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Your trusted supplier for semiconductor spare parts, consumables and upgrades

KLA semiconductor spare parts for critical equipment continuity

Eumetrys Spare Parts delivers OEM KLA semiconductor spare parts with fast sourcing and guaranteed compatibility. With a strong foundation in the semiconductor industry, we specialize in providing solutions tailored to complex environments and fast-paced production lines. Our experience with KLA tencor semiconductor systems allows us to understand the intricate details of tool configurations and anticipate maintenance needs before they become critical.

Additionally, we maintain a dedicated stock of high-rotation items, including essential KLA parts, which are always ready for rapid dispatch. This ensures that production disruptions are minimized and that maintenance teams can count on reliable availability when it matters most. Our offer combines agility, technical accuracy, and long-term support for KLA Tencor platforms both legacy and current ensuring continuous performance and system integrity.
Whether you’re facing equipment downtime or need to secure a preventive maintenance strategy, our agile sourcing model provides a fast and dependable solution for every critical scenario.

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Cleanroom technician operating computer and equipment related to KLA semiconductor systems

browse our KLA Tencor catalog and find the perfect fit for your needs

Efficient support for your semiconductor KLA equipment

Our deep expertise in the semiconductor KLA ecosystem enables us to deliver traceable, official parts compatible with KLA Tencor equipment. We provide fast access to essential components thanks to a robust sourcing network and a stock policy aligned with the most critical industry demands.

We support a wide range of tools including metrology, defect inspection, and process control systems. This includes spare parts for older generations and hard-to-find systems as well as components for current-generation fabs. All KLA Tencor spare parts offered by Eumetrys are thoroughly verified for technical compliance and operational performance.

Our ability to work across multiple toolsets ensures seamless continuity for semiconductor manufacturers looking to maintain uptime while minimizing procurement complexity.

Genuine KLA Tencor parts for maximum compatibility

Our portfolio of KLA Tencor parts includes OEM-sourced components tailored for exact compatibility across a wide range of KLA tools. We offer solutions for both reactive replacements and planned maintenance, giving customers operational flexibility.

Our fast-track service includes items such as KLA valve, used in many process-critical subsystems. We also support temperature-sensitive equipment with products like the KLA temp wafer, designed to ensure calibration accuracy. For metrology and inspection tools, we provide specialized KLA sensor wafers, each compliant with tool specifications.

Additional offerings include essential circuit components such as KLA pcb, engineered for signal integrity in legacy modules. For customers requiring advanced replacements, we help source legacy parts like KLA tencor sensor, which are essential for precise detection and signal transmission. In addition to these components, our offer extends to custom mechanical solutions. One example is the KLA billet aluminum replacement extended paddle shifters, designed to ensure mechanical stability in complex handling systems.

Our service also covers handling solutions that facilitate tool operation over time, particularly for legacy systems that require specialized support. Among these, one of the most requested replacements is the KLA paddle replacement, which ensures continued operation of older platforms still active in production environments.

In addition, we maintain a close relationship with our logistics partners to ensure expedited delivery across Europe, North America, and Asia. When every hour counts, our ability to ship within 48 hours (when in stock) provides unmatched peace of mind.

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Optimized sourcing for KLA semiconductor equipment

Our tailored offer for KLA semiconductor equipment ensures a reliable response to maintenance needs, urgent repairs, and inventory restocking. We work closely with maintenance teams to define the exact technical specifications of required components and ensure that each delivery is accurate and compliant.

Our sourcing strategy includes:
Active monitoring of market availability
Strategic stocking of high-rotation and critical parts
Sourcing of obsolete or hard-to-find items like used KLA-tencor system parts vme

Evaluation and supply of custom solutions tailored to client specifications, including advanced modules such as the replacement KLA linking mechanism, used in high-precision motion assemblies

Each request is treated with urgency, and our quotations include technical references, lead times, and logistics options, empowering you to make quick and informed decisions.

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High-precision optics and wafers for KLA optics platforms

The sourcing of certified KLA optics components is a key part of our service for inspection and metrology tools. We deliver critical optical assemblies, wafers, and sensors that meet cleanroom-grade standards and ensure consistency across inspections and measurements.

Our optics offering includes:

  • KLA optics components for high-resolution visual systems
  • Sensor arrays and KLA tencor sensory wafer replacements, carefully selected for their precision in signal fidelity and compatibility with advanced inspection platforms
  • To complement these solutions, we also provide KLA wafer models used for reference calibration and tool alignment during high-accuracy metrology procedures

These items are critical for maintaining accuracy in fab operations and ensuring tool qualification. Our selection process guarantees OEM quality and compatibility with various KLA Tencor platforms.

Why choose Eumetrys spare parts ?

Founded in 2019, Eumetrys Spare Parts has become a key player in the European semiconductor spare parts market by offering a fast, flexible alternative to traditional OEM channels. Unlike manufacturers who operate under rigid processes, we offer:

  • Speed: Rapid response and short lead times for critical deliveries
  • Flexibility: A responsive structure adapted to various procurement models
  • Expertise: In-depth technical knowledge across brands and generations
  • Reliability: Only certified and compatible parts are supplied, ensuring safe tool integration

We understand that semiconductor operations cannot afford delays. Our mission is to reduce your downtime and secure your supply chain with precision and confidence.

Our delivery promise for KLA Tencor spare parts

Whether you need one urgent KLA Tencor spare parts or a complete list for stock replenishment, Eumetrys Spare Parts is ready to deliver. Our service includes:

  • Technical validation of part numbers and compatibility
  • Quote within 24 hours for in-stock components
  • Express delivery across Europe and North America
  • Continuous support from sourcing to installation

Our sourcing team works directly with verified suppliers and uses internal part-matching tools to ensure exact compliance with tool models. This process includes legacy systems still in use across fabs worldwide.

A smarter alternative to traditional OEM processes

While OEMs remain essential to the semiconductor ecosystem, their lead times and rigid logistics can create friction in urgent situations. Eumetrys Spare Parts offers:

  • A dedicated point of contact for each request
  • Simplified quote-to-delivery workflows
  • Transparent pricing and availability
  • Proactive support for legacy tool maintenance

As a result, our customers benefit from faster sourcing, better control over procurement, and reduced dependency on OEM-only supply chains.

We don’t compete with OEMs we complete your sourcing strategy by ensuring agility and operational continuity.

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Get a quote for your KLA spare parts now

If you’re managing a KLA system and need reliable, fast-delivery parts to keep your operations running, Eumetrys Spare Parts is your go-to partner.

We serve fabs, R&D labs, and equipment maintenance providers with high-performance semiconductor spare parts, including advanced components for KLA Tencor systems.

Contact us today to receive a personalized quote or discuss your sourcing needs with one of our experts. Reduce downtime, simplify procurement, and secure the continuity of your KLA semiconductor equipment now.

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