLOID,OAP,UVSRC,50MM. Compatible with THERMAWAVE equipment. Part No. 65-030296.
THERMAWAVE
65-030313
Ina, BEAMSPLITTER,SCE COMB,LP repl. by 65-157612
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina, BEAMSPLITTER,SCE COMB,LP repl. by 65-157612. Compatible with THERMAWAVE equipment. Part No. 65-030313.
THERMAWAVE
65-157640
BEAMSPLITTER,2IN,50/50
spare_part
High-quality nan for THERMAWAVE CMP tool. BEAMSPLITTER,2IN,50/50. Compatible with THERMAWAVE equipment. Part No. 65-157640.
THERMAWAVE
66-002658
MicroMotor,DC,15V W/BRUSHES
spare_part
High-quality nan for THERMAWAVE CMP tool. MicroMotor,DC,15V W/BRUSHES. Compatible with THERMAWAVE equipment. Part No. 66-002658.
THERMAWAVE
66-006790
Motor,60.5:1,W/05/32SHFT,G/BOX
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,60.5:1,W/05/32SHFT,G/BOX. Compatible with THERMAWAVE equipment. Part No. 66-006790.
THERMAWAVE
66-007433
Driver,Stepper MTR,C SERIES,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Stepper MTR,C SERIES,P20. Compatible with THERMAWAVE equipment. Part No. 66-007433.
THERMAWAVE
66-007434
Motor,Stepper,Theta Stage,P20
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,Stepper,Theta Stage,P20. Compatible with THERMAWAVE equipment. Part No. 66-007434.
THERMAWAVE
66-007676
Valve,Solenoid,125PSI,12VDC
spare_part
High-quality nan for THERMAWAVE CMP tool. Valve,Solenoid,125PSI,12VDC. Compatible with THERMAWAVE equipment. Part No. 66-007676.
THERMAWAVE
66-007776
Motor,Linear Stepper
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,Linear Stepper. Compatible with THERMAWAVE equipment. Part No. 66-007776.
THERMAWAVE
66-008099
Solenoid,Rotary,45 RT,11V,Controller
spare_part
High-quality nan for THERMAWAVE CMP tool. Solenoid,Rotary,45 RT,11V,Controller. Compatible with THERMAWAVE equipment. Part No. 66-008099.
THERMAWAVE
66-008527
Motor,Stepper,X,Y
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,Stepper,X,Y. Compatible with THERMAWAVE equipment. Part No. 66-008527.
THERMAWAVE
66-009480
Solenoid,ROTRY,45DEG RT,NOSHFT
spare_part
High-quality nan for THERMAWAVE CMP tool. Solenoid,ROTRY,45DEG RT,NOSHFT. Compatible with THERMAWAVE equipment. Part No. 66-009480.
THERMAWAVE
66-010433
Motor,DC Brushless,ELECT COM
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,DC Brushless,ELECT COM. Compatible with THERMAWAVE equipment. Part No. 66-010433.
THERMAWAVE
66-010643
Motor,PL,864:12V
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,PL,864:12V. Compatible with THERMAWAVE equipment. Part No. 66-010643.
THERMAWAVE
66-010849
Motor, Stepper,W/Gearbox
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor, Stepper,W/Gearbox. Compatible with THERMAWAVE equipment. Part No. 66-010849.
THERMAWAVE
66-011450
Equipe Robot,THETA MTR2ENCOD SET
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,THETA MTR2ENCOD SET. Compatible with THERMAWAVE equipment. Part No. 66-011450.
THERMAWAVE
66-011451
Equipe Robot,RADIAL MTR2ENC SET
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,RADIAL MTR2ENC SET. Compatible with THERMAWAVE equipment. Part No. 66-011451.
THERMAWAVE
66-011452
Equipe Robot,ZMTR2ENC SET
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,ZMTR2ENC SET. Compatible with THERMAWAVE equipment. Part No. 66-011452.
THERMAWAVE
66-012701
Actuator,PNEU,Shutter
spare_part
High-quality nan for THERMAWAVE CMP tool. Actuator,PNEU,Shutter. Compatible with THERMAWAVE equipment. Part No. 66-012701.
THERMAWAVE
66-012995
Driver,Stepper MTR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Stepper MTR,UV. Compatible with THERMAWAVE equipment. Part No. 66-012995.
THERMAWAVE
66-012995
Driver,Stepper MTR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Stepper MTR,UV. Compatible with THERMAWAVE equipment. Part No. 66-012995.
THERMAWAVE
66-013666
MOTOR,12VDC,1.6X5MM SHAFT,MINI
spare_part
High-quality nan for THERMAWAVE CMP tool. MOTOR,12VDC,1.6X5MM SHAFT,MINI. Compatible with THERMAWAVE equipment. Part No. 66-013666.
THERMAWAVE
66-014312
Motor,DC W/ENCD,Theta Stage
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,DC W/ENCD,Theta Stage. Compatible with THERMAWAVE equipment. Part No. 66-014312.
THERMAWAVE
66-015366
Actuator, Pneu, 595 MGV MIR, P
spare_part
High-quality nan for THERMAWAVE CMP tool. Actuator, Pneu, 595 MGV MIR, P. Compatible with THERMAWAVE equipment. Part No. 66-015366.
THERMAWAVE
66-015533
Solenoid,Rotary,24V,45DEG,RT
spare_part
High-quality nan for THERMAWAVE CMP tool. Solenoid,Rotary,24V,45DEG,RT. Compatible with THERMAWAVE equipment. Part No. 66-015533.
THERMAWAVE
66-015682
Driver,Stepper MTR,5 PHASE
spare_part
High-quality nan for THERMAWAVE CMP tool. Driver,Stepper MTR,5 PHASE. Compatible with THERMAWAVE equipment. Part No. 66-015682.
THERMAWAVE
66-015934
Motor,DC With Encoder,NEW AMP
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,DC With Encoder,NEW AMP. Compatible with THERMAWAVE equipment. Part No. 66-015934.
THERMAWAVE
66-018455
ACTUATOR,SP5P,.38DIAX1.5STR
spare_part
High-quality nan for THERMAWAVE CMP tool. ACTUATOR,SP5P,.38DIAX1.5STR. Compatible with THERMAWAVE equipment. Part No. 66-018455.
THERMAWAVE
66-018898
ACTUATOR,PNEU,S95X1.5STK
spare_part
High-quality nan for THERMAWAVE CMP tool. ACTUATOR,PNEU,S95X1.5STK. Compatible with THERMAWAVE equipment. Part No. 66-018898.
THERMAWAVE
66-019016
Actuator,PNEUMATIC,6IN
spare_part
High-quality nan for THERMAWAVE CMP tool. Actuator,PNEUMATIC,6IN. Compatible with THERMAWAVE equipment. Part No. 66-019016.
THERMAWAVE
66-019250
MOTOR,DC W/ENCODER CBL PINOUT
spare_part
High-quality nan for THERMAWAVE CMP tool. MOTOR,DC W/ENCODER CBL PINOUT. Compatible with THERMAWAVE equipment. Part No. 66-019250.
THERMAWAVE
66-019878
Motor,DC,Y-Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,DC,Y-Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 66-019878.
THERMAWAVE
66-019879
Motor,DC,X-Stage,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor,DC,X-Stage,TP500. Compatible with THERMAWAVE equipment. Part No. 66-019879.
THERMAWAVE
66-021841
INA,ACTUATOR,PIN-LIFTER,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. INA,ACTUATOR,PIN-LIFTER,P35. Compatible with THERMAWAVE equipment. Part No. 66-021841.
THERMAWAVE
66-022309
Motor Assembly,Y-Stage
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor Assembly,Y-Stage. Compatible with THERMAWAVE equipment. Part No. 66-022309.
THERMAWAVE
66-023090
Motor/TACH,Y-Stage,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor/TACH,Y-Stage,TP630. Compatible with THERMAWAVE equipment. Part No. 66-023090.
THERMAWAVE
66-023091
Motor/TACH,X-Stage,TP630
spare_part
High-quality nan for THERMAWAVE CMP tool. Motor/TACH,X-Stage,TP630. Compatible with THERMAWAVE equipment. Part No. 66-023091.
THERMAWAVE
66-088585
ACTUATOR,DUAL CYL,20X50MM
spare_part
High-quality nan for THERMAWAVE CMP tool. ACTUATOR,DUAL CYL,20X50MM. Compatible with THERMAWAVE equipment. Part No. 66-088585.
THERMAWAVE
66-088586
ACTUATOR,ROT,3/4IN DUAL
spare_part
High-quality nan for THERMAWAVE CMP tool. ACTUATOR,ROT,3/4IN DUAL. Compatible with THERMAWAVE equipment. Part No. 66-088586.
THERMAWAVE
69-003436
ADH,PLIOBOND
spare_part
High-quality nan for THERMAWAVE CMP tool. ADH,PLIOBOND. Compatible with THERMAWAVE equipment. Part No. 69-003436.
THERMAWAVE
69-006755
ADH,EPOXY,5MIN
spare_part
High-quality nan for THERMAWAVE CMP tool. ADH,EPOXY,5MIN. Compatible with THERMAWAVE equipment. Part No. 69-006755.
THERMAWAVE
70-015739
Guard, Mushroom-HD,EMO,29-40MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Guard, Mushroom-HD,EMO,29-40MM. Compatible with THERMAWAVE equipment. Part No. 70-015739.
THERMAWAVE
76-004918
Manual,OPERATIONS,PAS
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,OPERATIONS,PAS. Compatible with THERMAWAVE equipment. Part No. 76-004918.
THERMAWAVE
76-006108
Manual,Service,RobotICS
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Service,RobotICS. Compatible with THERMAWAVE equipment. Part No. 76-006108.
THERMAWAVE
76-006168
Manual,IMS,HIGH DOSE
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,IMS,HIGH DOSE. Compatible with THERMAWAVE equipment. Part No. 76-006168.
THERMAWAVE
76-010119
Manual,SECSII,5.03A,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,SECSII,5.03A,TP. Compatible with THERMAWAVE equipment. Part No. 76-010119.
