About our cleanroom equipment maintenance: our commitment to performance and responsiveness
Cleanroom equipment maintenance is at the core of our mission: fast, traceable, and expert support for semiconductor manufacturers. Founded in 2019, Eumetrys Spare Parts was born from the ambition to build a sourcing model that is both high-performing and adapted to the evolving needs of semiconductor operations. Our objective has always been clear: offer fast, precise, and flexible procurement solutions to those for whom downtime is not an option. Since its creation, the company has positioned itself as a trusted partner, recognized for its reactivity, multidisciplinary expertise, and deep understanding of critical fab environments.
Our roots: engineering excellence in semiconductors plant maintenance services
Eumetrys Spare Parts is deeply rooted in the world of semiconductors plant maintenance services. As a specialized division of Eumetrys, established in 2012 and known for its metrology leadership, our Spare Parts unit benefits from years of field expertise. From cleanroom specifications to highly specialized equipment, our knowledge is grounded in real-world fab experience. Our solutions support all maintenance stakeholders: from cleanroom technicians to strategic buyers, always aligning with performance and safety standards. By anticipating their needs and adapting to operational constraints, we help improve production continuity and tool uptime.
Fast, reliable, and expert-driven semiconductor maintenance
We built our offer to respond to the most demanding requirements in semiconductor maintenance. Traditional OEMs often operate under rigid systems and lead times that don’t match the pace of modern fabs. At Eumetrys Spare Parts, our responsiveness is embedded in our processes. We respond quickly to critical requests, ship worldwide in short timeframes, and always ensure that each part is technically validated. Our model was developed to offer peace of mind, even in high-pressure environments.
Our technical specialists analyze each request to ensure 100% compatibility with the requested tool or configuration. This includes obsolete parts, refurbished alternatives, or fully compliant upgrades. We reduce uncertainty, accelerate repairs, and bring clarity to sourcing workflows.
Supporting fab operations with semiconductor manufacturing equipment maintenance expertise
Our solutions are engineered to enhance semiconductor manufacturing equipment maintenance. Eumetrys Spare Parts provides access to a vast catalog of compatible components for CMP tools, metrology systems, robotic handlers, and wafer processing stations. Our references include pad conditioners, head membranes, sensor modules, laser units, drivers, motors, and more. Each part is reviewed by our quality team, tested if applicable, and shipped with full traceability documentation.
Our goal is not only to deliver parts but to enable better maintenance strategies. We work closely with our clients to build preventive stock lists, manage supply continuity for critical references, and even assist with upgrade initiatives that extend equipment lifespan and improve process stability.
Going beyond parts: a structured model for semiconductor equipment maintenance
Our value lies in our structured and efficient approach to semiconductor equipment maintenance. We do more than supply: we advise, we optimize, and we support the daily operations of fabs across Europe and beyond. Our sourcing experts handle complex cases such as discontinued parts, urgent replacements, and traceability-sensitive items. Our integrated logistics model includes part verification, compliance control, and transport coordination across international zones.
This level of structure allows us to minimize procurement delays and improve overall OEE (Overall Equipment Effectiveness) for the manufacturing lines we support. In an industry where timing and precision are everything, this operational agility is a true competitive edge.
A European company with a global reach
Headquartered in France, with operational bases in Gaillac and Grenoble, Eumetrys Spare Parts leverages a strong European presence. Our German office, dedicated to Germany, Switzerland and Austria, is staffed by local experts who understand the region’s industrial standards and expectations. Our European clients benefit from fast, localized support, while our global partners receive consistent service and coordination through a trusted network of certified suppliers and technical agents.
Our international orientation is also reflected in our multilingual service. We handle projects in English, French, and German, from the initial RFQ to post-delivery support. This makes us particularly agile for multinational operations with multiple site locations.
Our digital platform: a new standard in facility maintenance for semiconductor manufacturing
Designed specifically for facility maintenance for semiconductor manufacturing, our online platform empowers users with fast and intuitive access to our catalog. It is more than a product listing—it is a strategic tool for engineers and buyers alike. You can browse by part number, OEM, or tool family. Each part is indexed with technical specs, photos, and sourcing conditions.
The platform also enables smart RFQ generation based on urgency level, project context, or criticality score. This saves valuable time when planning preventive maintenance or managing a sudden downtime. Full support is provided in English, French, and German.
Multi-brand compatibility: from KLA Tencor to amat and ebara
Our sourcing expertise spans major semiconductor OEMs, including amat, KLA, and ebara. We maintain a robust inventory and qualified sourcing capabilities to support all generations of equipment. We regularly ship compatible spare parts, from consumables like seals and lamps, to advanced components such as CMP upgrade kits or vacuum-compatible retainer rings.
We specialize in helping manufacturers reduce their reliance on single-source suppliers by offering technically vetted alternatives. These solutions respect original tolerances and specifications while offering cost savings and shorter lead times. This multi-brand flexibility is at the core of our service model.
Sustainable sourcing: supporting long-term operations in the semiconductor industry
We support fab operators in implementing sourcing models that align with sustainability and reliability objectives. By integrating refurbished or reconditioned parts when appropriate, and favoring reusable alternatives, our sourcing model helps reduce waste while preserving equipment integrity. In cases where OEM components are discontinued or obsolete, we offer verified technical substitutes to ensure process continuity.
This approach lowers environmental impact and increases the total value extracted from each toolset over time. Clients who adopt this strategy benefit from better risk management, lower TCO, and fewer unplanned stoppages.
Our mission
At Eumetrys Spare Parts, our mission is to deliver high-performance, reliable, and traceable cleanroom equipment maintenance solutions. We believe that sourcing should never be a bottleneck. We ensure fast access to the right part, at the right moment, with the right specifications. Our focus on customer success drives everything we do—from our technical audits to our post-sales support procedures.
Our promise
- Responsiveness: Ultra-fast quote and delivery process tailored to each case
- Expertise: In-house team of specialists for tool compatibility and process integrity
- Traceability: Documented sourcing with full reference mapping and part serialization
- Cost-efficiency: Smart sourcing strategies to reduce total cost of ownership over time
Let’s optimize your semiconductor spare parts sourcing
Whether you are sourcing critical spares, replacing semiconductor consumables, or upgrading your CMP tools, Eumetrys Spare Parts is your partner in performance. Our semiconductor spare parts catalog and expert support teams are here to help you navigate sourcing with confidence.
Let’s reduce downtime, extend your equipment’s life, and keep your production running with precision.