KLA-Tencor-SP1-SP2-0023889-000-Ceramic-chuck-upgrade-150mm for precision wafer handling
The KLA-Tencor-SP1-SP2-0023889-000-Ceramic-chuck-upgrade-150mm enhances wafer stability and tool performance. Designed to replace aging or degraded aluminum chucks in legacy KLA SP1 and SP2 systems, this upgrade introduces a high-performance ceramic platform to ensure superior flatness, thermal resistance, and mechanical precision across critical metrology steps.
At Eumetrys Spare Parts, we understand the constraints of semiconductor production lines and the importance of minimizing downtime. The KLA tencor upgrades solution offers an immediate, install-ready response to common issues such as wafer slippage, surface degradation, and non-uniformity introduced by conventional chuck materials.
Key benefits
Reliability improvement with a ceramic contact surface compared to OEM designs prone to wear
• Extended lifetime and reduced risk of particle generation during inspection processes
• Improved process stability and measurement accuracy on Surfscan SP1 and SP2 tools
• Reduced preventive maintenance frequency and lower total cost of ownership
• Fully compatible with OEM SP1 and SP2 chucks for seamless integration
field results
Proven adoption across KLA Surfscan platforms in production fabs
• Demonstrated improvements in inspection repeatability and tool availability
• Direct savings through extended part durability and fewer replacements
high-performance ceramic chuck replacement
The ceramic chuck upgrade offers a robust and precise solution for 150mm wafer handling in SP1/SP2 platforms. Built from high-density technical ceramic, this part drastically reduces deformation over time and remains stable across temperature fluctuations. Its non-conductive, ultra-flat surface ensures improved wafer fixation, especially in electrostatic clamp environments.
Maintenance teams benefit from simplified cleaning routines and longer operational intervals, while engineers notice a direct impact on defect detection accuracy and reproducibility. With tight manufacturing tolerances and a coating-free design, this upgrade eliminates risks related to peeling and surface deterioration seen in coated metal chucks.
extend performance with advanced ceramic wafer chuck engineering
Our ceramic wafer chuck upgrade represents a significant improvement in both mechanical and process stability. Unlike standard aluminum or anodized aluminum chucks that tend to warp, oxidize, or accumulate surface contaminants over time, this ceramic model delivers continuous performance with minimal wear.
Specifically developed for the KLA SP1 and SP2 metrology systems, the ceramic chuck upgrade introduces the following benefits:
- Improved dimensional stability and flatness across thermal cycles
- Exceptional resistance to chemical agents and cleaning procedures
- Longer life expectancy and reduced maintenance interventions
With extensive deployment across European and Asian fabs, this component has demonstrated consistent gains in throughput stability and defect analysis resolution. Its surface does not require re-coating and remains dimensionally stable after years of use. This is particularly advantageous for fabs that operate 24/7 and cannot afford repeated chuck realignment or recalibration.
This upgrade can be installed directly onto the SP1/SP2 chuck stage without any tool modifications, and is compatible with all standard 150mm wafer handling settings. Eumetrys provides full support with part traceability, QA documentation, and installation guidance when required.
Engineered benefits of our high-performance ceramic chuck solution
Each ceramic chuck is manufactured under ISO-compliant processes with precise attention to mechanical tolerances and surface quality. With uniform grain structure and low porosity, the ceramic body resists both impact stress and thermal fatigue. The result is a high-reliability component that ensures wafers are held in place accurately, even during fast scanning and stage movement.
Key specifications of the ceramic wafer chuck upgrade
Our ceramic wafer chuck model 0023889-000 complies with all functional and dimensional standards for SP1 and SP2 systems. It features:
• 150mm diameter flat surface (±3µm flatness)
• Polished finish (Ra < 0.01µm) for optimal wafer contact
• High-purity alumina-based material (99.6%)
• Non-coated, dielectric surface (for ESC compatibility)
• Direct mounting compatibility with OEM stage
All units are shipped with traceability codes, inspection reports, and protective packaging to ensure safe handling and integration.
Upgrade your platform with confidence
Optimize your KLA SP1 or SP2 platform with the KLA-Tencor-SP1-SP2-0023889-000-Ceramic-chuck-upgrade-150mm-Upgrade and maintain operational excellence across your inspection routines. Contact Eumetrys Spare Parts to request a quote and benefit from responsive sourcing, full technical support, and dedicated assistance throughout the upgrade process.
This product is part of our wider KLA tencor upgrade program, and integrates seamlessly into our catalog of high-performance semiconductor spare parts.