THERMAWAVE
76-010120
Manual,MMS,TP,5.03A
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,MMS,TP,5.03A. Compatible with THERMAWAVE equipment. Part No. 76-010120.
THERMAWAVE
76-010491
Manual,Support,Users,2.02A,CLN,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Support,Users,2.02A,CLN,OP. Compatible with THERMAWAVE equipment. Part No. 76-010491.
THERMAWAVE
76-010492
Manual,Support,Users,2.02A,Standard,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Support,Users,2.02A,Standard,OP. Compatible with THERMAWAVE equipment. Part No. 76-010492.
THERMAWAVE
76-010752
Manual,Clean Room,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Clean Room,TP420. Compatible with THERMAWAVE equipment. Part No. 76-010752.
THERMAWAVE
76-010755
Manual,Clean Room,GEM/SECS,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Clean Room,GEM/SECS,TP420. Compatible with THERMAWAVE equipment. Part No. 76-010755.
THERMAWAVE
76-010867
Manual,Schematics,OP2500
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Schematics,OP2500. Compatible with THERMAWAVE equipment. Part No. 76-010867.
THERMAWAVE
76-010891
Manual,Service,TPXP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Service,TPXP. Compatible with THERMAWAVE equipment. Part No. 76-010891.
THERMAWAVE
76-010998
Manual,User,Standard,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,User,Standard,TP420. Compatible with THERMAWAVE equipment. Part No. 76-010998.
THERMAWAVE
76-011289
Manual,Schematics,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Schematics,TP420. Compatible with THERMAWAVE equipment. Part No. 76-011289.
THERMAWAVE
76-011308
Manual,Service,TP400/420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Service,TP400/420. Compatible with THERMAWAVE equipment. Part No. 76-011308.
THERMAWAVE
76-011390
Manual,Standard,GEM/SECS,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Standard,GEM/SECS,TP420. Compatible with THERMAWAVE equipment. Part No. 76-011390.
THERMAWAVE
76-011473
Manual,User,2.03,CLN,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,User,2.03,CLN,OP. Compatible with THERMAWAVE equipment. Part No. 76-011473.
THERMAWAVE
76-011474
Manual,User,2.03,Standard,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,User,2.03,Standard,OP. Compatible with THERMAWAVE equipment. Part No. 76-011474.
THERMAWAVE
76-011789
Manual,Service,KENSINGTON ROBT
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Service,KENSINGTON ROBT. Compatible with THERMAWAVE equipment. Part No. 76-011789.
THERMAWAVE
76-014179
Manual,PAT REC,1.00,CLN,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,PAT REC,1.00,CLN,TP500. Compatible with THERMAWAVE equipment. Part No. 76-014179.
THERMAWAVE
76-014456
Manual,MMS,User,TP500,CLN
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,MMS,User,TP500,CLN. Compatible with THERMAWAVE equipment. Part No. 76-014456.
THERMAWAVE
76-014510
Manual,GEM/SECS,User,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,GEM/SECS,User,TP500. Compatible with THERMAWAVE equipment. Part No. 76-014510.
THERMAWAVE
76-014612
Manual,TRAINING,LVL1,OP2600
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,TRAINING,LVL1,OP2600. Compatible with THERMAWAVE equipment. Part No. 76-014612.
THERMAWAVE
76-014920
Manual,Schematics/DWGS,TP50
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Schematics/DWGS,TP50. Compatible with THERMAWAVE equipment. Part No. 76-014920.
THERMAWAVE
76-015087
Manual,User 3.00,Standard OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,User 3.00,Standard OP. Compatible with THERMAWAVE equipment. Part No. 76-015087.
THERMAWAVE
76-015088
Manual,User,3.00,CLN OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,User,3.00,CLN OP. Compatible with THERMAWAVE equipment. Part No. 76-015088.
THERMAWAVE
76-015089
Manual,Getting Started,Standard,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Getting Started,Standard,OP. Compatible with THERMAWAVE equipment. Part No. 76-015089.
THERMAWAVE
76-015090
Manual,Getting Started,Clean Room,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Getting Started,Clean Room,OP. Compatible with THERMAWAVE equipment. Part No. 76-015090.
THERMAWAVE
76-015342
Manual,Schematics,2600/B/DU
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Schematics,2600/B/DU. Compatible with THERMAWAVE equipment. Part No. 76-015342.
THERMAWAVE
76-016236
Manual,ADD,User,1.1C,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,ADD,User,1.1C,TP500. Compatible with THERMAWAVE equipment. Part No. 76-016236.
THERMAWAVE
76-016246
Manual,ADD,PAT REC,1.1C,CLN,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,ADD,PAT REC,1.1C,CLN,TP. Compatible with THERMAWAVE equipment. Part No. 76-016246.
THERMAWAVE
76-016703
Manual,ADD,User,3.00,Standard,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,ADD,User,3.00,Standard,OP. Compatible with THERMAWAVE equipment. Part No. 76-016703.
THERMAWAVE
76-016704
Manual,ADD,User,3.00,CLN,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,ADD,User,3.00,CLN,OP. Compatible with THERMAWAVE equipment. Part No. 76-016704.
THERMAWAVE
76-016860
Manual,GEM/SECS,3.00 OP CLN
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,GEM/SECS,3.00 OP CLN. Compatible with THERMAWAVE equipment. Part No. 76-016860.
THERMAWAVE
76-017235
Manual,Service,1.1C,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Manual,Service,1.1C,TP500. Compatible with THERMAWAVE equipment. Part No. 76-017235.
THERMAWAVE
76-019384
User Manual, Cleanroom, OP5305
spare_part
High-quality nan for THERMAWAVE CMP tool. User Manual, Cleanroom, OP5305. Compatible with THERMAWAVE equipment. Part No. 76-019384.
THERMAWAVE
76-021017
User Manual, Plain Paper, OP5305
spare_part
High-quality nan for THERMAWAVE CMP tool. User Manual, Plain Paper, OP5305. Compatible with THERMAWAVE equipment. Part No. 76-021017.
THERMAWAVE
76-021191
Facilities Guide, OP5305
spare_part
High-quality nan for THERMAWAVE CMP tool. Facilities Guide, OP5305. Compatible with THERMAWAVE equipment. Part No. 76-021191.
THERMAWAVE
76-031488
MANUAL,USER,OP7340,CLNRM
spare_part
High-quality nan for THERMAWAVE CMP tool. MANUAL,USER,OP7340,CLNRM. Compatible with THERMAWAVE equipment. Part No. 76-031488.
THERMAWAVE
77-010253
Window,FRONT
spare_part
High-quality nan for THERMAWAVE CMP tool. Window,FRONT. Compatible with THERMAWAVE equipment. Part No. 77-010253.
THERMAWAVE
77-011161
Window,Monitor
spare_part
High-quality nan for THERMAWAVE CMP tool. Window,Monitor. Compatible with THERMAWAVE equipment. Part No. 77-011161.
THERMAWAVE
77-026036
EG, Window, FR, CU Transparent, Amber 2422
spare_part
High-quality nan for THERMAWAVE CMP tool. EG, Window, FR, CU Transparent, Amber 2422. Compatible with THERMAWAVE equipment. Part No. 77-026036.
THERMAWAVE
79-003093
FLUID,DAMPER
spare_part
High-quality nan for THERMAWAVE CMP tool. FLUID,DAMPER. Compatible with THERMAWAVE equipment. Part No. 79-003093.
THERMAWAVE
79-003366
COMPOUND,THERMAL,TYPE 120
spare_part
High-quality nan for THERMAWAVE CMP tool. COMPOUND,THERMAL,TYPE 120. Compatible with THERMAWAVE equipment. Part No. 79-003366.
THERMAWAVE
79-003374
ADH,LOCTITE 242
spare_part
High-quality nan for THERMAWAVE CMP tool. ADH,LOCTITE 242. Compatible with THERMAWAVE equipment. Part No. 79-003374.
THERMAWAVE
79-003421
BREADBOARD,2 OZ CU 1 SIDE
spare_part
High-quality nan for THERMAWAVE CMP tool. BREADBOARD,2 OZ CU 1 SIDE. Compatible with THERMAWAVE equipment. Part No. 79-003421.
THERMAWAVE
79-003449
GREASE,Vacuum,SILICONE
spare_part
High-quality nan for THERMAWAVE CMP tool. GREASE,Vacuum,SILICONE. Compatible with THERMAWAVE equipment. Part No. 79-003449.
THERMAWAVE
79-003451
PAPER,Lens
spare_part
High-quality nan for THERMAWAVE CMP tool. PAPER,Lens. Compatible with THERMAWAVE equipment. Part No. 79-003451.
THERMAWAVE
79-005100
OBS,DESICCANT,DriverYER REPLACEMEN
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS,DESICCANT,DriverYER REPLACEMEN. Compatible with THERMAWAVE equipment. Part No. 79-005100.
THERMAWAVE
79-005212
SEAL,OIL
spare_part
High-quality nan for THERMAWAVE CMP tool. SEAL,OIL. Compatible with THERMAWAVE equipment. Part No. 79-005212.
THERMAWAVE
79-009027
Lubricant,LEADScrewEW/TURCITE
spare_part
High-quality nan for THERMAWAVE CMP tool. Lubricant,LEADScrewEW/TURCITE. Compatible with THERMAWAVE equipment. Part No. 79-009027.
THERMAWAVE
79-009692
ADH, Loctite, 380, Black Max
spare_part
High-quality nan for THERMAWAVE CMP tool. ADH, Loctite, 380, Black Max. Compatible with THERMAWAVE equipment. Part No. 79-009692.
THERMAWAVE
79-011638
ADH, Loctite, 680, Retaining Comp
spare_part
High-quality nan for THERMAWAVE CMP tool. ADH, Loctite, 680, Retaining Comp. Compatible with THERMAWAVE equipment. Part No. 79-011638.
THERMAWAVE
79-013103
WIPE,2PROPANOL
spare_part
High-quality nan for THERMAWAVE CMP tool. WIPE,2PROPANOL. Compatible with THERMAWAVE equipment. Part No. 79-013103.
