KLA Tencor 60xx 6220 2214 30SLQTA (0224471-001) SSD Laser upgrade for stable metrology optics
The KLA Tencor 60xx 6220 2214 30SLQTA (0224471-001) SSD Laser upgrade ensures stable, long-life optical performance. Designed as a direct-replacement laser module for legacy 60xx and 6220 series platforms, this upgrade provides consistent optical power, extended operating life, and reduced downtime due to beam instability or laser aging.
At Eumetrys Spare Parts, we specialize in practical KLA tencor upgrades solutions that extend tool usability and reliability. This SSD laser module addresses the growing challenge of sourcing discontinued OEM lasers and prevents measurement drift, signal loss, or tool failure caused by worn-out light sources.
Key benefits
Reliability improvement with solid-state laser technology replacing gas lasers, eliminating instability and frequent replacements
• Extended lifetime of 4 to 5 years compared to only 7–12 months for gas lasers
• No preventive maintenance required, very high stability and no shelf life issues
• Cost efficiency with more than 5x longer lifetime and very short ROI
• Easy installation, fully compatible with Surfscan and SP1-TBI/DLS tools
• Warranty extended to 3 years compared to only 12 months with gas lasers
field results
Significant reduction of downtime thanks to fewer interventions and no need for regular alignment
• Proven adoption across Surfscan and SP1-TBI/DLS installed base
• Improved tool availability and process stability leading to direct cost savings
Precision-focused KLA laser replacement for legacy tools
This high-efficiency KLA laser upgrade delivers stable beam quality and robust performance for KLA 6220 and 60xx series platforms. Designed to meet or exceed the original specifications of the 2214-30SLQTA module, it offers excellent wavelength control, narrow beam divergence, and consistent energy output over its full rated lifetime.
Key advantages include:
• Plug-and-play compatibility with original optics and alignment components
• No redesign required at the system level
• Compact SSD architecture with integrated driver electronics
Installation is fast and straightforward, minimizing risk to production. This upgrade is ideally suited for fabs seeking to reduce unplanned tool downtime and maintain optical alignment accuracy without the high cost or lead times of OEM-sourced lasers.
unlock uptime with advanced SSD-based KLA laser design
The SSD-based KLA laser solution is engineered for long-term reliability and optical precision in metrology environments. Featuring a sealed solid-state design, the 0224471-001 upgrade delivers high thermal stability, vibration resistance, and immunity to beam degradation.
Unlike gas or older diode-pumped lasers, SSD modules maintain a narrow spectral output and stable energy emission across temperature ranges and continuous duty cycles. They are ideal for inline wafer inspection where measurement repeatability is critical.
This model is engineered to integrate with:
- KLA 6220 overlay and CD systems
- KLA 60xx film metrology platforms
- All tool configurations originally using the 2214-30SLQTA reference
Benefits include:
- 5x longer MTBF compared to aging gas laser units
- Improved signal-to-noise ratio in high-throughput operations
- Reduced maintenance and calibration events
Fully tested and qualified before delivery, each SSD laser unit ships with installation guidelines, compliance documentation, and ESD-safe packaging. The module can be operational within hours of delivery, restoring tool performance and production confidence.
Precision performance engineered into every KLA laser upgrade
Every KLA laser module is manufactured under strict cleanroom conditions and validated for consistency in output and durability. Our engineering partners ensure wavelength stability and beam quality are controlled to within sub-nanometer tolerances.
In high-volume fabs, optical alignment drift can lead to substantial yield loss. By integrating this SSD laser upgrade, customers protect themselves from signal irregularities caused by aging components, thermal expansion, or laser noise. It’s a resilient solution for facilities operating under continuous load.
Technical specifications and compatibility details
Our KLA laser upgrade for 2214-30SLQTA / 0224471-001 is fully compatible with standard KLA optics blocks. Core specifications include:
• Beam power: 30 mW ±5%
• Wavelength: 635 nm (±0.5 nm)
• Beam divergence: <1.2 mrad
• Cooling: passive, integrated thermal sink
• Input voltage: 5V DC (internally regulated)
• Form factor: matches OEM bracket and housing
The SSD architecture also enables better power regulation, making this module more resistant to ambient noise, load spikes, and feedback instability. Each unit is shipped with serial tracking and a full 12-month warranty.
Upgrade your KLA laser with long-life performance
Secure consistent inspection results and minimize tool downtime with the KLA-Tencor-60xx-6220-2214-30SLQTA-(0224471-001)-SSD-Laser-upgrade. Eumetrys Spare Parts delivers fast shipping, responsive technical support, and seamless integration for all major KLA platforms.
This product is part of our broader KLA tencor upgrade program and integrates perfectly with our catalog of tested, reliable semiconductor spare parts.