THERMAWAVE
79-017128
Ina.Grease,DEMNUM,L200 repl. by 79-019112
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Grease,DEMNUM,L200 repl. by 79-019112. Compatible with THERMAWAVE equipment. Part No. 79-017128.
THERMAWAVE
79-017198
Lubricant,LEADScrewEW,SYNTHETIC. Repl. by 18-123006
spare_part
High-quality nan for THERMAWAVE CMP tool. Lubricant,LEADScrewEW,SYNTHETIC. Repl. by 18-123006. Compatible with THERMAWAVE equipment. Part No. 79-017198.
THERMAWAVE
79-019094
Lubricant,KLUBER,TOPAS NB52
spare_part
High-quality nan for THERMAWAVE CMP tool. Lubricant,KLUBER,TOPAS NB52. Compatible with THERMAWAVE equipment. Part No. 79-019094.
THERMAWAVE
79-019095
Ina.Lubricant,UNIVERSAL,KS-46 repl.by 79-017198
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina.Lubricant,UNIVERSAL,KS-46 repl.by 79-017198. Compatible with THERMAWAVE equipment. Part No. 79-019095.
THERMAWAVE
79-019112
Grease, NYE 899-1, 50g Syringe
spare_part
High-quality nan for THERMAWAVE CMP tool. Grease, NYE 899-1, 50g Syringe. Compatible with THERMAWAVE equipment. Part No. 79-019112.
THERMAWAVE
79-022064
Grease, Low Viscosity, Cleanroom
spare_part
High-quality nan for THERMAWAVE CMP tool. Grease, Low Viscosity, Cleanroom. Compatible with THERMAWAVE equipment. Part No. 79-022064.
THERMAWAVE
79-022346
Grease, Fluorinated, Krytox
spare_part
High-quality nan for THERMAWAVE CMP tool. Grease, Fluorinated, Krytox. Compatible with THERMAWAVE equipment. Part No. 79-022346.
THERMAWAVE
79-031105
LUBRICANT,MAT,RAILS,NCT,STG
spare_part
High-quality nan for THERMAWAVE CMP tool. LUBRICANT,MAT,RAILS,NCT,STG. Compatible with THERMAWAVE equipment. Part No. 79-031105.
THERMAWAVE
79-031106
LUBRICANT,Z WEDGE,RAILS
spare_part
High-quality nan for THERMAWAVE CMP tool. LUBRICANT,Z WEDGE,RAILS. Compatible with THERMAWAVE equipment. Part No. 79-031106.
THERMAWAVE
79-089498
LUBRICANT,RAILS,STAGE
spare_part
High-quality nan for THERMAWAVE CMP tool. LUBRICANT,RAILS,STAGE. Compatible with THERMAWAVE equipment. Part No. 79-089498.
THERMAWAVE
79-089499
GREASE,LUBE,THK AFB
spare_part
High-quality nan for THERMAWAVE CMP tool. GREASE,LUBE,THK AFB. Compatible with THERMAWAVE equipment. Part No. 79-089499.
THERMAWAVE
79-089500
GREASE,LUBE,ROBOT,KAWASAKI
spare_part
High-quality nan for THERMAWAVE CMP tool. GREASE,LUBE,ROBOT,KAWASAKI. Compatible with THERMAWAVE equipment. Part No. 79-089500.
THERMAWAVE
80-008320
Label,StandardATION 1
spare_part
High-quality nan for THERMAWAVE CMP tool. Label,StandardATION 1. Compatible with THERMAWAVE equipment. Part No. 80-008320.
THERMAWAVE
80-008859
Target,UNIVERSAL,#4038
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,UNIVERSAL,#4038. Compatible with THERMAWAVE equipment. Part No. 80-008859.
THERMAWAVE
80-011015
LABEL, DANGER LASER RADIATION
spare_part
High-quality nan for THERMAWAVE CMP tool. LABEL, DANGER LASER RADIATION. Compatible with THERMAWAVE equipment. Part No. 80-011015.
THERMAWAVE
80-011775
Label,Laser SAuto FocusETY,670NM,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Label,Laser SAuto FocusETY,670NM,TP500. Compatible with THERMAWAVE equipment. Part No. 80-011775.
THERMAWAVE
80-011776
Label,Laser,SAuto FocusETY,785NM,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Label,Laser,SAuto FocusETY,785NM,TP500. Compatible with THERMAWAVE equipment. Part No. 80-011776.
THERMAWAVE
81-004844
PROM Assembly,SECS A BOOT PROM A
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS A BOOT PROM A. Compatible with THERMAWAVE equipment. Part No. 81-004844.
THERMAWAVE
81-004845
PROM Assembly,SECS A BOOT PROM B
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS A BOOT PROM B. Compatible with THERMAWAVE equipment. Part No. 81-004845.
THERMAWAVE
81-004846
PROM Assembly,SECS A BOOT PROM C
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS A BOOT PROM C. Compatible with THERMAWAVE equipment. Part No. 81-004846.
THERMAWAVE
81-004847
PROM Assembly,SECS A BOOT PROM D
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS A BOOT PROM D. Compatible with THERMAWAVE equipment. Part No. 81-004847.
THERMAWAVE
81-004848
PROM Assembly,SECS B BOOT PROM A
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS B BOOT PROM A. Compatible with THERMAWAVE equipment. Part No. 81-004848.
THERMAWAVE
81-004849
PROM Assembly,SECS B BOOT PROM B
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS B BOOT PROM B. Compatible with THERMAWAVE equipment. Part No. 81-004849.
THERMAWAVE
81-004850
PROM Assembly,SECS B BOOT PROM C
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS B BOOT PROM C. Compatible with THERMAWAVE equipment. Part No. 81-004850.
THERMAWAVE
81-004851
PROM Assembly,SECS B BOOT PROM D
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SECS B BOOT PROM D. Compatible with THERMAWAVE equipment. Part No. 81-004851.
THERMAWAVE
81-007014
PAL Assembly,OP Auto Focus,ADDriver DECODE 1
spare_part
High-quality nan for THERMAWAVE CMP tool. PAL Assembly,OP Auto Focus,ADDriver DECODE 1. Compatible with THERMAWAVE equipment. Part No. 81-007014.
THERMAWAVE
81-008109
PAL Assembly,CASS SENS
spare_part
High-quality nan for THERMAWAVE CMP tool. PAL Assembly,CASS SENS. Compatible with THERMAWAVE equipment. Part No. 81-008109.
THERMAWAVE
81-008562
PROM Assembly,SCSI/SECSBOOT A,U49
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT A,U49. Compatible with THERMAWAVE equipment. Part No. 81-008562.
THERMAWAVE
81-008563
PROM Assembly,SCSI/SECSBOOT A,U50
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT A,U50. Compatible with THERMAWAVE equipment. Part No. 81-008563.
THERMAWAVE
81-008564
PROM Assembly,SCSI/SECSBOOT A,U51
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT A,U51. Compatible with THERMAWAVE equipment. Part No. 81-008564.
THERMAWAVE
81-008565
PROM Assembly,SCSI/SECSBOOT A,U52
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT A,U52. Compatible with THERMAWAVE equipment. Part No. 81-008565.
THERMAWAVE
81-008627
PROM Assembly,SCSI/SECSBOOT B,U49
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT B,U49. Compatible with THERMAWAVE equipment. Part No. 81-008627.
THERMAWAVE
81-008628
PROM Assembly,SCSI/SECSBOOT B,U50
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT B,U50. Compatible with THERMAWAVE equipment. Part No. 81-008628.
THERMAWAVE
81-008629
PROM Assembly,SCSI/SECSBOOT B,U51
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT B,U51. Compatible with THERMAWAVE equipment. Part No. 81-008629.
THERMAWAVE
81-008630
PROM Assembly,SCSI/SECSBOOT B,U52
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,SCSI/SECSBOOT B,U52. Compatible with THERMAWAVE equipment. Part No. 81-008630.
THERMAWAVE
81-008646
PROM Assembly,Cognex,U1L
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,Cognex,U1L. Compatible with THERMAWAVE equipment. Part No. 81-008646.
THERMAWAVE
81-008647
PROM Assembly,Cognex,U1M
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,Cognex,U1M. Compatible with THERMAWAVE equipment. Part No. 81-008647.
THERMAWAVE
81-010080
PAL Assembly,OP Analog CNTRL LOGIC3
spare_part
High-quality nan for THERMAWAVE CMP tool. PAL Assembly,OP Analog CNTRL LOGIC3. Compatible with THERMAWAVE equipment. Part No. 81-010080.
THERMAWAVE
81-011038
PROM Assembly,CPU,PLC
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,CPU,PLC. Compatible with THERMAWAVE equipment. Part No. 81-011038.
THERMAWAVE
81-011432
PROM Assembly,ADAPTEC SCSI CTRL,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. PROM Assembly,ADAPTEC SCSI CTRL,OP. Compatible with THERMAWAVE equipment. Part No. 81-011432.
THERMAWAVE
81-011460
Equipe Robot,Eprom SET (LATEStandard)
spare_part
High-quality nan for THERMAWAVE CMP tool. Equipe Robot,Eprom SET (LATEStandard). Compatible with THERMAWAVE equipment. Part No. 81-011460.
THERMAWAVE
81-022013
EEPROM,4K WORDS MEMORY CASS
spare_part
High-quality nan for THERMAWAVE CMP tool. EEPROM,4K WORDS MEMORY CASS. Compatible with THERMAWAVE equipment. Part No. 81-022013.
THERMAWAVE
81-026526
EPROM
spare_part
High-quality nan for THERMAWAVE CMP tool. EPROM. Compatible with THERMAWAVE equipment. Part No. 81-026526.
THERMAWAVE
82-002165
Tooling,SPOOL ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,SPOOL ADJ. Compatible with THERMAWAVE equipment. Part No. 82-002165.
THERMAWAVE
82-002391
Tooling,Dichroic Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Dichroic Alignment. Compatible with THERMAWAVE equipment. Part No. 82-002391.
THERMAWAVE
82-002472-01
OBS. PLUG,Laser Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PLUG,Laser Alignment. Compatible with THERMAWAVE equipment. Part No. 82-002472-01.
THERMAWAVE
82-002472-02
OBS. PLUG,Laser Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PLUG,Laser Alignment. Compatible with THERMAWAVE equipment. Part No. 82-002472-02.
THERMAWAVE
82-002473
GAUGE,HEIGHT,Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. GAUGE,HEIGHT,Laser. Compatible with THERMAWAVE equipment. Part No. 82-002473.
THERMAWAVE
82-002474
Target,FINACTIVEL TM
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,FINACTIVEL TM. Compatible with THERMAWAVE equipment. Part No. 82-002474.
THERMAWAVE
82-002475
Target,Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,Detector. Compatible with THERMAWAVE equipment. Part No. 82-002475.
THERMAWAVE
82-002482
Target Assembly,ARGON Detector
spare_part
High-quality nan for THERMAWAVE CMP tool. Target Assembly,ARGON Detector. Compatible with THERMAWAVE equipment. Part No. 82-002482.
THERMAWAVE
82-002525-01
OBS. PLUG,Target
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PLUG,Target. Compatible with THERMAWAVE equipment. Part No. 82-002525-01.
THERMAWAVE
82-002525-02
OBS. PLUG,Target
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS. PLUG,Target. Compatible with THERMAWAVE equipment. Part No. 82-002525-02.
THERMAWAVE
82-003202
SLIDE,Filter HOLDER
spare_part
High-quality nan for THERMAWAVE CMP tool. SLIDE,Filter HOLDER. Compatible with THERMAWAVE equipment. Part No. 82-003202.
THERMAWAVE
82-003206
BLOCK,Beam ANALYZER
spare_part
High-quality nan for THERMAWAVE CMP tool. BLOCK,Beam ANALYZER. Compatible with THERMAWAVE equipment. Part No. 82-003206.
THERMAWAVE
82-003211
HOLDER,SPOOL Power Meter
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,SPOOL Power Meter. Compatible with THERMAWAVE equipment. Part No. 82-003211.
THERMAWAVE
82-003311
WFR,MOCK,6IN CENTERING
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,MOCK,6IN CENTERING. Compatible with THERMAWAVE equipment. Part No. 82-003311.
THERMAWAVE
82-003388
Tooling,Align, Motor PL,PHI
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Align, Motor PL,PHI. Compatible with THERMAWAVE equipment. Part No. 82-003388.
THERMAWAVE
82-003904
ARM,Align, Robot TO CHUCK
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,Align, Robot TO CHUCK. Compatible with THERMAWAVE equipment. Part No. 82-003904.
THERMAWAVE
82-003905
ARM,Align, Robot TO PLATF
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,Align, Robot TO PLATF. Compatible with THERMAWAVE equipment. Part No. 82-003905.
THERMAWAVE
82-003907
PL,CENTERING,Robot TO PLATF
spare_part
High-quality nan for THERMAWAVE CMP tool. PL,CENTERING,Robot TO PLATF. Compatible with THERMAWAVE equipment. Part No. 82-003907.
THERMAWAVE
82-004055
ARM,Robot LEVELING
spare_part
High-quality nan for THERMAWAVE CMP tool. ARM,Robot LEVELING. Compatible with THERMAWAVE equipment. Part No. 82-004055.
THERMAWAVE
82-004712
Target,Robot
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,Robot. Compatible with THERMAWAVE equipment. Part No. 82-004712.
THERMAWAVE
82-004920
GAUGE,AR Laser PAD
spare_part
High-quality nan for THERMAWAVE CMP tool. GAUGE,AR Laser PAD. Compatible with THERMAWAVE equipment. Part No. 82-004920.
THERMAWAVE
82-006193
Fixture,Auto Focus,5X Lens,T9
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,Auto Focus,5X Lens,T9. Compatible with THERMAWAVE equipment. Part No. 82-006193.
THERMAWAVE
82-007504
Target,Align, T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,Align, T12. Compatible with THERMAWAVE equipment. Part No. 82-007504.
THERMAWAVE
82-007970
Fixture,CASS Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,CASS Alignment. Compatible with THERMAWAVE equipment. Part No. 82-007970.
THERMAWAVE
82-007971
Fixture,Theta Stage Alignment
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,Theta Stage Alignment. Compatible with THERMAWAVE equipment. Part No. 82-007971.
THERMAWAVE
82-008119
Tooling,PIN,EXTRACTOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PIN,EXTRACTOR. Compatible with THERMAWAVE equipment. Part No. 82-008119.
THERMAWAVE
82-008120
PCB,EXTENDER,PC-AT,16BIT
spare_part
High-quality nan for THERMAWAVE CMP tool. PCB,EXTENDER,PC-AT,16BIT. Compatible with THERMAWAVE equipment. Part No. 82-008120.
THERMAWAVE
82-008121
Tooling,CHAPMAN HEXSET
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,CHAPMAN HEXSET. Compatible with THERMAWAVE equipment. Part No. 82-008121.
THERMAWAVE
82-008122
WRENCH,HEX,3/8
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,HEX,3/8. Compatible with THERMAWAVE equipment. Part No. 82-008122.
THERMAWAVE
82-008327
Tooling,Target Alignment,LGE APT
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Target Alignment,LGE APT. Compatible with THERMAWAVE equipment. Part No. 82-008327.
THERMAWAVE
82-008618
Tooling,ADJ,1/4 WAVE,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,ADJ,1/4 WAVE,T12. Compatible with THERMAWAVE equipment. Part No. 82-008618.
THERMAWAVE
82-008619
Tooling,PLTF/ROBT LOC VERIFY,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PLTF/ROBT LOC VERIFY,T12. Compatible with THERMAWAVE equipment. Part No. 82-008619.
THERMAWAVE
82-008621
Fixture,A/F ALIGN
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,A/F ALIGN. Compatible with THERMAWAVE equipment. Part No. 82-008621.
THERMAWAVE
82-008663
Tooling,Robot Alignment,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Robot Alignment,T12. Compatible with THERMAWAVE equipment. Part No. 82-008663.
THERMAWAVE
82-008709
Tooling,PIN,Small Robot PADDLE RE
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PIN,Small Robot PADDLE RE. Compatible with THERMAWAVE equipment. Part No. 82-008709.
THERMAWAVE
82-008721
Tooling,Power Meter StandardAND,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Power Meter StandardAND,T12. Compatible with THERMAWAVE equipment. Part No. 82-008721.
THERMAWAVE
82-009191
Tooling,CHUCK Align, 5IN,OVR CNTR
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,CHUCK Align, 5IN,OVR CNTR. Compatible with THERMAWAVE equipment. Part No. 82-009191.
THERMAWAVE
82-009300
Tooling,Platform Alignment,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Platform Alignment,200MM. Compatible with THERMAWAVE equipment. Part No. 82-009300.
THERMAWAVE
82-009761
WFR,NATIVE OXIDE,150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,NATIVE OXIDE,150MM. Compatible with THERMAWAVE equipment. Part No. 82-009761.
High-quality nan for THERMAWAVE CMP tool. Ina, WFR,20-0019000A,OX WDG,150MM repl.by 82-164209. Compatible with THERMAWAVE equipment. Part No. 82-009762.
THERMAWAVE
82-009766
WFR,775A,NITRIDE,150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,775A,NITRIDE,150MM. Compatible with THERMAWAVE equipment. Part No. 82-009766.
THERMAWAVE
82-009812
Carrier/Container,With Auto Focus,150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Carrier/Container,With Auto Focus,150MM. Compatible with THERMAWAVE equipment. Part No. 82-009812.
THERMAWAVE
82-009813
CARRIER/CONTAINER,WAFER,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CARRIER/CONTAINER,WAFER,200MM. Compatible with THERMAWAVE equipment. Part No. 82-009813.
THERMAWAVE
82-009928
Fixture,CENTERING,Platform
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,CENTERING,Platform. Compatible with THERMAWAVE equipment. Part No. 82-009928.
THERMAWAVE
82-010072
Target,Mirror,FINACTIVEL Turn,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,Mirror,FINACTIVEL Turn,OP. Compatible with THERMAWAVE equipment. Part No. 82-010072.
THERMAWAVE
82-010086
Target,Beam Align, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,Beam Align, OP. Compatible with THERMAWAVE equipment. Part No. 82-010086.
THERMAWAVE
82-010995
Wafer, TW Implant Standard, 700TW, 150MM "Do not order at this level"
spare_part
High-quality nan for THERMAWAVE CMP tool. Wafer, TW Implant Standard, 700TW, 150MM "Do not order at this level". Compatible with THERMAWAVE equipment. Part No. 82-010995.
THERMAWAVE
82-011098
Fixture,Robot CENTERING
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,Robot CENTERING. Compatible with THERMAWAVE equipment. Part No. 82-011098.
THERMAWAVE
82-011359
Fixture,NOSEPIECE Align, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,NOSEPIECE Align, OP. Compatible with THERMAWAVE equipment. Part No. 82-011359.
THERMAWAVE
82-011597
Fixture,Align, Target,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,Align, Target,TP500. Compatible with THERMAWAVE equipment. Part No. 82-011597.
THERMAWAVE
82-011635
Tooling,Camera,.040IN OFFSET,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Camera,.040IN OFFSET,UV. Compatible with THERMAWAVE equipment. Part No. 82-011635.
THERMAWAVE
82-011778
Tooling,ROTATION,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,ROTATION,UV. Compatible with THERMAWAVE equipment. Part No. 82-011778.
THERMAWAVE
82-012173
Tooling,Camera,.110IN,OFFSET,DET ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Camera,.110IN,OFFSET,DET ADJ. Compatible with THERMAWAVE equipment. Part No. 82-012173.
THERMAWAVE
82-012249
Tooling,Camera,.080 OFFSET,Auto Focus TL ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Camera,.080 OFFSET,Auto Focus TL ADJ. Compatible with THERMAWAVE equipment. Part No. 82-012249.
THERMAWAVE
82-012949
Target,FRONT Aperture,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,FRONT Aperture,UV. Compatible with THERMAWAVE equipment. Part No. 82-012949.
THERMAWAVE
82-012950
Target,REAR IMAGE,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Target,REAR IMAGE,UV. Compatible with THERMAWAVE equipment. Part No. 82-012950.
THERMAWAVE
82-013123
Tooling,Aperture,Align, PMT,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Aperture,Align, PMT,UV. Compatible with THERMAWAVE equipment. Part No. 82-013123.
THERMAWAVE
82-013601
Tooling,DUAL Beam ALIGN
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,DUAL Beam ALIGN. Compatible with THERMAWAVE equipment. Part No. 82-013601.
THERMAWAVE
82-013602
Tooling,SPANNER,ObjectiveECTIVE,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,SPANNER,ObjectiveECTIVE,UV. Compatible with THERMAWAVE equipment. Part No. 82-013602.
THERMAWAVE
82-013603
Tooling,Lens HOLDER,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Lens HOLDER,UV. Compatible with THERMAWAVE equipment. Part No. 82-013603.
THERMAWAVE
82-013604
Tooling,Mirror,BLOCK,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Mirror,BLOCK,UV. Compatible with THERMAWAVE equipment. Part No. 82-013604.
THERMAWAVE
82-013684
WFR,400A,NITRIDE,150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,400A,NITRIDE,150MM. Compatible with THERMAWAVE equipment. Part No. 82-013684.
THERMAWAVE
82-013695
Tooling,Camera,1/8StandardRK,3/32PIN,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Camera,1/8StandardRK,3/32PIN,UV. Compatible with THERMAWAVE equipment. Part No. 82-013695.
THERMAWAVE
82-013696
GOGGLES,SAuto FocusETY,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. GOGGLES,SAuto FocusETY,UV. Compatible with THERMAWAVE equipment. Part No. 82-013696.
THERMAWAVE
82-013856
Tooling,HLDriver,HOLMI OX FLTR,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,HLDriver,HOLMI OX FLTR,DUV. Compatible with THERMAWAVE equipment. Part No. 82-013856.
THERMAWAVE
82-013857
Tooling,Target,IUV DET,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Target,IUV DET,DUV. Compatible with THERMAWAVE equipment. Part No. 82-013857.
THERMAWAVE
82-014454
Tooling,MICR Assembly,PMT,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,MICR Assembly,PMT,DUV. Compatible with THERMAWAVE equipment. Part No. 82-014454.
THERMAWAVE
82-014603
Tooling,Target,FNL Turn MIRR,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Target,FNL Turn MIRR,UV. Compatible with THERMAWAVE equipment. Part No. 82-014603.
THERMAWAVE
82-014780
Wafer, TW, 200MM, Uniformity
spare_part
High-quality nan for THERMAWAVE CMP tool. Wafer, TW, 200MM, Uniformity. Compatible with THERMAWAVE equipment. Part No. 82-014780.
THERMAWAVE
82-014935
Tooling,Lens HTR TEStandard BOX
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Lens HTR TEStandard BOX. Compatible with THERMAWAVE equipment. Part No. 82-014935.
THERMAWAVE
82-014941
KEY,L,HEX,Kit, REF ENCL
spare_part
High-quality nan for THERMAWAVE CMP tool. KEY,L,HEX,Kit, REF ENCL. Compatible with THERMAWAVE equipment. Part No. 82-014941.
THERMAWAVE
82-014975
ToolingBOX,FSE,TP/OP
spare_part
High-quality nan for THERMAWAVE CMP tool. ToolingBOX,FSE,TP/OP. Compatible with THERMAWAVE equipment. Part No. 82-014975.
THERMAWAVE
82-015091
Fixture, Alignment, Base, Laser, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture, Alignment, Base, Laser, OP. Compatible with THERMAWAVE equipment. Part No. 82-015091.
THERMAWAVE
82-015531
Tooling,CRIMPER,28-16AWG
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,CRIMPER,28-16AWG. Compatible with THERMAWAVE equipment. Part No. 82-015531.
THERMAWAVE
82-015991
Tooling,WRENCH,SPNR,OAL,Hene
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,WRENCH,SPNR,OAL,Hene. Compatible with THERMAWAVE equipment. Part No. 82-015991.
THERMAWAVE
82-016480
WFR,NATIVE OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,NATIVE OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016480.
THERMAWAVE
82-016481
OBS.Wafer,20-19000A,OX Wedge,200MM- do not order
spare_part
High-quality nan for THERMAWAVE CMP tool. OBS.Wafer,20-19000A,OX Wedge,200MM- do not order. Compatible with THERMAWAVE equipment. Part No. 82-016481.
THERMAWAVE
82-016482
WFR,75A OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,75A OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016482.
THERMAWAVE
82-016483
WFR,7500A,OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,7500A,OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016483.
THERMAWAVE
82-016485
WFR,200A,OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200A,OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016485.
THERMAWAVE
82-016486
WFR,500A,OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,500A,OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016486.
THERMAWAVE
82-016487
WFR,1000A,OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,1000A,OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016487.
THERMAWAVE
82-016488
WFR,2000A,OXIDE,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,2000A,OXIDE,200MM. Compatible with THERMAWAVE equipment. Part No. 82-016488.
THERMAWAVE
82-016856
TARGET,BEAM CHECK,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. TARGET,BEAM CHECK,P34. Compatible with THERMAWAVE equipment. Part No. 82-016856.
THERMAWAVE
82-017718
TOOL,TARGET,THIN,FLAT,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOL,TARGET,THIN,FLAT,P34. Compatible with THERMAWAVE equipment. Part No. 82-017718.
THERMAWAVE
82-018056
WFR,GLASS,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,GLASS,300MM. Compatible with THERMAWAVE equipment. Part No. 82-018056.
THERMAWAVE
82-018475
Tooling,Camera,REF-MOD ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,Camera,REF-MOD ADJ. Compatible with THERMAWAVE equipment. Part No. 82-018475.
THERMAWAVE
82-018477
Tooling,JAY Mirror ADJ,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,JAY Mirror ADJ,P34. Compatible with THERMAWAVE equipment. Part No. 82-018477.
THERMAWAVE
82-018776
FIXTURE,PRE-ALIGNER
spare_part
High-quality nan for THERMAWAVE CMP tool. FIXTURE,PRE-ALIGNER. Compatible with THERMAWAVE equipment. Part No. 82-018776.
THERMAWAVE
82-018803
Tooling,BASE,TWIN MIR,TEStandard,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,BASE,TWIN MIR,TEStandard,P34. Compatible with THERMAWAVE equipment. Part No. 82-018803.
THERMAWAVE
82-018820
Tooling Target,FN LN,PLUG,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Target,FN LN,PLUG,P34. Compatible with THERMAWAVE equipment. Part No. 82-018820.
THERMAWAVE
82-018827
Tool, Level, Cal Bubble, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tool, Level, Cal Bubble, P34. Compatible with THERMAWAVE equipment. Part No. 82-018827.
THERMAWAVE
82-019357
TOOLING,SETUP,PADDLE,T41
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOLING,SETUP,PADDLE,T41. Compatible with THERMAWAVE equipment. Part No. 82-019357.
THERMAWAVE
82-019420
Tooling,BATTERY PACK,3.6V
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,BATTERY PACK,3.6V. Compatible with THERMAWAVE equipment. Part No. 82-019420.
THERMAWAVE
82-019421
Tooling,ScrewEWDriver,CORDLESS
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,ScrewEWDriver,CORDLESS. Compatible with THERMAWAVE equipment. Part No. 82-019421.
THERMAWAVE
82-019424
Tooling,HEX BIT SET
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,HEX BIT SET. Compatible with THERMAWAVE equipment. Part No. 82-019424.
THERMAWAVE
82-019430
Tooling,PADDLE TO PRE-Align, P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PADDLE TO PRE-Align, P34. Compatible with THERMAWAVE equipment. Part No. 82-019430.
THERMAWAVE
82-019435
Tooling,LAMP SPECTRAL CAL
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,LAMP SPECTRAL CAL. Compatible with THERMAWAVE equipment. Part No. 82-019435.
THERMAWAVE
82-019436
TOOL,POWER SUPPLY,110V
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOL,POWER SUPPLY,110V. Compatible with THERMAWAVE equipment. Part No. 82-019436.
THERMAWAVE
82-019437
Tooling,SHIELD Small Aperture
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,SHIELD Small Aperture. Compatible with THERMAWAVE equipment. Part No. 82-019437.
THERMAWAVE
82-020441
Tooling,PADDLE TO CHUCK,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PADDLE TO CHUCK,P34. Compatible with THERMAWAVE equipment. Part No. 82-020441.
THERMAWAVE
82-020547
Wafer, Pattern, Std, OP, 200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Wafer, Pattern, Std, OP, 200MM. Compatible with THERMAWAVE equipment. Part No. 82-020547.
THERMAWAVE
82-021635
CARRIER,WFR,SGL,300MM
spare_part
High-quality nan for THERMAWAVE CMP tool. CARRIER,WFR,SGL,300MM. Compatible with THERMAWAVE equipment. Part No. 82-021635.
THERMAWAVE
82-021942
FIXTURE,DESORBER
spare_part
High-quality nan for THERMAWAVE CMP tool. FIXTURE,DESORBER. Compatible with THERMAWAVE equipment. Part No. 82-021942.
THERMAWAVE
82-022153
TOOL,DOOR REMOVAL,300MM FOUP
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOL,DOOR REMOVAL,300MM FOUP. Compatible with THERMAWAVE equipment. Part No. 82-022153.
THERMAWAVE
82-023851
Tool, Base, TEC ADH Fixture
spare_part
High-quality nan for THERMAWAVE CMP tool. Tool, Base, TEC ADH Fixture. Compatible with THERMAWAVE equipment. Part No. 82-023851.
THERMAWAVE
82-023852
Tool, Block, TEC ADH Fiber Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Tool, Block, TEC ADH Fiber Laser. Compatible with THERMAWAVE equipment. Part No. 82-023852.
THERMAWAVE
82-025246
TOOL,POT ADJUST,ESD,BLK
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOL,POT ADJUST,ESD,BLK. Compatible with THERMAWAVE equipment. Part No. 82-025246.
THERMAWAVE
82-164115
WFR,PATTERN,300MM,STG CAL
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,PATTERN,300MM,STG CAL. Compatible with THERMAWAVE equipment. Part No. 82-164115.
THERMAWAVE
82-164165
Obs.WFR,150NM Trench,POLY/OX,200MM repl. by 82-164281
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs.WFR,150NM Trench,POLY/OX,200MM repl. by 82-164281. Compatible with THERMAWAVE equipment. Part No. 82-164165.
THERMAWAVE
82-164203
WFR,200MM,1E12,20KEV,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200MM,1E12,20KEV,TP. Compatible with THERMAWAVE equipment. Part No. 82-164203.
THERMAWAVE
82-164204
WFR,200MM,2E12,20KEV,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200MM,2E12,20KEV,TP. Compatible with THERMAWAVE equipment. Part No. 82-164204.
THERMAWAVE
82-164205
WFR,200MM,5E12,20KEV,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200MM,5E12,20KEV,TP. Compatible with THERMAWAVE equipment. Part No. 82-164205.
THERMAWAVE
82-164206
WFR,200MM,1E13,20KEV,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200MM,1E13,20KEV,TP. Compatible with THERMAWAVE equipment. Part No. 82-164206.
THERMAWAVE
82-164207
WFR,200MM,5E13,20KEV,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR,200MM,5E13,20KEV,TP. Compatible with THERMAWAVE equipment. Part No. 82-164207.
THERMAWAVE
85-007499
Software,MS-DOS,PC-AT
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,MS-DOS,PC-AT. Compatible with THERMAWAVE equipment. Part No. 85-007499.
THERMAWAVE
85-008362
Software,4.05A,IMS_HD,TP250
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,4.05A,IMS_HD,TP250. Compatible with THERMAWAVE equipment. Part No. 85-008362.
THERMAWAVE
85-010140
Software,5.03A,SECS,TP400
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,5.03A,SECS,TP400. Compatible with THERMAWAVE equipment. Part No. 85-010140.
THERMAWAVE
85-010150
Software,5.03A,MMS,TP400
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,5.03A,MMS,TP400. Compatible with THERMAWAVE equipment. Part No. 85-010150.
THERMAWAVE
85-013370
Software,Service SupportPORT,P26
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,Service SupportPORT,P26. Compatible with THERMAWAVE equipment. Part No. 85-013370.
THERMAWAVE
85-013668
Software, VBSE100
spare_part
High-quality nan for THERMAWAVE CMP tool. Software, VBSE100. Compatible with THERMAWAVE equipment. Part No. 85-013668.
THERMAWAVE
85-014065
Software,6.03A,Standard,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,6.03A,Standard,TP420. Compatible with THERMAWAVE equipment. Part No. 85-014065.
THERMAWAVE
85-014066
Software,6.03A,MMS,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,6.03A,MMS,TP420. Compatible with THERMAWAVE equipment. Part No. 85-014066.
THERMAWAVE
85-014067
Software,6.03A,SECS,TP420
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,6.03A,SECS,TP420. Compatible with THERMAWAVE equipment. Part No. 85-014067.
THERMAWAVE
85-014191
Software,Equipe,ESC200,SETUP
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,Equipe,ESC200,SETUP. Compatible with THERMAWAVE equipment. Part No. 85-014191.
THERMAWAVE
85-014744
Software,2.04D,Optici-Probe
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,2.04D,Optici-Probe. Compatible with THERMAWAVE equipment. Part No. 85-014744.
THERMAWAVE
85-014746
Software,3.00A,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,3.00A,OP. Compatible with THERMAWAVE equipment. Part No. 85-014746.
THERMAWAVE
85-017133
Software,1.1C,TP500,MMS
spare_part
High-quality nan for THERMAWAVE CMP tool. Software,1.1C,TP500,MMS. Compatible with THERMAWAVE equipment. Part No. 85-017133.
THERMAWAVE
85-020466
EG,Software,2.04E,ServicePACK,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,Software,2.04E,ServicePACK,OP. Compatible with THERMAWAVE equipment. Part No. 85-020466.
THERMAWAVE
85-021585
Software, SCSI Utility, OP2690
spare_part
High-quality nan for THERMAWAVE CMP tool. Software, SCSI Utility, OP2690. Compatible with THERMAWAVE equipment. Part No. 85-021585.
THERMAWAVE
85-021744
SOFTWARE, INSTL, OP52XXNT FILES
spare_part
High-quality nan for THERMAWAVE CMP tool. SOFTWARE, INSTL, OP52XXNT FILES. Compatible with THERMAWAVE equipment. Part No. 85-021744.
THERMAWAVE
85-021870
SOFTWARE, INSTL, NAV FOR DOS
spare_part
High-quality nan for THERMAWAVE CMP tool. SOFTWARE, INSTL, NAV FOR DOS. Compatible with THERMAWAVE equipment. Part No. 85-021870.
THERMAWAVE
86-003281-01
Cable Assembly,TEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TEStandard. Compatible with THERMAWAVE equipment. Part No. 86-003281-01.
THERMAWAVE
86-003282-01
Cable Assembly,TEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TEStandard. Compatible with THERMAWAVE equipment. Part No. 86-003282-01.
THERMAWAVE
86-003282-02
Cable Assembly,TEStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,TEStandard. Compatible with THERMAWAVE equipment. Part No. 86-003282-02.
THERMAWAVE
86-003283-01
Cable Assembly,Detector JUMPER
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,Detector JUMPER. Compatible with THERMAWAVE equipment. Part No. 86-003283-01.
THERMAWAVE
86-003335
Obs. Fixture Assembly,TEStandard,AR Laser
spare_part
High-quality nan for THERMAWAVE CMP tool. Obs. Fixture Assembly,TEStandard,AR Laser. Compatible with THERMAWAVE equipment. Part No. 86-003335.
THERMAWAVE
86-003370
Detector Assembly,DOM
spare_part
High-quality nan for THERMAWAVE CMP tool. Detector Assembly,DOM. Compatible with THERMAWAVE equipment. Part No. 86-003370.
THERMAWAVE
86-003464
Fixture,Align, Stage AND REF
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture,Align, Stage AND REF. Compatible with THERMAWAVE equipment. Part No. 86-003464.
THERMAWAVE
86-004082
HOLDER,Power Meter,PhotoSENSOR
spare_part
High-quality nan for THERMAWAVE CMP tool. HOLDER,Power Meter,PhotoSENSOR. Compatible with THERMAWAVE equipment. Part No. 86-004082.
THERMAWAVE
86-004794
Cable Assembly,AR LaserPower ADJ
spare_part
High-quality nan for THERMAWAVE CMP tool. Cable Assembly,AR LaserPower ADJ. Compatible with THERMAWAVE equipment. Part No. 86-004794.
THERMAWAVE
86-008727
Tooling Assembly,Cable,Laser P/S SETUP
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Cable,Laser P/S SETUP. Compatible with THERMAWAVE equipment. Part No. 86-008727.
THERMAWAVE
86-009814
KIT,WAFER,STD ACCEPT,OP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,WAFER,STD ACCEPT,OP. Compatible with THERMAWAVE equipment. Part No. 86-009814.
THERMAWAVE
86-010300
Tooling Assembly,AR EXHAUStandard TEMP MEAS
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,AR EXHAUStandard TEMP MEAS. Compatible with THERMAWAVE equipment. Part No. 86-010300.
THERMAWAVE
86-010983
Fixture Assembly,Alignment SCOPE
spare_part
High-quality nan for THERMAWAVE CMP tool. Fixture Assembly,Alignment SCOPE. Compatible with THERMAWAVE equipment. Part No. 86-010983.
THERMAWAVE
86-011002
WFR Assembly,TW IMPLNT Standard,700TW
spare_part
High-quality nan for THERMAWAVE CMP tool. WFR Assembly,TW IMPLNT Standard,700TW. Compatible with THERMAWAVE equipment. Part No. 86-011002.
THERMAWAVE
86-011777
SCOPE Assembly,Alignment,R-SPECTRO
spare_part
High-quality nan for THERMAWAVE CMP tool. SCOPE Assembly,Alignment,R-SPECTRO. Compatible with THERMAWAVE equipment. Part No. 86-011777.
THERMAWAVE
86-013799
Kit, WAuto FocusER,Standard ACCEPT,DUV
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, WAuto FocusER,Standard ACCEPT,DUV. Compatible with THERMAWAVE equipment. Part No. 86-013799.
THERMAWAVE
86-014787
Kit, WAuto FocusER,TP Standard ACCEPTANCE
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, WAuto FocusER,TP Standard ACCEPTANCE. Compatible with THERMAWAVE equipment. Part No. 86-014787.
THERMAWAVE
86-016624
Kit, WAuto FocusER SET,200MM
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, WAuto FocusER SET,200MM. Compatible with THERMAWAVE equipment. Part No. 86-016624.
THERMAWAVE
86-016625
Kit, WAuto FocusER SET,200MM,UV
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, WAuto FocusER SET,200MM,UV. Compatible with THERMAWAVE equipment. Part No. 86-016625.
THERMAWAVE
86-017331
Tooling Assembly,PINHOLE Align, OP
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,PINHOLE Align, OP. Compatible with THERMAWAVE equipment. Part No. 86-017331.
THERMAWAVE
86-018639
Tooling Assembly,Target,SM FLDGMIR
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Target,SM FLDGMIR. Compatible with THERMAWAVE equipment. Part No. 86-018639.
THERMAWAVE
86-018641
Tooling Assembly,Filter,470NM
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Filter,470NM. Compatible with THERMAWAVE equipment. Part No. 86-018641.
THERMAWAVE
86-018787
Tooling Assembly,Mirror,BOOStandardER,P3
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Mirror,BOOStandardER,P3. Compatible with THERMAWAVE equipment. Part No. 86-018787.
THERMAWAVE
86-018886
Tooling Assembly,Target,UP,OAL,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Target,UP,OAL,P34. Compatible with THERMAWAVE equipment. Part No. 86-018886.
THERMAWAVE
86-019131
Tooling Assembly,TRGT,OAL DET,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,TRGT,OAL DET,P34. Compatible with THERMAWAVE equipment. Part No. 86-019131.
THERMAWAVE
86-019285
Kit, Wafer Acceptance, OP5240
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit, Wafer Acceptance, OP5240. Compatible with THERMAWAVE equipment. Part No. 86-019285.
THERMAWAVE
86-019723
Tooling Assembly,Filter,720NM
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling Assembly,Filter,720NM. Compatible with THERMAWAVE equipment. Part No. 86-019723.
THERMAWAVE
86-019893
Target Assembly,FINE LINE,P34
spare_part
High-quality nan for THERMAWAVE CMP tool. Target Assembly,FINE LINE,P34. Compatible with THERMAWAVE equipment. Part No. 86-019893.
THERMAWAVE
86-021622
KIT WAFER ACCEPT,300MM,P35
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT WAFER ACCEPT,300MM,P35. Compatible with THERMAWAVE equipment. Part No. 86-021622.
THERMAWAVE
86-021623
KIT,WFR ACCEPT,300MM,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT,WFR ACCEPT,300MM,TP. Compatible with THERMAWAVE equipment. Part No. 86-021623.
THERMAWAVE
86-022649
Kit WFR Accept, 200MM,OP53XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. Kit WFR Accept, 200MM,OP53XXX. Compatible with THERMAWAVE equipment. Part No. 86-022649.
THERMAWAVE
86-025767
KIT, WAFER, STD ACCEPT, 150MM
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, WAFER, STD ACCEPT, 150MM. Compatible with THERMAWAVE equipment. Part No. 86-025767.
THERMAWAVE
86-026886
KIT, WFR ACCEPT, 200MM, OP73
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, WFR ACCEPT, 200MM, OP73. Compatible with THERMAWAVE equipment. Part No. 86-026886.
THERMAWAVE
86-122497
FIXTURE ASSY,LASER MT
spare_part
High-quality nan for THERMAWAVE CMP tool. FIXTURE ASSY,LASER MT. Compatible with THERMAWAVE equipment. Part No. 86-122497.
THERMAWAVE
86-173682
EG,KIT,WFR,200MM,LO DOSE,TP
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,KIT,WFR,200MM,LO DOSE,TP. Compatible with THERMAWAVE equipment. Part No. 86-173682.
THERMAWAVE
87-003387
WRENCH,SET,ALLEN,SAE
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,SET,ALLEN,SAE. Compatible with THERMAWAVE equipment. Part No. 87-003387.
THERMAWAVE
87-003473
Tooling,HAND,WIRE WRAP/UNWRAP
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,HAND,WIRE WRAP/UNWRAP. Compatible with THERMAWAVE equipment. Part No. 87-003473.
THERMAWAVE
87-003480
O-SCOPE,TEKTRONICS,10MHZ
spare_part
High-quality nan for THERMAWAVE CMP tool. O-SCOPE,TEKTRONICS,10MHZ. Compatible with THERMAWAVE equipment. Part No. 87-003480.
THERMAWAVE
87-003630
WRENCH,OPEN END,30DEG,1.12
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,OPEN END,30DEG,1.12. Compatible with THERMAWAVE equipment. Part No. 87-003630.
THERMAWAVE
87-003631
WRENCH,TAPPET,15DEG,3/4X7/8
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,TAPPET,15DEG,3/4X7/8. Compatible with THERMAWAVE equipment. Part No. 87-003631.
THERMAWAVE
87-003632
WRENCH,TAPPET,15DEG,15/16X1
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,TAPPET,15DEG,15/16X1. Compatible with THERMAWAVE equipment. Part No. 87-003632.
THERMAWAVE
87-005076
WRENCH,OPEN END 9/16-5/8
spare_part
High-quality nan for THERMAWAVE CMP tool. WRENCH,OPEN END 9/16-5/8. Compatible with THERMAWAVE equipment. Part No. 87-005076.
THERMAWAVE
87-017127
APPLICATOR,SYRINGE,3CC
spare_part
High-quality nan for THERMAWAVE CMP tool. APPLICATOR,SYRINGE,3CC. Compatible with THERMAWAVE equipment. Part No. 87-017127.
THERMAWAVE
87-018560
Tooling,PROBE,OSCSCP,MOD,ADJ,250M
spare_part
High-quality nan for THERMAWAVE CMP tool. Tooling,PROBE,OSCSCP,MOD,ADJ,250M. Compatible with THERMAWAVE equipment. Part No. 87-018560.
THERMAWAVE
87-089570
TOOL,GUN,GREASE,THK
spare_part
High-quality nan for THERMAWAVE CMP tool. TOOL,GUN,GREASE,THK. Compatible with THERMAWAVE equipment. Part No. 87-089570.
THERMAWAVE
89-003368
Screw,Panel,CAPTIVE,10-24X3/4
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,Panel,CAPTIVE,10-24X3/4. Compatible with THERMAWAVE equipment. Part No. 89-003368.
THERMAWAVE
89-003512
Screw,CAPTIVE,10-24X1-1/4
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,CAPTIVE,10-24X1-1/4. Compatible with THERMAWAVE equipment. Part No. 89-003512.
THERMAWAVE
89-009092
Screw,WSHR FACE KNURL,10-32X.5
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,WSHR FACE KNURL,10-32X.5. Compatible with THERMAWAVE equipment. Part No. 89-009092.
THERMAWAVE
89-009373
Screw,REF ANCHOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,REF ANCHOR. Compatible with THERMAWAVE equipment. Part No. 89-009373.
THERMAWAVE
89-011005
Screw,PAD,LEVELING,BH
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,PAD,LEVELING,BH. Compatible with THERMAWAVE equipment. Part No. 89-011005.
THERMAWAVE
89-011767
SCR, ADJ,FNL Turn, BLK,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. SCR, ADJ,FNL Turn, BLK,TP500. Compatible with THERMAWAVE equipment. Part No. 89-011767.
THERMAWAVE
89-013430
Screw,PAD LEVELING
spare_part
High-quality nan for THERMAWAVE CMP tool. Screw,PAD LEVELING. Compatible with THERMAWAVE equipment. Part No. 89-013430.
THERMAWAVE
89-020451
BOLT,DOCKING,OP/TP
spare_part
High-quality nan for THERMAWAVE CMP tool. BOLT,DOCKING,OP/TP. Compatible with THERMAWAVE equipment. Part No. 89-020451.
THERMAWAVE
89-090028
EG,LEAD SCREW, COURSE Z, OP5XX
spare_part
High-quality nan for THERMAWAVE CMP tool. EG,LEAD SCREW, COURSE Z, OP5XX. Compatible with THERMAWAVE equipment. Part No. 89-090028.
THERMAWAVE
91-014576
Swagelock Fitting Kit
spare_part
High-quality nan for THERMAWAVE CMP tool. Swagelock Fitting Kit. Compatible with THERMAWAVE equipment. Part No. 91-014576.
THERMAWAVE
91-028495
Pre-Aligner, 301B
spare_part
High-quality nan for THERMAWAVE CMP tool. Pre-Aligner, 301B. Compatible with THERMAWAVE equipment. Part No. 91-028495.
THERMAWAVE
93-002614
WASHER,WAVY,SSR-0100
spare_part
High-quality nan for THERMAWAVE CMP tool. WASHER,WAVY,SSR-0100. Compatible with THERMAWAVE equipment. Part No. 93-002614.
THERMAWAVE
93-003369
NUT,Panel,1/2-28,SStandard
spare_part
High-quality nan for THERMAWAVE CMP tool. NUT,Panel,1/2-28,SStandard. Compatible with THERMAWAVE equipment. Part No. 93-003369.
THERMAWAVE
93-004741
WASHER,9/32IDX1/2 ODX5/32THK
spare_part
High-quality nan for THERMAWAVE CMP tool. WASHER,9/32IDX1/2 ODX5/32THK. Compatible with THERMAWAVE equipment. Part No. 93-004741.
THERMAWAVE
93-010793
WASHER,WAVY,1.781IDX2.00ODX.19
spare_part
High-quality nan for THERMAWAVE CMP tool. WASHER,WAVY,1.781IDX2.00ODX.19. Compatible with THERMAWAVE equipment. Part No. 93-010793.
THERMAWAVE
96-003321
BAG,DESICCANT,CLASS 100,8UNITS
spare_part
High-quality nan for THERMAWAVE CMP tool. BAG,DESICCANT,CLASS 100,8UNITS. Compatible with THERMAWAVE equipment. Part No. 96-003321.
THERMAWAVE
96-005031
Container,Shipping,RPM
spare_part
High-quality nan for THERMAWAVE CMP tool. Container,Shipping,RPM. Compatible with THERMAWAVE equipment. Part No. 96-005031.
THERMAWAVE
96-007785
Container,SHIP,Robot
spare_part
High-quality nan for THERMAWAVE CMP tool. Container,SHIP,Robot. Compatible with THERMAWAVE equipment. Part No. 96-007785.
THERMAWAVE
96-008470
Container,Shipping,T12
spare_part
High-quality nan for THERMAWAVE CMP tool. Container,Shipping,T12. Compatible with THERMAWAVE equipment. Part No. 96-008470.
THERMAWAVE
96-008566
Crate,Shipping,OP MEAS M
spare_part
High-quality nan for THERMAWAVE CMP tool. Crate,Shipping,OP MEAS M. Compatible with THERMAWAVE equipment. Part No. 96-008566.
THERMAWAVE
96-008568
Crate,Shipping,OP ACCESS
spare_part
High-quality nan for THERMAWAVE CMP tool. Crate,Shipping,OP ACCESS. Compatible with THERMAWAVE equipment. Part No. 96-008568.
THERMAWAVE
96-008569
BAG,Shipping,OP MEAS MOD
spare_part
High-quality nan for THERMAWAVE CMP tool. BAG,Shipping,OP MEAS MOD. Compatible with THERMAWAVE equipment. Part No. 96-008569.
THERMAWAVE
96-010934
Crate,Shipping Filter,OP2600B
spare_part
High-quality nan for THERMAWAVE CMP tool. Crate,Shipping Filter,OP2600B. Compatible with THERMAWAVE equipment. Part No. 96-010934.
THERMAWAVE
97-003018
PAPER,CLEAN ROOM COMP,9-1/2X11
spare_part
High-quality nan for THERMAWAVE CMP tool. PAPER,CLEAN ROOM COMP,9-1/2X11. Compatible with THERMAWAVE equipment. Part No. 97-003018.
THERMAWAVE
97-003470
ThermoMeter,DIGITAL
spare_part
High-quality nan for THERMAWAVE CMP tool. ThermoMeter,DIGITAL. Compatible with THERMAWAVE equipment. Part No. 97-003470.
THERMAWAVE
97-003474
TERM,EXTRACTOR
spare_part
High-quality nan for THERMAWAVE CMP tool. TERM,EXTRACTOR. Compatible with THERMAWAVE equipment. Part No. 97-003474.
THERMAWAVE
97-003476
Extender Card,MOTHERBOARD
spare_part
High-quality nan for THERMAWAVE CMP tool. Extender Card,MOTHERBOARD. Compatible with THERMAWAVE equipment. Part No. 97-003476.
THERMAWAVE
97-003477
Extender Card,MULTIBUS
spare_part
High-quality nan for THERMAWAVE CMP tool. Extender Card,MULTIBUS. Compatible with THERMAWAVE equipment. Part No. 97-003477.
THERMAWAVE
97-003478
MULTIMeter,DIGITAL
spare_part
High-quality nan for THERMAWAVE CMP tool. MULTIMeter,DIGITAL. Compatible with THERMAWAVE equipment. Part No. 97-003478.
THERMAWAVE
97-003482
LEVEL,BUBBLE
spare_part
High-quality nan for THERMAWAVE CMP tool. LEVEL,BUBBLE. Compatible with THERMAWAVE equipment. Part No. 97-003482.
THERMAWAVE
97-003639
Meter,AIR VELOCITY
spare_part
High-quality nan for THERMAWAVE CMP tool. Meter,AIR VELOCITY. Compatible with THERMAWAVE equipment. Part No. 97-003639.
THERMAWAVE
97-003721
Obsolete, Camera, CCTV, HV-735
spare_part
High-quality nan for THERMAWAVE CMP tool. Obsolete, Camera, CCTV, HV-735. Compatible with THERMAWAVE equipment. Part No. 97-003721.
THERMAWAVE
97-007254
Inactive - order 97-021020 instead
spare_part
High-quality nan for THERMAWAVE CMP tool. Inactive - order 97-021020 instead. Compatible with THERMAWAVE equipment. Part No. 97-007254.
THERMAWAVE
97-008788
Camera,CCD,MONOCHROME,AUTOIRIS
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,CCD,MONOCHROME,AUTOIRIS. Compatible with THERMAWAVE equipment. Part No. 97-008788.
THERMAWAVE
97-009871
PAPER,Video Printer,HI-RES
spare_part
High-quality nan for THERMAWAVE CMP tool. PAPER,Video Printer,HI-RES. Compatible with THERMAWAVE equipment. Part No. 97-009871.
THERMAWAVE
97-012123
Monitor,14IN,COLR,VGA,DMND PRO
spare_part
High-quality nan for THERMAWAVE CMP tool. Monitor,14IN,COLR,VGA,DMND PRO. Compatible with THERMAWAVE equipment. Part No. 97-012123.
THERMAWAVE
97-012186
Camera,CCD,HI-PRFM,COLOR
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,CCD,HI-PRFM,COLOR. Compatible with THERMAWAVE equipment. Part No. 97-012186.
THERMAWAVE
97-014607
Ina,eter,Optic Power,10MMX10MM AREA repl. 97-009979
spare_part
High-quality nan for THERMAWAVE CMP tool. Ina,eter,Optic Power,10MMX10MM AREA repl. 97-009979. Compatible with THERMAWAVE equipment. Part No. 97-014607.
THERMAWAVE
97-015035
VIEWER,INFRARED,TP500
spare_part
High-quality nan for THERMAWAVE CMP tool. VIEWER,INFRARED,TP500. Compatible with THERMAWAVE equipment. Part No. 97-015035.
THERMAWAVE
97-016714
Camera,CCD,PULNIX 7I will be repl. by 61-154351
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,CCD,PULNIX 7I will be repl. by 61-154351. Compatible with THERMAWAVE equipment. Part No. 97-016714.
THERMAWAVE
97-021020
Camera,CCD PUL,COLR+BW DC SYNC
spare_part
High-quality nan for THERMAWAVE CMP tool. Camera,CCD PUL,COLR+BW DC SYNC. Compatible with THERMAWAVE equipment. Part No. 97-021020.
THERMAWAVE
97-024574
EG, Camera, CCD, Pulnix TM745I, BW
spare_part
High-quality nan for THERMAWAVE CMP tool. EG, Camera, CCD, Pulnix TM745I, BW. Compatible with THERMAWAVE equipment. Part No. 97-024574.
THERMAWAVE
97-026611
SF, Reader, RFID, Advantag, 300FL
spare_part
High-quality nan for THERMAWAVE CMP tool. SF, Reader, RFID, Advantag, 300FL. Compatible with THERMAWAVE equipment. Part No. 97-026611.
THERMAWAVE
97-095771
CAMERA,PULNIX TMC-7DSP
spare_part
High-quality nan for THERMAWAVE CMP tool. CAMERA,PULNIX TMC-7DSP. Compatible with THERMAWAVE equipment. Part No. 97-095771.
THERMAWAVE
61-154351
KIT, RETROFIT, CAMERA, OP5XXX
spare_part
High-quality nan for THERMAWAVE CMP tool. KIT, RETROFIT, CAMERA, OP5XXX. Compatible with THERMAWAVE equipment. Part No. 61-154351.
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Precision-sourced Thermawave spare parts for optimal equipment uptime
Thermawave spare parts are vital to maintaining the functionality of these systems. From heaters and lamps to sensors and optical modules, each part must meet specific tolerance, calibration, and thermal stability standards.
We supply:
Heaters with verified thermal response curves
Optical sensors with wavelength accuracy
Lamp modules with extended lifecycle ratings
Calibration modules
Cooling fans and boards
Control boards, cabling kits, and interface PCBs
Process chamber gaskets and thermal insulation kits
Each part is subjected to a technical review by our in-house team, ensuring conformity with the original system architecture. We support both on-demand requests and long-term procurement strategies. Our goal is to minimize unexpected system downtime by providing fast and reliable access to high-priority spare parts.
We also offer component kits tailored to specific maintenance intervals or process use cases. These kits are ideal for fabs managing multiple Thermawave systems, enabling standardization and reducing the risk of procurement errors.
Why choose Eumetrys Spare Parts for your thermawave heater supply?
Our strengths: • Speed : We deliver critical Thermawave heater parts in as little as 48 hours • Compliance : Each heater is sourced or manufactured under strict ISO-based procedures • Technical validation : We confirm tool compatibility before shipment • Cost efficiency : We help you avoid long OEM cycles and reduce downtime • Field experience : We understand how heater behavior impacts metrology performance • Continuity : We help clients mitigate risks associated with discontinued OEM support
Whether you’re managing a tool retrofit or planning a proactive maintenance cycle, our team provides expertise tailored to your production context. We collaborate with procurement departments, tool owners, and field engineers to define a sourcing plan that matches your fab’s operational tempo.
Multi-brand support and traceable logistics
Our approach to semiconductor spare parts sourcing includes multi-brand compatibility, structured documentation, and integrated support. For Thermawave systems in particular, we track versioning differences between models and provide clear specifications to ensure fit and performance.
Our platform also allows for : Search by tool model or part number • Detailed tech sheets for each heater or module • Traceability documentation and packaging adapted to cleanroom standards • Configurable notifications for product updates or lifecycle end alerts •
With headquarters in France and logistics partners across Europe and Asia, we ensure fast delivery wherever your fab is located. We also provide multilingual assistance (English, French, German) to facilitate smoother communication across multinational teams.
Expertise beyond parts: support for process engineers and maintenance teams
We do more than ship spare parts. Our team collaborates directly with maintenance and engineering teams to:
Investigate heater-related process instability
Recommend preventive replacement cycles
Evaluate refurbishment options when appropriate
Perform sourcing risk assessments
Provide installation guidance and support documentation
In many cases, we’ve helped clients extend the lifespan of their Thermawave tools by integrating adapted upgrade kits or proposing retrofitted components to reduce performance drift. Our technical understanding of these tools allows us to support even the most complex sourcing requirements with confidence.
Frequently sourced Thermawave heater models
Among the most in-demand references we supply:
Thermawave Opti-Probe 5220 heater assembly
Thermawave TP 4200 ceramic heater
Lamp housings and heat shields for Thermawave 3000/4000
Cooling unit fans for Opti-Probe series
Replacement thermocouples and calibration jigs
Digital temperature controllers for legacy models
Even if your reference isn’t listed, our sourcing team can run a match check based on specs or OEM part number. In cases of discontinued parts, we can provide refurbished or compatible alternatives that meet your fab’s qualification standards.
The advantage of a proactive sourcing partner
By working with Eumetrys Spare Parts, you gain access to a network of validated suppliers, reverse-engineering capabilities, and technical documentation support. We combine our sourcing operations with field experience, allowing us to anticipate common failure modes and propose forward-looking procurement strategies.
Our team constantly monitors market availability, alternative manufacturing sources, and compatibility updates to give our clients an edge in spare parts planning. Whether you’re preparing for a quarterly maintenance shutdown or stocking emergency kits, we support your efforts with precision.
We’re not a catalog we’re a partner. We invest time in understanding your operational requirements and create sourcing strategies that align with your KPIs.
Get your thermawave quote today
Our dedicated sourcing team is available to respond quickly to your request. Whether you’re managing a large-scale line or a research tool, we help you stay ahead of unplanned downtime and performance loss.
Explore our offer or contact us now for a quote. We’re here to simplify your Thermawave spare parts procurement and keep your tools productive. Let’s ensure that your semiconductor spare parts strategy remains fast, reliable, and built for long-term success.